CN1200489C - All sheet-metal strip waveguide gas laser - Google Patents
All sheet-metal strip waveguide gas laser Download PDFInfo
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- CN1200489C CN1200489C CN 02148694 CN02148694A CN1200489C CN 1200489 C CN1200489 C CN 1200489C CN 02148694 CN02148694 CN 02148694 CN 02148694 A CN02148694 A CN 02148694A CN 1200489 C CN1200489 C CN 1200489C
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Abstract
The present invention provides an all sheet-metal strip waveguide gas laser which comprises a metal central electrode 1, a metal bottom electrode 2, two metal side walls 3 and an electrical insulation component 4, the four of which form a lath waveguide gas-discharge zone. A matching inductor 7 which is connected between the metal center electrode 1 and the two metal side walls 3 along the length direction of the metal center electrode 1 is arranged. The electrical insulation component 4 arranged between the lower corner rib B of the metal central electrode 1 and the two metal side walls 3 is arranged along the length direction of the electrode, wherein the electrical insulation component 4 makes a gap formed between the lower corner rib B and the two metal side walls 3. The two metal side walls 3 are directly connected with the metal bottom electrode 2, the metal bottom electrode 2 is directly connected with the inner wall of a vacuum chamber 12 or is connected with the inner wall of the vacuum chamber 12 by other metal parts, the metal center electrode 1 is connected with an electrode connecting rod 10, and the electrode connecting rod 10 passes through a vacuum insulation insulating bush 11 to be connected with an external device. The laser has the advantages of excellent heat conductivity, low cost and simple structure.
Description
Technical field: the present invention relates to a kind of laser, specifically relate to a kind of all-metal plate waveguide gas laser.
Background technology: the horizontal gas discharge technology of radio frequency combines with the optical waveguide technology, has promoted waveguide CO
2Developing rapidly of laser technique.In more than ten years in the past, radio frequency transversely excited list waveguide CO
2Laser technique has experienced the evolution from full ceramic waveguide structure, pottery and metal clip cardiac wave guide structure to the all-metal waveguide structure.(see Fig. 1 a), rectangular waveguide is to be made of four vacuum ceramics, places between two metal electrodes, and discharge excitation forms a gain channel region in waveguide in full ceramic waveguide structure.The advantage of full ceramic waveguide structure is that the light wave loss is little.Along with waveguide CO
2The development of laser technique, in order to improve the gain cooling effect and to reduce cost and simplified structure, pottery has been carried (seeing Fig. 1 b) with metal clip cardiac wave guide structure.In metal and ceramic sandwich waveguiding structure, two metal electrodes and two vacuum ceramic plates have constituted waveguide discharge excitation passage.In order further to reduce device cost and easily modularization production, U.S. Synrad company proposed a kind of RF excited heavy caliber all-metal channel C O in 1988
2Laser technique [1] (seeing Fig. 1 c).In this technology, waveguide channels is to be made of four aluminum alloy anodes of handling through anodized surface, side-wall electrode ground connection, and upper/lower electrode phase difference 180 degree form four electrode discharge forms.The people such as suffering foundation of Beijing Institute of Technology in 1991 are developed into the horizontal two electrode discharges excitation of a kind of radio frequency all-metal waveguide structure C O
2Laser technique [2] (seeing Fig. 1 d).In this structure, upper/lower electrode and waveguide sidewalls are aluminium alloy, leave the gas gap of thick 0.1mm between waveguide sidewalls and upper/lower electrode, and according to the crust Xing Yuanli of gas discharge, between minimum gas gap, gas breakdown voltage is higher.Thereby suitably design the waveguide channels caliber size, the gas discharge excitation can be limited in the waveguide channels.
In the world at present report have a radio frequency exciting whole metallic CO
2Only two families of laser technique, the RF excited four electrode heavy caliber all-metal channel C O of U.S. Synrad company
2The radio frequency transversely excited two electrode all-metal waveguide structure C O of laser and Beijing Institute of Technology
2Laser.
But up to the present, the domestic and international face of reporting increases than plate waveguide RF excited diffused cooling CO
2What laser all adopted is metal and ceramic sandwich structure.Technically, metal and ceramic sandwich structure waveguide radio frequency excitation diffused cooling CO
2Laser utilizes the pottery incoming call to isolate sparking electrode, forms gain region so that produce gas discharge in the waveguide of metal and ceramic sandwich structure; And all-metal waveguide structure RF excited diffused cooling CO
2Laser utilizes the crust Xing Yuanli of gas discharge, gas discharge is suppressed at forms gain region in the all-metal waveguide.The gain region of two kinds of technology forms the principle fundamental difference.
Summary of the invention: the invention provides a kind of all-metal slab waveguide laser, utilize the crust Xing Yuanli of gas discharge and adopt the horizontal gas discharge of radio frequency to be activated to form laser gain in the metal waveguide.Constitute the lath all-metal waveguide gas laser of the horizontal gas discharge excitation of a kind of radio frequency.This kind laser is compared with metal clip core structure slab waveguide laser with ceramic structure plate waveguide and pottery, can reduce device cost and can form modularization production.
The invention provides a kind of all-metal plate waveguide gas laser, comprise vacuum chamber, and the plate waveguide gas-discharge zone of metal center electrode, metal bottom electrode, two metal sidewall, electrical insulation and coupling inductance formation, the metal center electrode is connected with the electrode connecting rod, the isolated insulation cover that the electrode connecting rod passes on the vacuum chamber links to each other with external devices, and described two metal sidewall are that symmetrical left metal sidewall also directly links to each other with the left and right side of metal bottom electrode 2 respectively with right metal sidewall 3; Described metal bottom electrode 2 directly links to each other with vacuum chamber 12 inwalls or links to each other with vacuum chamber 12 inwalls by metal supporting plate 6; Described central electrode 1 links to each other with vacuum chamber 12 inwalls with metal upper extrusion board 9 by metal lower extrusion plate 8 or metal center electrode 1 directly links to each other with vacuum chamber 12 inwalls; Described insulating part is to place respectively between the left and right inferior horn rib B and left metal sidewall and right metal sidewall 3 of metal center electrode 1 along the electrode length direction, and between the left and right upward angle rib A of metal center electrode 1 and the metal lower extrusion plate 8 or between the left and right upward angle rib A and vacuum chamber 12 inwalls of metal center electrode 1, and make the electrical insulation 4 that all has a gap therebetween.
A kind of preferred genus plate waveguide gas laser provided by the invention, described central electrode 1 links to each other with vacuum chamber 12 inwalls with metal upper extrusion board 9 by metal lower extrusion plate 8 or metal center electrode 1 directly links to each other with vacuum chamber 12 inwalls; Described insulating part is to place respectively between the left and right inferior horn rib B and left metal sidewall and right metal sidewall 3 of metal center electrode 1 along the electrode length direction, and between the left and right upward angle rib A of metal center electrode 1 and the metal lower extrusion plate 8 or between the left and right upward angle rib A and vacuum chamber 12 inwalls of metal center electrode 1, and make the electrical insulation 4 that all has a gap therebetween.Described metal lower extrusion plate 8 and metal upper extrusion board 9 respectively have an inclined-plane, and the inclined-plane of metal lower extrusion plate 8 directly links to each other with the inclined-plane of metal upper extrusion board 9; The last plane of metal upper extrusion board 9 directly links to each other with vacuum chamber 12 inwalls.
More preferably laths of metal waveguide gas laser provided by the invention, described laser comprise that metal center electrode 1, metal bottom electrode 2, two metal sidewall 3 and electrical insulation 4 constitute the plate waveguide gas-discharge zone; Be provided with along coupling inductance 7 metal center electrode 1 length direction, that be connected 3 of metal center electrode 1 and two metal sidewall; Be provided with the electrical insulation 4 that has a gap therebetween that makes that places 3 of metal center electrode 1 inferior horn rib B and two metal sidewall along the electrode length direction; Two metal sidewall 3 directly link to each other with metal bottom electrode 2; Metal bottom electrode 2 directly links to each other with vacuum chamber 12 inwalls or links to each other with vacuum chamber 12 inwalls by other metal partss; Metal center electrode 1 is connected with electrode connecting rod 10; Electrode connecting rod 10 passes vacuum insulation insulating bushing 11 and links to each other with external devices.Be provided with the electrical insulation 4 that becomes a gap therebetween that makes that places between metal center electrode 1 and metal lower extrusion plate 8 or vacuum chamber 12 inwalls along the electrode length direction; The inclined-plane of metal lower extrusion plate 8 directly links to each other with the inclined-plane of metal upper extrusion board 9; The plane of metal upper extrusion board 9 directly links to each other with the vacuum chamber inwall.Described waveguide gas-discharge zone height is 1-6mm, and wide is 2-200mm.
Most preferred laths of metal waveguide gas laser provided by the invention, described laser comprise that metal center electrode 1, metal bottom electrode 2, two metal sidewall 3 and electrical insulation 4 constitute the waveguide gas-discharge zone; Be provided with along coupling inductance 7 metal center electrode 1 length direction, that be connected 3 of metal center electrode 1 and two metal sidewall; Be provided with the electrical insulation 4 that has the 0.05-0.5mm gap therebetween that makes that places 3 of metal center electrode 1 inferior horn rib B and two metal sidewall along the electrode length direction; Two metal sidewall 3 directly link to each other with metal bottom electrode 2; Metal bottom electrode 2 directly links to each other with vacuum chamber 12 inwalls or links to each other with vacuum chamber 12 inwalls by other metal partss; Metal center electrode 1 is connected with electrode connecting rod 10; Electrode connecting rod 10 passes vacuum insulation insulating bushing 11 and links to each other with external devices.Be provided with the electrical insulation 4 that becomes the 0.05-0.5mm gap therebetween that makes that places between metal center electrode 1 and metal lower extrusion plate 8 or vacuum chamber 12 inwalls along the electrode length direction; The inclined-plane of metal lower extrusion plate 8 directly links to each other with the inclined-plane of metal upper extrusion board 9; The plane of metal upper extrusion board 9 directly links to each other with the vacuum chamber inwall.Described waveguide gas-discharge zone height is 1-6mm, and wide is 2-200mm.
All-metal slab waveguide laser of the present invention, its structure is by Fig. 2 and shown in Figure 3.Metal center electrode 1, metal bottom electrode 2 and two metal sidewall 3 constitute plate waveguide gas-discharge zone 5, high H=1-6mm, wide W=2-200mm, i.e. laser gain district.Along metal center electrode 1 length direction, between metal center electrode 1 and two metal sidewall 3, connect several coupling inductance 7, two metal sidewall 3 and directly link to each other with metal bottom electrode 2, metal bottom electrode 2 places on the metal supporting plate 6 and closely and connects.There are several electrical insulations 4 to place between the inferior horn rib B (see figure 4) and two metal sidewall, 3 (see figure 5)s of metal center electrode 1 along the electrode length direction, between metal center electrode 1 and two metal sidewall 3, form the 0.05-0.5mm gap.Metal center electrode 1 is connected with electrode connecting rod 10, and electrode connecting rod 10 passes vacuum insulation insulating bushing 11 and links to each other with vacuum chamber 12 device outward.The angle (see figure 4) value of the inferior horn rib A of metal center electrode 1 and last angle rib B is between the 20-80 degree.The angle (see figure 5) value of the interior angle rib C of two metal sidewall 3 and exterior angle rib D is between the 20-80 degree.There are several electrical insulations 4 to place between the last angle rib A (see figure 4) and metal lower extrusion plate 8 (see figure 6)s or metal vacuum chamber 12 inwalls of metal center electrode 1 along the electrode length direction, between metal center electrode 1 and metal lower extrusion plate 8 or metal vacuum chamber 12 inwalls, form the gap of 0.05-0.5mm.The angle (see figure 6) value of the angle rib E of two length directions of metal lower extrusion plate 8 is between the 20-80 degree.Metal lower extrusion plate 8 and metal upper extrusion board 9 respectively have an inclined-plane, the inclined-plane of the inclined-plane of metal lower extrusion plate 8 and metal upper extrusion board 9 (see figure 3) that directly links to each other.The relative position of the length direction by changing metal lower extrusion plate 8 and metal upper extrusion board 9, the total height that scalable metal lower extrusion plate 8 and metal upper extrusion board 9 are superimposed, thereby can be with by metal center electrode 1, metal bottom electrode 2, two metal sidewall 3, electrical insulation 4, metal supporting plate 6, coupling inductance 7, metal lower extrusion plate 8, the assembly that metal upper extrusion board 9 and electrode connecting rod 10 constitute is fixed in the metal vacuum chamber 12.
Optical resonator output eyeglass 13 is installed in the output eyeglass metal fixed mount 14, output eyeglass metal fixed mount 14 is regulated bracing frame 16 by output mirror holder metal adjusting screw(rod) 15 with output mirror holder metal and is connected, and output mirror holder metal is regulated bracing frame 16 and is fixed on (as shown in Figure 3) on the metal supporting plate 6.Feedback eyeglass 17 is installed in the back feedback eyeglass metal fixed mount 18 behind the optical resonator, back feedback eyeglass metal fixed mount 18 is regulated bracing frame 20 by back feedback mirror holder metal adjusting screw(rod) 19 with back feedback mirror holder metal and is connected, and back feedback mirror holder metal is regulated bracing frame 20 and is fixed on the metal supporting plate 6.Laser output window 22 vacuum seals are on vacuum chamber 12 front consoles (as shown in Figure 3).
In laser structure provided by the invention, because plate waveguide is all-metal waveguide, so it has good thermal conductivity and advantage cheaply.When metal materials such as employing aluminium alloy, its parts can adopt the technology of extrusion modling, can realize modularization production, further reduce cost.Compare with metal clip cardiac wave guide structure Laser Devices with in the past full ceramic waveguide structure Laser Devices or pottery, the low greater advantage of cost is arranged.Compare with all-metal waveguide structure Laser Devices in the past, owing to directly link to each other with metal bottom electrode 2 as metal sidewall 3; The inclined-plane of metal lower extrusion plate 8 directly links to each other with the inclined-plane of metal upper extrusion board 9; The plane of metal upper extrusion board 9 directly links to each other in the vacuum chamber inwall, so structure is more simple, heat conductivility further improves, and utilizes the excitation of radio frequency gas discharge can form the strip type gain region, can realize all-metal plate waveguide structure Laser Devices in conjunction with optical resonator.
Description of drawings:
Existing waveguiding structure schematic diagram in accompanying drawing 1. gas lasers
A. complete ceramic single channel waveguide structure; B. the pottery with the metal clip core structure; C. all-metal four electrode heavy caliber channel designs; D. all-metal square wave guide structure.
Accompanying drawing 2A. all-metal plate waveguide structure cross sectional representation
1. metal center electrode; 2. metal bottom electrode; 3. metal sidewall; 4. electrical insulation; 5. plate waveguide gas-discharge zone; 6. metal supporting plate; 7. coupling inductance; 8. metal lower extrusion plate; 9. metal upper extrusion board; 10. electrode connecting rod; 11. vacuum insulation insulating bushing; 12. metal vacuum chamber.
Accompanying drawing 2B. all-metal plate waveguide structure cross sectional representation
1. metal center electrode; 2. metal bottom electrode; 3. metal sidewall; 4. electrical insulation; 5. plate waveguide gas-discharge zone; 6. metal supporting plate; 7. coupling inductance; 10. electrode connecting rod; 11. vacuum insulation insulating bushing; 12. metal vacuum chamber.
Accompanying drawing 3A. all-metal plate waveguide structure longitudinal cross-section schematic diagram
1. metal center electrode; 3. metal sidewall; 4. electrical insulation; 6. metal supporting plate; 7. coupling inductance; 8. metal lower extrusion plate; 9. metal upper extrusion board; 12. metal vacuum chamber; 13. optical resonator output eyeglass; 14. output eyeglass metal fixed mount; 15. output mirror holder metal adjusting screw(rod); 16. output mirror holder metal is regulated bracing frame; 17. feed back eyeglass behind the optical resonator; 18. back feedback eyeglass metal fixed mount; 19. back feedback mirror holder metal adjusting screw(rod); 20. back feedback mirror holder metal is regulated bracing frame; 21. electrode connecting rod connector; 22. laser output window; 23. laser output beam.
Accompanying drawing 3B. all-metal plate waveguide structure longitudinal cross-section schematic diagram
1. metal center electrode; 2. metal sidewall; 4. electrical insulation; 6. metal supporting plate; 7. coupling inductance; 12. metal vacuum chamber; 13. optical resonator output eyeglass; 14. output eyeglass metal fixed mount; 15. output mirror holder metal adjusting screw(rod); 16. output mirror holder metal is regulated bracing frame; 17. feed back eyeglass behind the optical resonator; 18. back feedback eyeglass metal fixed mount; 19. back feedback mirror holder metal adjusting screw(rod); 20. back feedback mirror holder metal is regulated bracing frame; 21. electrode connecting rod connector; 22. laser output window; 23. laser output beam.
The angle rib schematic diagram of accompanying drawing 4. metal center electrodes 1
A. angle rib on the metal center electrode; B. metal center electrode inferior horn rib; H1. metal center electrode inferior horn rib height; D1. metal center electrode inferior horn rib width; H2. angle rib height on the metal center electrode; D2. angle rib width on the metal center electrode; L1. metal center electrode length; W1. metal center electrode width; H1. metal center electrode height; 21. electrode connecting rod connector.
The angle rib schematic diagram of accompanying drawing 5. metal sidewall 3
A. metal sidewall interior angle rib; B. metal sidewall exterior angle rib; H3. metal sidewall exterior angle rib height; D3. metal sidewall exterior angle rib width; H4. metal sidewall interior angle rib height; D4. metal sidewall interior angle rib width; L3. metal sidewall length; W3. metal sidewall width; H3. metal sidewall height.
The angle rib schematic diagram of accompanying drawing 6. metal lower extrusion plates 8
A. metal lower extrusion plate angle rib; H5. metal lower extrusion plate angle rib height; D5. metal lower extrusion plate angle rib width; L5. metal lower extrusion plate length; W5. metal lower extrusion plate width; H5. the high-end height of metal lower extrusion plate; H6. metal lower extrusion plate low side height.
The schematic diagram of accompanying drawing 7. metal bottom electrodes 2
L2. metal bottom electrode length; W2. metal bottom electrode width; H2. metal bottom electrode height.
Fig. 8. the schematic diagram of metal supporting plate 6
L4. metal pallet length; W4. metal supporting plate width; H5. metal supporting plate height.
Fig. 9. the schematic diagram of metal upper extrusion board 9
L6. metal lower extrusion plate length; W6. metal lower extrusion plate width; H7. metal lower extrusion plate low side height; H8. the high-end height of metal lower extrusion plate.
Figure 10. the schematic diagram in metal vacuum chamber 12
L7. metal vacuum cavity length; W7. width outside the metal vacuum chamber; W8. metal vacuum chamber insied width; H9. height outside the metal vacuum chamber; H10. metal vacuum chamber inner height; 11. vacuum insulation insulating bushing.
The relative position schematic diagram plate waveguide gas-discharge zone of accompanying drawing 11. optical resonators and plate waveguide gas-discharge zone 5; 13. optical resonator output eyeglass; 17. feed back eyeglass behind the optical resonator; 23. laser output beam; Lg. optical resonance cavity length.
Embodiment: in plate waveguide gas laser, laser gain is a lath-shaped gain.Adopt all-metal plate waveguide structure of the present invention, utilize the excitation of radio frequency gas discharge, can form strip type laser gain volume, combine, can obtain efficient laser power output (seeing Fig. 2 and Fig. 3) with optical resonator.
Example parameter is as follows:
Metal center electrode 1, metal bottom electrode 2, two metal sidewall 3, metal supporting plate 6, metal lower extrusion plate 8, metal upper extrusion board 9, output eyeglass metal fixed mount 14, back feedback eyeglass metal fixed mount 18, output mirror holder metal are regulated bracing frame 16 and back feedback mirror holder metal and are regulated bracing frame 20 and make by rust-preventing aluminum alloy, and insulating part 4 is by Al
2O
3The thin slice that the vacuum porcelain is made, electrode connecting rod 10 and coupling inductance 7 are made by metallic copper, and metal vacuum chamber 12 is made by forging aluminium alloy.Output mirror holder metal adjusting screw(rod) 15 and back feedback mirror holder metal adjusting screw(rod) 19 are made by copper alloy.
Metal center electrode 1 long L1 is 386mm, and wide W1 is that 40mm and high H1 are 20mm, and the angle of last angle rib A is 45 °, and the wide d2 of last angle rib A is 2mm, and high h2 is 2mm.The angle of inferior horn rib B is 45 °, and the wide d1 of inferior horn rib B is 2mm, and high h1 is the 2mm (see figure 4); Metal bottom electrode 2 long L2 are 386mm, and wide W2 is that 24mm and high H2 are the 17mm (see figure 7); Metal sidewall 3 long L3 are 386mm, and wide W3 is that 10mm and high H3 are 19mm, and the angle of exterior angle rib C is 45 °, and the exterior angle wide d4 of rib C is 2mm, and high h4 is 2mm.The angle of interior angle rib D is 45 °, and the wide d3 of interior angle rib D is 2mm, and high h3 is the 2mm (see figure 5); Metal supporting plate 6 long L4 are 486mm, and wide W4 is that 36mm and high H4 are the 8mm (see figure 8); Metal lower extrusion plate 8 long L5 are 386mm, and wide W5 is 40mm, and high-end high H5 is that 2mm and the high H6 of low side are 25mm, and the angle of angle rib E is 45 °, and the angle wide d5 of rib E is 2mm, and high h5 is the 2mm (see figure 6); Metal upper extrusion board 9 long L6 are 386mm, and wide W6 is 36mm, and the high H7 of low side is that 2mm and high-end high H8 are the 25mm (see figure 9); Electrical insulation 4 is that diameter is 8mm, and thickness is the thin rounded flakes of 0.1mm.Metal vacuum chamber 12 long L7 are 470mm, and outer wide W7 is 94mm, and outer high H9 is 94mm, and inner width W8 is 74mm, and interior high H10 is the 74mm (see figure 10).
Optical resonator be one from the axle pseudo confocal unsteady resonator, optical resonator output eyeglass 13 be one from crown of roll face speculum, radius of curvature r is 3280mm; Behind the optical resonator feedback eyeglass 17 be one from the axle concave mirror, radius of curvature R is 4100mm; The long Lg in optical resonator chamber is 410mm (seeing Figure 11).Output beam is of a size of the high 2mm that is, wide is 4mm.
By regulating vertical relative position of metal lower extrusion plate 8 and metal upper extrusion board 9, the total height that scalable metal lower extrusion plate 8 and metal upper extrusion board 9 are superimposed, thereby will be by metal center electrode 1, metal bottom electrode 2, metal sidewall 3, electrical insulation 4, metal supporting plate 6, coupling inductance 7, metal lower extrusion plate 8, the assembly that metal upper extrusion board 9 and electrode connecting rod 10 constitute is fixed in the metal vacuum chamber 12.Forming a high H with this is 2mm, and wide W is the all-metal plate waveguide gas-discharge zone 5 (seeing Fig. 2 and Fig. 3) of 20mm.
By from electrode connecting rod 10 input radio frequency power, 5 produce the excitation of radio frequency gas discharge in all-metal plate waveguide gas-discharge zone, can form strip type laser gain volume, combine, can obtain efficient laser power output (seeing Fig. 3 and Figure 11) with optical resonator.
Those of ordinary skill in the art can carry out all changes or modification to the specific embodiment of the present invention after reading specification of the present invention, but these changes and modification are all within the scope of claims that application is awaited the reply.
Claims (4)
1. all-metal plate waveguide gas laser, comprise the plate waveguide gas-discharge zone that metal center electrode, metal bottom electrode, two metal sidewall, electrical insulation and coupling inductance constitute, the metal center electrode is connected with the electrode connecting rod, the isolated insulation cover that electrode connecting rod etc. passes on the vacuum chamber links to each other with external devices, it is characterized in that: described two metal sidewall are that symmetrical left metal sidewall also directly links to each other with the left and right side of metal bottom electrode (2) respectively with right metal sidewall (3); Described metal bottom electrode (2) directly links to each other with vacuum chamber (12) inwall or links to each other with vacuum chamber (12) inwall by metal supporting plate (6); Described metal center electrode (1) links to each other with vacuum chamber (12) inwall with metal upper extrusion board (9) by metal lower extrusion plate (8) or metal center electrode (1) directly links to each other with vacuum chamber (12) inwall; Described electrical insulation is to place respectively between the left and right inferior horn rib (B) and left metal sidewall and right metal sidewall (3) of metal center electrode (1) along the electrode length direction, and between the left and right inferior horn rib (A) of metal center electrode (1) and the metal lower extrusion plate (8) or between the left and right upward angle rib (A) and vacuum chamber (12) inwall of metal center electrode (1), and make the electrical insulation (4) that all has a gap therebetween.
2. according to the all-metal plate waveguide gas laser of claim 1, it is characterized in that: described metal lower extrusion plate (8) and metal upper extrusion board (9) respectively have an inclined-plane, and the inclined-plane of metal lower extrusion plate (8) directly links to each other with the inclined-plane of metal upper extrusion board (9); The last plane of metal upper extrusion board (9) directly links to each other with vacuum chamber (12) inwall.
3. according to the all-metal plate waveguide gas laser of claim 1, it is characterized in that: the high 1-6mm of being in described plate waveguide gas-discharge zone, wide is 2-200mm.
4. according to the all-metal plate waveguide gas laser of claim 1, it is characterized in that: the gap between the left and right inferior horn rib (B) of described metal center electrode (1) and left metal sidewall and the right metal sidewall (3), equal tool gap is 0.05-0.5mm between the left and right upward angle rib (A) of metal center electrode (1) and the left and right upward angle rib (A) of gap between the metal lower extrusion plate (8) or metal center electrode (1) and vacuum chamber (12) inwall.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02148694 CN1200489C (en) | 2002-11-18 | 2002-11-18 | All sheet-metal strip waveguide gas laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02148694 CN1200489C (en) | 2002-11-18 | 2002-11-18 | All sheet-metal strip waveguide gas laser |
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| Publication Number | Publication Date |
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| CN1501556A CN1501556A (en) | 2004-06-02 |
| CN1200489C true CN1200489C (en) | 2005-05-04 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 02148694 Expired - Lifetime CN1200489C (en) | 2002-11-18 | 2002-11-18 | All sheet-metal strip waveguide gas laser |
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| CN1314173C (en) | 2003-09-29 | 2007-05-02 | 北京礴德恒激光科技有限公司 | One-dimensional all-metal lath waveguide gas laser |
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Owner name: SHENZHEN XINHUIDA LASER SCI. & TECH. CO., LTD.; B Free format text: FORMER OWNER: BODEHENG LASER SCIENCE AND TECHNOLOGY CO., LTD., BEIJING Effective date: 20070216 |
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Effective date of registration: 20070216 Address after: 518104 Shenzhen Baoan District City manhole town and Village Industrial Road jinmeiwei Industrial Park 2 Building 1 floor West Co-patentee after: Beijing BDHlaser Science & Technology Inc.,Ltd. Patentee after: Shenzhen Xinhuida Laser Science and Technology Co.,Ltd. Address before: 100085 No., seven street, Beijing, China Patentee before: Beijing BDHlaser Science & Technology Inc.,Ltd. |
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Granted publication date: 20050504 |
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