DD123979A1 - - Google Patents

Info

Publication number
DD123979A1
DD123979A1 DD192756A DD19275676A DD123979A1 DD 123979 A1 DD123979 A1 DD 123979A1 DD 192756 A DD192756 A DD 192756A DD 19275676 A DD19275676 A DD 19275676A DD 123979 A1 DD123979 A1 DD 123979A1
Authority
DD
German Democratic Republic
Application number
DD192756A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of DD123979A1 publication Critical patent/DD123979A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301Arrangements enabling beams to pass between regions of different pressure
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/067Replacing parts of guns; Mutual adjustment of electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/315Electron-beam or ion-beam tubes for localised treatment of objects for welding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
DD192756A 1975-06-24 1976-05-10 DD123979A1 (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2528032A DE2528032C2 (de) 1975-06-24 1975-06-24 Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke

Publications (1)

Publication Number Publication Date
DD123979A1 true DD123979A1 (https=) 1977-01-26

Family

ID=5949801

Family Applications (1)

Application Number Title Priority Date Filing Date
DD192756A DD123979A1 (https=) 1975-06-24 1976-05-10

Country Status (7)

Country Link
US (1) US4034256A (https=)
JP (1) JPS588104B2 (https=)
BE (1) BE843275A (https=)
DD (1) DD123979A1 (https=)
DE (1) DE2528032C2 (https=)
FR (1) FR2315767A1 (https=)
GB (1) GB1513690A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19623701A1 (de) * 1996-06-14 1997-12-18 Leybold Systems Gmbh Vorrichtung und Verfahren zum Elektronenstrahlverdampfen

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3328172A1 (de) * 1983-08-04 1985-02-14 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlkanone
UA43927C2 (uk) * 2000-12-26 2002-01-15 Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О. Патона Нан України Електронна гармата з лінійним термокатодом для електронно-променевого нагрівання
TW202220012A (zh) 2020-09-30 2022-05-16 德商卡爾蔡司多重掃描電子顯微鏡有限公司 在可調工作距離附近具快速自動對焦之多重粒子束顯微鏡及相關方法
DE102021105201B4 (de) * 2021-03-04 2024-10-02 Carl Zeiss Multisem Gmbh Vielzahl-Teilchenstrahlmikroskop und zugehöriges Verfahren mit schnellem Autofokus mit speziellen Ausführungen
KR102560783B1 (ko) * 2022-12-16 2023-07-27 (주)이에프씨 인조흑연 생산 자동화 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3187216A (en) * 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
DE1248175B (de) * 1961-08-31 1967-08-24 Heraeus Gmbh W C Elektronenstrahlerzeugungssystem
US3298083A (en) * 1964-01-02 1967-01-17 Rca Corp Method of making electron gun mount
DE1955846C3 (de) * 1969-11-06 1973-10-31 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19623701A1 (de) * 1996-06-14 1997-12-18 Leybold Systems Gmbh Vorrichtung und Verfahren zum Elektronenstrahlverdampfen

Also Published As

Publication number Publication date
US4034256A (en) 1977-07-05
DE2528032C2 (de) 1983-06-09
FR2315767A1 (fr) 1977-01-21
JPS588104B2 (ja) 1983-02-14
GB1513690A (en) 1978-06-07
DE2528032A1 (de) 1977-01-20
BE843275A (fr) 1976-10-18
FR2315767B1 (https=) 1979-07-20
JPS523368A (en) 1977-01-11

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