CN2910967Y - Apparatus for spraying antireflective coating of solar cell - Google Patents
Apparatus for spraying antireflective coating of solar cell Download PDFInfo
- Publication number
- CN2910967Y CN2910967Y CN 200520047147 CN200520047147U CN2910967Y CN 2910967 Y CN2910967 Y CN 2910967Y CN 200520047147 CN200520047147 CN 200520047147 CN 200520047147 U CN200520047147 U CN 200520047147U CN 2910967 Y CN2910967 Y CN 2910967Y
- Authority
- CN
- China
- Prior art keywords
- solar cell
- spraying
- worktable
- copper coin
- reflection film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model relates to a solar cell reducing reflection film spraying device which includes a worktable, the worktable is characterized by being provided with a pneumatic horse type indexing mechanism which is provided with four copper plates with four working positions 90 DEC apart from each other, the worktables under three working positions of the copper plate are provided with a heating platform, a heating platform and a cooling platform. The utility model can realize semi-automatic continuous production of spraying to the reducing reflection film of the solar cell surface. The device can carry out automatic control to the process time of spraying, temperature, gas flow, valve action, work pressure and so on.
Description
Technical field
The utility model relates to a kind of anti-reflection film of solar cell spray equipment.
Background technology
Solar cell is a kind of semiconducter device, and it can be directly is electric energy with the transform light energy of the sun.Owing to need not water, oil, vapour, fuel during its work, as long as the characteristics that have light just can generate electricity can be rated as cleaning in the present age, non-pollution of renewable energy, and installation and maintenance are simple, and long service life can realize unmanned, extremely people's favor is the outstanding person of new forms of energy.In recent years, sun power be applied in the whole world more and more widely, particularly in the communications field, solar power supply system just progressively replaces some traditional power units, obtains more and more general application.
The solar battery surface thin film of must growing, it not only protects the silicon solar cell performance, slows down its degeneration, the more important thing is it as antireflective coating, makes sunlight reduce to minimum in the reflection of silicon face.A large amount of light is absorbed by battery transfer electric energy to.
This layer film of growing generally adopts S
iN
xOr T
iO
xGrowth S
iN
xThe general PECVD method that adopts, the production unit of this method generally all is imports, and the company of China's production solar cell is more from German import, and an equipment needs 1,300 ten thousand Renminbi; And T
iO
xFilm production equipment (APCVD) also needs 300-500 ten thousand/platform, and the film of monocrystalline solar cell only needs T
iO
x(the SiN of certain PECVD growth
xFilm is better), many companies do not adopt the APCVD method in order to reduce cost, but adopt hand spray T
iO
xFilm.
Hand spray T
iO
xDuring film, after mixing with 70% metatitanic acid fat and 30% ethyl acetate, be ejected into by spraying and have on the 400-450 ℃ of battery, become T by thermolysis
iO
xBut the hand spray of domestic corporation only is that a stove (electricradiator heating) adds a temperature controller (400-450 ℃) at present.Because manual operation fully, efficient is lower, and the spraying human factor is more, and quality can not guarantee.
The utility model content
At the above-mentioned deficiency of prior art, the utility model proposes a kind of can the spraying and realize semi-automatic continuous production, the stable anti-reflection film of solar cell spray equipment of coating quality the antireflective coating of solar battery surface.This device can be to process time, temperature, gas flow, the valve event of spraying, and operating pressure etc. are carried out control automatically.
The anti-reflection film of solar cell spray equipment that the utility model proposes, comprise worktable, worktable is provided with pneumatic horse formula indexing mechanism, setting has four working positions and apart 90 ° copper coin on the pneumatic horse formula indexing mechanism, and the below, three working positions of copper coin is respectively equipped with heating platform, Li Rire platform and chill station.Between the second and the 3rd working position of copper coin, establish attemperator.
With respect to prior art, the utility model can be realized the semi-automatic continuous production to the antireflective coating spraying of solar battery surface.This device can be to process time, temperature, gas flow, the valve event of spraying, and operating pressure etc. are carried out control automatically.
Description of drawings
Fig. 1 is the plan view of this practical new device
Fig. 2 is the synoptic diagram of solar cell in second working position
Fig. 3 is the synoptic diagram of solar cell in the 3rd working position
Fig. 4 is the synoptic diagram of solar cell in the 4th working position
Wherein: 5 is attemperator: 6 are worktable; 7 is heating platform; 8 is chill station: 9 are pneumatic horse formula indexing mechanism.
Embodiment
Below in conjunction with drawings and Examples the present invention is described in further detail.
Shown in Fig. 1-4, a kind of anti-reflection film of solar cell spray equipment that the utility model one preferred embodiment proposes, comprise worktable 6, worktable 6 is provided with pneumatic horse formula indexing mechanism 9, be provided with on the pneumatic horse formula indexing mechanism 9 and have four working positions 1,2,3 and 4 and apart 90 ° copper coin, three work of copper coin are not provided with heating platform 7, heating platform 7 and chill station 8 in the worktable 6 of below, 3 and 4 positions.In addition, between the second and the 3rd working position 2 and 3 of copper coin, establish attemperator 5, guarantee that the heat in the copper coin rotary course does not lose.
Below in conjunction with description of drawings course of action of the present utility model.
Shown in Fig. 1-4, the silicon solar cell sheet is placed on the copper coin in 1 working position, and the copper coin some minutes half-twist of being separated by under the control of pneumatic horse formula indexing mechanism 9 rotates to 2 working position, heating on heating platform 7 is as the heating before the solar cell piece spraying; Under the control of pneumatic horse formula indexing mechanism 9, the copper coin some minutes half-twist of being separated by rotates to 3 working position, and also be a process furnace this moment under the copper coin, " row puts " sprays up and down to guarantee to begin the solar cell piece temperature automatically when reaching 400-450 ℃, promptly sends rotating signal after having sprayed; Under the control of pneumatic horse formula indexing mechanism 9, copper coin cooling on the chill station 8 of the working position of half-twist to 4 again, this moment, copper coin was water cooling plant down, with the cooling of the silicon solar cell sheet on copper coin back unloading piece.The rotation of four operating positions is synchronous, and interval time is by having sprayed the rotating signal control that the back takes place.
Claims (2)
1, a kind of anti-reflection film of solar cell spray equipment comprises worktable, it is characterized in that worktable is provided with pneumatic horse formula indexing mechanism, is provided with on the pneumatic horse formula indexing mechanism to have four working positions and apart 90.Copper coin, be respectively equipped with heating platform, heating platform and chill station in the worktable of the below, three working positions of copper coin.
2, anti-reflection film of solar cell spray equipment according to claim 1 is characterized in that establishing attemperator between the second and the 3rd working position of copper coin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520047147 CN2910967Y (en) | 2005-12-01 | 2005-12-01 | Apparatus for spraying antireflective coating of solar cell |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520047147 CN2910967Y (en) | 2005-12-01 | 2005-12-01 | Apparatus for spraying antireflective coating of solar cell |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2910967Y true CN2910967Y (en) | 2007-06-13 |
Family
ID=38132826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520047147 Expired - Fee Related CN2910967Y (en) | 2005-12-01 | 2005-12-01 | Apparatus for spraying antireflective coating of solar cell |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2910967Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103043915A (en) * | 2011-10-12 | 2013-04-17 | 东京毅力科创株式会社 | Film forming apparatus and film forming method |
-
2005
- 2005-12-01 CN CN 200520047147 patent/CN2910967Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103043915A (en) * | 2011-10-12 | 2013-04-17 | 东京毅力科创株式会社 | Film forming apparatus and film forming method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070613 Termination date: 20100104 |