CN85100563B - 大功率氦氖激光器 - Google Patents

大功率氦氖激光器 Download PDF

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CN85100563B
CN85100563B CN85100563A CN85100563A CN85100563B CN 85100563 B CN85100563 B CN 85100563B CN 85100563 A CN85100563 A CN 85100563A CN 85100563 A CN85100563 A CN 85100563A CN 85100563 B CN85100563 B CN 85100563B
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laser
helium neon
discharge
discharge tube
tube
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CN85100563A (zh
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凌一鸣
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Nanjing Institute of Technology
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Priority to US07/201,357 priority patent/US4862476A/en
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/09—Processes or apparatus for excitation, e.g. pumping
    • H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

一种可获得大功率激光输出的氦氖激光器，本发明采用扁平放电管结构制成，从而解决了短激光管情况下获得大功率氦氖激光输出的问题。本发明可供激光医疗，激光全息技术，激光信息处理、激光舞台照明等需求大功率氦氖激光的应用场合使用。

Description

大功率氦氖激光器
本发明属于一种气体激光器。
一般的氦氖激光器是由圆形截面毛细管内的氦氖气体放电形成激光的。例如，美国US-4429399号专利所说的氦氖激光器就是一个例子。这种激光管结构要提高激光输出功率，必须增长放电管长度。因此，用这种结构制成大功率氦氖激光器时，放电管长度势必很长，这对使用都带来极大不便。
本发明的目的在于研制一种可以在较短放电管情况下获得较大激光输出的氦氖激光器。
本发明的大功率氦氖激光器是由氦氖激光管、光学谐振腔以及激光器电源组成的氦氖激光器，其特征在于限制激活介质的扁平放电管〔14〕的内壁在垂直于放电轴向的放电截面为具有长短两维尺度的扁平截面。其长短两维尺度之比至少大于2∶1。这样，利用短边长度来保证足够的激光增益。利用适当增加长边尺寸来提供较大的模体积，可以兼顾影响提高输出功率的诸因素，因此，这种激光器的输出功率与同样放电管长度的圆截面氦氖激光器相比，其输出功率要大得多，光斑面积也大得多。
本发明的氦氖激光器与现有的一般氦氖激光器相比，具有输出功率大、结构紧凑、成本低、寿命长、便于生产、便于使用等优点。可供激光医疗、激光舞台照明、激光光谱技术，激光全息技术等需求大功率氦氖激光的应用场合使用。
图1是这种氦氖激光器的示意图。其中〔1〕〔12〕为介质膜反射镜，〔2〕〔11〕为布氏窗片，〔3〕〔6〕〔7〕〔10〕为电极引线，〔4〕为阴极玻泡，〔8〕为阳极玻泡，〔5〕为阴极灯丝，〔9〕为阳极钛泵，〔13〕〔15〕为放电孔，〔14〕为扁平放电管。图2为扁平放电管〔14〕的剖面图。图3是这种氦氖激光器电源线路图。其中T1是自耦变压器，T2为灯丝变压器，T3为高压变压器，K1为电源开关，K2为钛泵开关，J为延时继电器，D1、D2、D3、D4为高压硅堆，C1、C2、C3为高压电容器，R为限流电阻。
本发明的大功率氦氖激光器可以由如下方案实施;其氦氖激光管的整个放电管壳（包括扁平放电管〔14〕、布氏窗〔2〕〔11〕、阳极玻泡〔8〕和阴极玻泡〔4〕）可由软玻璃经低熔点玻璃直接封接而成，这样既可以方便地构成扁平形放电管，而且成本低、寿命长，也便于激光管壳成批制造。其扁平放电管〔14〕横截面的长短两边之比以3∶1至8∶1为宜，因为其比例太小则对提高输出功率作用不大，其比例太大，则可能会出现放电不稳定现象。激光管阴极〔5〕由直热式氧化物阴极制成，不仅成本低、寿命长，而且能提供较大的发射电流，满足激光管的工作要求。激光管阳极〔9〕由螺旋形钛丝制成，既作阳极又作小钛泵，有助于提高管内真空度。激光管的电极引线〔3〕〔6〕〔7〕〔10〕是由镍丝-杜美丝-铜丝组成的三节导丝制成。以便与软玻璃管壳实现气密封接。在扁平放电管〔14〕的同侧有两个放电孔〔13〕〔15〕，构成从阴极灯丝〔5〕通过放电管〔14〕到阳极钛泵〔9〕的放电通道，该放电孔与两端的距离以4～8公分为宜，太短则会导致放电对窗片的影响，太长则使结构不紧凑。激光器的光学谐振腔可以由球面或柱面介质膜反射镜〔1〕〔12〕构成，可以根据对激光横模、输出功率、稳定性等因素来选择光学谐振腔的结构、形状和参数。激光器的电源设计除了具有较大放电电流的高压放电电路外，还在于具有可供给激光管阴极灯丝和阳极钛泵加热的灯丝变压器〔T2〕，而且接阳极钛泵的绕组aa，通过开关K2接到阳极钛泵〔9〕，以便在必要时，接通钛泵提高管内真空度，而常态时可断开K2以延长钛泵使用寿命。此外，高压放电电路通过延时继电器〔J〕接到灯丝变压器〔T2〕初级，以便灯丝预热后，自动接通放电电路。
例如，本发明的氦氖激光器在放电长度为1米，放电截面为3×18平方毫米，光学谐振腔采用平凹球面内腔结构，凹面全反镜（反射率约为99.8%）曲率半径为3米，平面半反镜透射平均为1.9%，充气压力为0.8mmHg，气体配比为7.5∶1，放电电流为50毫安，放电管压降为1650伏的情况下（即输入功率为82.5瓦），其6328
Figure 85100563_IMG1
激光输出功率在65毫瓦以上，激光功率的测量是用国产GG-1型激光功率计去掉探测器光阑，使激光束直接照射长方形光电池用100毫瓦档量程进行量测的，该功率计的读数又用LW-1型激光功率计（热偶型，中国计算科学院实验工厂生产）校正，激光输出具有扁平形光斑，由于含有较丰富的横模，以致光斑中心部分在较宽的范围内光强分布较为均匀而略有起伏，故对希望均匀激光照射的场合尤为有利。

Claims (8)

1、一种由氦氖激光管、光学谐振腔以及激光器电源组成的氦氖激光器。本发明的特征在于限制气体激活介质的扁平放电管〔14〕的内壁在垂直于放电轴向的放电横截面为具有长短两维尺度的扁平截面，其长短两维尺度之比至少大于2∶1。
2、按照权利要求1所述的氦氖激光器，其特征在于限制气体激活介质的扁平放电管〔14〕、布氏窗片〔2〕〔11〕、阴极玻泡〔4〕和阳极玻泡〔8〕均由软玻璃制成，并用低熔点玻璃封接成放电管管壳。
3、按照权利要求1所述的氦氖激光器，其特征在于扁平放电管〔14〕的放电横截面长短两维尺度之比以3∶1至8∶1为宜。
4、按照权利要求1或2所述的氦氖激光器其特征在于扁平放电管〔14〕的同侧离两端4～8公分处分别有一放电孔〔13〕〔15〕。
5、按照权利要求1或2所述的氦氖激光器，其特征在于阳极〔9〕由螺旋形钛丝制成。
6、按照权利要求1或2所述的氦氖激光器，其特征在于电极引线〔3〕〔6〕〔7〕〔10〕由镍丝-杜美丝-铜丝组成的三节导丝制成。
7、按照权利要求1所述的氦氖激光器，其特征在于激光器电源具有供激光管阴极灯丝和阳极钛泵加热用的灯丝变压器〔T2〕，以及〔T2〕的aa，绕组通过开关K2接到阳极钛泵〔9〕。
8、按照权利要求1所述的氦氖激光器，其特征在于激光器电源的高压放电电路经延时继电器〔J〕接到灯丝变压器〔T2〕的初级。
CN85100563A 1985-04-01 1985-04-01 大功率氦氖激光器 Expired CN85100563B (zh)

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CN85100563A CN85100563B (zh) 1985-04-01 1985-04-01 大功率氦氖激光器
JP61071420A JPS62111487A (ja) 1985-04-01 1986-03-31 レ−ザ管
US07/201,357 US4862476A (en) 1985-04-01 1988-05-26 Gas laser having flat discharger cross-section

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JPH0274086A (ja) * 1988-09-09 1990-03-14 Fanuc Ltd ガスレーザ装置用放電管
US4937832A (en) * 1989-06-30 1990-06-26 Rocca Jorge J Methods and apparatus for producing soft x-ray laser in a capillary discharge plasma
BR9805340B1 (pt) * 1998-12-14 2009-01-13 inserto de expansço variÁvel para estabilizaÇço de coluna vertebral.
CN100361353C (zh) * 2004-06-16 2008-01-09 四川大学 一种紧凑型氦氖激光器装置
CN101789559B (zh) * 2010-02-10 2012-06-20 华中科技大学 一种气体激光器
CN102340091B (zh) * 2011-09-30 2013-05-15 南京乐翔科技发展有限公司 一种内腔扁平氦氖激光管及其制备方法
CN104143493B (zh) * 2014-06-15 2017-08-25 泰州市东兴合金材料有限公司 电光源用三节电接导丝及其制造工艺

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US3428914A (en) * 1965-01-25 1969-02-18 Spectra Physics Gas lasers with plasma tube having variable cross-section and discharge current
US3815047A (en) * 1973-02-14 1974-06-04 Bell Telephone Labor Inc Transversely-excited waveguide gas laser
US3904986A (en) * 1974-04-19 1975-09-09 Rca Corp Gas laser tube
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US4352184A (en) * 1976-11-01 1982-09-28 Ibm Corporation Gas laser and method of manufacturing
US4464760A (en) * 1982-04-20 1984-08-07 Sutter Jr Leroy V Elongated chambers for use in combination with a transversely excited gas laser
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