GB2056758B - Device for air locking objects in corpuscular irradiation devices - Google Patents

Device for air locking objects in corpuscular irradiation devices

Info

Publication number
GB2056758B
GB2056758B GB8017690A GB8017690A GB2056758B GB 2056758 B GB2056758 B GB 2056758B GB 8017690 A GB8017690 A GB 8017690A GB 8017690 A GB8017690 A GB 8017690A GB 2056758 B GB2056758 B GB 2056758B
Authority
GB
United Kingdom
Prior art keywords
irradiation devices
air locking
locking objects
corpuscular
corpuscular irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB8017690A
Other versions
GB2056758A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Jenoptik Jena GmbH
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DD21327779A external-priority patent/DD143188A1/en
Priority claimed from DD21588379A external-priority patent/DD158974A2/en
Application filed by Jenoptik Jena GmbH, Carl Zeiss Jena GmbH filed Critical Jenoptik Jena GmbH
Publication of GB2056758A publication Critical patent/GB2056758A/en
Application granted granted Critical
Publication of GB2056758B publication Critical patent/GB2056758B/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Electron Beam Exposure (AREA)
GB8017690A 1979-05-31 1980-05-30 Device for air locking objects in corpuscular irradiation devices Expired GB2056758B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DD21327779A DD143188A1 (en) 1979-05-31 1979-05-31 DEVICE FOR LOADING OBJECTS FOR CORPUSCULAR RADIATORS
DD21588379A DD158974A2 (en) 1979-09-28 1979-09-28 DOUBLE SCHLEUSE FOR CORPUSKULAR RADIATORS

Publications (2)

Publication Number Publication Date
GB2056758A GB2056758A (en) 1981-03-18
GB2056758B true GB2056758B (en) 1983-03-23

Family

ID=25747658

Family Applications (1)

Application Number Title Priority Date Filing Date
GB8017690A Expired GB2056758B (en) 1979-05-31 1980-05-30 Device for air locking objects in corpuscular irradiation devices

Country Status (2)

Country Link
DE (1) DE3019728A1 (en)
GB (1) GB2056758B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57194531A (en) * 1981-05-26 1982-11-30 Toshiba Corp Electron beam transfer device
US4861563A (en) * 1987-05-14 1989-08-29 Spectrum Cvd, Inc. Vacuum load lock
KR890701275A (en) * 1987-11-30 1989-12-19 쉬타트뮐러, 노르트만 Electron beam welding device of the object
DE10250988A1 (en) * 2002-10-28 2004-05-13 Gamma-Service Produktbestrahlung Gmbh Electron irradiation facility

Also Published As

Publication number Publication date
GB2056758A (en) 1981-03-18
DE3019728A1 (en) 1980-12-04

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee