DD204110A1 - METALIZATION METHOD FOR CONDUCTIVITY CONDENSATE CONDENSERS - Google Patents

Abstract

The invention relates to a method for applying concentric metallizations on frustoconical Durchfuehrungskondensatoren according to patent 61,832. This should be done according to the task as standard by means of a molecular coating process. The object is achieved according to the invention by a group of feedthrough capacitors, which is covered with corresponding templates, being guided in a straight line through a sputter coating system whose surface-area target has a width extension in the order of magnitude of the distance of the target feedthrough capacitor. To avoid shadowing by the template webs, a certain degree of overlap between the group of feedthrough capacitors and the target surface must be maintained. The invention is applicable to the manufacture of ceramic capacitors.

Description

237642

Rolf Petermann P 858

Manfred Undeutsch IPK: C 23 C, 15/00

11.2,1982

Title of the invention

Method for metallizing kege! Stump-shaped feedthrough capacitors

Field of application of the invention

The invention relates to a method for applying concentric metal coatings to ball-shaped, optionally combined with a cylinder bushing capacitors according to patent 61,832. A special feature in this case are the technological difficulties in coating the die surface, with the omission of a central middle section and the conical surface.

Characteristic of the known technical solutions

In the customary for these special products spray silvering (DD 61.332, column 3, line 16), the use of templates for the simultaneous metallization of a group of products is unknown, Rather, these parts have been previously metallized individually. The production of the inner insulation edge brings considerable technological difficulties with it. The for the covering-free

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Circular surface provided cover pieces are lifted or moved by the compressed air used during Spritζversilbern. For this reason, one obtains only a low yield with the desired insulating surface. In addition, it is costly to insert the individual small Abdeckstücke with about 1 mm in height and 3 mm diameter each new in the components.

Sine coating with moving vapor deposition (for example according to DE 2.8TO.316) raises the problem of fixing the covering piece on the now downwardly directed truncated cone covering surface. If one wants to solve it by a holder by means of webs extended outwards over the conical surface, the problem of shading (dilution or interruption) of the metal layer on the conical surface occurs precisely in the case of punctiform coating material sources in question.

Known sputter-coating plants with areal farget (journal "the technique" 3 ± (1979) 4, page 237-240) have been used only for the coating of planar planar workpieces, while the above-mentioned products were as already said coated by a completely different method ,

Object of the invention

The aim of the invention is a rationalization of the production of kege! Stump-shaped. Lead-ins according to patent 61.332.

Explanation of the essence of the invention

It is an object of the present invention to metallize a flat truncated surface except for a round concentric portion on the top surface uniformly under the conditions of mass production by a molecular beam coating method.

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According to the invention, this object is achieved in that a group of ordered feedthrough capacitors in rectilinear relative movement to the coating source through, a sputter coating plant is hindurchgefahrt whose planar Sarget has a width extension in the order of the distance target - feedthrough capacitor, wherein a template not to be coated areas of Covering capacitors covering and this template has in the case of the truncated cone surfaces of webs held cover plates for producing the concentric recess.

Appropriately, a process management with such temporal and geometric coverage of Durchführungskondensatorengruppe and target surface, that shading of the coating is compensated behind the webs of the template.

By applying the invention, a high yield of good metallization in the process is achieved. There are no mechanical stresses on the stencils used, as a result of which they achieve a long service life. The applied coating process ensures, on the one hand, contour-sharp metallization and, on the other hand, a high degree of coverage of rough or non-planar workpieces. The latter fact results from the planar target shape and offers great advantages, especially with rough ceramic surfaces. »This is further promoted by the relative movement. Another part of the gate is that less precious metals, such as copper, can be applied by sputter coating instead of silver.

Execution b e ± 3 ρ i 91

The accompanying drawings show: Pig »1: tapered stubby feedthrough capacitor with hatched highlighting of metallized areas;

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Pig. 2: template for the production of the upper metallization;

Pig «- 3: Template for the production of the lower metallization.

While the fabrication of the upper metallization will be readily understood with reference to the drawings (Pig 1 and 2), some embodiments are necessary for the lower metallization extending over the conical surface and the outer edge of the top surface: the feedthrough capacitor blanks are ceramic Materials with typical dimensions of 6 .., 10 mm diameter and 1.5. ·· 2 _S 5 mm total height are clamped in a non-pointed frame and can be moved horizontally evenly in the sputter coating system. On it, ie directed downwards to the target, the template lies after Pig. 3 · The coating parameters (flow rate 0.1 ... 10 m / min, target distance 60 mm, target dimensions 60 χ 16O mm ") lead to a uniform metallization of the surfaces with a 0, despite the momentary shadowing by the webs according to Pig. 2 ♦, 4 / thick electrode layer made of CrUi or stainless steel as adhesion layer and Cu or CuNi as solderable electrode layer,

Claims (1)

-5-237642 5 P 858 Erfindungsanspruch A method of metallizing a frustoconical feedthrough capacitor, characterized in that a group of ordered feedthrough capacitors is passed in rectilinear relative movement to the coating source through a sputter-coating machine whose planar target has a width extent of the order of the distance of the target feedthrough capacitor, with a template not to be coated areas of the feedthrough capacitors covers and this template in the case of the truncated cone surface of webs held cover plates for producing the concentric recess have Method according to item 1, characterized by such temporal and geometric coverage of feedthrough capacitor group and target surface that shading of the coating behind the webs of the stencil is compensated- For this 1 page drawings.