CN2927416Y - One-dimensional panel waveguide gas laser - Google Patents
One-dimensional panel waveguide gas laser Download PDFInfo
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- CN2927416Y CN2927416Y CN 200620023132 CN200620023132U CN2927416Y CN 2927416 Y CN2927416 Y CN 2927416Y CN 200620023132 CN200620023132 CN 200620023132 CN 200620023132 U CN200620023132 U CN 200620023132U CN 2927416 Y CN2927416 Y CN 2927416Y
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Abstract
The utility model relates to a one-dimensional batten wave-guide gas laser, wherein, a batten wave-guide gas discharging area comprises a metal upper electrode, a metal lower electrode and a metal supporting block, an inductance is connected between the metal upper electrode and the metal upholding plate, the metal lower electrode is positioned on top of the metal upholding plate. The metal upholding plate is contacted on a metal vacuum chamber inner wall. A vacuum porcelain block is arranged between the metal upper electrode and the metal upholding plate, an electric insulation spaces the metal upper electrode and the metal lower electrode. A metal pressing plate is contacted to the metal vacuum chamber inner wall. The metal upper electrode is connected with the electrode linking rod. An optic resonance chamber output lens and an optic resonance chamber rear feedback lens are fixed on the metal upholding plate. A laser output window is vacuum-sealed on the front end panel of the vacuum chamber. The utility model has the advantages of non wave-guide side wall, the high order wave-guide module effect produced on the wave-guide transverse section parallel to the electrode in the principle is eliminated, the laser output light beam strength is distributed on the direction without producing the modulated appearance, and then the laser output light beam quality is improved.
Description
Technical field: the utility model relates to a kind of one-dimensional plate waveguide gas laser.Belong to laser technology field.
Background technology: the horizontal gas discharge technology of radio frequency combines with the optical waveguide technology, has promoted waveguide CO
2Developing rapidly of laser technique.In more than ten years in the past, radio frequency transversely excited list waveguide CO
2Laser technique has experienced the evolution from full ceramic waveguide structure, pottery and metal clip cardiac wave guide structure to the all-metal waveguide structure.(see Fig. 1 a), rectangular waveguide is to be made of ceramic sidewalls 33 and ceramic cleat, cleat 34, places between two metal electrodes 32, and high frequency electric source 31 connects two metal electrodes 32, and discharge excitation forms a gain channel region in waveguide in full ceramic waveguide structure.The advantage of full ceramic waveguide structure is that the light wave loss is little.Along with waveguide CO
2The development of laser technique, in order to improve the gain cooling effect and to reduce cost and simplified structure, pottery has been carried with metal clip cardiac wave guide structure, in pottery and metal clip cardiac wave guide structure (seeing Fig. 1 b), rectangular waveguide is to be made of ceramic sidewalls 33 and two metal electrodes 32, high frequency electric source 31 connects two metal electrodes 32, and discharge excitation forms a gain channel region in waveguide.In order further to reduce device cost and easily modularization production, U.S. Synrad company proposed a kind of RF excited heavy caliber all-metal channel C O in 1988
2Laser technique (seeing Fig. 1 c).In this technology, waveguide channels is that the metal electrode 37 by the metal sidewall 36 of two surface insulation layers and two surface insulation layers constitutes, the metal sidewall 36 of surface insulation layer is connected with metal shell 35, the metal electrode 37 of surface insulation layer is connected with high frequency electric source 31, metal electrode 37 phase differences 180 degree of upper and lower surface insulating barrier form four electrode discharge forms.The people such as suffering foundation of Beijing Institute of Technology in 1991 grind and constitute the horizontal two electrode discharges excitation of a kind of radio frequency all-metal waveguide structure C O
2Laser technique (seeing Fig. 1 d).In this structure, the metal sidewall 36 of metal electrode 32 and surface insulation layer is aluminium alloy up and down, at the metal sidewall 36 of surface insulation layer and 32 gas gaps that leave thick 0.1mm of metal electrode up and down, metal electrode 32 is connected with high frequency electric source 31, crust Xing Yuanli and voltage voltage divider principle according to gas discharge, gas breakdown voltage between minimum gas gap is higher, and the voltage in this structure between gas gap only is 1/2nd of 32 voltages of metal electrode, thereby suitably design the waveguide channels caliber size, the gas discharge excitation can be limited in the waveguide channels.
But up to the present, the domestic and international face of reporting increases than plate waveguide RF excited diffused cooling CO
2Metal shown in Fig. 1 b that laser all adopts and ceramic sandwich structure.Adopting this structure, on waveguide cross-section, be parallel to electrode surface and be stationary field perpendicular to the light wave fields of electrode surface, is wave guide mode.Existing slab waveguide laser structure is the two-dimensional waveguide structure.In existing plate waveguide structure, produce higher order wave guided mode effect on the electrode direction in being parallel to of waveguide cross-section, make the laser output beam intensity distributions produce modulation phenomenon, and then influenced beam quality in this direction.
Summary of the invention: the utility model purpose is to improve the shortcoming of prior art, and a kind of one-dimensional plate waveguide gas laser of one-dimensional plate structure is provided, and for achieving the above object, the utility model is taked following design:
The utility model is by electrode of metal, and metal bottom electrode and ceramic insulation back-up block constitute plate waveguide gas-discharge zone, i.e. laser gain district.The metal bottom electrode places on the metal supporting plate.The metal supporting plate closely contacts with the metal vacuum cavity wall.Between electrode of metal and metal supporting plate, have 2 vacuum ceramic pieces, electric insulation isolating metal top electrode and metal bottom electrode at least.Have between metal backing and electrode of metal and the metal platen and form the electric insulation isolation at least between 2 ceramic insulations and electrode of metal and metal platen.Metal platen contacts with the metal vacuum cavity wall.Electrode of metal is connected with the electrode connecting rod, and the electrode connecting rod passes the vacuum insulation insulating bushing and links to each other with power supply outside the metal vacuum chamber.
The advantage that the utlity model has: one-dimensional plate waveguide laser structure of the present utility model, no waveguide sidewall, eliminated the higher order wave guided mode effect that electrode direction produces that is parallel to from principle in waveguide cross-section, make the laser output beam intensity distributions no longer produce modulation phenomenon, thereby improved the laser output beam quality in this direction.Utilize the excitation of radio frequency gas discharge, can form strip type laser gain volume, combine, can obtain the output of efficient laser power with optical resonator.
Description of drawings:
Fig. 1. existing waveguiding structure schematic diagram in the gas laser
Fig. 2 A. one-dimensional plate waveguide structure cross sectional representation
Fig. 2 B. one-dimensional plate waveguide structure cross sectional representation
Fig. 2 C. one-dimensional plate waveguide structure cross sectional representation
Fig. 3 A. all-metal plate waveguide structure longitudinal cross-section schematic diagram
Fig. 3 B. all-metal plate waveguide structure longitudinal cross-section schematic diagram
Fig. 3 C. all-metal plate waveguide structure longitudinal cross-section schematic diagram
Fig. 4. the lath-shaped gain region with from the combination schematic diagram of axle pseudo confocal unsteady resonator
Embodiment:
Embodiment 1: as shown in Figures 2 and 3, electrode of metal 1, metal bottom electrode 2 and vacuum ceramic dielectric support block 3 constitute plate waveguide gas-discharge zone 12 (high H is 0.2 millimeter, and wide W is 2 millimeters), i.e. laser gain districts.Metal bottom electrode 2 places on the metal supporting plate 4.Metal supporting plate 4 closely contacts with metal vacuum chamber 11 inwalls.Between electrode of metal 1 and metal supporting plate 4, have 2 vacuum ceramic dielectric support block 3 at least, electric insulation isolating metal top electrode 1 and metal bottom electrode 2 along electrode longitudinal direction both sides.Isolate with electrode of metal 1 and 6 formation of metal platen electric insulation by at least 2 ceramic insulation pads 7 (thick 0.1-6 millimeter) between metal backing 5 and electrode of metal 1 and the metal platen 6 along the electrode longitudinal direction.Metal platen 6 closely contacts with metal vacuum chamber 11 inwalls.Electrode of metal 1 is connected with electrode connecting rod 9, and electrode connecting rod 9 passes vacuum insulation insulating bushing 10 and links to each other with metal vacuum chamber 11 power supply outward.
Optical resonator output eyeglass 13 is installed in the output eyeglass metal fixed mount 14, output eyeglass metal fixed mount 14 is regulated bracing frame 15 by output mirror holder metal adjusting screw(rod) 16 with output mirror holder metal and is connected, and output mirror holder metal is regulated bracing frame 15 and is fixed on (as shown in Figure 3) on the metal supporting plate 4.Feedback eyeglass 17 is installed in the back feedback eyeglass metal fixed mount 18 behind the optical resonator, back feedback eyeglass metal fixed mount 18 is regulated bracing frame 19 by back feedback mirror holder metal adjusting screw(rod) 20 with back feedback mirror holder metal and is connected, and back feedback mirror holder metal is regulated bracing frame 19 and is fixed on the metal supporting plate 4.21 vacuum seals of laser output window are on vacuum chamber 11 front consoles (as shown in Figure 3).
Electrode of metal 1, metal bottom electrode 2, vacuum ceramic dielectric support block 3, metal supporting plate 4, metal backing 5, metal platen 6, output eyeglass metal fixed mount 14, back feedback eyeglass metal fixed mount 18, output mirror holder metal adjusting bracing frame 15 and back feedback mirror holder metal are regulated bracing frame 19 and are constituted by rust-preventing aluminum alloy, and ceramic insulation pad 7 is by Al
2O
3The vacuum porcelain constitutes, and electrode connecting rod 9 and coupling inductance 8 are made of metallic copper, and metal vacuum chamber 11 is made of aluminium alloy castings, and output mirror holder metal adjusting screw(rod) 16 and back feedback mirror holder metal adjusting screw(rod) 20 are made of copper alloy.
Embodiment 2: electrode of metal 1 long L1 is 386 millimeters, and it is 20 millimeters with high H1 that wide W1 is 40 millimeters.Metal bottom electrode 2 long L2 are 386 millimeters, and it is 18 millimeters with high H2 that wide W2 is 20 millimeters.Vacuum ceramic dielectric support block 3 long L3 are 386 millimeters, and it is 20 millimeters with high H3 that wide W3 is 9 millimeters.Metal supporting plate 4 long L4 are 486 millimeters, and it is 19.8 millimeters with high H4 that wide W4 is 80 millimeters.Metal backing 5 long L5 are 386 millimeters, and wide W5 is 30 millimeters, and high H5 is 15 millimeters.Metal platen 6 long L6 are 386 millimeters, and wide W6 is 30 millimeters, and high H6 is 15 millimeters.Ceramic insulation pad 7 is that diameter is 8 millimeters, and thickness is 0.1 millimeter thin rounded flakes.Metal vacuum chamber 12 long L7 are 500 millimeters, and outer wide W7 is 110 millimeters, and outer high H7 is 110 millimeters, and inner width W8 is 90 millimeters, and interior high H8 is 90 millimeters.
Optical resonator be one from the axle pseudo confocal unsteady resonator, optical resonator output eyeglass 14 be one from crown of roll face speculum, radius of curvature r is 3280 millimeters; Behind the optical resonator feedback eyeglass 18 be one from the axle concave mirror, radius of curvature R is 4100 millimeters; The long Lg in optical resonator chamber is 410 millimeters (see figure 4)s.
Along electrode of metal 1 length direction, between electrode of metal 1 and metal supporting plate 4, be connected to rare 2 coupling inductance 8, to be fixed in the metal vacuum chamber 11 by the assembly that electrode of metal 1, metal bottom electrode 2, vacuum ceramic dielectric support block 3, metal supporting plate 4, metal backing 5, metal platen 6, ceramic insulation pad 7, coupling inductance 8 and electrode connecting rod 9 constitute, forming a high H with this is 2 millimeters, and wide W is 20 millimeters one dimension all-metal plate waveguide gas-discharge zone 12 (seeing Fig. 2 and Fig. 3).
By from electrode connecting rod 9 input radio frequency power, 12 produce the excitation of radio frequency gas discharges in one dimension all-metal plate waveguide gas-discharge zone, can form strip type laser gain volume, combine (see figure 4) with optical resonator, can obtain the output of efficient laser power.
Embodiment 3: the both sides that are shaped as of electrode of metal 1 become recessed platform, the protruding platform of middle one-tenth to constitute, between recessed platform of the dual-side of electrode of metal 1 and metal bottom electrode 2, put at least 2 vacuum ceramic dielectric support block 3, make and form the electric insulation isolation between electrode of metal 1 and the metal bottom electrode 2 along the electrode longitudinal direction.Other structures are with embodiment 2 or embodiment 1.
Embodiment 4: the both sides that are shaped as of electrode of metal 1 become recessed platform, the protruding platform of middle one-tenth to constitute (seeing Fig. 2 C), between recessed platform of the dual-side of electrode of metal 1 and metal supporting plate 4, put at least 2 vacuum ceramic dielectric support block 3, make and form the electric insulation isolation between electrode of metal 1 and the metal bottom electrode 2 along the electrode longitudinal direction.Other structures are with embodiment 2 or embodiment 1.
Embodiment 5: electrode of metal 1, metal bottom electrode 2 and ceramic insulation back-up block 3 constitute plate waveguide gas-discharge zone 12 (high H is 0.8 millimeter, and wide W is 20 millimeters), i.e. laser gain districts.Other structures are with embodiment 2 or embodiment 1.
Embodiment 6: electrode of metal 1, metal bottom electrode 2 and ceramic insulation back-up block 3 constitute plate waveguide gas-discharge zone 12 (high H is 8 millimeters, and wide W is 500 millimeters), i.e. laser gain districts.Other structures are with embodiment 2 or embodiment 1.
Embodiment 7: metal bottom electrode 2 can constitute parts with metal supporting plate 4, and promptly metal bottom electrode 2 becomes single part with metal supporting plate 4.
Claims (12)
1, a kind of one-dimensional plate waveguide gas laser, it is characterized in that: by electrode of metal, metal bottom electrode and vacuum ceramic dielectric support block constitute the plate waveguide gas-discharge zone, it is the laser gain district, the metal bottom electrode places on the metal supporting plate, the metal supporting plate closely contacts with the metal vacuum cavity wall, between electrode of metal and metal supporting plate, have 2 vacuum ceramic dielectric support block at least, electric insulation isolating metal top electrode and metal bottom electrode, have between metal backing and electrode of metal and the metal platen and form the electric insulation isolation at least between 2 ceramic insulations and electrode of metal and metal platen, metal platen contacts with the metal vacuum cavity wall, electrode of metal is connected with the electrode connecting rod, and the electrode connecting rod passes the vacuum insulation insulating bushing and links to each other with power supply outside the metal vacuum chamber.
2, a kind of one-dimensional plate waveguide gas laser according to claim 1 is characterized in that: connect at least 2 inductance between electrode of metal and metal supporting plate.
3, a kind of one-dimensional plate waveguide gas laser according to claim 1 and 2, it is characterized in that: optical resonator output eyeglass is installed in the output eyeglass metal fixed mount, output eyeglass metal fixed mount is regulated bracing frame by output mirror holder metal adjusting screw(rod) with output mirror holder metal and is connected, output mirror holder metal is regulated bracing frame and is fixed on the metal supporting plate, the feedback eyeglass is installed in the feedback eyeglass metal fixed mount of back behind the optical resonator, back feedback eyeglass metal fixed mount is regulated bracing frame by back feedback mirror holder metal adjusting screw(rod) with back feedback mirror holder metal and is connected, back feedback mirror holder metal is regulated bracing frame and is fixed on the metal supporting plate, and the laser output window vacuum seal is on the vacuum chamber front console.
4, a kind of one-dimensional plate waveguide gas laser according to claim 1 and 2 is characterized in that: the high H in laser gain district is the 0.2-8 millimeter, and wide W is the 2-500 millimeter.
5, a kind of one-dimensional plate waveguide gas laser according to claim 3 is characterized in that: the high H in laser gain district is the 0.2-8 millimeter, and wide W is the 2-500 millimeter.
6, a kind of one-dimensional plate waveguide gas laser according to claim 4, it is characterized in that: along the electrode of metal length direction, between electrode of metal and metal supporting plate, connect the coupling inductance, between electrode of metal and metal supporting plate, the vacuum ceramic piece is arranged along electrode longitudinal direction both sides, between metal backing and electrode of metal and the metal platen by forming the electric insulation isolation along between the ceramic insulation pad of electrode longitudinal direction and electrode of metal and metal platen.
7, a kind of one-dimensional plate waveguide gas laser according to claim 5, it is characterized in that: along the electrode of metal length direction, between electrode of metal and metal supporting plate, connect the coupling inductance, between electrode of metal and metal supporting plate, the vacuum ceramic piece is arranged along electrode longitudinal direction both sides, between metal backing and electrode of metal and the metal platen by forming the electric insulation isolation along between the ceramic insulation pad of electrode longitudinal direction and electrode of metal and metal platen.
8, a kind of one-dimensional plate waveguide gas laser according to claim 1 and 2, it is characterized in that: the both sides that are shaped as of electrode of metal become recessed platform, the protruding platform of middle one-tenth to constitute, between recessed platform of the dual-side of electrode of metal and metal bottom electrode, put at least 2 vacuum ceramic dielectric support block, make and form the electric insulation isolation between electrode of metal and the metal bottom electrode along the electrode longitudinal direction.
9, a kind of one-dimensional plate waveguide gas laser according to claim 1 and 2, it is characterized in that: the both sides that are shaped as of electrode of metal become recessed platform, the protruding platform of middle one-tenth to constitute, between recessed platform of the dual-side of electrode of metal and metal supporting plate, put at least 2 vacuum ceramic dielectric support block, make and form the electric insulation isolation between electrode of metal and the metal bottom electrode along the electrode longitudinal direction.
10, a kind of one-dimensional plate waveguide gas laser according to claim 3, it is characterized in that: the both sides that are shaped as of electrode of metal become recessed platform, the protruding platform of middle one-tenth to constitute, between recessed platform of the dual-side of electrode of metal and metal bottom electrode, put at least 2 vacuum ceramic dielectric support block, make and form the electric insulation isolation between electrode of metal and the metal bottom electrode along the electrode longitudinal direction.
11, a kind of one-dimensional plate waveguide gas laser according to claim 3, it is characterized in that: the both sides that are shaped as of electrode of metal become recessed platform, the protruding platform of middle one-tenth to constitute, between recessed platform of the dual-side of electrode of metal and metal supporting plate, put at least 2 vacuum ceramic dielectric support block, make and form the electric insulation isolation between electrode of metal and the metal bottom electrode along the electrode longitudinal direction.
12, a kind of one-dimensional plate waveguide gas laser according to claim 11 is characterized in that: metal bottom electrode and metal supporting plate become single part.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620023132 CN2927416Y (en) | 2006-06-21 | 2006-06-21 | One-dimensional panel waveguide gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620023132 CN2927416Y (en) | 2006-06-21 | 2006-06-21 | One-dimensional panel waveguide gas laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2927416Y true CN2927416Y (en) | 2007-07-25 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620023132 Expired - Fee Related CN2927416Y (en) | 2006-06-21 | 2006-06-21 | One-dimensional panel waveguide gas laser |
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| CN (1) | CN2927416Y (en) |
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2006
- 2006-06-21 CN CN 200620023132 patent/CN2927416Y/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070725 Termination date: 20140621 |
|
| EXPY | Termination of patent right or utility model |