DE102005053718B8 - Floating-Gate-Speicherzelle und Verfahren zum Herstellen einer Floating-Gate-Speicherzelle - Google Patents
Floating-Gate-Speicherzelle und Verfahren zum Herstellen einer Floating-Gate-Speicherzelle Download PDFInfo
- Publication number
- DE102005053718B8 DE102005053718B8 DE200510053718 DE102005053718A DE102005053718B8 DE 102005053718 B8 DE102005053718 B8 DE 102005053718B8 DE 200510053718 DE200510053718 DE 200510053718 DE 102005053718 A DE102005053718 A DE 102005053718A DE 102005053718 B8 DE102005053718 B8 DE 102005053718B8
- Authority
- DE
- Germany
- Prior art keywords
- memory cell
- floating gate
- gate memory
- fabricating
- floating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000004519 manufacturing process Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/788—Field effect transistors with field effect produced by an insulated gate with floating gate
- H01L29/7881—Programmable transistors with only two possible levels of programmation
- H01L29/7883—Programmable transistors with only two possible levels of programmation charging by tunnelling of carriers, e.g. Fowler-Nordheim tunnelling
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/511—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures
- H01L29/513—Insulating materials associated therewith with a compositional variation, e.g. multilayer structures the variation being perpendicular to the channel plane
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0408—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors
- G11C16/0416—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells containing floating gate transistors comprising cells containing a single floating gate transistor and no select transistor, e.g. UV EPROM
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Non-Volatile Memory (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200510053718 DE102005053718B8 (de) | 2005-11-10 | 2005-11-10 | Floating-Gate-Speicherzelle und Verfahren zum Herstellen einer Floating-Gate-Speicherzelle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE200510053718 DE102005053718B8 (de) | 2005-11-10 | 2005-11-10 | Floating-Gate-Speicherzelle und Verfahren zum Herstellen einer Floating-Gate-Speicherzelle |
Publications (3)
Publication Number | Publication Date |
---|---|
DE102005053718A1 DE102005053718A1 (de) | 2007-05-24 |
DE102005053718B4 DE102005053718B4 (de) | 2014-02-13 |
DE102005053718B8 true DE102005053718B8 (de) | 2014-04-30 |
Family
ID=37989257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE200510053718 Expired - Fee Related DE102005053718B8 (de) | 2005-11-10 | 2005-11-10 | Floating-Gate-Speicherzelle und Verfahren zum Herstellen einer Floating-Gate-Speicherzelle |
Country Status (1)
Country | Link |
---|---|
DE (1) | DE102005053718B8 (de) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10374041B2 (en) | 2017-12-21 | 2019-08-06 | International Business Machines Corporation | Field effect transistor with controllable resistance |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6121654A (en) * | 1997-10-10 | 2000-09-19 | The Research Foundation Of State University Of New York | Memory device having a crested tunnel barrier |
ATE524833T1 (de) * | 2001-04-27 | 2011-09-15 | Imec | Isolierende sperrschicht |
US6784480B2 (en) * | 2002-02-12 | 2004-08-31 | Micron Technology, Inc. | Asymmetric band-gap engineered nonvolatile memory device |
-
2005
- 2005-11-10 DE DE200510053718 patent/DE102005053718B8/de not_active Expired - Fee Related
Non-Patent Citations (3)
Title |
---|
B.Govoreanua, D.Bruncob, J.Van Houdt, Scaling Down the Interpoly Dielectric for Next Generation Flash Memory: Challenges and Opportunities, 1st International Conf. on Memory Technology & Design (ICMTD) Giens, France, 21-24. Mai 2005 |
Christian Peters, Holger Sedlak Gerd Dirscherl, Michael Bollu, Andreas Schlaffer and Stefanie Thierold, A 130nm high-density embedded EEPROM as Universal Memory for code and data storage based on a 1T FN/FN Flash cell, NVSMW 2004, 22. bis 24 Aug. 2004 monterrey |
G.D.Wilk et al., High-k gate dielectrics: Current status and materials properties considerations, Applied Physics Review, Journal of Applied Physics, Vol. 89, No. 10, S. 5243-5273, Mai 2001 |
Also Published As
Publication number | Publication date |
---|---|
DE102005053718A1 (de) | 2007-05-24 |
DE102005053718B4 (de) | 2014-02-13 |
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DE102005053718B8 (de) | Floating-Gate-Speicherzelle und Verfahren zum Herstellen einer Floating-Gate-Speicherzelle |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
OP8 | Request for examination as to paragraph 44 patent law | ||
R018 | Grant decision by examination section/examining division | ||
R083 | Amendment of/additions to inventor(s) | ||
R020 | Patent grant now final | ||
R082 | Change of representative | ||
R020 | Patent grant now final |
Effective date: 20141114 |
|
R119 | Application deemed withdrawn, or ip right lapsed, due to non-payment of renewal fee | ||
R079 | Amendment of ipc main class |
Free format text: PREVIOUS MAIN CLASS: H01L0027115000 Ipc: H01L0027115170 |