DD158974A2 - DOUBLE SCHLEUSE FOR CORPUSKULAR RADIATORS - Google Patents

Abstract

The invention relates to a double lock for Korpuskularstrahlgeraete, in particular for scanning electron microscopes and electron beam exposure systems. The aim of the invention is to increase the working productivity d. to increase equipped with the inventive object sluice devices. For this purpose, two magazines are to be used, whereby the processing time for the first magazine should run parallel with the time for the temperature control, evacuation and degassing of the second magazine. To solve the problem, the double lock PS 143188 is designed so that the two chambers are horizontally opposite lying with the main chamber, the inner lock chamber is part of a horizontally movable carriage, which also has two bearings for magazines, and in the main chamber preferably slidable elevator is mounted perpendicular to the carriage travel direction, which passes through openings in the carriage bottom and brings the individual subjects of the magazines successively in the achievable by the object changer position.

Description

Title; Double lock for particle beam devices

Field of application of the invention :

The invention relates to a double guard for particle beam devices, in particular for scanning electron microscopes and ultraviolet beam exposure systems for the inspection or processing of objects such as semiconductor wafers, masks and mask carriers The time required for the sluice, temperature control and positioning of the objects must be as small as possible with these devices be maintained in order to achieve the high labor productivity adequate to the high equipment cost.

Characteristic of the known technical solutions:

Ih the main pat ent registration WP "Ityj / I ^ .. is described a device for locks for corpuscular beam devices, which contains either a simple magazine lock or a double lock for the simultaneous recording of two objects.

The double lock consists of a middle section (main chamber), which is connected to the processing chamber via a changer opening vacuum diGht and one upper and one lower antechamber each. In the middle part of a plate is moved up, up and down and sealed by provided sealing elements je-Y / eils in the end positions of the upper or lower gate chamber from. ÜTsex and. under the plate are ever

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a depository for the object stop he. Each antechamber has a door to the outside through which the object holders are inserted or removed by hand. If the plate seals off the upper pre-chamber, the changer can transfer the object holder under the plate for processing, while in the upper pre-chamber after ventilating and opening the door the object already being processed is exchanged and after closing the door. the evacuation of the antechamber can take place.

NaG.ni the processing of the object, the changer leads the Qbjekthalter back to the bearing point below the plate and there is an analog work cycle. This operation causes a significant burden on the operator due to the manual change of each object.

In order to ensure a roll-automatic operation for a long time, the insertion of a filled magazine must be possible. In the main patent application for a magazine lock is specified, which allows the insertion and replacement of a magazine only in the upper antechamber · Instead of the lower prechamber a pot is attached, which receives the retracted plate when the upper object holder from the magazine into the processing chamber be transported.

In this variant, the evacuation time for the newly loaded object holder can be placed in the processing time of an object, if, the processing of the last object of a feed takes place only after the replacement in the upper antechamber. A storage facility must remain free in the ITeube Schickung for lying on the cross table object holder.

25.FES.1980 * 8443.to

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Aim of the invention;

The object of the invention is to further increase the labor productivity of equipped with the double lock corpuscular beam device .. For this Zweok should work with two magazines, the processing time for the first magazine with the time for the temperature control, evacuation and degassing of the second magazine should run parallel.

Explanation of the essence of the invention :

The invention has for its object to change the double lock after the main patent so that the use of two magazines is possible · To solve the problem, the double lock is designed as a magazine double lock as follows:

- The two antechambers are mounted horizontally opposite each other on the main chamber;

- To transport the magazines between the gate chamber and the main chamber, the lifting device according to Fig »3 of the main patent to. transformed a horizontally movable carriage;

- In the main chamber, a preferably programmed perpendicular to the carriage travel direction slidable elevator is introduced, which extends through openings in the carriage bottom at the bearing points for the magazines and carries at its upper end a Fahr- stuhlteller for receiving the located in the main chamber magazine.

It is advantageous to connect the walls of the two prechambers to a tempering system. Sine for high-precision work - z, B · The production and evaluation of original stencils for the photolithography- Required tempering chamber with the associated risks in terms of which there imprinted. Temperature and dust during the transfer from the temperature chamber to the lock can be saved.

3507

26.Ftß.1980 * 84431o

- 4 - 215883

Exemplary embodiment :

The double magazine soleuse consists of a cuboidal main chamber 1, which is connected via a changer opening 2 with the processing chamber 3 and flanged to this vacuum-tight, as well as two mirror images of the same Torkammern 4 and 5, at the two of the side of the processing chamber vertically adjacent main chamber surfaces horizontally are attached opposite vacuum-tight. Each of the antechambers is through, a vacuum-sealable and easy-to-use door -for example. the Torkammer 5 'through the Torkammertür 6 - accessible and connected via one of their clear width corresponding opening with the main chamber.

"Inside the volume: Torkammer 4 - main chamber 1 Torkammer 5 is a horizontally movable carriage 7, which can be moved between two end positions so that either the Torkammer 4 or the Torkammer 5 with the main chamber 1 and the changer opening 2 also is vacuum-connected to the processing chamber, wherein the respective other gate chamber is separated with a seal 8, 9 and can assume an independent of the device vacuum pressure state Here is the principle of the double lock of the main pat entanmeldung WP H 01 J / 213 277 4Fig »3 ) again.

The said carriage is at the same time as a carrier for two magazines 10; 11 formed with receiving guides 12, 13 for the magazines on both sides of the carriage plate 14th In each magazine are stacked at a distance of any number of object holders 15, each receiving an object 16 (in the drawing, for example, five object holders per magazine are shown).

- 5 - 2 15 8 8 3

The storage of each magazine in the carriage is designed so that it can move freely upwards and then placed back on the carriage. Through an opening 17 or 18 in the receiving base of the carriage, the plate 19 can pass through a vertically movable elevator 20, lift the magazine from the carriage to appropriate heights and set down again · This gives all movement possibilities., To any object of the magazine before the Access opening of a changer, as explained in the main patent application (Figures 1 and 2), which provides for the transport of the object holder from the magazine to the cross table in the processing chamber and back.

'In general, the objects of a magazine are processed one after another * This is during processing constantly in the main chamber 1 of the lock. In. The time required for the processing of a magazine is also available to first temper the second magazine in the antechamber in air - the presence of air shortened by the convection the tempering time - and then to evacuate the antechamber and degas the objects. With proper matching of the times and the number of object holders, it will be possible to eliminate both the temperature control and the evacuation time from the average loss time per object between two processes.

Sled and lift can be driven electrically, hydraulically, pneumatically or manually. Because either the carriage or the elevator must be moved, but never both at the same time, a common source of power is conceivable.

2S.FE8.198G * 8443Io

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The "two prechambers are tempered by a flowing liquid, which is pumped out of thermostats by snugly against the housing walls coil 21 · The drawing shows the following state:

- Left magazine in Torkammer 4 in the waiting state for temperature control, evacuation and degassing

- Magazine right in the highest position of the elevator,

Bottom object holder is located in front of the changer opening \ The working cycle of the double magazine lock starts as follows, starting from the time the device is put into operation:

The carriage 7 is moved to the left end position and thus the Torkammer 4 separated from the device vacuum.

The door chamber 4 can now be ventilated, the door of the door opened, the first magazine inserted into the left-hand receiving guide of the carriage as far as it will go, and the door closed again. After sufficient tempering and sufficient Torvakuum the carriage moves to the right stop, whereby the Torkammer as before the Torkammer 4 is separated from the vacuum device · Here, the loading of the right receiving guide with a second magazine in the manner already described can be done.

Meanwhile, the first magazine sits in the main chamber and is brought in η different levels in η object holders in front of the leading to the processing chamber changer opening. The object changer retrieves the desired object holder from the magazine and returns it to the original magazine compartment after processing. · Only then is the elevator allowed to move one step higher (or lower). After processing all the objects of the first magazine, the elevator puts the magazine back on the slide and moves to the end

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bottom stop 22 from the range of movement of debrus ent ellers. Fun the carriage can drive back to the left end position, on the one hand, the "processed magazine can be replaced in the antechamber against a new magazine, on the other hand, the now tempered and degassed magazine is transported into the main chamber

 Sound from now repeat the operations.

Claims (2)

Brfindungsanspruch: 1 »double lock for corpuscular radiation devices, consisting of an evacuated main chamber, which is connected via a changer opening-vacuum-tight with a processing chamber and at the two separately evacuated, each sealed with an outer antechamber door chambers are set in which a carriage is slidably disposed, the one acting as an inner Schleuskammertür plate with seals for sealing against the main chamber and the aerated pre-chamber having attached to the both sides of the plate bearing points for object holders, post- f it! / M2A (l characterized in that the double lock is designed as a magazine double lock in such a way that the antechambers (4, 5) are mounted horizontally opposite each other and each can receive a magazine (10, 11), the carriage (7) is horizontally movable therein and in that in the main chamber (i) a preferably perpendicular to the carriage travel direction Programmed programmed sliding elevator (20), which passes through openings (17, 18) in the carriage floor at the storage locations for the magazines and at its upper end carries a lift plate (19) for receiving the magazine located in the main chamber. 2. double lock according to item 1, characterized in that the two antechambers are connected to a temperature control system · \ Cs 1979 Hierza A Page 2 e ^ na η Kel / Mr Buet 3507