DE10047113C2 - Sensoreinrichtung - Google Patents
SensoreinrichtungInfo
- Publication number
- DE10047113C2 DE10047113C2 DE10047113A DE10047113A DE10047113C2 DE 10047113 C2 DE10047113 C2 DE 10047113C2 DE 10047113 A DE10047113 A DE 10047113A DE 10047113 A DE10047113 A DE 10047113A DE 10047113 C2 DE10047113 C2 DE 10047113C2
- Authority
- DE
- Germany
- Prior art keywords
- sensor device
- micro
- switching
- circuit
- relay
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Revoked
Links
- 230000009471 action Effects 0.000 claims description 22
- 230000006978 adaptation Effects 0.000 claims description 8
- 238000002955 isolation Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 4
- 230000001939 inductive effect Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 238000007667 floating Methods 0.000 claims description 2
- 230000005693 optoelectronics Effects 0.000 claims description 2
- 239000012530 fluid Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 1
- 230000008901 benefit Effects 0.000 description 8
- 238000013461 design Methods 0.000 description 5
- 230000000712 assembly Effects 0.000 description 3
- 238000000429 assembly Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 238000005452 bending Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 235000010678 Paulownia tomentosa Nutrition 0.000 description 1
- 240000002834 Paulownia tomentosa Species 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000011990 functional testing Methods 0.000 description 1
- 235000013882 gravy Nutrition 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000010327 methods by industry Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 238000000742 single-metal deposition Methods 0.000 description 1
- 210000000352 storage cell Anatomy 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D1/00—Measuring arrangements giving results other than momentary value of variable, of general application
- G01D1/18—Measuring arrangements giving results other than momentary value of variable, of general application with arrangements for signalling that a predetermined value of an unspecified parameter has been exceeded
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F23/00—Indicating or measuring liquid level or level of fluent solid material, e.g. indicating in terms of volume or indicating by means of an alarm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Electronic Switches (AREA)
- Relay Circuits (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Priority Applications (10)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10047113A DE10047113C2 (de) | 2000-09-22 | 2000-09-22 | Sensoreinrichtung |
| CA002422559A CA2422559C (en) | 2000-09-22 | 2001-09-19 | Integrated micro-relay sensor |
| PCT/EP2001/010841 WO2002029364A1 (de) | 2000-09-22 | 2001-09-19 | Sensorvorrichtung |
| CNA018193110A CN1476529A (zh) | 2000-09-22 | 2001-09-19 | 传感器设备 |
| US10/380,472 US7139159B2 (en) | 2000-09-22 | 2001-09-19 | Sensor device |
| EP01974266A EP1319168B1 (de) | 2000-09-22 | 2001-09-19 | Grenzwertsensor-vorrichtung |
| AU2001293823A AU2001293823B9 (en) | 2000-09-22 | 2001-09-19 | Sensor device |
| AU9382301A AU9382301A (en) | 2000-09-22 | 2001-09-19 | Sensor device |
| JP2002532890A JP2004510970A (ja) | 2000-09-22 | 2001-09-19 | センサ装置 |
| DE50110171T DE50110171D1 (de) | 2000-09-22 | 2001-09-19 | Grenzwertsensor-vorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE10047113A DE10047113C2 (de) | 2000-09-22 | 2000-09-22 | Sensoreinrichtung |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE10047113A1 DE10047113A1 (de) | 2002-04-25 |
| DE10047113C2 true DE10047113C2 (de) | 2003-06-18 |
Family
ID=7657314
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE10047113A Revoked DE10047113C2 (de) | 2000-09-22 | 2000-09-22 | Sensoreinrichtung |
| DE50110171T Expired - Lifetime DE50110171D1 (de) | 2000-09-22 | 2001-09-19 | Grenzwertsensor-vorrichtung |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE50110171T Expired - Lifetime DE50110171D1 (de) | 2000-09-22 | 2001-09-19 | Grenzwertsensor-vorrichtung |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7139159B2 (enExample) |
| EP (1) | EP1319168B1 (enExample) |
| JP (1) | JP2004510970A (enExample) |
| CN (1) | CN1476529A (enExample) |
| AU (2) | AU2001293823B9 (enExample) |
| CA (1) | CA2422559C (enExample) |
| DE (2) | DE10047113C2 (enExample) |
| WO (1) | WO2002029364A1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014204039B3 (de) * | 2014-03-05 | 2015-05-07 | Ifm Electronic Gmbh | Elektronisches Schaltgerät in Zweileitertechnik und Verfahren zum Betreiben eines solchen Schaltgeräts |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7633033B2 (en) | 2004-01-09 | 2009-12-15 | General Lasertronics Corporation | Color sensing for laser decoating |
| WO2008118365A1 (en) * | 2007-03-22 | 2008-10-02 | General Lasertronics Corporation | Methods for stripping and modifying surfaces with laser-induced ablation |
| US10112257B1 (en) * | 2010-07-09 | 2018-10-30 | General Lasertronics Corporation | Coating ablating apparatus with coating removal detection |
| US9140113B2 (en) * | 2012-01-12 | 2015-09-22 | Weatherford Technology Holdings, Llc | Instrumented rod rotator |
| US9895771B2 (en) | 2012-02-28 | 2018-02-20 | General Lasertronics Corporation | Laser ablation for the environmentally beneficial removal of surface coatings |
| US10086597B2 (en) | 2014-01-21 | 2018-10-02 | General Lasertronics Corporation | Laser film debonding method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4100634A1 (de) * | 1991-01-11 | 1992-07-16 | Adaptronic Ag | Pruefvorrichtung |
| DE4205029C1 (en) * | 1992-02-19 | 1993-02-11 | Siemens Ag, 8000 Muenchen, De | Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate |
| JPH0660788A (ja) * | 1992-08-04 | 1994-03-04 | Sharp Corp | 圧電式リレー |
| DE19846639A1 (de) * | 1998-10-09 | 2000-04-27 | Abb Research Ltd | Neue elektrische Schalteinrichtung |
| DE19854450C2 (de) * | 1998-11-25 | 2000-12-14 | Tyco Electronics Logistics Ag | Mikromechanisches elektrostatisches Relais |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2314420C3 (de) * | 1973-03-22 | 1978-03-30 | Siemens Ag, 1000 Berlin Und 8000 Muenchen | Piezoelektrische Taste |
| US4392074A (en) * | 1980-09-19 | 1983-07-05 | Siemens Aktiengesellschaft | Trigger device and piezo-ignition coupler with galvanic decoupling |
| DE8815289U1 (de) * | 1988-12-08 | 1989-03-09 | Asea Brown Boveri Ag, 68309 Mannheim | Schaltgerät |
| US5287086A (en) * | 1990-01-02 | 1994-02-15 | Raptor, Inc. | Proximity detection system and oscillator |
| DE4114835A1 (de) * | 1991-05-07 | 1992-11-12 | Vdo Schindling | Schalteinrichtung, insbesondere zur verwendung in kraftfahrzeugen |
| US6060788A (en) * | 1998-11-12 | 2000-05-09 | Eaton Corporation | Vehicle driver module |
-
2000
- 2000-09-22 DE DE10047113A patent/DE10047113C2/de not_active Revoked
-
2001
- 2001-09-19 AU AU2001293823A patent/AU2001293823B9/en not_active Ceased
- 2001-09-19 EP EP01974266A patent/EP1319168B1/de not_active Expired - Lifetime
- 2001-09-19 CA CA002422559A patent/CA2422559C/en not_active Expired - Fee Related
- 2001-09-19 AU AU9382301A patent/AU9382301A/xx active Pending
- 2001-09-19 WO PCT/EP2001/010841 patent/WO2002029364A1/de not_active Ceased
- 2001-09-19 CN CNA018193110A patent/CN1476529A/zh active Pending
- 2001-09-19 JP JP2002532890A patent/JP2004510970A/ja active Pending
- 2001-09-19 DE DE50110171T patent/DE50110171D1/de not_active Expired - Lifetime
- 2001-09-19 US US10/380,472 patent/US7139159B2/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4100634A1 (de) * | 1991-01-11 | 1992-07-16 | Adaptronic Ag | Pruefvorrichtung |
| DE4205029C1 (en) * | 1992-02-19 | 1993-02-11 | Siemens Ag, 8000 Muenchen, De | Micro-mechanical electrostatic relay - has tongue-shaped armature etched from surface of silicon@ substrate |
| JPH0660788A (ja) * | 1992-08-04 | 1994-03-04 | Sharp Corp | 圧電式リレー |
| DE19846639A1 (de) * | 1998-10-09 | 2000-04-27 | Abb Research Ltd | Neue elektrische Schalteinrichtung |
| DE19854450C2 (de) * | 1998-11-25 | 2000-12-14 | Tyco Electronics Logistics Ag | Mikromechanisches elektrostatisches Relais |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014204039B3 (de) * | 2014-03-05 | 2015-05-07 | Ifm Electronic Gmbh | Elektronisches Schaltgerät in Zweileitertechnik und Verfahren zum Betreiben eines solchen Schaltgeräts |
Also Published As
| Publication number | Publication date |
|---|---|
| DE10047113A1 (de) | 2002-04-25 |
| AU9382301A (en) | 2002-04-15 |
| AU2001293823C1 (en) | 2006-02-09 |
| CN1476529A (zh) | 2004-02-18 |
| DE50110171D1 (de) | 2006-07-27 |
| JP2004510970A (ja) | 2004-04-08 |
| AU2001293823B2 (en) | 2005-07-28 |
| EP1319168B1 (de) | 2006-06-14 |
| US20030169167A1 (en) | 2003-09-11 |
| EP1319168A1 (de) | 2003-06-18 |
| WO2002029364A1 (de) | 2002-04-11 |
| CA2422559A1 (en) | 2003-03-14 |
| AU2001293823B9 (en) | 2006-08-31 |
| US7139159B2 (en) | 2006-11-21 |
| CA2422559C (en) | 2006-06-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| OP8 | Request for examination as to paragraph 44 patent law | ||
| 8304 | Grant after examination procedure | ||
| 8363 | Opposition against the patent | ||
| 8331 | Complete revocation | ||
| 8369 | Partition in: |
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| Q171 | Divided out to: |
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