CN85106881A - Electrostatic binary switching and storage arrangement - Google Patents

Electrostatic binary switching and storage arrangement Download PDF

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Publication number
CN85106881A
CN85106881A CN198585106881A CN85106881A CN85106881A CN 85106881 A CN85106881 A CN 85106881A CN 198585106881 A CN198585106881 A CN 198585106881A CN 85106881 A CN85106881 A CN 85106881A CN 85106881 A CN85106881 A CN 85106881A
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China
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row
array
electrode
parts
storage arrangement
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CN198585106881A
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Chinese (zh)
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乔治·R·辛普森
赫伯特·W·沙利文
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Priority claimed from US06/683,619 external-priority patent/US4736202A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
    • G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
    • G11C11/24—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using capacitors
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C17/00—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards
    • G11C17/04—Read-only memories programmable only once; Semi-permanent stores, e.g. manually-replaceable information cards using capacitive elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
    • F05C2225/08—Thermoplastics
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11C—STATIC STORES
    • G11C23/00—Digital stores characterised by movement of mechanical parts to effect storage, e.g. using balls; Storage elements therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H1/00—Contacts
    • H01H1/0036—Switches making use of microelectromechanical systems [MEMS]
    • H01H2001/0063—Switches making use of microelectromechanical systems [MEMS] having electrostatic latches, i.e. the activated position is kept by electrostatic forces other than the activation force
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H2059/009—Electrostatic relays; Electro-adhesion relays using permanently polarised dielectric layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics

Abstract

The electrostatic element array of aligning and being listed as can be used for switching purposes and storage arrangement.Each element can be inhaled moving parts by static, in the time of action, just become a complete capacitor element, make this element can accumulate electric charge.Utilizing high-frequency signal energy sensitivity to go out this element is capacitor element.If replace the parts that to inhale with the figure of a slice conductive area, can also make read-only storage.The parts that these can be inhaled when being moved by suction, also can form capacitor switching device or switch matrix.

Description

Electrostatic binary switching and storage arrangement
The present invention is related to a kind of dynamo-electric two-state device of the Electrostatic Control of using as similar devices such as an array, switch matrix, storeies.This part patented claim is the continuation part of our following several applications: U. S. application string numbers 642,752, title " electrostatically actuated two-state device array ", August 21 1984 date of application; U. S. application string numbers 642,997, title " electrostatically actuated two-state device array and manufacture method thereof ", August 21 1984 date of application; And U. S. application string numbers 642,996, title " electrostatically actuated binary shutter devices array ", August 21 1984 date of application.
The example that many static display elements are arranged in the prior art.For example United States Patent (USP) 1,984,683 and 3,553, a class device of explanation in 364 comprises a kind ofly having and the light valve that enters the cover plate that light parallels, and each cover plate can be controlled with electrostatic methods,, all be to make cover plate on the approach of light, change an oblique angle no matter for the demonstration of mode transmission or for the demonstration of reflection-type.At United States Patent (USP) 3,897, in 997, revealed a kind of electrode, it is to wrap on another curved fixed electorde with electrostatic methods, so that influence the reflective character of fixed electorde.Also has a kind of prior art, for example be loaded on electronics magazine (Elec-tronics) the 78-83 page or leaf of publishing on Dec 7th, 1970 and reveal communique (IBM Technical Disclosure Bulletin) Vol.13 with ibm technology, No.3, on in August, 1970 number, this technology adopts an electron gun, a part of deformable material of selecting is charged on static, thereby change its light-transfer characteristic or reflection characteristic.
From more following United States Patent (USP)s, also can obtain to be used to show other explanations in the Electrostatic Control element field of purpose:
People such as 4,336,536 Kalt
4，266，339 Kalt
People such as 4,234,245 Toda
People such as 4,229,075 Ueda
People such as 4,208,103 Kalt
People such as 4,160,583 Ueda
4，160，582 Yasuo
4，105，294 Peck
4，094，590 Kalt
People such as 4,065,677 Micheron
3，989，357 Kalt
3，897，997 Kalt
888，241 Kuhlmann
The present invention is that the material of being revealed from people's such as the United States Patent (USP) 4,248,501 of Simpson and Simpson United States Patent (USP) 4,235,522 sets out.
In some background materials, interested also have:
W.R.Aiken："An Electrostatic Sign-The Distec System"，Society for Information Display，June 1972，PP.108-9;
J.L.Bruneel et al: " Optical Display Device Using Bistable Elements ", Applied Physics Letters, Vol.30, No.8,15 April 1977, PP.382-3; And
R.T.Gallagher："Microshutter Flip to Form Charac-ters in Dot-Matrix Display"，Electronics，14 July 1983，PP.81-2.
The invention provides out a kind of electrostatic equipment that can be used in storer, switch matrix and the similar devices.This device is got the form of electrostatic binary element arrays, and each binary element has several electrode districts so that be connected into row and column, in the time of visiting location to certain particular element, can be at this row this list and apply driving voltage, change the state of this element with electrostatic methods.In the time of action, this element has formed a capacitor.Utilize high-frequency signal or pulse signal can determine which element to work,, just can " read " state of this array according to the whether existence of electric capacity as capacitor.This of element changes to the ability of noncapacitive device state from the capacitor state, and they can be used as switching device in array, can provide a signal pulse when action.This switch matrix or array can be used to control the another one array.
The United States Patent (USP) 4,248,501 of Simpson, people's such as Simpson United States Patent (USP) 4,235,522 and people's U. S. application string such as Simpson numbers 642,752, string numbers 642,997 and string numbers 642,996 once shown the electrostatically actuated binary element of many kinds, wherein all utilize the suitable energising on the electrode, order about the flexible cover plate of a slice, curling sheet or shutter, rest on the position or a kind of state in two positions or the two states.These patents have been revealed the column array of being made up of this binary element, and wherein each element can both be visited the location separately and be changed its state, so that for example use in letter-numeral shows.The various elements of revealing in above patent and application all are suitable for the present invention and use as binary element, so this several patents here all as a reference.The present invention illustrates and has described a kind of suitable popularizing form of the electrostatic binary element that the specific utility model described in revealing by above arbitrary realizes out.
The simple declaration of accompanying drawing
Fig. 1 is the skeleton view that is applicable to binary element of the present invention.
Fig. 2 is the simple expression of binary element array.
Fig. 3 is the skeleton view of the another kind of utility model of binary element.
Fig. 4 is explanation removes to control a main array with two switch arrays a sketch.
Fig. 5 is the diagrammatic sectional view that is suitable for as the binary element of capacitance switch element use.
Fig. 6 is the diagrammatic sectional view of the another kind of utility model of a binary element.
Fig. 7 is the electrical schematic diagram that adopts a capacitor storage of binary element of the present invention.
Fig. 1 is the simple expression of the single bifurcation electrostatic element 10 simplified, its useful V font gap separates on stator 11 X, Y and locking or maintenance (HD) electrode, and one can be inhaled moving cover plate 12, the form that the cover plate among the figure is expressed as curling by static.To the energising of X electrode district, will cause that the part of cover plate 12 is stretched.To Y electrode district energising, will cause further and stretch, again to lock room HD energising, cover plate 12 will not be curled or stretch fully.Can remove the driving voltage on X and the Y electrode district this moment, keeps energising as long as locking electrode HD goes up, and cover plate stretches maintenance.
6 * 9 little element arrays 20 that Fig. 2 is made up of 54 binary elements or pixel have in these elements and severally move, and have formed a visual letter, under the situation of Fig. 2, have shown numeral " 6 ".Selected element makes it action by following way, and promptly X and the Y electrode district to certain particular address place element in the array applies driving voltage.Each all X district of row all is connected together on electric, and is connected to an X input end (lead-in wire 14) of this row.Each is listed as all Y districts and all is connected together on electric, and is connected to a Y input end (lead-in wire 16) of these row.So, in order to form the left side of numeral " 6 ", row input lead Y1 and all energisings successively of row input lead X1 to X10.Equally, form the right of this numeral, row input lead Y6 and row input lead X1 to X5 and X9 be energising successively.Each has been changed its state by the element of addressing or pixel, and owing to all led to electricity with locking electrode HD all in 18 pairs of arrays of input lead, so all be locked in the state after that change.Each pixel 10 has a discrete address, X9 for example, Y6.Therefore,, add 1 maintenance input again, need carry out Kai Heguan always have 16 inputs be exactly 9 X inputs of required external switch device and number of leads add 6 Y inputs for the little array of control chart 2.
The number of controlling 389,376 pixels required X, Y input lead or external switch device in one 576 * 676 array is 1252 and adds and keep input.For an array, the number of switching device is provided by following formula:
S = d N d
Wherein S is the number of required switch minimum, and N is a number of picture elements, and d is the mathematics dimension of array, for example for X, Y array d=2, for X, Y, Z array d=3.In above two-dimensional array, S=2 389,376 2 =1248 external switch devices.
In order to reduce the required external switch device count of array of controls, a way is the dimension that increases array.If X, Y array are considered to bidimensional, then X, Y, Z array are exactly cubical array.Fig. 3 represent one with the similar binary element 30 of Fig. 1 element 10, but it has a Z electrode district and goes between 17.The Z electrode district of a set of pieces all is connected together in the array.In Fig. 2, express 6 Z groups (Z1 to Z6), they are 6 groups that with dashed lines crosses, every group of 9 pixels.The address of certain particular element is an example with element 10, will be (X9, Y6, Z2).For the cubical array of 398,376 pixels, the number of external switch device will be S=3 389,376 3 =220, almost be the as much pixel the two-dimensional array requisite number 1/5th.
For array that a large amount of elements or pixel are arranged of control, the another kind of method that reduce required external switch device count is respectively to utilize switch arrays again in the X lead-in wire front of cell array and Y lead-in wire front.Fig. 4 is a sketch, has shown an array 90 that 576 * 676 pixels are for example arranged, and it has 92 and 676 Y lead-in wires 91 of 576 X lead-in wires, is total up to 1252 lead-in wires.Switch arrays 94 that are used for the X lead-in wire and the switch arrays 97 that are used for the Y lead-in wire have also been shown among the figure.In order to control this 576 lead-in wires, switch arrays 94 need 2 576 2 Article=48, lead-in wire, the latter can be distributed into 24 "A" pins 95 and 24 "B" pins 96.Equally, 676 Y lead-in wires can be controlled with Y switch arrays 97, and the latter has 2 676 2 Article=52, lead-in wire is distributed into 26 "C" pins 98 and 26 " D " lead-in wire 99.Utilized switch arrays, the required outside lead number of external switch just becomes the 48+52=100 bar, rather than 1252.
When a certain particular pixels is visited the location, be made as X=250, Y=330 only needs X switch arrays suitable A lead-in wire and B lead-in wire are visited the location, and Y switch arrays suitable C line and D lead-in wire is visited the location.The address of selected pixel (X=250, Y=330) become now ((A, B), (C, D)), wherein A, B, C, D are the variablees that matrix determined by X and Y switch arrays.
A large amount of minimizings of outside lead number (in this example, replace 1252 be 100), also significantly reduced the hardware cost of controlling a big quantity array.But owing to two switch arrays must respond before the cell array action, so total speed of response is to have slowed down.
Fig. 5 is a sketch, expresses electrostatically actuated element and how can be adapted to X and Y switch arrays 94 and 97 as the capacitance switch device.Because these switching devices all are a little and the similar electrostatic element of pixel element, so they can be when forming display element, with same photetching or printing technology, for example the edge at pixel array of display 90 forms.X and Y lead-in wire from array of display is drawn can directly connect with X and Y switch arrays, and form as the part in photetching or the printing process.Therefore, need outwards to connect De Only be some only a fews X and Y switch arrays are visited the lead-in wire that the location is used.
The sketch of Fig. 5 is expressed a pixel 110 of X switch arrays and a pixel 112 of Y switch arrays.The pixel of these two X and Y switch arrays needs not be visual display element, but should be electrostatically actuated capacitance switch element.Can be inhaled rolled state and each conduction region A, the X that moving cover plate 10X and 10Y with dashed lines are represented them by static with them nWith C, Y nCome their action of association or straight configuration.Stator 20X and 20Y respectively have conduction region COMX, B, COMX and COMY, D, COMY.
Two common electrode area COMX of stator are connected together, and two public area COMY also are connected together, and are connected to AC power.To the suitable row supply alternating current of X switch arrays 94, be exactly to all cover plate 10X of this row and the energising of A district, to suitable row supply alternating current, exactly this is listed as the B district energising of all stators.In this example, the position is exactly the pixel 110 that draws in the capacitance switch pixel supposition of this row infall of this row.It is the pixel of unique action in the X switch arrays, after the action, and electrode district X nBecome electrical capacitive charge, thereby produced the X of delegation that an output signal goes to drive required driving in the array of display 90 nEqually, after capacitance switch pixel 112 actions of Y switch arrays 97, also can be from electrode Y nThe place provides the selected row Y that a drive signal removes to drive array of display n
Drive signal X n, Y n(being the output of X and Y switch arrays) and deposit and will cause the action of target pixel in the array of display.Therefore, to X switch pixel 110(A, visit location B) and to Y switch pixel 112(C, visit location D) is exactly to display element X n, Y nThe visit location, wherein A, B, C, D are the address component of representing two selected row of switch arrays and row, thereby have represented the absolute address component of this big array of display target pixel.In this way, the quantity of the required external switch device of control array of display can significantly reduce, as above to Fig. 4 said.
Switch arrays also can continue to come the chain connection with switch arrays, can also continue to reduce the quantity of outside lead like this.This technology obtains adopting when number of pixels increases in array of display.For example, the large tracts of land array of display that the three primary colors group of pixels is arranged can be made a flat TV screen as thin as a wafer of not limitting size.The quantity of three primary colors group of pixels is also restricted, but this restriction is not owing to technology, but is limited to the standard of broadcast singal.Switch arrays on the chain connection edge can be connected to signal generator, television receiver or video recorder with a cable according to the lead of actual quantity.
Adopt three-dimensional or multi-dimension array also can reduce lead-in wire, wherein each element have X, Y, Z ... N drives each electrode district of input.Please see our United States Patent (USP) 4,235,522, hurdle 6 and following content thereof.The combination of capacitive switch array and mathematics three-dimensional or multi-dimension array more can significantly reduce required outside lead and separating component.Utilize three bidimensional switch arrays to remove to drive a cubical array, be equivalent to one 6 dimension array.Therefore, for 100 required lead-in wires of array of former said 389,376 pixels,, so just can control (100/6) if adopt this combination technique to make one 6 dimension array 6Promptly surpass 21,000,000 pixels.
Fig. 6 is the diagrammatic sectional view with the similar binary element 60 of Fig. 1 and Fig. 3 element, wherein mobilizable electrode 12 is the form of the curling sheet of a slice, and can be become by electrostatic attraction and curl or straight configuration and spreading out on stator 11, stator 11 is made by insulating material, has several stator electrode districts COM, HD, X, Y, Z and HD.Cover plate 12 dots its rolled state, represents its straight configuration with solid line.It has a conductive surface at least, for example can plate one deck hydatogenesis aluminium on poly-terephalic acid glycol ester (Polyetbylehe terephthalate) film.This layer conducting surface directly do not electrically connect, and is freely to float on electric.Between the several electrodes district of stator, apply current potential, can visit this element, and make it to move straight configuration.After stretching, the continuation energising that utilizes locking or keep electrode district HD can make cover plate 12 be locked in and stretch or operating state.After stretching, the driving current potential that is added on X, Y and the Z electrode can remove.Utilize suitable electrode switch in proper order also can make it to become rolled state to the selected cover plate that stretches, these were all said in our patented claim string numbers 642,752.
The losing of memory contents when preventing power interruption, locking or keep electrode HD to make with electret.Electret promptly is to resemble a kind of material that poly-terephalic acid glycol ester wherein can forever keep static charge.On the purpose of action, the conductive electrode district of locking or maintenance electrode allows to be replaced by the permanent charge of electret.When not having power supply, the locking action of electret will maintain the state of each element.
The theme that we reveal to this is lockable gating element array of a kind of bifurcation or gating element field in essence, these gating elements or curling or stretch, perhaps reflection ray or do not reflect, an or aperture or be not.This array also can use as storer in computing machine.By program, the element that a part is chosen makes it to stretch, and other element still is to curl, and it is exactly a storer like this.
When cover plate, curl sheet or shutter action takes place and are spread out after on the stator electrode, binary element is just like a capacitor, because this is every one deck medium between the electrode district of parallel flat usually.Can make the action of some elements and make other element arrays of being failure to actuate to be used as storer to it to use.In order to read this storer, each element makes it to spread out with a driving in proper order in the array, if this element can be spread out.In order to determine whether this element is spread out on stator, can add a signal pulse on the electrode of this element, connects a signal detector simultaneously on another electrode of this element.If the stator of this element is lived by topped,, but have only stator this capacitive coupling just to be arranged by topped element of living because capacitive coupling can detect this signal.
Fig. 7 is an array of 64 elements, is arranged to 4 * 4 * three-dimensional X, Y, Z array.For the sake of clarity, only draw X, Y and Z electrode district.Floating conductor or cover plate 12 dot in upper left corner element 60, the address of this element be (X1, Y1, Z1).
The fact that Only has an element 60 to move can come to determine like this, promptly need high-frequency signal that an energy opens or closes in the arbitrary position of Z1 to Z4 or impulse source 75, first signal transducer 76 that energy opens or closes in the arbitrary position of Y1 to Y4, and the secondary signal sensor 77 that energy opens or closes in the arbitrary position of X1 to X4.Venerate when the switch of signal source 75 is invested the Z1 position and will run into a capacitor (element 60).And venerate when the switch of sensor 76,77 is respectively invested Y1 and X1, this signal will be capacitively coupled to Y1 and be coupled to X1 and just detected by sensor 76,77.So, the fact of can detecting element 60 having moved, and confirm the address be (X1, Y1, Z1).
In the sort memory array, information is whether to become capacitor according to the capable element with each infall of row of array to store.Can not measure the analogue value of electric charge, that can only know bifurcation has or does not have.Therefore, this just provides a kind of reliable and stable storer, and it is insensitive to electrical noise or random signal, does not also have the frequency band problem.
The manufacturing of Fig. 7 array can change after printed with photetching or printing technology on which floor base plate mould.The lead wire of conductor of each electrode district can be arranged in the plane, avoids unwanted X-bracing.Lead-in wire at an electrode district passes the place that another electrode district goes between, and can arrange that another one is connected to the conductive plane of ground wire, allows it play the shielding buffer action, prevents that train of signal is in the lead-in wire that should not connect.Thisly seem that very complicated circuit can resolve into " handicraft " of which floor printing or photetching, cost is reduced.Venerate the array that to make hundreds thousand of elements on the area that several centimeter square are arranged at one.Therefore the quantity of connection of the not only cost of array very low (venerate on film and print), and outside and switching device seldom also reduced the resulting cost of computing machine or other application hardware.

Claims (20)

1, a kind of storage arrangement, it is characterized in that it is aligned by electrostatically actuated binary element and the array of row is formed, each element can be independent of other element in the array and single movement, each element is venerated after action and could be worked as capacitor, therefore, whether every row and every row infall have electric capacity to exist, and can reflect the information of being deposited in the storer.
2, the storage arrangement of claim 1, it is characterized in that each electrostatically actuated element, comprise that a fixed subcomponent and one can be inhaled moving and parts that have a conductive surface at least by static, this fixed subcomponent and this can be inhaled moving parts all several electrode districts, can be inhaled moving parts and can spread out on fixed subcomponent after the action, but have a dielectric material that they are separated therebetween.
3, the storage arrangement of claim 2 is characterized in that can be inhaled moving parts by static is the flexible cover plates of a slice.
4, the storage arrangement of claim 3, the cover plate that it is characterized in that have the permanent mechanical bias power of leaving this fixed subcomponent tendency.
5, the storage arrangement of claim 4, the cover plate that it is characterized in that is biased to rolled state when being failure to actuate.
6, the storage arrangement of claim 1, what it is characterized in that each electrostatically actuated binary element comprises that a fixed subcomponent with several electrode districts and one has at least one conducting surface can be inhaled moving parts by static, this can be inhaled moving parts on the electrode district of just spreading out after the action at fixed subcomponent, but has a dielectric material that they are separated therebetween.
7, claim 1 or 6 storage arrangement, the first region that it is characterized in that every each element of row of this array all is connected together, and be connected to an input lead of this row, second electrode district of every each element of row of array all is connected together, and is connected to an input lead of these row.
8, the storage arrangement of claim 7 is characterized in that the third electrode district of each element of a set of pieces in array all is connected together, and is connected to an input lead of this group.
9, a kind of storage arrangement, it is characterized in that it is aligned by electrostatically actuated binary element and the array of row is formed, each element comprises that one can be inhaled moving and parts that have a conductive surface at least by static, and fixed subcomponent that several electrode districts are arranged, this can be inhaled moving parts and just spread out on fixed subcomponent after the action, but have a dielectric material that they are separated therebetween, thereby this element can use as the element of capacitor storage.
10, a kind of method of operating of memory storage, it is characterized in that this device is aligned by electrostatically actuated binary element and the array of row is formed, each element comprises that one can be inhaled moving and parts that have a conductive surface at least by static, and fixed subcomponent that several electrode districts are arranged, this can be inhaled moving parts and just spread out on fixed subcomponent after the action, but have a dielectric material that they are separated therebetween, this method comprises the following steps:
A, in the time of will making in the array action of selected element, must apply current potential to the electrode district of this element, the parts that can inhale a slice by static are drawn to and are topped on fixed subcomponent,
B, use a electrode district to send the method for a signal pulse to determine whether this element moves to this element, and
C, signal transducer is connected to the other electrode district of this element, that comes transducing signal thus exists ， Only when this can inhale dynamic component and on electric capacity this two electrode district is coupled together, and could sensing go out this signal.
11, a kind of method of reading the storer of forming by bifurcation capacity cell array on electric, it is characterized in that having in the included step of this method a step is that an element is sent a signal pulse, and the method that whether exists with this signal of detection determines whether this element is in the electric capacity state then.
12, a kind of memory storage, it is characterized in that it is embarked on journey by element rows and the array of row is formed, each element has the first region and second electrode district at least in the array, the first region of each element all is connected together and is connected to an input lead of these row in array one row, second electrode district of each element all is connected together and is connected to an input lead of this row in the array delegation, first and second electrode districts of each element all have dielectric material that one cube electrode area of they and this element is separated, may be stamped conductive material on this electrode area, for each element, exist on the electrode area and do not exist conductive material that this element is worked with memory component the samely.
13, the storage arrangement of claim 12 is characterized in that the conductive material on the electrode area is can be inhaled moving conductive component by static by a slice to constitute.
14, a kind of two-state device is characterized in that it comprises:
One each element moves when the infall of driving voltage at this element place of the driving voltage of this row and these row exists jointly by align main array with row of binary element,
The driving voltage of each row of main array is controlled by one first binary element switch arrays, each element of first switch arrays is just to move when there are the driving voltage of the driving voltage of this row and these row jointly in the first switch arrays element be expert at and row infall
Driving voltage of each row of main array is controlled by one second binary element switch arrays, and each element of second switch array is just to move when there are the driving voltage of the driving voltage of this row and these row jointly in second switch array element be expert at and row infall.
15, the device of claim 14, the still need coexistence of additional one the 3rd driving voltage of the action that it is characterized in that main array element, this the 3rd driving voltage is controlled by one the 3rd switch arrays of binary element, and each element of the 3rd switch arrays is just to move when there are the driving voltage of the driving voltage of this row and these row jointly in the 3rd switch arrays element be expert at and row infall.
16, claim 14 or 15 device, it is characterized in that the element of main array and the element of switch arrays, it all is electrostatically actuated binary element, each element comprises that a fixed subcomponent, one can be inhaled moving parts and several electrode districts by static, these electrode districts will be when switching on electrostatic attraction these parts that can inhale.
17, the device of claim 16, the element that it is characterized in that switch arrays comprises a fixed subcomponent and the cover plate parts with several electrode districts with several electrode districts, to wherein some electrode district energising, cover plate is spread out on fixed subcomponent, thereby form a capacitor, will have a drive signal to send into main array by this capacitor.
18, a kind of electrostatically actuated capacitance switch element, it is characterized in that it comprises that a fixed subcomponent with several electrode districts and one can be inhaled moving and parts that have a conductive surface at least by static, to wherein some electrode district energising, the parts that can enable to inhale are spread out on fixed subcomponent, but to there be dielectric material separately between the electrode district of these two parts, so this element has formed a capacitor when action.
19, a kind of storage arrangement, it is characterized in that it is embarked on journey by element rows and the array of row is formed, each element has several electrode districts, these electrode districts have been formed a side of capacitor element, an and cube electrode area, this cube electrode area is topped to be made it to separate with electrode district by this layer dielectric material on one deck dielectric material and just, if have the opposite side just formed capacitor element, exist or do not exist complete capacitor element just to determine the state of this element in this array in the electrode area by conductive material.
20, a kind of storage arrangement is characterized in that it is embarked on journey by the element rows that can become capacitor element and the array of row is formed, and whether the state of each element will become capacitor element by this element and decide in the array.
CN198585106881A 1984-12-19 1985-09-12 Electrostatic binary switching and storage arrangement Pending CN85106881A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
USUSSN683,619 1984-12-19
US06/683,619 US4736202A (en) 1984-08-21 1984-12-19 Electrostatic binary switching and memory devices

Publications (1)

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CN85106881A true CN85106881A (en) 1986-06-10

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Application Number Title Priority Date Filing Date
CN198585106881A Pending CN85106881A (en) 1984-12-19 1985-09-12 Electrostatic binary switching and storage arrangement

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EP (1) EP0205450A1 (en)
JP (1) JPS62501172A (en)
CN (1) CN85106881A (en)
WO (1) WO1986003879A1 (en)

Cited By (1)

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CN114273251A (en) * 2021-11-12 2022-04-05 国网浙江省电力有限公司衢州供电公司 Sorting equipment for old electric energy meters

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Publication number Priority date Publication date Assignee Title
CH670914A5 (en) * 1986-09-10 1989-07-14 Landis & Gyr Ag
DE102004010150B9 (en) * 2004-02-27 2012-01-26 Eads Deutschland Gmbh High-frequency MEMS switch with bent switching element and method for its production

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US4235522A (en) * 1978-06-16 1980-11-25 Bos-Knox, Ltd. Light control device
US4402062A (en) * 1981-05-14 1983-08-30 Batchelder J Samuel Method and apparatus for dielectrophoretic storage and retrieval of information

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114273251A (en) * 2021-11-12 2022-04-05 国网浙江省电力有限公司衢州供电公司 Sorting equipment for old electric energy meters
CN114273251B (en) * 2021-11-12 2023-10-03 国网浙江省电力有限公司衢州供电公司 Old meter sorting equipment of electric energy meter

Also Published As

Publication number Publication date
JPS62501172A (en) 1987-05-07
WO1986003879A1 (en) 1986-07-03
EP0205450A1 (en) 1986-12-30

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