CS8801768A1 - Method of high-duty semi-conductor structures' multi-layer contact etching - Google Patents

Method of high-duty semi-conductor structures' multi-layer contact etching

Info

Publication number
CS8801768A1
CS8801768A1 CS176888A CS176888A CS8801768A1 CS 8801768 A1 CS8801768 A1 CS 8801768A1 CS 176888 A CS176888 A CS 176888A CS 176888 A CS176888 A CS 176888A CS 8801768 A1 CS8801768 A1 CS 8801768A1
Authority
CS
Czechoslovakia
Prior art keywords
layer contact
conductor structures
contact etching
duty semi
duty
Prior art date
Application number
CS176888A
Other languages
Czech (cs)
Other versions
CS274946B2 (en
Inventor
Daniela Ing Ricarova
Jaromir Rndr Louda
Jaroslav Rndr Csc Homola
Original Assignee
Daniela Ing Ricarova
Jaromir Rndr Louda
Homola Jaroslav
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daniela Ing Ricarova, Jaromir Rndr Louda, Homola Jaroslav filed Critical Daniela Ing Ricarova
Priority to CS176888A priority Critical patent/CS274946B2/en
Publication of CS8801768A1 publication Critical patent/CS8801768A1/en
Publication of CS274946B2 publication Critical patent/CS274946B2/en

Links

CS176888A 1988-03-18 1988-03-18 Method of high-duty semi-conductor structures' multi-layer contact etching CS274946B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS176888A CS274946B2 (en) 1988-03-18 1988-03-18 Method of high-duty semi-conductor structures' multi-layer contact etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS176888A CS274946B2 (en) 1988-03-18 1988-03-18 Method of high-duty semi-conductor structures' multi-layer contact etching

Publications (2)

Publication Number Publication Date
CS8801768A1 true CS8801768A1 (en) 1990-11-14
CS274946B2 CS274946B2 (en) 1991-12-17

Family

ID=5352912

Family Applications (1)

Application Number Title Priority Date Filing Date
CS176888A CS274946B2 (en) 1988-03-18 1988-03-18 Method of high-duty semi-conductor structures' multi-layer contact etching

Country Status (1)

Country Link
CS (1) CS274946B2 (en)

Also Published As

Publication number Publication date
CS274946B2 (en) 1991-12-17

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