CN2865130Y - Ultra-sophisticated super-magnetic micromotion actuator - Google Patents
Ultra-sophisticated super-magnetic micromotion actuator Download PDFInfo
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- CN2865130Y CN2865130Y CN 200520099220 CN200520099220U CN2865130Y CN 2865130 Y CN2865130 Y CN 2865130Y CN 200520099220 CN200520099220 CN 200520099220 CN 200520099220 U CN200520099220 U CN 200520099220U CN 2865130 Y CN2865130 Y CN 2865130Y
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- magnetostrictive material
- output shaft
- giant magnetostrictive
- actuator
- material rod
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Abstract
The utility model relates to a super precision over-mangneto micro-motion actuator, comprising a casing (1), a solenoid (2), output shafts (3), a barrel skeleton (5), an over-magnetostrictive material bar (4); wherein, the solenoid (2) is wound on the barrel skeleton (5) in the casing (1), the over-magnetostrictive material bar (4) is fitted in the barrel skeleton (5), and the output shaft (3) is pre-pressed on one end of the over-magnetostrictive material bar (4); the over-magnetostrictive material bar (4) is a hollow tube, a reverse output shaft (8) is connected at the contact end between the output shaft (3) and the over-magnetostrictive material bar (4), and the reverse output shaft (8) passes through the hollow tube and protrude from the casing (1) at the other end. The micro-motion actuator provided in the utility model has front and rear output shafts, and the movement detectors and the components controlled by the actuator can be arranged on the two output shafts, respectively; the components can be arranged easily, and the movement can be detected at a high accuracy.
Description
Technical field
The utility model relates to the telescopic drive device, is specifically related to fine motion actuator, particularly giant magnetostrictive material (GMM) fine motion actuator.
Background technology
Characteristics such as super mangneto fine motion actuator is big with its power output, displacement resolution is high, displacement is big, load capacity is strong have wide application prospect in ultraprecise location, ultraprecise processing, intelligence structure, vibration active control system.It has overcome piezoelectric ceramic actuator because the drift phenomenon that adopts lamination to bring, simultaneously since its be operated in the low pressure range, with respect to piezoelectric ceramic under high pressure work bring prevent requirements such as electric leakage, have characteristic of simple structure.
Super mangneto fine motion actuator is to utilize the super magnetic materials of clavate when external magnetic field of living in size changes, and its material corresponding dilatation takes place designs and produces.Existing super mangneto fine motion actuator structure as shown in Figure 3, it comprises shell 1, solenoid 2, output shaft 3, cylindrical skeleton 5, giant magnetostrictive material rod 4; Solenoid 2 is wrapped on the cylindrical skeleton 5 in the shell 1, and giant magnetostrictive material rod 4 is enclosed within the cylindrical skeleton 5, and output shaft 3 is pressed on the end of giant magnetostrictive material rod 4 by precompression.
The operation principle of super mangneto fine motion actuator is: when solenoid 2 energisings, can produce a magnetic field, under the effect in this magnetic field, giant magnetostrictive material rod 4 can produce the axial stretching strain, thereby can promote the motion of the output shaft 3 of fine motion actuator.The fine motion precision of output shaft 3 can reach nanoscale even Subnano-class.
In actual application, the effect of super mangneto fine motion actuator is unsatisfactory, mainly shows:
1, existing super mangneto fine motion actuator is very inaccurate; This mainly is because can't the displacement of super mangneto fine motion actuator output shaft 3 be detected accurately, cause the reason of above-mentioned defective to be: existing super mangneto fine motion actuator all adopts solid giant magnetostrictive material rod 4, make 3 of output shafts to stretch out from an end of actuator, therefore, on existing super mangneto fine motion actuator, the displacement detecting element, the parts of actuator control (as the cutting tool of feeding on the high-accuracy lathe etc.) all must be installed on the output shaft 3 of actuator front end, can cause the inconvenience that each parts is installed on the output shaft 3 like this, the parts of displacement detecting element and actuator control can influence each other, and influence the precision of displacement detecting.
2, complex structure, the volume of existing super mangneto fine motion actuator are big; Because during solenoid 2 energisings of super mangneto fine motion actuator, can produce a large amount of heats, the raising of temperature can have a strong impact on the stability of giant magnetostrictive material rod 4 work of solenoid 2 central authorities, therefore, existing super mangneto fine motion actuator all adopts the mode of liquid cools to come the heating of balance solenoid, as shown in Figure 3, also be provided with Control device of liquid cooling 13 on the existing super mangneto fine motion actuator, the direction of arrow among the figure is the flow direction of liquid.Though the cooling effect of liquid cools mode is very good, the big servicing unit that liquid cools needs causes complex structure, the volume of super mangneto fine motion actuator big, has influenced the practicability of super mangneto fine motion actuator.
Summary of the invention
Technical problem to be solved in the utility model is: the super mangneto fine motion of a kind of ultraprecise actuator is provided, and each parts is easy for installation on the output shaft of this actuator, the precision height of displacement detecting.
Another technical problem to be solved in the utility model is: the super mangneto fine motion of a kind of ultraprecise simple in structure, that volume is little actuator is provided.
The utility model solves the problems of the technologies described above the technical scheme that is adopted:
A kind of super mangneto fine motion actuator, it comprises shell, solenoid, output shaft, cylindrical skeleton, giant magnetostrictive material rod; On the solenoid winding cylindrical skeleton in the enclosure, the giant magnetostrictive material rod is enclosed within the cylindrical skeleton, and output shaft is pressed on the end of giant magnetostrictive material rod by precompression; The giant magnetostrictive material rod is a hollow pipe, and output shaft is connected a reverse output shaft with the contact jaw of giant magnetostrictive material rod, and oppositely output shaft passes hollow pipe, stretches out from the shell of the other end.
In the such scheme, be provided with thermal insulation layer between cylindrical skeleton and the giant magnetostrictive material rod.
In the such scheme, also be provided with cylindrical partition between cylindrical skeleton and the giant magnetostrictive material rod, thermal insulation layer is arranged between cylindrical skeleton and the cylindrical partition.
Compared with prior art, the super mangneto fine motion of the utility model actuator has the following advantages:
1, the giant magnetostrictive material rod is a hollow pipe, output shaft is connected a reverse output shaft with the contact jaw of giant magnetostrictive material rod, oppositely output shaft passes hollow pipe, stretch out from the shell of the other end, make that super mangneto fine motion actuator has former and later two output shafts, the parts of displacement detecting element, actuator control can be installed in respectively on two output shafts, help the installation of each parts on the output shaft, the parts of displacement detecting element, actuator control can not influenced each other, guaranteed the precision of displacement detecting.
2, adopt the method that thermal insulation layer is set between cylindrical skeleton and giant magnetostrictive material rod, the Control device of liquid cooling that replaces prior art, in the stability that guarantees the work of giant magnetostrictive material rod, the structure of super mangneto fine motion actuator is simplified greatly, volume dwindles greatly.
3, also be provided with cylindrical partition between cylindrical skeleton and the giant magnetostrictive material rod, thermal insulation layer and giant magnetostrictive material rod are separated, guaranteed the stability of giant magnetostrictive material rod work, the installation of convenient super mangneto fine motion actuator.
Description of drawings
Fig. 1 is the structural representation of the utility model embodiment
Fig. 2 is a fine motion actuator control system block diagram
Fig. 3 is the structural representation of existing super mangneto fine motion actuator
Embodiment
The super mangneto fine motion of the utility model as shown in Figure 1 actuator embodiment, it is the fine motion actuator of super precision lathe, the direction of arrow among Fig. 1 is the moving direction of output shaft.
The super mangneto fine motion of the utility model actuator embodiment comprises shell 1, solenoid 2, output shaft 3, cylindrical skeleton 5, giant magnetostrictive material rod 4, cylindrical partition 7.Shell 1 is made up of the forward and backward end cap 103,101 at barrel-type casing 102, barrel-type casing 102 two ends.Solenoid 2 is wrapped on the cylindrical skeleton 5 in the shell 1, and giant magnetostrictive material rod 4 is enclosed within the cylindrical skeleton 5; Cylindrical partition 7 is arranged between cylindrical skeleton 5 and the giant magnetostrictive material rod 4, is provided with thermal insulation layer 6 between cylindrical skeleton 5 and the cylindrical partition 7.Be pressed with pre-compressed spring 9 on the output shaft 3, output shaft 3 is pressed on the end of giant magnetostrictive material rod 4 by the precompression of pre-compressed spring 9.
The giant magnetostrictive material rod 4 of fine motion actuator is a hollow pipe, and the two ends of hollow pipe are provided with permanent magnet 11, and output shaft 3 is pressed on the permanent magnet 11 of giant magnetostrictive material rod 4 one ends by the precompression of pre-compressed spring 9.
Actuator control parts---the cutter 10 of super precision lathe is arranged on the end of output shaft 3, displacement detecting element---displacement transducer 12 is arranged on the reverse output shaft 8, as shown in Figure 2, the output of displacement transducer 12 is connected with industrial computer.
The DGS-6C series differential transformer transducer (LVDT) that the commercial weight instrument was produced during displacement transducer 12 can adopt.
Thermal insulation layer 6 can adopt aluminosilicate fiber cotton.
For reducing the caloric value of solenoid 2, the solenoid 2 of the utility model embodiment has adopted the solenoid of little electric current, the big number of turn.
The actuator that the super mangneto fine motion of the utility model actuator also can be used as other ultra-precision machine tool uses.
Claims (3)
1, the super mangneto fine motion of ultraprecise actuator, it comprises shell (1), solenoid (2), output shaft (3), cylindrical skeleton (5), giant magnetostrictive material rod (4); Solenoid (2) is wrapped on the interior cylindrical skeleton (5) of shell (1), and giant magnetostrictive material rod (4) is enclosed within the cylindrical skeleton (5), and output shaft (3) is pressed on the end of giant magnetostrictive material rod (4) by precompression; It is characterized in that: giant magnetostrictive material rod (4) is a hollow pipe, and output shaft (3) is connected a reverse output shaft (8) with the contact jaw of giant magnetostrictive material rod (4), and oppositely output shaft (8) passes hollow pipe, stretches out from the shell (1) of the other end.
2, super mangneto fine motion actuator as claimed in claim 1 is characterized in that: be provided with thermal insulation layer (6) between cylindrical skeleton (5) and the giant magnetostrictive material rod (4).
3, super mangneto fine motion actuator as claimed in claim 2 is characterized in that: also be provided with cylindrical partition (7) between cylindrical skeleton (5) and the giant magnetostrictive material rod (4), thermal insulation layer (6) is arranged between cylindrical skeleton (5) and the cylindrical partition (7).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520099220 CN2865130Y (en) | 2005-12-06 | 2005-12-06 | Ultra-sophisticated super-magnetic micromotion actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520099220 CN2865130Y (en) | 2005-12-06 | 2005-12-06 | Ultra-sophisticated super-magnetic micromotion actuator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2865130Y true CN2865130Y (en) | 2007-01-31 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520099220 Expired - Fee Related CN2865130Y (en) | 2005-12-06 | 2005-12-06 | Ultra-sophisticated super-magnetic micromotion actuator |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2865130Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101439476B (en) * | 2008-12-03 | 2010-04-07 | 苏州大学 | Clamping mechanism for chucking appliance system |
-
2005
- 2005-12-06 CN CN 200520099220 patent/CN2865130Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101439476B (en) * | 2008-12-03 | 2010-04-07 | 苏州大学 | Clamping mechanism for chucking appliance system |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20070131 Termination date: 20100106 |