CS273450B3 - Method of ion-cladding during layer sputtering - Google Patents

Method of ion-cladding during layer sputtering

Info

Publication number
CS273450B3
CS273450B3 CS232889A CS232889A CS273450B3 CS 273450 B3 CS273450 B3 CS 273450B3 CS 232889 A CS232889 A CS 232889A CS 232889 A CS232889 A CS 232889A CS 273450 B3 CS273450 B3 CS 273450B3
Authority
CS
Czechoslovakia
Prior art keywords
ion
layers
substrates
flow
during layer
Prior art date
Application number
CS232889A
Other languages
English (en)
Other versions
CS232889A1 (en
Inventor
Wolf-Dieter Dr Munz
Stanislav Rndr Kadlec
Jindrich Ing Drsc Musil
Original Assignee
Munz Wolf Dieter Dr
Kadlec Stanislav
Jindrich Ing Drsc Musil
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Munz Wolf Dieter Dr, Kadlec Stanislav, Jindrich Ing Drsc Musil filed Critical Munz Wolf Dieter Dr
Priority to CS232889A priority Critical patent/CS273450B3/cs
Publication of CS232889A1 publication Critical patent/CS232889A1/cs
Publication of CS273450B3 publication Critical patent/CS273450B3/cs

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  • Physical Vapour Deposition (AREA)
CS232889A 1989-04-14 1989-04-14 Method of ion-cladding during layer sputtering CS273450B3 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CS232889A CS273450B3 (en) 1989-04-14 1989-04-14 Method of ion-cladding during layer sputtering

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CS232889A CS273450B3 (en) 1989-04-14 1989-04-14 Method of ion-cladding during layer sputtering

Publications (2)

Publication Number Publication Date
CS232889A1 CS232889A1 (en) 1990-08-14
CS273450B3 true CS273450B3 (en) 1991-03-12

Family

ID=5360097

Family Applications (1)

Application Number Title Priority Date Filing Date
CS232889A CS273450B3 (en) 1989-04-14 1989-04-14 Method of ion-cladding during layer sputtering

Country Status (1)

Country Link
CS (1) CS273450B3 (cs)

Also Published As

Publication number Publication date
CS232889A1 (en) 1990-08-14

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