DE102007059856A1 - Herstellungsverfahren für ein mikromechanisches Bauelement und mikromechaniches Bauelement - Google Patents

Herstellungsverfahren für ein mikromechanisches Bauelement und mikromechaniches Bauelement Download PDF

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Publication number
DE102007059856A1
DE102007059856A1 DE102007059856A DE102007059856A DE102007059856A1 DE 102007059856 A1 DE102007059856 A1 DE 102007059856A1 DE 102007059856 A DE102007059856 A DE 102007059856A DE 102007059856 A DE102007059856 A DE 102007059856A DE 102007059856 A1 DE102007059856 A1 DE 102007059856A1
Authority
DE
Germany
Prior art keywords
semiconductor substrate
insulating layer
actuator
etching
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
DE102007059856A
Other languages
German (de)
English (en)
Inventor
Christoph Friese
Tjalf Pirk
Stefan Pinter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Priority to DE102007059856A priority Critical patent/DE102007059856A1/de
Priority to PCT/EP2008/063670 priority patent/WO2009074368A2/fr
Publication of DE102007059856A1 publication Critical patent/DE102007059856A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C3/00—Assembling of devices or systems from individually processed components
    • B81C3/001—Bonding of two components
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2203/00—Forming microstructural systems
    • B81C2203/03—Bonding two components
    • B81C2203/038—Bonding techniques not provided for in B81C2203/031 - B81C2203/037

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
DE102007059856A 2007-12-12 2007-12-12 Herstellungsverfahren für ein mikromechanisches Bauelement und mikromechaniches Bauelement Withdrawn DE102007059856A1 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE102007059856A DE102007059856A1 (de) 2007-12-12 2007-12-12 Herstellungsverfahren für ein mikromechanisches Bauelement und mikromechaniches Bauelement
PCT/EP2008/063670 WO2009074368A2 (fr) 2007-12-12 2008-10-10 Procédé de fabrication d'un composant micromécanique et composant micromécanique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102007059856A DE102007059856A1 (de) 2007-12-12 2007-12-12 Herstellungsverfahren für ein mikromechanisches Bauelement und mikromechaniches Bauelement

Publications (1)

Publication Number Publication Date
DE102007059856A1 true DE102007059856A1 (de) 2009-06-18

Family

ID=40679864

Family Applications (1)

Application Number Title Priority Date Filing Date
DE102007059856A Withdrawn DE102007059856A1 (de) 2007-12-12 2007-12-12 Herstellungsverfahren für ein mikromechanisches Bauelement und mikromechaniches Bauelement

Country Status (2)

Country Link
DE (1) DE102007059856A1 (fr)
WO (1) WO2009074368A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014210986A1 (de) * 2014-06-10 2015-12-17 Robert Bosch Gmbh Mikromechanische Schichtenanordnung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19728598A1 (de) 1997-07-04 1999-02-04 Bosch Gmbh Robert Mikromechanische Spiegeleinrichtung
US6891650B2 (en) 2001-08-20 2005-05-10 Fujitsu Limited, Micromirror unit fabrication method and micromirror unit made by the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100400218B1 (ko) * 2000-08-18 2003-10-30 삼성전자주식회사 마이크로 액튜에이터 및 그 제조방법
KR100486716B1 (ko) * 2002-10-18 2005-05-03 삼성전자주식회사 2-ｄ 액튜에이터 및 그 제조방법
KR100579868B1 (ko) * 2003-12-02 2006-05-15 삼성전자주식회사 마이크로 미러 및 그 제조방법
KR100624436B1 (ko) * 2004-10-19 2006-09-15 삼성전자주식회사 2축 액츄에이터 및 그 제조방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19728598A1 (de) 1997-07-04 1999-02-04 Bosch Gmbh Robert Mikromechanische Spiegeleinrichtung
US6891650B2 (en) 2001-08-20 2005-05-10 Fujitsu Limited, Micromirror unit fabrication method and micromirror unit made by the same

Also Published As

Publication number Publication date
WO2009074368A3 (fr) 2009-11-12
WO2009074368A2 (fr) 2009-06-18

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Date Code Title Description
R012 Request for examination validly filed

Effective date: 20140408

R002 Refusal decision in examination/registration proceedings
R119 Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee