DD114726A1 - - Google Patents

Info

Publication number
DD114726A1
DD114726A1 DD18006174A DD18006174A DD114726A1 DD 114726 A1 DD114726 A1 DD 114726A1 DD 18006174 A DD18006174 A DD 18006174A DD 18006174 A DD18006174 A DD 18006174A DD 114726 A1 DD114726 A1 DD 114726A1
Authority
DD
German Democratic Republic
Application number
DD18006174A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to DD18006174A priority Critical patent/DD114726A1/xx
Priority to DE19752527938 priority patent/DE2527938A1/de
Priority to CS513675A priority patent/CS184959B1/cs
Priority to FR7522885A priority patent/FR2280095A1/fr
Priority to GB3052675A priority patent/GB1513433A/en
Publication of DD114726A1 publication Critical patent/DD114726A1/xx

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
DD18006174A 1974-07-23 1974-07-23 DD114726A1 (el)

Priority Applications (5)

Application Number Priority Date Filing Date Title
DD18006174A DD114726A1 (el) 1974-07-23 1974-07-23
DE19752527938 DE2527938A1 (de) 1974-07-23 1975-06-23 Anordnung zur gewinnung eines lichtsignales aus dem belichtungsstrahlengang einer positionier- und belichtungsvorrichtung
CS513675A CS184959B1 (en) 1974-07-23 1975-07-21 Device for receiving the light signal from the current of exposure beams of the adjusting and exposure device
FR7522885A FR2280095A1 (fr) 1974-07-23 1975-07-22 Dispositif d'obtention d'un signal lumineux, a partir du faisceau lumineux d'un dispositif de positionnement et d'exposition
GB3052675A GB1513433A (en) 1974-07-23 1975-07-22 Photoprinting apparatus including a light sensing arrangement

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DD18006174A DD114726A1 (el) 1974-07-23 1974-07-23

Publications (1)

Publication Number Publication Date
DD114726A1 true DD114726A1 (el) 1975-08-12

Family

ID=5496668

Family Applications (1)

Application Number Title Priority Date Filing Date
DD18006174A DD114726A1 (el) 1974-07-23 1974-07-23

Country Status (5)

Country Link
CS (1) CS184959B1 (el)
DD (1) DD114726A1 (el)
DE (1) DE2527938A1 (el)
FR (1) FR2280095A1 (el)
GB (1) GB1513433A (el)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928337A (ja) * 1982-08-09 1984-02-15 Hitachi Ltd プロジエクシヨンアライナ

Also Published As

Publication number Publication date
GB1513433A (en) 1978-06-07
FR2280095B3 (el) 1979-04-27
FR2280095A1 (fr) 1976-02-20
DE2527938A1 (de) 1976-02-12
CS184959B1 (en) 1978-09-15

Similar Documents

Publication Publication Date Title
FR2258382A1 (el)
DK289775A (el)
FR2283082B1 (el)
DK144175A (el)
FR2258375A1 (el)
FR2271428B3 (el)
AU495930B2 (el)
FR2280095B3 (el)
DK683774A (el)
FR2286916B2 (el)
FR2279867B1 (el)
JPS50103250U (el)
JPS50100456A (el)
JPS50100640U (el)
BG21351A1 (el)
BG21129A1 (el)
BG21526A1 (el)
BG21352A1 (el)
CH569220A5 (el)
AU479931A (el)
AU480208A (el)
AU480247A (el)
CH566410A5 (el)
CH566915A5 (el)
BG19847A1 (el)