CS222973B1 - Method of producing micro-apartures in capillary instruments for connecting electrode outlets - Google Patents

Method of producing micro-apartures in capillary instruments for connecting electrode outlets Download PDF

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Publication number
CS222973B1
CS222973B1 CS657179A CS657179A CS222973B1 CS 222973 B1 CS222973 B1 CS 222973B1 CS 657179 A CS657179 A CS 657179A CS 657179 A CS657179 A CS 657179A CS 222973 B1 CS222973 B1 CS 222973B1
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CS
Czechoslovakia
Prior art keywords
capillary
apartures
tip
unn
connecting electrode
Prior art date
Application number
CS657179A
Other languages
Czech (cs)
Inventor
Karl-Heinz Rudolph
Gottfried Froemmel
Original Assignee
Rudolph Karl Heinz
Gottfried Froemmel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rudolph Karl Heinz, Gottfried Froemmel filed Critical Rudolph Karl Heinz
Publication of CS222973B1 publication Critical patent/CS222973B1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
    • B23P15/16—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass plates with holes of very small diameter, e.g. for spinning or burner nozzles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/10—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of articles with cavities or holes, not otherwise provided for in the preceding subgroups
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
    • B22F5/10—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of articles with cavities or holes, not otherwise provided for in the preceding subgroups
    • B22F2005/103—Cavity made by removal of insert

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Powder Metallurgy (AREA)
  • Wire Bonding (AREA)
  • Press-Shaping Or Shaping Using Conveyers (AREA)
  • Manufacturing Of Tubular Articles Or Embedded Moulded Articles (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Air Conditioning Control Device (AREA)

Description

222 973222 973

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HanpanjieHHH iipobqjiohhoio BHBOfla Kainuumpa npoH3BO,HHTCH ny- 4 222 973 τβΜ 9Λ6κτρ09ρ03Η0ΗΗ0Γ0 cteMa MaTepnajia.HanpanjieHHH iipobqjiohhoio BHBOfla Kainuumpa npoH3BO, HHTCH ny- 4 222 973 τβΜ 9Λ6κτρ09ρ03Η0ΗΗ0Γ0 cteMa MaTepnajia.

CorjiacHo Η3οόρθτβΗΗκ 3Ta 3anaHa pemaeTca τβΜ, πτο b 3aro-TOBK6 $opMyeTGH CKBO3Hoe οτΒθροτιιθ, odpaayeMoe c homoiulk)$HKCHpOBaHHOÍÍ ΟΟΤρίϊθΜ B flWKHeíl ΙίΠΗΤβ φορΜΗ φορΜΟΒΟΗΗΟΗJíTJIH II ÓOKOBOÍÍ nOBSpXHOCTH KOHyca OTBepCTUfí, KOTOpoe nocjieCneKaHHfl 3arOTOBKH, HCXOAH H3 MEHHMaJIBHOrO miawieTpa, HaCTHH-ho flopaóaŤHBaeTCH η3βθοτηημ 3Λθκτρο3ρο3ΗθΗΗΗΜ οί,θμομ MaTepnana#0 iyiJiHBflpiraecKoro ΜίικροοτΒθροτΗΒ.CorjiacHo Η3οόρθτβΗΗκ 3TA 3anaHa pemaeTca τβΜ, πτο b 3aro-TOBK6 $ opMyeTGH CKBO3Hoe οτΒθροτιιθ, odpaayeMoe c homoiulk) $ HKCHpOBaHHOÍÍ ΟΟΤρίϊθΜ B flWKHeíl ΙίΠΗΤβ φορΜΗ φορΜΟΒΟΗΗΟΗJíTJIH II ÓOKOBOÍÍ nOBSpXHOCTH KOHyca OTBepCTUfí, KOTOpoe nocjieCneKaHHfl 3arOTOBKH, HCXOAH H3 MEHHMaJIBHOrO miawieTpa, HaCTHH-ho flopaóaŤHBaeTCH η3βθοτηημ 3Λθκτρο3ρο3ΗθΗΗΗΜ οί, θμομ MaTepnana # 0 iyiJiHBflpiraecKoro ΜίικροοτΒθροτΗΒ.

IIpHMep OOyiqeOTBJíeHHg H30dpeT6HHJI ΙθΤΟβ Η3ΓΟΤΟΒΗΘΗΚΗ KaifflJULHpHOrO EHCTpyM6HTa PJIX ΘΛΘΚΤρΟΛ-HHX BHBOfíOB ΠΟΗΟΗΗΘΤΟΗ ΗΗ3ΚΘ Ba ΠρΗΜθρθ OCymeCTBJíeHHH. ÍIpeccroopMa, cocTOjmaa b ochobhom H3 τρβχ HacTeií, 3anojifl-eTGH nopomKOOÓpa3HHM MaTepzajioM mm πηιθμομ, pacnpeflejmeMHMBOKpyr ynepjKHBaeMOH b BepxHefi nacTH φορΜΗ h 3a^)HKCHpoBanHOHB HHSHeft mníTe φορΜΗ φορΜΟΒΟΗΗΟΕ ΗΓΛΗ. ΘΤΗΜ SOCTHTaeTCH ΤΟ,πτο npeocyeMas nojraa 3aroTOBKa nojiynaeT οκβο3ηοθ οτεθροτΗθ. ΠοοΛβ τογο, ksk βθρχηηη naoTB φορΜΗ h hedkhhh ramTa φορΜΗOKpy&eHH BJiaoTiriHoft oóojiohkoh HaHHHaeTCH npoixeoc npeccoBa-HHH. ΠΟΑ BHCOKHM βΗΒΗΘΗΚΘΜ SJíaCTHHHaH OÓOJIOHKa paBHOMepHOcnpeccoBHBaeTCH, b pe3yjn>TaTe nero socTuraeToa BuooKaa ofí-Hopo^HocTB cTpyKTypH KamuuLHpHoro HHCTpyMeHTa ftna npucoe-řymeHKS sjíeKTpo/pinx βηβολοβ. Τθκξμ oópaaoM djiaronpHHTHHe npe^nocmiKH jyia η3ΓοτοβλθηηηiíHjnnmpinecKoro KannjuiapHoro oTBepcTHH moscho co3,naTi> yzeΠρΗ φορΜΟΟόρβΒΟΒΒΉΗΗ (b φορΜΘ ΗθρΗΟΒΟΓΟ ΚΟΗΗΗΘΟΚΟΓΟ OT-BepcTHH). IlocJie οκοηηθηηη npou;ecca irpeccoBaHHa ΦορμοβοηηθηHima ysajineTCH h sa nocjiejíyioiitHM nponeccoM οπθκβηηη odpa-30BaHHaa τθκημ odpaaoM npeccoBaHHaH saroTOBKa odpadaTHBaeT-CH, HanpHMep, HyTeM 3ΛΘΚΤρ03ρ03Η0ΗΗ0Η OdpadOTKH, CBepJieHHHyjiBTpa3ByKOM, odpadoTKH JiaaepHHM JiynoM huh cBepjreHHa htjioh. - 5 - 222 973HHg H30dpeT6HHJI ΙθΤΟβ Η3ΓΟΤΟΒΗΘΗΚΗ KaifflJULHpHOrO EHCTpyM6HTa PJIX ΘΛΘΚΤρΟΛ-HHX BHBOfiOB ΠΟΗΟΗΗΘΤΟΗ ΗΗ3ΚΘ Ba ΠρΗΜθρθ OCymeCTBJiHHH. 3 pec c M ac 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 CH CH CH CH CH CH CH CH CH CH CH CH CH CH. OC SOCTHTaeTCH ΤΟ, πτο npeocyeMas nojraa 3aroTOBKa nojiynaeT οκβο3ηοθ οτεθροτΗθ. ΠοοΛβ τογο, ksk βθρχηηη naoTB φορΜΗ h hedkhhh ramTa φορΜΗOKpy & eHH BJiaoTiriHoft ooojiohkoh HaHHHaeTCH npoixeoc npeccoBa-HHH. ΠΟΑ BHCOKHM βΗΒΗΘΗΚΘΜ SJíaCTHHHaH OÓOJIOHKa paBHOMepHOcnpeccoBHBaeTCH, b pe3yjn> TaTe nero socTuraeToa BuooKaa ofí-Hopo ^ HocTB cTpyKTypH KamuuLHpHoro HHCTpyMeHTa ftna npucoe-řymeHKS sjíeKTpo / pinx βηβολοβ. Jiθκξμ oópaaoM djiaronpHHTHHe npe ^ nocmiKH jyia η3ΓοτοβλθηηηίαHjnnmpinecKoro KannjuiapHoro oTBepcTHH moscho co3, naTi> yzeΠρΗ φορΜΟΟόρβΒΟΒΒΉΗΗ (b φορΜΘ ΗθρΗΟΒΟΓΟ T OT-BepcTHH). IlocJie οκοηηθηηη npou; ECCA irpeccoBaHHa ΦορμοβοηηθηHima ysajineTCH h, nocjiejíyioiitHM nponeccoM οπθκβηηη evaporating 30BaHHaa τθκημ odpaaoM npeccoBaHHaH saroTOBKa odpadaTHBaeT-CH HanpHMep, Hyte 3ΛΘΚΤρ03ρ03Η0ΗΗ0Η OdpadOTKH, CBepJieHHHyjiBTpa3ByKOM, odpadoTKH JiaaepHHM JiynoM huh cBepjreHHa htjioh. - 5 - 222 973

Enaroflapa nojioaeHHOMy b ocHOBy αηηηογο n3oópeT6HHH MeTosynOBHUiaeTCH TCBíHOCTL φορΜΗ npeCOOBaHHOÍi 3arOTOBKH H COKpa-inaeTOH βρθμη Bcex noojiejxyioinHx padonux onepaiw.Enaroflapa nojioaeHHOMy b ocHOBy αηηηογο n3oópeT6HHH MeTosynOBHUiaeTCH TCBHOCTL φορΜΗ npeCOOBaHHOIi 3arOTOBKH H COKpa-inaeTOH Bcex noojiejxyioinHx padonux onepaiw.

EnaroflapH He3HaHHTejiLHOCTH HapyiuemiH coochocth Kainuump-ηογο OTBepcTna n KOHyca jvih BBOfla προεοποκΗ npn paóoTe cΗ3Γ0Τ0ΒΗΘΗΗΗΜΗ ΤΘΚΗΜ OÓpa3OM HHCTpyMeHTaMH JVIH ΠρΗΟΟθΛΗ-ΗΘΗΗΗ ΒΗΒΟΛΟΒ UpeflOTBpamHIOTCH OTJIOJKeHHH 3 OJI O Ta Πθρθβ KaiDUIJIHPHHM ΟΤΒθρΟΤΗβΜ. · -fc-EnaroflapH He3HaHHTejiLHOCTH HapyiuemiH coochocth Kainuump-ηογο OTBepcTna n KOHyca jvih BBOfla προεοποκΗ npn paóoTe cΗ3Γ0Τ0ΒΗΘΗΗΗΜΗ ΤΘΚΗΜ OÓpa3OM HHCTpyMeHTaMH JVIH ΠρΗΟΟθΛΗ-ΗΘΗΗΗ ΒΗΒΟΛΟΒ UpeflOTBpamHIOTCH OTJIOJKeHHH OJI O 3 Ta Πθρθβ KaiDUIJIHPHHM ΟΤΒθρΟΤΗβΜ. · -Fc-

^opMyjia H30ÓpeTeHHH 222 973 ΜθΤΟβ Η3Γ0Τ0ΒΗΘΗΗΗ ΜΗΚρΟΟΤΒθρΟΤϋίΐ B KaiBUUIflpHHX ΗΗΟΤργΜθΗΤΗΧTax npnOOeflHHeHKH θΛΘΚΤρΟ,ΙξΗΗΧ BUBOflOB, npa KOTOpOM MeTaJDIH-qecKHM nopomoK yimoTHaeTCH BOKpyr φορΜΟΒΟ^Ηοϊΐ htjih, coctoh-meĚ H3 iíHJiHHflpiiqecKoro cTepjKHH c KOHirqecKHM οοτριίθΜ, flajieecneKaeTCH η πγτθΜ 3JieKTpo,3po3HOHHoro cteMa MaTepnazia odpa-óaTHBaeTGH flo odpasoBaHUH Karnuumpa, HeoÓxojyíMoro jyuiΠρΟΤΗΓΗΒΘΉΗΗ ΠρΟΒΟΛΟ^ΗΟΓΟ BHBOfía, OTJIHHaíOímtílCfl ΤΘΜ, HTO BSarOTOBKe C ΠΟΜΟΙξΚΟ 3a$HKCHp0BaHH0fí OCTpneM B HHJKHefi ΙϋΙΗΤβφορΜΗ φορΜΟΒΟΗΗΟΗ HTJUJ H KOHyca OCTpHfl OÓpa3yeTCH CKB03H0eOTBepcTHe, κοτοροβ nocjie cneKaHHH npeccoBaHHOH 33γοτοβκη, hoXOftH,H3 MHHHMaULHOrO flHaMeTpa, ΠγΤΘΜ Η3ΒΘ0ΤΗ0Γ0 ΘΛθΚΤρΟ-sposHOHHoro cteMa MaTepnana ηηοτηήηο sopadaTUBaeTCH floHHJIHimpEraeCKOrO ΜΗΚρΟΟΤΒβρβΤΗΗ. 222 973^ OpMyjia H30ÓpeTeHHH 222973 ΜθΤΟβ Η3Γ0Τ0ΒΗΘΗΗΗ ΜΗΚρΟΟΤΒθρΟΤϋίΐ B KaiBUUIflpHHX ΗΗΟΤργΜθΗΤΗΧTax npnOOeflHHeHKH θΛΘΚΤρΟ, ΙξΗΗΧ BUBOflOB NPA-KOTOpOM MeTaJDIH qecKHM nopomoK yimoTHaeTCH BOKpyr φορΜΟΒΟ ^ Ηοϊΐ htjih, coctoh MEE-C H3 iíHJiHHflpiiqecKoro cTepjKHH KOHirqecKHM οοτριίθΜ, flajieecneKaeTCH η πγτθΜ 3JieKTpo, 3po3HOHHoro reads MaTepnazia odpa- óaTHBaeTGH flo odpasoBaHUH Karnuumpa, HeoÓxojyíMoro jyuiΠρΟΤΗΓΗΒΘΉΗΗ ΠρΟΒΟΛΟ ^ ΗΟΓΟ BHBOfía, OTJIHHaíOímtílCfl ΤΘΜ, HTO BSarOTOBKe C $ ΠΟΜΟΙξΚΟ 3a HKCHp0BaHH0fí OCTpneM B HHJKHefi ΙϋΙΗΤβφορΜΗ φορΜΟΒΟΗΗΟΗ HTJUJ H KOHyca OCTpHfl OÓpa3yeTCH CKB03H0eOTBepcTHe, κοτοροβ nocjie cneKaHHH npeccoBaHHOH 33γοτοβκη, hoXOftH H3 MHHHMaULHOrO flHaMeTpa, ΠγΤΘΜ Η3ΒΘ0ΤΗ0Γ0 ΘΛθΚΤρΟ- sposHOHHoro cteMa MaTepnana ηηοτηήηο sopadaTUBaeTCH floHHJIHimpEraeCKOrO ΜΗΚρΟΟΤΒβρβΤΗΗ. 222 973

AHHOTanag Μ3ΟόρθΤβΗΗΘ KacaeTOH MeTojia η3ΓΟΤοβηθηιιη ΜΜΚρΟΟΤΒβρΟΤΚΜB KanHJUIflpHHX ΜΗΟΤργΜθΗΤΘΧ flJLS ΙΓρΗΟΟβ^ξΗΗθΗΗΗ SJíeKTpOAHUXBUBOflOB, ΙΓρίΓΊβΜ H3 MeTaJUHFíeCKOIO noppimta H3rOTaBJEHBaeTCHnpeccoBaHHaa earoTOBKa HHCTpyMeHTa, npnroflHoro jvlh προτκ-rHBaHHH ΠρΟΒΟΛΟΗΗΟΓΟ BUBOfla.AHHOTanag Μ3ΟόρθΤβΗΗΘ KacaeTOH MeTojia η3ΓΟΤοβηθηιιη ΜΜΚρΟΟΤΒβρΟΤΚΜB KanHJUIflpHHX ΜΗΟΤργΜθΗΤΘΧ flJLS ΙΓρΗΟΟβ ^ ξΗΗθΗΗΗ SJíeKTpOAHUXBUBOflOB, ΙΓρίΓΊβΜ H3 MeTaJUHFíeCKOIO noppimta H3rOTaBJEHBaeTCHnpeccoBaHHaa earoTOBKa HHCTpyMeHTa, npnroflHoro jvlh προτκ-rHBaHHH ΠρΟΒΟΛΟΗΗΟΓΟ BUBOfla.

UeJILIO Η3Ο0ρθΤβΗΗΗ ΗΒΗΗΘΤΟΗ ΠΟΒΗΠΙΘΗΗβ KaseOTBa ΜΗΚρΟΟΤΒβρ-cthě h yjiyHmeHue θκοηομηηηοοτη πρπ Η3Γοτοβλθηηη Karnnmap-HHX HHCTpyMeHTOB ftJIH ΠρΗΟΟβΛΗΗβΗΗΗ ΒΗΒΟβΟΒ. 3auaHefi Η300ρβΤβΗΗΗ ΗΒΠΗβΤΟΗ Η3Γ0Τ0ΒΛβΗΗβ B ΤΘΧΗΗΚβ npec-coBaraiH KarauuiHpHax OTBepcTítíi jsflfi npHooejmHemia bhboaobTaK, HTOÓH npn Η3ΓΟΤΟΒΠβΗΗΗ ΜΗΚρΟΟΤΒβροΤΗίί Ηβ ΙφΗΧΟΛΚΗΟΟΒpadoTaTL co βοθμ MaTepnajioM.UeJILIO Η3Ο0ρθΤβΗΗΗ ΠΟΒΗΠΙΘΗΗβ CaseOTBa ΜΗΚρΟΟΤΒβρ-cthě h yjiyHmeHue θκοηομηηηοοτη πρπ Η3Γοτοβλθηηη Karnnmap-HHX HHCTpyMeHTOB ftJIH ΠρΗΟΟβΛΗΗβΗΗΗ ΒΗΒΟβΟΒ. 3auaHefi Η300ρβΤβΗΗΗβΗβΤΟΗ Η3Γ0Τ0ΒΛβΗΗβ B ΤΘΧΗΗΚβ npec-coBaraiH KarauuiHpHax OTBepcTiit p npHooejmHemia bhboaobTaK, HTOÓH npn Η3ΓΟΤΟΒΠβΗΗΗ ΜΗΚρΟΟΤΒβροΤΗίί Ηβ ΙφΗΧΟΛΚΗΟΟΒpadoTaTL what βοθμ MaTepnajioM.

CorjiacHo H3odpeT6HHD 3Ta 3anana pemaeTca τθμ, hto b 3aro-τοΒκβ $opMyeTca cKBO3Hoe oTBepcTHe, odpa3yeMoe 3a®HKCiapoBaHHOH ΟΟΤΡΗΘΜ B ΗΚΚΗΘΖ ΙΜΗΤβ φορΜΗ φορΜΟΒΟΗΗΟΚ HTJIOÍí H KOHy-•COM OCTpHH, κοτοροβ ΠΟΟΛβ ΟΠβΚΟΗΗΗ 3ar0T0BKH, HCXOřtfl H3ΜΗΗΗΜΘΛΒΗΟΓΟ .DpiaMeTpa, nyTeM Η3Ββ0ΤΗ0Γ0 3ΛβΚΤρθ3ρθ3ΗΟΗΗΟΓΟcteMa MaTepnajia ^acTHHHo AopatíaTHBaeTCH ao uannnnpiraecKororΜΗΚρΟΟΤΒβρβΤΗΗ.CorjiacHo H3odpeT6HHD 3TA 3anana pemaeTca τθμ, HTO-b 3aro τοΒκβ $ opMyeTca cKBO3Hoe oTBepcTHe, odpa3yeMoe 3a®HKCiapoBaHHOH ΟΟΤΡΗΘΜ B ΗΚΚΗΘΖ ΙΜΗΤβ φορΜΗ φορΜΟΒΟΗΗΟΚ HTJIOÍí H KOHy- • COM OCTpHH, κοτοροβ ΠΟΟΛβ ΟΠβΚΟΗΗΗ 3ar0T0BKH, HCXOřtfl H3ΜΗΗΗΜΘΛΒΗΟΓΟ .DpiaMeTpa, rivet Η3Ββ0ΤΗ0Γ0 3ΛβΚΤρθ3ρθ3ΗΟΗΗΟΓΟcteMa MaTepnajia ^ acTHHHo AopatíaTHBaeTCH ao uannnnpiraecKororΜΗΚρΟΟΤΒβρβΤΗΗ.

Claims (1)

-i- PŘEDMĚT VYNÁLEZU 222 973 Způsob zhotovování mlkrootvorů v kapilárních nástrojíchpro připojení elektrodových vývodů, při kterém se kovový prá-šek zhutní kolem tvarovaoí jehly, sestávající z válcovitéhodříku a kónickým hrotem, potom se prášek spéká a elektroero-zívním ubíráním materiálu se opracovává do vytvoření kapiláry,potřebné pro protažení drátového vývodu, vyznačený tím, že se ve výlisku vytvoří pomocí tvarovací jehly, upevněné hrotem vespodní desce formy, a kuželu hrotu průchozí otvor, který se poopékání výlisku zčásti dohotoví ze strany s minimálním průměrem,elektroerozívním ubíráním materiálu do tvaru válcovitého mikro-otvoru· 1 výkres Uznáno vynálezem na základě výsledků expertizy, provedené Úřa-dem pro vynálezeotví a patentnictví, Berlín, DDBACKGROUND OF THE INVENTION 222 973 A method of making a micro-hole in capillary tools for electrode connection, wherein a metal powder is compacted around a forming needle consisting of a cylindrical rod and a conical tip, then the powder is sintered and processed to form an electro-erosive material a capillary required to extend the wire outlet, characterized in that a through hole is formed in the blank by means of a forming needle fixed by the tip of the bottom mold plate and a cone of the tip, which is partially finished from the side with a minimum diameter by electroerosion removal of the material into a cylindrical shape micro-aperture · 1 drawing Recognized by the invention based on the results of expertise made by the Invention and Patent Office, Berlin, DD
CS657179A 1978-10-26 1979-09-27 Method of producing micro-apartures in capillary instruments for connecting electrode outlets CS222973B1 (en)

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DD20867078A DD139402B1 (en) 1978-10-26 1978-10-26 METHOD FOR PRODUCING MICRO-DRILLING IN DUEL-WELL, SAEULEN-OVEN HOLLOW BODIES

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US6302679B1 (en) * 1994-11-10 2001-10-16 Corning Incorporated Honeycomb extrusion die
CN108480653A (en) * 2018-06-29 2018-09-04 中国科学院上海光学精密机械研究所 The device and method of hollow over spherical powder is prepared based on femtosecond laser

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