CN85106884A - Electrostatically actuated binary shutter devices array<del/ 〉 - Google Patents

Electrostatically actuated binary shutter devices array<del/ 〉 Download PDF

Info

Publication number
CN85106884A
CN85106884A CN 85106884 CN85106884A CN85106884A CN 85106884 A CN85106884 A CN 85106884A CN 85106884 CN85106884 CN 85106884 CN 85106884 A CN85106884 A CN 85106884A CN 85106884 A CN85106884 A CN 85106884A
Authority
CN
China
Prior art keywords
shutter
electrode
stator
binary element
shutter part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 85106884
Other languages
Chinese (zh)
Inventor
乔治·R·辛普森
赫伯特·W·沙利文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to CN 85106884 priority Critical patent/CN85106884A/en
Publication of CN85106884A publication Critical patent/CN85106884A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

Electrostatically actuated two-state device array has and can be inhaled moving cover plate or shutter so that the change state by static.Each device can adopt a plurality of parallel shutters.Each device has a plurality of electrode districts, can carry out the address visit of X, Y to this device, also has some electrodes to be used for down to lock this device at operating state.

Description

Electrostatically actuated binary shutter devices array<del/ 〉
The present invention is related to a kind of dynamo-electric two-state device of the Electrostatic Control of using as an array in visual demonstration, switch matrix, storer and similar devices.
The example that many static display elements are arranged in the prior art.For example United States Patent (USP) 1,984,683 and 3,553, a class device of explanation in 364 comprises a kind ofly having and the light valve that enters the cover plate that light parallels, and each cover plate can be controlled with electrostatic methods,, all be to make cover plate on the approach of light, change an oblique angle no matter for the demonstration of mode transmission or for the demonstration of reflection-type.At United States Patent (USP) 3,897, in 997, revealed a kind of electrode, it is to wrap on another curved fixed electorde with electrostatic methods, so that influence the reflective character of fixed electorde.Also has a kind of prior art, for example be loaded on electronics magazine (Electronics) the 78-83 page or leaf of publishing on Dec 7th, 1970 and reveal communique (IBM Techical Disclosure Bulletin) Vol.13 with ibm technology, № .3, on in August, 1970 number, this technology adopts an electron gun, a part of deformable material of selecting is charged on static, thereby change its light-transfer characteristic or reflection characteristic.
From more following United States Patent (USP)s, also can obtain to be used to show other explanations in the Electrostatic Control element field of purpose:
People such as 4,336,536 Kalt
4,266,339 Kalt
People such as 4,234,245 Toda
People such as 4,229,075 Ueda
People such as 4,208,103 Kalt
People such as 4,160,583 Ueda
4,160,582 Yasuo
4,105,294 Peck
4,094,590 Kalt
People such as 4,065,677 Micheron
3,989,357 Kalt
3,897,997 Kalt
888,241 Kuhlmann
The present invention is that the material of being revealed from people's such as the United States Patent (USP) 4,248,501 of Simpson and Simpson United States Patent (USP) 4,235,522 sets out, and these two patents here in the lump as a reference.
In some background materials, interested also have:
W.R.Aiken:"An Electrostatic Sign-The Distec System",Society for Information Display,June 1972,PP.108-9;
J.L.Bruneel et al: " Optical Display Device Using Bistable Elements ", Applied Physics Letters, Vol.30, No.8,15 April 1977, PP.382-3; And
R.T.Gallagher:"Microshutters Flip to Form Charac-ters in Dot-Matrix Display",Electronics 14 July 1983,PP.81-2.
This part is applied in theme in essence, and is relevant with our U.S. Patent application string just on the docket numbers 642,752,642,997 and 683,619.Revealing here also in the lump as a reference of these three applications.
The invention provides a kind of dynamo-electric two-state device that is used for the Electrostatic Control of array of display, switch arrays, storer and similar device.This part invention will illustrate that wherein each element in the array can both be controlled separately from the application of visual demonstration, so can produce various visual demonstrations, comprises that the alphanumeric of black and white and polychrome shows and the image demonstration.
A display element of the present invention (pixel) has two parallel alternate stators up and down, fixed electorde is all arranged on the every stator, and one between wherein hinged movable cover plate or shutter, and this cover plate or shutter can be by Electrostatic Control on the primary importance that is parallel to the stator usually or common second places perpendicular to stator.In the utility model that the present invention recommends, stator has the flat surface perpendicular to the light approach, also has a hinged cover plate or shutter, the latter can with Electrostatic Control perpendicular to or be parallel on the position of light approach.This display element can be controlled the transmission of light, and perhaps the light reflex device can influence the reflection of light characteristic.It can for example use as letter-digital indicator in clock and watch and calculator application.It is two states or bifurcation.It can be locked in arbitrary state.
Display element of the present invention or pixel all have the electrode district of several conductions, in order that can visit location and locking to single pixel.When they are used as cell array, have a conduction region to be designated as the X electrode, another conduction region is designated as the Y electrode.X electrodes all in the delegation all are connected together, and all Y electrodes also all are connected together in the row.When changing state, can make that pixel action of this row and this row intersection.Also have an electrode district, be referred to as to keep electrode district, be used for that X and Y electrode lock the pixel that this moved after cutting off the power supply under operating state.
Can produce the array that a kind of wherein each pixel that little pixel of a myriad of or binary element arranged can both independently be visited the location, utilized many known technology in the production, for example selectively deposition technique, photetching technology, with direct printing technology of electrically conductive ink or the like.In our U.S. Patent application string just on the docket numbers 642,997, revealed a kind of manufacture method.
The simple declaration of accompanying drawing
Fig. 1 is the face upwarding section that the line segment I-I along Fig. 2 is got, and it has represented a part of array according to display element of the present invention.
Fig. 2 is a part of planimetric map according to the display component array of Fig. 1.
Fig. 3 is the skeleton view of the another kind of utility model of display element of the present invention.
Fig. 4 is the skeleton view of a part of array of the another kind of utility model display element of explanation the present invention.
Fig. 5 is the planimetric map of a part of array of the another kind of utility model display element of explanation the present invention.
Fig. 6 is the face upwarding section of the display element of another kind of utility model according to the present invention.
Fig. 7 is the face upwarding section of the display element of another utility model according to the present invention.
Fig. 1 and Fig. 2 a part of array that drawn, this is basic a realization of the present invention.On first insulating base 10 of glass or plastics, some conductive strips Y10, Y11, Y12 etc. have been formed.On one second insulating base 12, also form some similar conductive strips X20, X21, X22 etc.These two covers conductive strips are orthogonal.One deck film parallel with base plate 14 arranged between two base plates.Film 14 contains many slits 16 that utilize can make three limits free movable cover plate or shutter 31-39.The four edges of shutter is equipped with Torque force hinge joint.Cover plate or shutter all are arranged in the infall of two cover conductive strips.
Cross-over connection one potential source on conductive strips Y10 and X21, this venerates can be near the infall of these two conductive strips, and promptly shutter 32 places set up electric field.Because any other infall is not all set up electric field in the array, so except that shutter 32, other shutter is not subjected to effect of electric field.If the specific inductive capacity of air is much bigger between the permittivity ratio base plate 10 and 12 of film 14 and shutter 32, then this electric field will have a masterpiece to be used for shutter 32.Because shutter connects with hinge, so it will move along direction of an electric field.Shutter 32 will be opened as the appearance of Fig. 1 and Fig. 2.
If film 14 is opaque, again if base plate 10,12 has one or both, and two have a cover or both in cover X, the Y conductive strips, all be transparent, then the unlatching of shutter 32 will allow light to pass through, perhaps change the reflection of incident ray, this has just changed the apperance by shutter 32 shared elemental areas.Suitably select X and Y conductive strips, just can open some specific shutter, so create letter or other figure that forms by pixel.
Fig. 3 has illustrated a kind of pixel 340 of utility model, big single shutter among Fig. 1 and 2, now replace into several narrow shutter 341-345, the latter hinge reserves after these webs are slotted in film 314 shutter is installed on little twisted strip or web 347.Because each shutter 341-345 is narrow, so compare with the utility model of Fig. 1 and 2, it is just much little to open the required electric field force of shutter.Also be decorated with a part of X conductive strips X320 among Fig. 3.
These shutters can cut out from polymer thin film, and polymer thin film for example has poly-terephalic acid glycol ester (Polyethylene Terephthalate, PET) film of the commercially available MYLAR of being called.The specific inductive capacity of PET film is about 6 to 9, and the specific inductive capacity of this and air differs greatly.Otherwise, that shutter also can be made conduction or conductive coating is arranged, for example can be the PET film that evaporation plating aluminium is arranged on it.No matter be the shutter of high-k or the shutter of conduction, all will redirect to direction along electric field.
Fig. 4 is the skeleton view of a part of cell array, and this is a kind of distortion of Fig. 1 and 2 arrays, has wherein removed the X conductive strips, and the latter's function is replaced by the conductive surface coating on the film 414 that shutter is arranged on it.
Film 414 is PET films that the hydatogenesis aluminium lamination is arranged thereon.Since etching many gaps 452, this film has been divided into many remaining parallel aluminium strip X21, X22 etc.Shutter 432-436 cuts out along these bands, makes shutters all in each X of array row that the connection of electricity all be arranged by aluminium lamination.Y band Y10, Y11 etc. were then with in the past the same, be on base plate 10, form and shutter from a distance, make shutter be convenient to swing.Fig. 4 shows that shutter 432 opening, and this is the result who the conductive strips of conductive strips that comprise row X21 under the shutter 432 and row Y10 is applied current potential.
In the various utility models of Fig. 1 to Fig. 4, when the interviewed location of shutter, it always redirect to direction of an electric field.Closing of shutter then by the recovery bias force of machinery or the spring effect of hinge or tape.This mechanical bias power is opposite with effect of electric field.The shutter supposition of unlatching has an open-angle, and this angle will be recovered determining with joint efforts of bias force by the acting force and the machinery of electric field intensity.
Fig. 5 has shown the figure of a part of conductive strips.This figure can both be suitable for for X in above-mentioned several utility models and Y conductor.Fig. 5 expresses the Y conductor fig.Each all is connected to lead-in wire Y10 electrodes 531,532,533 etc., and when lead-in wire Y10 was connected to potential source, each electrode was all switched on.Equally, electrode 534-536 is connected to Y11, and electrode 537-539 is connected to Y12.Each electrode is all used V font gap and electrode 550 separately among the electrode 531-539, and each electrode 550 all is connected to lead-in wire HD, and each lead-in wire HD is connected together again.Electrode 550 uses as locking.When a certain specific pixel because to the energising of suitable X and Y lead-in wire and during interviewed location, corresponding shutter is just arranged.If lead-in wire HD also switches on, the electrode 550 of so interviewed pixel will make selected shutter be held open, thereby allow X and the outage of Y lead-in wire this moment.This locking ability can make many pixels sequentially visit the location, after the interviewed location of each pixel, just is locked in opening simultaneously.Owing to can create each letter or figure out and pin, so once show one, can show many letters or delegation's letter, can be retained in there simultaneously, behind the voltage that disconnects lead-in wire HD, just wipe.
Fig. 6 is a diagrammatic sectional view, expresses maintenance or locking electrode and the X and the Y electrode of the pixel that shutter 632 cuts out from film 614.Upper plate 610 has X electrode and two locking electrode area LD and LU.Lower shoe 612 has Y electrode and two locking electrode area LD and LU.To this pixel visit before location and after, following locking electrode all is connected to a side of voltage source (being made as (-) negative pole arbitrarily), top locking electrode is connected to the opposite side (being made as (+) positive pole) of voltage source.At this moment shutter 632 still in off position.The X electrode is connected to positive pole, and make some difference to shutter but be very little this moment, is connected to negative pole until the Y electrode, and in the case, shutter 632 is just opened suddenly as shown in the figure.Remove the driving voltage of X and Y, shutter is not had very influence, because there is the locking electrode to continue to be connected to voltage source, shutter will be stayed the unlatching lock-out state.Gaps between electrodes all is the V font, as shown in Figure 5.This can guarantee that the edge of shutter had run into the electric field of next electrode district before leaving last electrode district when opening.
Fig. 7 has shown a kind of utility model, wherein on X, Y and all superincumbent stator 710 of locking (LU) electrode that makes progress.Film 714 comprises many shutters, and for example conductive surface of hydatogenesis aluminium lamination of one deck is arranged.The electrode LD of a locking downwards can stator 712 below on, also can be situated near the film 714 the shutter aperture edge.If this array also can in the opposite direction be visited the location, promptly the shutter of opening is closed selectively, then locking electrode downwards needs.
In order to visit selected shutter, downward locking electrode LD all in the array should cut off the power supply, and promptly are connected to the current potential of shutter.The electrode LU that upwards lock all in the array switch on.Capable and the Y electricity that works to certain specific X then, this will cause that selected shutter (732 among Fig. 7) opens, and when it reaches when upwards locking near the electrode LU, be locked in opening, allow to remove at this moment the driving voltage of X and Y.To downward locking electrode LD energising, can all be locked in closed condition the shutter of closing originally or at the opposite shutter of closing in the location of visiting.
In structure shown in Figure 7, the locked electrode of shutter passes to positive electrical and is locked in unlatching or closed condition, and this structure is stable, extraneous power, and for example acceleration, vibration, impact or static discharge do not have much influences to it.Utilize the locking electrode of permanent charging electret when having power, also can not play a little effects, also can keep the state of array by this.
The electrode pattern of describing in Fig. 5 to Fig. 7 also can form on shutter and film thereof.Therefore, these electrodes can be on a stator or two stators, and perhaps on a stator and all shutter, perhaps this three is furnished with electrode.
Fig. 6 and element shown in Figure 7, except keeping the district, have two independent controls the fixed electorde districts (X, Y).In each display element, increase the number in independent controllable conductivity district, the number of element is rolled up and the number of required switching device does not heighten thereupon.In particular, in order at component number to be the address of certain particular element of visit in the array of N, and if the number d in the independent controllable conductivity district of each element, then the number S of required on-off element is
<mi>S=d</mi>&lt;mroot><mn>N</mn><mn>d</mn>&lt;mroot>
For example, N=390 is arranged for one, 625 arrays of control pixels separately, each element then need 390,625 switches, or each element needs a switch if having only a conduction region.If each element has two conduction regions,, then need 1250 switches in order to control and visit each element separately.But, only need 100 switches if these elements have 4 districts.In this part instructions, other switching device of these switching devices and all can be a mechanical switch, also can be the electronic switch made of semiconductor element for example.Their function is that current potential is applied to by between the public electrode of control elements and the control electrode.
The present invention illustrates with visual demonstration, yet this array is a sheet of numerous bifurcation gate elements basically, they or open or close or reflect or not reflection ray or an aperture or be not. Therefore, this array also can be used as a memory for computer. In case make after selected pixel opens or closes with program, this state will remain unchanged, until when needing to change. Under this form, it is an energy editor or the read/write memory wiped.
Be simple meter, the present invention illustrates with the stator on plane. Certainly also can adopt the surface of shaped form or garden cylindricality arrange near the shutter edge electrode district so that shutter open or close. Equally, the present invention is with there being closing of the lucid and lively door of the shutter of mechanical bias force or spring effect, but for the closing of shutter, if with opposite way of visiting the location, it is unwanted then setovering.

Claims (24)

1, a kind of electrostatically actuated binary element, it comprises:
The fixed subcomponent of pair of parallel, each fixed subcomponent has several electrode districts, and
Can be inhaled the moving hinged shutter part of using by static for one,
Shutter part has the permanent mechanical bias power of the off-position tended to, usually off-position is parallel with stator, in the time of between near current potential is applied to said shutter the stator electrode district, this bias force be can't resist the electrostatic force that acts on the shutter, thereby make fast door-inhale to the open site, the open site is vertical with stator usually.
2, the binary element of claim 1, wherein shutter part is to be made by high dielectric constant materials.
3, the binary element of claim 1, shutter part wherein have the surface of a conduction at least.
4, the binary element of claim 2 or claim 3, wherein this shutter part comprises the shutter part that several are parallel again.
5, a kind of electrostatically actuated binary element, it comprises:
Fixed subcomponent with an electrode district, and
Can be inhaled by static for one moving to have hinged and the shutter part of closing with the open site is arranged,
Shutter part has a conductive surface at least, and permanent mechanical bias power with the off-position tended to, usually off-position is parallel with stator, when current potential puts between the conducting surface of stator electrode district and shutter, bias force be can't resist the electrostatic force that acts on the shutter, thereby make fast door-inhale to the open site, the open site is perpendicular to stator usually.
6, the binary element of claim 5, fixed subcomponent wherein have two electrode districts at least, one of them electrode district when behind the shutter opening position near shutter edge.
7, claim 1 or 6 binary element, stator electrode district wherein are all by V font gap separately.
8, the binary element of claim 6, wherein the conductive surface of shutter is divided into two electrode districts at least by V font gap.
9, the binary element of claim 1, each fixed subcomponent has two electrode districts at least in two fixed subcomponents wherein, an electrode district of each stator behind the shutter opening position near shutter.
10, the array that lines up rows and columns of a kind of electrostatically actuated binary element, each element comprises:
The fixed subcomponent of pair of parallel, each fixed subcomponent has several electrode districts, and
Can be inhaled the moving hinged shutter part that has by static for one,
Shutter part has the permanent mechanical bias power of the off-position tended to, usually off-position is parallel with stator, in the time of between near current potential is applied to said shutter the stator electrode district, this bias force be can't resist the electrostatic force that acts on the shutter, thereby make fast door-inhale to the open site, the open site is vertical with stator usually.
11, the array that lines up rows and columns of a kind of electrostatically actuated binary element, each element comprises:
Fixed subcomponent with an electrode district, and
Can be inhaled by static for one moving to have hinged and the shutter part of closing with the open site is arranged,
Shutter part has a conductive surface at least, and permanent mechanical bias power with the off-position tended to, usually off-position is parallel with stator, when current potential puts between the conducting surface of stator electrode district and shutter, bias force be can't resist the electrostatic force that acts on the shutter, thereby make fast door-inhale to the open site, the open site is perpendicular to stator usually.
12, the array of claim 10, wherein at the place, place of each binary element, first, second and third electrode district that each separates all useful V font of fixed subcomponent gap,
First all and third electrode district of each fixed subcomponent is connected together on electric, and is connected to the input lead of each stator,
Second electrode district of a stator of all elements all is connected together in one row, and is connected to an input lead of these row.
13, a kind of electrostatically actuated binary element is formed the array of row and column, this array comprises first and second fixed subcomponents of pair of parallel, each fixed subcomponent all has several parallel conductive strips, the conductive strips of the conductive strips of first fixed subcomponent and second fixed subcomponent are orthogonal, and be spaced from each other a distance
Can be inhaled the moving hinged shutter part that has by static, the infall of the first and second fixed subcomponent conductive strips of position between this two fixed subcomponent,
Each shutter part has a permanent mechanical bias power that trends towards the fixed subcomponent parallel position, when current potential was based upon between the conductive strips spaced apart from each other of pair of orthogonal, this bias force be can't resist the electrostatic force that acts on this a pair of conductive strips infall shutter part.
14, a kind of electrostatically actuated binary element, it comprises:
Fixed subcomponent with several separate mesh electrode districts, and
Can be inhaled the moving hinged shutter part that has by static for one, this shutter part can be movable between off-position and open site,
Electrode district is positioned to and can progressively inhales shutter part to the open site.
15, the binary element of claim 14, shutter part wherein has a conductive surface at least, and fixed subcomponent electrode district wherein comprises that one first can be visited the electrode district of location, second electrode district that can visit the location, and locking electrode district, between shutter part conductive surface and stator electrode district, set up current potential, can progressively inhale shutter to the open site.
16, the binary element of claim 15, it also has other locking electrode to fix on shutter lock on the off-position.
17, a kind of electrostatically actuated binary element, it comprises:
A pair of parallel fixed subcomponent usually, each fixed subcomponent has two locking electrode districts and the electrode district that can visit the location at least, and
Can be inhaled the moving hinged shutter part that has by static for one, this shutter part be between this two fixed subcomponent and can close and the open site between movable.
18, the array that lines up rows and columns according to the binary element of claim 15 or claim 17, what wherein a units was all first can visit the location electrode district and all be connected together on electric, and be connected to an input lead of this row, what one row element was all second can visit the location electrode and all be connected together on electric, an and defeated lead-in wire that is connected to these row, and all locking electrodes all are connected together, and are connected to an input lead.
19, a kind of array of row and column of electrostatically actuated binary element, this array comprises: the fixed subcomponent with several parallel electrically conductive bands, and flat components with at least one conducting surface, this conducting surface is divided into several parallel conductive strips, the conductive strips of flat components and stator conductive strips are spaced from each other a distance, and be orthogonal and intersect to form, arrange that at infall some can be inhaled the moving hinged shutter that has by static, the latter can be movable between the position that is parallel to this stator usually and a common position perpendicular to this fixed subcomponent.
20, the binary element of claim 15, the electret of the permanent charging of locking electrode utilization wherein is filled with electric charge at least in part.
21, the binary element of claim 17 wherein has the electret of the permanent charging of one or more locking electrode district utilization to be filled with electric charge at least in part.
22, the binary element of claim 13, shutter part wherein are a kind of high dielectric constant materials that has.
23, the binary element of claim 13, shutter part wherein has a conductive surface at least.
24, the binary element of claim 22 or claim 23, shutter part wherein comprises the shutter part that several are parallel again.
CN 85106884 1985-09-12 1985-09-12 Electrostatically actuated binary shutter devices array<del/ 〉 Pending CN85106884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 85106884 CN85106884A (en) 1985-09-12 1985-09-12 Electrostatically actuated binary shutter devices array<del/ 〉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 85106884 CN85106884A (en) 1985-09-12 1985-09-12 Electrostatically actuated binary shutter devices array<del/ 〉

Publications (1)

Publication Number Publication Date
CN85106884A true CN85106884A (en) 1987-03-11

Family

ID=4795336

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 85106884 Pending CN85106884A (en) 1985-09-12 1985-09-12 Electrostatically actuated binary shutter devices array<del/ 〉

Country Status (1)

Country Link
CN (1) CN85106884A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103676309A (en) * 2012-09-10 2014-03-26 联想(北京)有限公司 Display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103676309A (en) * 2012-09-10 2014-03-26 联想(北京)有限公司 Display device
CN103676309B (en) * 2012-09-10 2016-08-17 联想(北京)有限公司 Display device

Similar Documents

Publication Publication Date Title
KR950010659B1 (en) Micro light shutter and manufacturing method thereof
EP1089110B1 (en) Electrostatically actuated film display device
CN100409095C (en) Electrophoretic display device
US4218302A (en) Electrophoretic display devices
US5627561A (en) Electrophoretic display panel with selective character addressability
CN100472793C (en) Circuit fabrication method
US4686524A (en) Photosensitive electrophoretic displays
Kishi et al. 5.1: Development of In‐Plane EPD
US20080211764A1 (en) Stylus-based addressing structures for displays
CN1768316A (en) Apparatus with display
JPH06509883A (en) Electrophoretic display panel with interleaved local anodes
US7724234B2 (en) Panel for display device, and display device
US4736202A (en) Electrostatic binary switching and memory devices
ATE171337T1 (en) HIGH RENDEMENT PANEL DISPLAY DEVICE
CN85108819A (en) Improve electrographic writing head
CN105759515B (en) Liquid crystal display device and its driving method
CN85106884A (en) Electrostatically actuated binary shutter devices array<del/ 〉
EP0192702A1 (en) Array of electrostatically actuated binary shutter devices
Castleberry Varistor-controlled liquid-crystal displays
EP0607145A1 (en) Electrode structure for an electrophoretic display apparatus
CN85106881A (en) Electrostatic binary switching and storage arrangement
CN85106883A (en) Electrostatically actuated two-state device array
EP0190331A1 (en) Array of electrostatically actuated binary devices
CN216052547U (en) Display substrate and display panel
US11809649B2 (en) Electronic ink screen and method for manufacturing the same

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
WD01 Invention patent application deemed withdrawn after publication