DE102008048625A1 - Verfahren zur Leckprüfung einer Vakuumprozessanlage - Google Patents

Verfahren zur Leckprüfung einer Vakuumprozessanlage Download PDF

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Publication number
DE102008048625A1
DE102008048625A1 DE102008048625A DE102008048625A DE102008048625A1 DE 102008048625 A1 DE102008048625 A1 DE 102008048625A1 DE 102008048625 A DE102008048625 A DE 102008048625A DE 102008048625 A DE102008048625 A DE 102008048625A DE 102008048625 A1 DE102008048625 A1 DE 102008048625A1
Authority
DE
Germany
Prior art keywords
vacuum
process chamber
helium
partial pressure
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102008048625A
Other languages
German (de)
English (en)
Inventor
Werner Grosse Bley
Daniel Dr. Wetzig
Ralf Hirche
Original Assignee
Inficon GmbH Deutschland
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon GmbH Deutschland filed Critical Inficon GmbH Deutschland
Priority to DE102008048625A priority Critical patent/DE102008048625A1/de
Priority to PCT/EP2009/062210 priority patent/WO2010034691A1/fr
Publication of DE102008048625A1 publication Critical patent/DE102008048625A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
    • G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
    • G01M3/205—Accessories or associated equipment; Pump constructions

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
DE102008048625A 2008-09-24 2008-09-24 Verfahren zur Leckprüfung einer Vakuumprozessanlage Withdrawn DE102008048625A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102008048625A DE102008048625A1 (de) 2008-09-24 2008-09-24 Verfahren zur Leckprüfung einer Vakuumprozessanlage
PCT/EP2009/062210 WO2010034691A1 (fr) 2008-09-24 2009-09-21 Procédé pour contrôler les fuites d'une installation de traitement sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102008048625A DE102008048625A1 (de) 2008-09-24 2008-09-24 Verfahren zur Leckprüfung einer Vakuumprozessanlage

Publications (1)

Publication Number Publication Date
DE102008048625A1 true DE102008048625A1 (de) 2010-03-25

Family

ID=41351480

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102008048625A Withdrawn DE102008048625A1 (de) 2008-09-24 2008-09-24 Verfahren zur Leckprüfung einer Vakuumprozessanlage

Country Status (2)

Country Link
DE (1) DE102008048625A1 (fr)
WO (1) WO2010034691A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111091918A (zh) * 2018-10-24 2020-05-01 中核核电运行管理有限公司 一种中子通量管检查一体化装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10031882A1 (de) 2000-06-30 2002-01-10 Leybold Vakuum Gmbh Sensor für Helium oder Wasserstoff
US20050081605A1 (en) * 2003-10-20 2005-04-21 Kyoung-Hwan Chin Vacuum leakage detecting device for use in semiconductor manufacturing system
DE102004034381A1 (de) 2004-07-16 2006-02-16 Inficon Gmbh Gassensor und Verfahren zum Betreiben einer Getterpumpe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3549882A (en) * 1968-09-30 1970-12-22 Nasa Leak detector wherein a probe is monitored with ultraviolet radiation
US3939695A (en) * 1974-02-26 1976-02-24 The United States Of America As Represented By The United States Energy Research And Development Administration Apparatus for detecting leaks
US6286362B1 (en) * 1999-03-31 2001-09-11 Applied Materials, Inc. Dual mode leak detector
DE19960174A1 (de) * 1999-12-14 2001-06-28 Leybold Vakuum Gmbh Verfahren zur Lecksuche und Lecklokalisierung sowie zur Durchführung dieser Verfahren geeignete Vorrichtungen
DE102007057944A1 (de) * 2007-12-01 2009-06-04 Inficon Gmbh Verfahren und Vorrichtung zur Dichtheitsprüfung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10031882A1 (de) 2000-06-30 2002-01-10 Leybold Vakuum Gmbh Sensor für Helium oder Wasserstoff
US20050081605A1 (en) * 2003-10-20 2005-04-21 Kyoung-Hwan Chin Vacuum leakage detecting device for use in semiconductor manufacturing system
DE102004034381A1 (de) 2004-07-16 2006-02-16 Inficon Gmbh Gassensor und Verfahren zum Betreiben einer Getterpumpe

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111091918A (zh) * 2018-10-24 2020-05-01 中核核电运行管理有限公司 一种中子通量管检查一体化装置

Also Published As

Publication number Publication date
WO2010034691A1 (fr) 2010-04-01

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Legal Events

Date Code Title Description
OM8 Search report available as to paragraph 43 lit. 1 sentence 1 patent law
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee

Effective date: 20120403