CS782888A1 - Magnetron for thin layers' deposition in vacuum - Google Patents

Magnetron for thin layers' deposition in vacuum

Info

Publication number
CS782888A1
CS782888A1 CS887828A CS782888A CS782888A1 CS 782888 A1 CS782888 A1 CS 782888A1 CS 887828 A CS887828 A CS 887828A CS 782888 A CS782888 A CS 782888A CS 782888 A1 CS782888 A1 CS 782888A1
Authority
CS
Czechoslovakia
Prior art keywords
magnetron
deposition
vacuum
thin layers
layers
Prior art date
Application number
CS887828A
Other languages
Czech (cs)
Other versions
CS269498B1 (en
Inventor
Jiri Ing Stanislav
Milan Ing Exner
Augustin Frey
Jaroslav Ing Kult
Josef Ing Matuska
Original Assignee
Stanislav Jiri
Exner Milan
Augustin Frey
Kult Jaroslav
Josef Ing Matuska
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Stanislav Jiri, Exner Milan, Augustin Frey, Kult Jaroslav, Josef Ing Matuska filed Critical Stanislav Jiri
Priority to CS887828A priority Critical patent/CS269498B1/en
Publication of CS782888A1 publication Critical patent/CS782888A1/en
Publication of CS269498B1 publication Critical patent/CS269498B1/en

Links

CS887828A 1988-11-29 1988-11-29 Magnetron for thin film deposition in vacuum CS269498B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS887828A CS269498B1 (en) 1988-11-29 1988-11-29 Magnetron for thin film deposition in vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS887828A CS269498B1 (en) 1988-11-29 1988-11-29 Magnetron for thin film deposition in vacuum

Publications (2)

Publication Number Publication Date
CS782888A1 true CS782888A1 (en) 1989-09-12
CS269498B1 CS269498B1 (en) 1990-04-11

Family

ID=5428130

Family Applications (1)

Application Number Title Priority Date Filing Date
CS887828A CS269498B1 (en) 1988-11-29 1988-11-29 Magnetron for thin film deposition in vacuum

Country Status (1)

Country Link
CS (1) CS269498B1 (en)

Also Published As

Publication number Publication date
CS269498B1 (en) 1990-04-11

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