DE102006032878A1 - Beleuchtungssystem einer mikrolithographischen Projektionsbelichtungsanlage - Google Patents
Beleuchtungssystem einer mikrolithographischen Projektionsbelichtungsanlage Download PDFInfo
- Publication number
- DE102006032878A1 DE102006032878A1 DE102006032878A DE102006032878A DE102006032878A1 DE 102006032878 A1 DE102006032878 A1 DE 102006032878A1 DE 102006032878 A DE102006032878 A DE 102006032878A DE 102006032878 A DE102006032878 A DE 102006032878A DE 102006032878 A1 DE102006032878 A1 DE 102006032878A1
- Authority
- DE
- Germany
- Prior art keywords
- illumination system
- light
- strips
- polarization
- wedge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000005286 illumination Methods 0.000 title claims abstract description 47
- 230000003287 optical effect Effects 0.000 claims abstract description 71
- 230000010287 polarization Effects 0.000 claims abstract description 65
- 210000001747 pupil Anatomy 0.000 claims abstract description 50
- 230000001427 coherent effect Effects 0.000 claims abstract description 16
- 238000009826 distribution Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 claims description 5
- 230000008569 process Effects 0.000 claims description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 5
- 230000001419 dependent effect Effects 0.000 description 3
- 230000000873 masking effect Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 239000013598 vector Substances 0.000 description 3
- 230000005684 electric field Effects 0.000 description 2
- 230000002349 favourable effect Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000010261 arctane Substances 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- WUKWITHWXAAZEY-UHFFFAOYSA-L calcium difluoride Chemical compound [F-].[F-].[Ca+2] WUKWITHWXAAZEY-UHFFFAOYSA-L 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 229910001635 magnesium fluoride Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
- G03F7/70158—Diffractive optical elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/286—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising for controlling or changing the state of polarisation, e.g. transforming one polarisation state into another
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4205—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant
- G02B27/4222—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive optical element [DOE] contributing to image formation, e.g. whereby modulation transfer function MTF or optical aberrations are relevant in projection exposure systems, e.g. photolithographic systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4233—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application
- G02B27/4255—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element [DOE] contributing to a non-imaging application for alignment or positioning purposes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/4261—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect having a diffractive element with major polarization dependent properties
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/7055—Exposure light control in all parts of the microlithographic apparatus, e.g. pulse length control or light interruption
- G03F7/70566—Polarisation control
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1861—Reflection gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Optical Elements Other Than Lenses (AREA)
- Microscoopes, Condenser (AREA)
- Polarising Elements (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006032878A DE102006032878A1 (de) | 2006-07-15 | 2006-07-15 | Beleuchtungssystem einer mikrolithographischen Projektionsbelichtungsanlage |
| JP2009518757A JP5369319B2 (ja) | 2006-07-15 | 2007-07-05 | マイクロリソグラフィ投影露光装置の照明システム |
| EP07765066A EP2041625B1 (de) | 2006-07-15 | 2007-07-05 | Beleuchtungssystem einer mikrolithographischen projektionsbelichtungsanlage |
| PCT/EP2007/005943 WO2008009353A1 (de) | 2006-07-15 | 2007-07-05 | Beleuchtungssystem einer mikrolithographischen projektionsbelichtungsanlage |
| US12/272,297 US20090115991A1 (en) | 2006-07-15 | 2008-11-17 | Illumination system of a microlithographic projection exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE102006032878A DE102006032878A1 (de) | 2006-07-15 | 2006-07-15 | Beleuchtungssystem einer mikrolithographischen Projektionsbelichtungsanlage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| DE102006032878A1 true DE102006032878A1 (de) | 2008-01-17 |
Family
ID=38536021
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE102006032878A Withdrawn DE102006032878A1 (de) | 2006-07-15 | 2006-07-15 | Beleuchtungssystem einer mikrolithographischen Projektionsbelichtungsanlage |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US20090115991A1 (enExample) |
| EP (1) | EP2041625B1 (enExample) |
| JP (1) | JP5369319B2 (enExample) |
| DE (1) | DE102006032878A1 (enExample) |
| WO (1) | WO2008009353A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008009601A1 (de) * | 2008-02-15 | 2009-08-20 | Carl Zeiss Smt Ag | Optisches System für eine mikrolithographische Projektionsbelichtungsanlage sowie mikrolithographisches Belichtungsverfahren |
| US9116303B2 (en) * | 2010-03-05 | 2015-08-25 | Canon Kabushiki Kaisha | Hologram with cells to control phase in two polarization directions and exposure apparatus |
| KR101884486B1 (ko) * | 2010-09-28 | 2018-08-01 | 칼 짜이스 에스엠티 게엠베하 | 마이크로리소그래픽 투영 노광 장치의 광학 시스템 및 이미지 배치 에러 감소 방법 |
| DE102011085334A1 (de) * | 2011-10-27 | 2013-05-02 | Carl Zeiss Smt Gmbh | Optisches System in einer Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0486316A2 (en) * | 1990-11-15 | 1992-05-20 | Nikon Corporation | Projection exposure method and apparatus |
| US5459000A (en) * | 1992-10-14 | 1995-10-17 | Canon Kabushiki Kaisha | Image projection method and device manufacturing method using the image projection method |
| EP1367446A1 (en) * | 2002-05-31 | 2003-12-03 | ASML Netherlands B.V. | Lithographic apparatus |
| WO2005017620A2 (de) * | 2003-08-14 | 2005-02-24 | Carl Zeiss Smt Ag | Beleuchtungseinrichtung sowie polarisator für eine mikrolithographische projektionsbelichtungsanlage |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3985346B2 (ja) * | 1998-06-12 | 2007-10-03 | 株式会社ニコン | 投影露光装置、投影露光装置の調整方法、及び投影露光方法 |
| DE19829612A1 (de) * | 1998-07-02 | 2000-01-05 | Zeiss Carl Fa | Beleuchtungssystem der Mikrolithographie mit Depolarisator |
| US6563567B1 (en) * | 1998-12-17 | 2003-05-13 | Nikon Corporation | Method and apparatus for illuminating a surface using a projection imaging apparatus |
| JP3927753B2 (ja) * | 2000-03-31 | 2007-06-13 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
| DE10124474A1 (de) * | 2001-05-19 | 2002-11-21 | Zeiss Carl | Mikrolithographisches Belichtungsverfahren sowie Projektionsobjektiv zur Durchführung des Verfahrens |
| JP2003090978A (ja) * | 2001-09-17 | 2003-03-28 | Canon Inc | 照明装置、露光装置及びデバイス製造方法 |
| TW200412617A (en) * | 2002-12-03 | 2004-07-16 | Nikon Corp | Optical illumination device, method for adjusting optical illumination device, exposure device and exposure method |
| US7408616B2 (en) * | 2003-09-26 | 2008-08-05 | Carl Zeiss Smt Ag | Microlithographic exposure method as well as a projection exposure system for carrying out the method |
| TWI569308B (zh) * | 2003-10-28 | 2017-02-01 | 尼康股份有限公司 | 照明光學裝置、曝光裝置、曝光方法以及元件製造 方法 |
| WO2005050325A1 (en) * | 2003-11-05 | 2005-06-02 | Carl Zeiss Smt Ag | Polarization-optimizing illumination system |
| TWI519819B (zh) * | 2003-11-20 | 2016-02-01 | 尼康股份有限公司 | 光束變換元件、光學照明裝置、曝光裝置、以及曝光方法 |
| JP4497968B2 (ja) * | 2004-03-18 | 2010-07-07 | キヤノン株式会社 | 照明装置、露光装置及びデバイス製造方法 |
| US7324280B2 (en) * | 2004-05-25 | 2008-01-29 | Asml Holding N.V. | Apparatus for providing a pattern of polarization |
| JP2006005319A (ja) | 2004-06-21 | 2006-01-05 | Canon Inc | 照明光学系及び方法、露光装置及びデバイス製造方法 |
| US7548370B2 (en) * | 2004-06-29 | 2009-06-16 | Asml Holding N.V. | Layered structure for a tile wave plate assembly |
| JP2006196715A (ja) * | 2005-01-13 | 2006-07-27 | Nikon Corp | 光束変換素子、照明光学装置、露光装置、および露光方法 |
| JP2006269462A (ja) * | 2005-03-22 | 2006-10-05 | Sony Corp | 露光装置および照明装置 |
| US7317512B2 (en) * | 2005-07-11 | 2008-01-08 | Asml Netherlands B.V. | Different polarization in cross-section of a radiation beam in a lithographic apparatus and device manufacturing method |
| US20070058151A1 (en) * | 2005-09-13 | 2007-03-15 | Asml Netherlands B.V. | Optical element for use in lithography apparatus and method of conditioning radiation beam |
| US7525642B2 (en) * | 2006-02-23 | 2009-04-28 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
-
2006
- 2006-07-15 DE DE102006032878A patent/DE102006032878A1/de not_active Withdrawn
-
2007
- 2007-07-05 EP EP07765066A patent/EP2041625B1/de not_active Not-in-force
- 2007-07-05 JP JP2009518757A patent/JP5369319B2/ja not_active Expired - Fee Related
- 2007-07-05 WO PCT/EP2007/005943 patent/WO2008009353A1/de not_active Ceased
-
2008
- 2008-11-17 US US12/272,297 patent/US20090115991A1/en not_active Abandoned
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0486316A2 (en) * | 1990-11-15 | 1992-05-20 | Nikon Corporation | Projection exposure method and apparatus |
| US5459000A (en) * | 1992-10-14 | 1995-10-17 | Canon Kabushiki Kaisha | Image projection method and device manufacturing method using the image projection method |
| EP1367446A1 (en) * | 2002-05-31 | 2003-12-03 | ASML Netherlands B.V. | Lithographic apparatus |
| WO2005017620A2 (de) * | 2003-08-14 | 2005-02-24 | Carl Zeiss Smt Ag | Beleuchtungseinrichtung sowie polarisator für eine mikrolithographische projektionsbelichtungsanlage |
Also Published As
| Publication number | Publication date |
|---|---|
| US20090115991A1 (en) | 2009-05-07 |
| JP5369319B2 (ja) | 2013-12-18 |
| EP2041625B1 (de) | 2012-06-27 |
| JP2009544146A (ja) | 2009-12-10 |
| EP2041625A1 (de) | 2009-04-01 |
| WO2008009353A1 (de) | 2008-01-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8130 | Withdrawal |