DE102008045260B8 - Vorrichtung und Verfahren zum Galvanisieren von Substraten in Prozesskammern - Google Patents
Vorrichtung und Verfahren zum Galvanisieren von Substraten in Prozesskammern Download PDFInfo
- Publication number
- DE102008045260B8 DE102008045260B8 DE102008045260A DE102008045260A DE102008045260B8 DE 102008045260 B8 DE102008045260 B8 DE 102008045260B8 DE 102008045260 A DE102008045260 A DE 102008045260A DE 102008045260 A DE102008045260 A DE 102008045260A DE 102008045260 B8 DE102008045260 B8 DE 102008045260B8
- Authority
- DE
- Germany
- Prior art keywords
- process chambers
- electroplating substrates
- electroplating
- substrates
- chambers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/007—Current directing devices
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/001—Apparatus specially adapted for electrolytic coating of wafers, e.g. semiconductors or solar cells
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/002—Cell separation, e.g. membranes, diaphragms
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/008—Current shielding devices
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/10—Electrodes, e.g. composition, counter electrode
- C25D17/12—Shape or form
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/08—Electroplating with moving electrolyte e.g. jet electroplating
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
- C25D17/02—Tanks; Installations therefor
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Sustainable Development (AREA)
- Electroplating Methods And Accessories (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008045260A DE102008045260B8 (de) | 2008-09-01 | 2008-09-01 | Vorrichtung und Verfahren zum Galvanisieren von Substraten in Prozesskammern |
EP09777348A EP2331733A2 (de) | 2008-09-01 | 2009-07-21 | Vorrichtung und verfahren zum galvanisieren von substraten in prozesskammern |
PCT/EP2009/005301 WO2010022825A2 (de) | 2008-09-01 | 2009-07-21 | Vorrichtung und verfahren zum galvanisieren von substraten in prozesskammern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102008045260A DE102008045260B8 (de) | 2008-09-01 | 2008-09-01 | Vorrichtung und Verfahren zum Galvanisieren von Substraten in Prozesskammern |
Publications (2)
Publication Number | Publication Date |
---|---|
DE102008045260B3 DE102008045260B3 (de) | 2009-09-10 |
DE102008045260B8 true DE102008045260B8 (de) | 2010-02-11 |
Family
ID=40936605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE102008045260A Active DE102008045260B8 (de) | 2008-09-01 | 2008-09-01 | Vorrichtung und Verfahren zum Galvanisieren von Substraten in Prozesskammern |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2331733A2 (de) |
DE (1) | DE102008045260B8 (de) |
WO (1) | WO2010022825A2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102383168B (zh) * | 2011-08-22 | 2015-03-04 | 无锡鼎亚电子材料有限公司 | 压轮式导电槽 |
DE102017116934B4 (de) * | 2017-07-26 | 2022-01-20 | Balver Zinn Josef Jost GmbH & Co. KG | Löslicher Anodenkörper |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5000827A (en) * | 1990-01-02 | 1991-03-19 | Motorola, Inc. | Method and apparatus for adjusting plating solution flow characteristics at substrate cathode periphery to minimize edge effect |
US5391285A (en) * | 1994-02-25 | 1995-02-21 | Motorola, Inc. | Adjustable plating cell for uniform bump plating of semiconductor wafers |
US6132587A (en) * | 1998-10-19 | 2000-10-17 | Jorne; Jacob | Uniform electroplating of wafers |
US20010000891A1 (en) * | 1997-04-28 | 2001-05-10 | Katsuya Kosaki | Method of plating semiconductor wafer and plated semiconductor wafer |
KR20010090533A (ko) * | 2000-03-24 | 2001-10-18 | 조셉 제이. 스위니 | 금속층의 균일한 증착을 위한 천공 양극 |
JP2002097595A (ja) * | 2000-09-25 | 2002-04-02 | Hitachi Ltd | 半導体装置の製造方法 |
JP2002115096A (ja) * | 2000-10-10 | 2002-04-19 | Applied Materials Inc | めっき装置 |
DE102007020449A1 (de) * | 2006-12-13 | 2008-06-19 | Rena Sondermaschinen Gmbh | Vorrichtung und Verfahren zur einseitigen nasschemischen und elektrolytischen Behandlung von Gut |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6402923B1 (en) * | 2000-03-27 | 2002-06-11 | Novellus Systems Inc | Method and apparatus for uniform electroplating of integrated circuits using a variable field shaping element |
US6695957B1 (en) * | 1999-06-04 | 2004-02-24 | Mykrolis Corporation | Simultaneous electrical and fluid connection for anode |
US20030188975A1 (en) * | 2002-04-05 | 2003-10-09 | Nielsen Thomas D. | Copper anode for semiconductor interconnects |
JP2006193822A (ja) * | 2004-12-16 | 2006-07-27 | Sharp Corp | めっき装置、めっき方法、半導体装置、及び半導体装置の製造方法 |
-
2008
- 2008-09-01 DE DE102008045260A patent/DE102008045260B8/de active Active
-
2009
- 2009-07-21 EP EP09777348A patent/EP2331733A2/de not_active Withdrawn
- 2009-07-21 WO PCT/EP2009/005301 patent/WO2010022825A2/de active Application Filing
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5000827A (en) * | 1990-01-02 | 1991-03-19 | Motorola, Inc. | Method and apparatus for adjusting plating solution flow characteristics at substrate cathode periphery to minimize edge effect |
US5391285A (en) * | 1994-02-25 | 1995-02-21 | Motorola, Inc. | Adjustable plating cell for uniform bump plating of semiconductor wafers |
US20010000891A1 (en) * | 1997-04-28 | 2001-05-10 | Katsuya Kosaki | Method of plating semiconductor wafer and plated semiconductor wafer |
US6132587A (en) * | 1998-10-19 | 2000-10-17 | Jorne; Jacob | Uniform electroplating of wafers |
KR20010090533A (ko) * | 2000-03-24 | 2001-10-18 | 조셉 제이. 스위니 | 금속층의 균일한 증착을 위한 천공 양극 |
JP2002097595A (ja) * | 2000-09-25 | 2002-04-02 | Hitachi Ltd | 半導体装置の製造方法 |
JP2002115096A (ja) * | 2000-10-10 | 2002-04-19 | Applied Materials Inc | めっき装置 |
DE102007020449A1 (de) * | 2006-12-13 | 2008-06-19 | Rena Sondermaschinen Gmbh | Vorrichtung und Verfahren zur einseitigen nasschemischen und elektrolytischen Behandlung von Gut |
Non-Patent Citations (1)
Title |
---|
KR 1020010090533 A |
Also Published As
Publication number | Publication date |
---|---|
WO2010022825A3 (de) | 2010-05-14 |
EP2331733A2 (de) | 2011-06-15 |
WO2010022825A2 (de) | 2010-03-04 |
DE102008045260B3 (de) | 2009-09-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8396 | Reprint of erroneous front page | ||
8363 | Opposition against the patent | ||
R031 | Decision of examining division/federal patent court maintaining patent unamended now final |
Effective date: 20120530 |
|
R081 | Change of applicant/patentee |
Owner name: RENA TECHNOLOGIES GMBH, DE Free format text: FORMER OWNER: RENA GMBH, 78148 GUETENBACH, DE |
|
R082 | Change of representative |
Representative=s name: JOACHIM STUERKEN PATENTANWALTSGESELLSCHAFT MBH, DE |
|
R082 | Change of representative |