DD203429A1 - Schaltungsanordnung zur steuerung eines korpuskularstrahls - Google Patents

Schaltungsanordnung zur steuerung eines korpuskularstrahls

Info

Publication number
DD203429A1
DD203429A1 DD81232305A DD23230581A DD203429A1 DD 203429 A1 DD203429 A1 DD 203429A1 DD 81232305 A DD81232305 A DD 81232305A DD 23230581 A DD23230581 A DD 23230581A DD 203429 A1 DD203429 A1 DD 203429A1
Authority
DD
German Democratic Republic
Prior art keywords
controlling
circuit arrangement
corpuscular beam
corpuscular
arrangement
Prior art date
Application number
DD81232305A
Other languages
German (de)
English (en)
Inventor
Hans-Guenther Eichhorn
Juergen Gramss
Original Assignee
Eichhorn Hans Guenther
Juergen Gramss
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eichhorn Hans Guenther, Juergen Gramss filed Critical Eichhorn Hans Guenther
Priority to DD81232305A priority Critical patent/DD203429A1/xx
Priority to DE19823216354 priority patent/DE3216354A1/de
Priority to SU827772471A priority patent/SU1309036A1/ru
Priority to FR8212277A priority patent/FR2510816B1/fr
Priority to US06/402,228 priority patent/US4468566A/en
Publication of DD203429A1 publication Critical patent/DD203429A1/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/302—Controlling tubes by external information, e.g. programme control

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Image Processing (AREA)
  • Electron Beam Exposure (AREA)
DD81232305A 1981-08-03 1981-08-03 Schaltungsanordnung zur steuerung eines korpuskularstrahls DD203429A1 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DD81232305A DD203429A1 (de) 1981-08-03 1981-08-03 Schaltungsanordnung zur steuerung eines korpuskularstrahls
DE19823216354 DE3216354A1 (de) 1981-08-03 1982-05-03 Schaltungsanordnung zur steuerung eines korpuskularstahls
SU827772471A SU1309036A1 (ru) 1981-08-03 1982-06-03 Устройство дл формировани импульсов управлени корпускул рным лучом
FR8212277A FR2510816B1 (fr) 1981-08-03 1982-07-13 Dispositif numerique pour la commande d'un rayonnement corpusculaire
US06/402,228 US4468566A (en) 1981-08-03 1982-07-29 Corpuscular beam control circuit arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD81232305A DD203429A1 (de) 1981-08-03 1981-08-03 Schaltungsanordnung zur steuerung eines korpuskularstrahls

Publications (1)

Publication Number Publication Date
DD203429A1 true DD203429A1 (de) 1983-10-19

Family

ID=5532747

Family Applications (1)

Application Number Title Priority Date Filing Date
DD81232305A DD203429A1 (de) 1981-08-03 1981-08-03 Schaltungsanordnung zur steuerung eines korpuskularstrahls

Country Status (5)

Country Link
US (1) US4468566A (fr)
DD (1) DD203429A1 (fr)
DE (1) DE3216354A1 (fr)
FR (1) FR2510816B1 (fr)
SU (1) SU1309036A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6246518A (ja) * 1985-08-23 1987-02-28 Toshiba Corp 荷電ビ−ム描画方法
JPS6394623A (ja) * 1986-10-09 1988-04-25 Hitachi Ltd 描画装置
JP2501726B2 (ja) * 1991-10-08 1996-05-29 インターナショナル・ビジネス・マシーンズ・コーポレイション コンピュ―タ・イメ―ジ生成装置及びデ―タ減縮方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2294489A1 (fr) * 1974-12-13 1976-07-09 Thomson Csf Dispositif pour le trace programme de dessins par bombardement de particules
FR2339909A1 (fr) * 1976-01-30 1977-08-26 Thomson Csf Systeme pour le dessin programme par bombardement de particules
JPS5394772A (en) * 1977-01-31 1978-08-19 Cho Lsi Gijutsu Kenkyu Kumiai System for compressing data in charged beam exposing device

Also Published As

Publication number Publication date
US4468566A (en) 1984-08-28
FR2510816B1 (fr) 1985-11-22
DE3216354A1 (de) 1983-02-17
SU1309036A1 (ru) 1987-05-07
FR2510816A1 (fr) 1983-02-04

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Legal Events

Date Code Title Description
ENJ Ceased due to non-payment of renewal fee