DE1012398B - Electron-optical lens system for electron or ion microscopes - Google Patents

Electron-optical lens system for electron or ion microscopes

Info

Publication number
DE1012398B
DE1012398B DEH5682D DEH0005682D DE1012398B DE 1012398 B DE1012398 B DE 1012398B DE H5682 D DEH5682 D DE H5682D DE H0005682 D DEH0005682 D DE H0005682D DE 1012398 B DE1012398 B DE 1012398B
Authority
DE
Germany
Prior art keywords
electron
lens system
optical lens
ion microscopes
microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DEH5682D
Other languages
German (de)
Inventor
Dr Heinrich Herbst
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
HEINRICH HERBST DR
Original Assignee
HEINRICH HERBST DR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by HEINRICH HERBST DR filed Critical HEINRICH HERBST DR
Priority to DEH5682D priority Critical patent/DE1012398B/en
Publication of DE1012398B publication Critical patent/DE1012398B/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/145—Combinations of electrostatic and magnetic lenses

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)

Description

DEUTSCHESGERMAN

Die Erfindung betrifft ein elektronenoptisches Linsensystem für Elektronen- oder Ionenmikroskope, bei denen erfindungsgemäß zwischen den beiden Magnetpolen einer magnetischen Linse eine gegenüber Kathode negative oder positive aufgeladene Blende regelbarer Spannung zur Regelung der Brennweite angeordnet ist. Vorteilhaft dient die negative Blende regelbarer Spannung zur Verkürzung der Brennweite bei bereits gesättigtem maximalem Magnetfluß. Die Blende ist dabei gegenüber den Magnetpolen isoliert angeordnet.The invention relates to an electron-optical lens system for electron or ion microscopes, where according to the invention between the two magnetic poles of a magnetic lens one opposite Cathode negative or positive charged aperture with adjustable voltage to regulate the focal length is arranged. The negative diaphragm of controllable voltage is advantageously used to shorten the focal length when the maximum magnetic flux is already saturated. The diaphragm is insulated from the magnetic poles arranged.

In der Zeichnung ist die Erfindung an einem Ausführungsbeispiel dargestellt, und zwar zeigt die Abbildung einen Schnitt durch die Magnetpole einer elektronenoptischen Sammellinse.In the drawing, the invention is shown in an exemplary embodiment, namely the figure shows a section through the magnetic poles of an electron optical converging lens.

In der Abbildung stellt der Teil 1 den einen Magnetpol und Teil 2 den anderen Magnetpol dar. Zwischen beiden Magnetpolen ist in einem Isolierring 3 die Blende 4 angeordnet, die mit einer regelbaren negativen Spannung oder auch positiven Spannung betrieben werden kann. Die Magnetpole können das entgegengesetzte Potential der Lochblende führen, also z. B. positiv sein. Die Anordnung bringt den Vorteil mit sich, daß man durch eine negative Spannung an der Blende gegenüber der Kathode die Brennweite verkürzen und durch Anlegen einer positiven Spannung die Brennweite erhöhen kann. So kann man auch bei voll gesättigten Magnetpolen, wenn also die magnetische Linse als solche ans Ende ihrer Leistung gekommen ist, noch eine weitere Verkürzung der Brennweite vornehmen.In the figure, part 1 represents one magnetic pole and part 2 the other magnetic pole. Between the two magnetic poles, the diaphragm 4 is arranged in an insulating ring 3, which can be regulated with a negative voltage or positive voltage can be operated. The magnetic poles can lead the opposite potential of the pinhole, so z. B. be positive. The arrangement brings the This has the advantage that a negative voltage on the diaphragm compared to the cathode causes the Shorten the focal length and increase the focal length by applying a positive voltage. So one can also with fully saturated magnetic poles, if the magnetic lens as such at the end their performance has come, make a further shortening of the focal length.

Claims (1)

Patentansprüche.Claims. 1. Elektronenoptisches Linsensystem für Elektronen- oder Ionenmikroskope, dadurch gekenn-Elektronenoptisches Linsensystem
für Elektronen- oder Ionenmikroskope1. Electron-optical lens system for electron or ion microscopes, thereby identified-electron-optical lens system
for electron or ion microscopes Anmelder:Applicant: Dr. Heinrich Herbst,
Jena, Magmis-Poser-Str. 9Dr. Heinrich Herbst,
Jena, Magmis-Poser-Str. 9
DEH5682D 1943-11-27 1943-11-27 Electron-optical lens system for electron or ion microscopes Pending DE1012398B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DEH5682D DE1012398B (en) 1943-11-27 1943-11-27 Electron-optical lens system for electron or ion microscopes

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH5682D DE1012398B (en) 1943-11-27 1943-11-27 Electron-optical lens system for electron or ion microscopes

Publications (1)

Publication Number Publication Date
DE1012398B true DE1012398B (en) 1957-07-18

Family

ID=7144463

Family Applications (1)

Application Number Title Priority Date Filing Date
DEH5682D Pending DE1012398B (en) 1943-11-27 1943-11-27 Electron-optical lens system for electron or ion microscopes

Country Status (1)

Country Link
DE (1) DE1012398B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242602A2 (en) * 1986-04-24 1987-10-28 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Electrostatic and magnetic lens for corpuscular beam apparatus

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0242602A2 (en) * 1986-04-24 1987-10-28 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Electrostatic and magnetic lens for corpuscular beam apparatus
EP0242602A3 (en) * 1986-04-24 1989-09-06 Siemens Aktiengesellschaft Electrostatic and magnetic lens for corpuscular beam apparatuses

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