CS591886A1 - Method of photoresist layers' surface treatment - Google Patents

Method of photoresist layers' surface treatment

Info

Publication number
CS591886A1
CS591886A1 CS865918A CS591886A CS591886A1 CS 591886 A1 CS591886 A1 CS 591886A1 CS 865918 A CS865918 A CS 865918A CS 591886 A CS591886 A CS 591886A CS 591886 A1 CS591886 A1 CS 591886A1
Authority
CS
Czechoslovakia
Prior art keywords
surface treatment
photoresist layers
photoresist
layers
treatment
Prior art date
Application number
CS865918A
Other languages
Czech (cs)
Other versions
CS267575B1 (en
Inventor
Milos Ing Rothbauer
Zdenek Ing Novotny
Original Assignee
Rothbauer Milos
Novotny Zdenek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rothbauer Milos, Novotny Zdenek filed Critical Rothbauer Milos
Priority to CS865918A priority Critical patent/CS267575B1/en
Publication of CS591886A1 publication Critical patent/CS591886A1/en
Publication of CS267575B1 publication Critical patent/CS267575B1/en

Links

CS865918A 1986-08-07 1986-08-07 Method of photoresist layers' surface treatment CS267575B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS865918A CS267575B1 (en) 1986-08-07 1986-08-07 Method of photoresist layers' surface treatment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS865918A CS267575B1 (en) 1986-08-07 1986-08-07 Method of photoresist layers' surface treatment

Publications (2)

Publication Number Publication Date
CS591886A1 true CS591886A1 (en) 1989-06-13
CS267575B1 CS267575B1 (en) 1990-02-12

Family

ID=5405067

Family Applications (1)

Application Number Title Priority Date Filing Date
CS865918A CS267575B1 (en) 1986-08-07 1986-08-07 Method of photoresist layers' surface treatment

Country Status (1)

Country Link
CS (1) CS267575B1 (en)

Also Published As

Publication number Publication date
CS267575B1 (en) 1990-02-12

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