CS258213B1 - Contactor for temperature chamber with ice-formation protection - Google Patents

Abstract

The solution relates to a thermal contactor chambers with icing protection. The essence The solution is that in the middle body they are the openings formed on the cavities formed in the lower body.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contactor of a temperature chamber with anti-icing on the contactor contacts when measuring semiconductor devices at temperatures below freezing.

The contactor of the temperature chamber is located in the tempered space and its contacts pass into the ambient temperature environment. In the contactor, the measured component is connected to the electronic circuits of the test device, which evaluate its electrical parameters. The measuring and testing technology is connected to the contactor outside the tempered space. The quality of measurement depends on the mechanical but also electrical connection, which affects the transient resistance, inductance, insulation resistance between the leads, mechanical reliability, durability.

The contactor is located in an extremely low temperature area, and the contactor and measurement electronics connector is in an ambient temperature environment. This leads to heat transfer, cooling of the connection member and the possibility of formation of water vapor condensates present in the surrounding environment. With the formation of condensates, the insulating properties of the whole system are deteriorated and thus the measurement of electrical quantities is impossible. The prior art solutions basically use two kinds of protection against the formation of condensation of water vapor, namely heating of the tritium parts of the contactor together with the connecting electronics to a temperature above the dew point of the environment and the second way is to supply liquid nitrogen or other liquid cooling medium to where it evaporates and thereby creates an atmosphere free of water vapor. The disadvantage of these solutions is, firstly, the need for an auxiliary heat source and the associated increase in electricity consumption, and secondly, the need for a secondary supply of liquid coolant and greater complexity of the contactor node.

These drawbacks are overcome and the technical problem is solved by the anti-icing temperature chamber contactor, which is based on the fact that openings are formed in the central body which are connected to the cavities formed in the lower body.

An advantage of the frost protection temperature chamber contactor of the invention is that it eliminates the need for a secondary heat source to heat critical parts and, in the second mode of protection, eliminates the need for a secondary supply of liquid cooling medium to create a protective atmosphere. Another advantage is the simplicity of the solution of the node.

A further advantage of the thermal chamber contactor over the method of secondary supply of liquid cooling medium is that the heated medium already flows to the critical parts of the contactor by removing heat from the primary tempered space. The heat supply through the connection member and the ambient contacts is then sufficient for the critical point with the ambient dew point temperature to be in the cavities of the contactor.

The contactor of the anti-icing temperature chamber is shown by way of example in the accompanying drawing, where the contactor is drawn in elevation in partial section.

The anti-icing temperature chamber contactor consists of the actual contactor J1, the central contactor body 2, which separate the tempered space 2 from the ambient temperature environment 4 and the lower body J5. In the central body, openings 9 are formed following the cavities 10 formed in the lower body 5. The cavities 10 are closed by a measuring electronics connector. In the cavities 10 there are placed contacts 2 · On the top of the contactor 1 there is a measured component J3 ·

The function of the anti-icing temperature chamber is as follows: In the tempered compartment 2, where the contactor itself is located, an overpressure of the protective atmosphere 6 is created as a result of the evaporation of the cooling medium. A protective atmosphere 6 flows through the openings 2 formed in the central body 3 into the cavities 10 and partly around the connecting members 12 into the ambient temperature environment 4. The cavities 10 are closed at the measurement point 11 by the measuring electronics connection member 12, thereby creating an overpressure of the protective atmosphere 6 in the cavities 10.

The contacts 1 are protected from the environment 2 ^{with the} ambient temperature by the lower body 5 and the protective atmosphere 6 in the cavities 10.

Claims (1)

The anti-icing temperature chamber contactor comprising its own contactor located in the tempering space, the central body which separates the tempered space from the surrounding environment and the lower body, characterized in that openings (9) are provided in the central body (3) extending onto cavities (10) formed in the lower body (5).