CS196840B1 - Boat and holder of the substrate of the facility for preparation at least two epitaxial layers by the growth from the liquid phase in a single working operation - Google Patents
Boat and holder of the substrate of the facility for preparation at least two epitaxial layers by the growth from the liquid phase in a single working operation Download PDFInfo
- Publication number
- CS196840B1 CS196840B1 CS748877A CS748877A CS196840B1 CS 196840 B1 CS196840 B1 CS 196840B1 CS 748877 A CS748877 A CS 748877A CS 748877 A CS748877 A CS 748877A CS 196840 B1 CS196840 B1 CS 196840B1
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- Czechoslovakia
- Prior art keywords
- boat
- substrate
- holder
- liquid phase
- preparation
- Prior art date
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- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
Vynález sa týká lodičky a držiaku substrátu zariadenia na přípravu najmenej dvoch epitaxiálnych vrstiev raatom z kvapalnej fázy, v jednom pracovno* procese. RieSi sa přitom konštrukcia lodičky a držiaku substrátu.The invention relates to a boat and a substrate holder for a device for preparing at least two epitaxial layers by liquid phase raids, in a single process. The construction of the boat and the substrate holder is thereby addressed.
Existuje niekoTko metod na přípravu mnohovrstvovýeh epitaxiálnych štruktúr. Najčastejšie sa používá posúvacia metoda. Pri tejto metóde sa lodičkový systém skládá z najmenej dvoch dlhých posúvacich častí doskovitého tvaru.There are several methods for preparing multilayered epitaxial structures. The scroll method is most often used. In this method, the boat system consists of at least two long sliding portions of a plate shape.
Dolná časť je držiakom substrátu, ktorý leží na nej horizontálně. V hornej časti sú otvory pre taveniny. Posúvaním dielov lodičky ea dostávájú rdzne taveniny na substrát, a tým narastajú na ňom pri chladnutí postupné vrstvy 8 rdznym zložením a vlastnosťami. Pri inéj podobnéj metóde ea.namieato doskovitých častí používá lodička a držiak substrátu válcovitého tvaru, ktoré sú položené na sebe. Substrát je umiestnený v držiaku tak, že je na ňom opfiť položený horizontálně. V hornej časti, lodičke, sú otvory pre taveniny, usporiadané do kruhu. Otáčaním lodičky sa rdzne taveniny dostávájú na substrát.The lower part is a substrate holder that lies horizontally on it. At the top there are openings for melt. By shifting the parts of the boat e, the different melts are transferred to the substrate, thereby increasing the successive layers 8 with different compositions and properties upon cooling. In another similar method e.new, these plate-shaped parts use a boat and a substrate holder of cylindrical shape, which are superimposed. The substrate is placed in the holder so that it is supported horizontally on it. In the upper part, the boat, the melt openings are arranged in a circle. By rotating the boat, the various melts reach the substrate.
Nevýhodou spomínaných metod je, že substrát je počas homogenizácie taveniny v blízkosti taveniny, a preto aj na rovnakej teplote. Homogenizácie sa realizuje pri teplotách, pri ktorých dochádza k nežiadúcemu úletu prchavých zložiek zo substrátu. Substrát je v horizontálněj polohe, a preto sa tavenina po skončení epitaxiélneho rastu zle odtřha od substrátu. Na urýchlenie hoao196840 - 2 genizácie taveniny ea s lodičkou mfiže vibrovat. U apomínaných metod to nie je možné, pretože jednotlivé diely lodičkového systému sú na sebe iba volné položené.A disadvantage of these methods is that the substrate is near the melt and therefore at the same temperature during melt homogenization. Homogenization takes place at temperatures at which undesirable volatilization of the volatile components from the substrate occurs. The substrate is in the horizontal position, and therefore, the melt is severed from the substrate after the epitaxial growth is complete. To accelerate hoao196840 - 2 melt genisation ea can be vibrated with the boat. This is not possible with the aforementioned methods, since the individual parts of the boat system are only loosely laid on each other.
Uvedené nedostatky odstraňuje lodička a držiak substrátu zariadenia poidla vynálezu, ktorého podstaita spočívá v tom, že lodička je vytvořená z valčeka, v ktorého čele sú vytvořené otvory tak, že v střede je otvor pre zasunutie tyčky držiaka substrátu. Okolo otvoru sa nachádza jú diery pre zašunutie vodiaceho kolíka a po okraji sú urobené otvory pre taveniny. Držiak substrátu je tvořený tyčkou s vodiacim kolíkom a doskou, na ktorej je upevňovacou doskou a skrutkou s maticou upevněný substrát.The above-mentioned drawbacks are eliminated by the boat and the substrate holder of the inventive device of the invention, the principle being that the boat is formed from a roller in which the apertures are formed so that the hole for inserting the rod of the substrate holder is in the center. Around the opening there are holes for inserting the guide pin, and holes for the melt are made along the edge. The substrate holder is formed by a rod with a guide pin and a plate on which the substrate is fastened by a fastening plate and a nut bolt.
Pokrok vynálezu je predovšetkým v tom, že lodička a držiak substrátu zariadenia umožňujú přípravu najmenej dvoch epitaziálnych vrstiev v jednom praoovnom procese, pričom sa nevyskytujú uvedené nedostatky.In particular, the invention is progressing in that the boat and substrate holder of the device allow the preparation of at least two epithasial layers in a single process, without the aforementioned drawbacks.
Na připojených výkresoch je znázorněná lodička a držiak substrátu zariadenia podía vynálezu. Na obr. 1 je bočný pohlaď na lodičku a držiak substrátu v polohe před epitaxiálnym rastem. Na obr. 2 je pOdorys lodičky.The boat and substrate holder of the device according to the invention are shown in the attached drawings. In FIG. 1 is a side view of the boat and substrate holder at a position prior to epitaxial growth. In FIG. 2 is a plan view of the boat.
Lodičku g tvoří valček,v ktorého čele eú vyrobené otvory g pre taveniny· Otvory eú usporiadané do kruhu a lob počet sa dá zhotovit podía velkosti valčeka. V střede valčeka je otvor g pre zaaunutie tyčky 10 držiaku £ substrátu. Ďalej eú vo valčeku diery g pre zaaunutie vodiaceho kolíka £· Držiak 2. substrátu sa skládá z tyčky 10. na ktorej je pritavený vodiaci kolík £ a doska J. Substrát 11 je pridržiavaný v zvislej polohe doskou 2 a upevňovacou doskou £ a skrutkou a maticou g.The boat g is formed by a roller in which the melt openings g for eu are produced. The eu openings are arranged in a circle and the lob number can be made according to the size of the roller. In the center of the roller there is an opening g for receiving the rod 10 of the substrate holder 6. The substrate holder 2 comprises a rod 10 on which the guide pin 8 and the plate J are welded. The substrate 11 is held in a vertical position by the plate 2 and the fastening plate 8 and the screw and nut. g.
Možnost využitie vynálezu je pri príprave anohovrstvových polovodičových štruktúr.The possibility of using the invention is in the preparation of anoholded semiconductor structures.
Claims (2)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS748877A CS196840B1 (en) | 1977-11-15 | 1977-11-15 | Boat and holder of the substrate of the facility for preparation at least two epitaxial layers by the growth from the liquid phase in a single working operation |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CS748877A CS196840B1 (en) | 1977-11-15 | 1977-11-15 | Boat and holder of the substrate of the facility for preparation at least two epitaxial layers by the growth from the liquid phase in a single working operation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CS196840B1 true CS196840B1 (en) | 1980-04-30 |
Family
ID=5424096
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CS748877A CS196840B1 (en) | 1977-11-15 | 1977-11-15 | Boat and holder of the substrate of the facility for preparation at least two epitaxial layers by the growth from the liquid phase in a single working operation |
Country Status (1)
| Country | Link |
|---|---|
| CS (1) | CS196840B1 (en) |
-
1977
- 1977-11-15 CS CS748877A patent/CS196840B1/en unknown
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