CN2854762Y

CN2854762Y - Short pulse laser precision etching device for optical disk master disk surface and interior

Info

Publication number: CN2854762Y
Application number: CN 200520046634
Authority: CN
Inventors: 顾爱宜; 贾锋
Original assignee: Shanghai Institute of Laser Technology
Current assignee: Shanghai Institute of Laser Technology
Priority date: 2005-11-18
Filing date: 2005-11-18
Publication date: 2007-01-03
Anticipated expiration: 2015-11-18

Abstract

The utility model discloses a device for short-pulse laser precision etching of the surface and interior of CD mother disc, and is characterized in that it comprises a laser that is YVO solid frequency double laser or YAG lamp-pump solid frequency double laser, with short pulse width of no more than 10ns, frequency of 100-1,000Hz and pulse energy of more than 0.5mj; the beam emitted from the laser passes through a beam expanding telescope and a two-dimensional high-speed scanning mirror and enters into a F-Q optical focusing device; in the laser, an electro-optic Q-switch and a polarizer are arranged between an omni-directional reflector and an output mirror; a frequency-doubling crystal having temperature-control plate is arranged between an output mirror and a short-wave-pass filter; and a laser delivery device used in the device consists of a two-dimensional high-speed scanning mirror and a workbench driven by a stepper motor or servo motor. The utility model overcomes the problem of the prior arts, and realizes the etching of pattern or bar code on glass surface by using short-pulse laser. The utility model is mainly used for the etching of bar code and label on the surface of CD mother disc.

Description

Be used for CD master-disc surface and the inner accurate etching device of short-pulse laser

Technical field

The utility model relates to a kind of CD master-disc surface and inner accurate etching device of short-pulse laser of being used for, and is a kind of novel at engraving laser processing device on glass, belongs to technical field of laser processing.

Background technology

Traditional etching is to use film and chemical etching medicament, for example at etching souvenir on glass, must do template earlier, go out depression with acid corrosion then, its shortcoming is that the loaded down with trivial details souvenir edge that carves of formality is crude, the sewage that stays in the etching process will be handled, and so far, still adopts this method in our production run of CD master-disc.And the laser digitizing etching and processing system of a new generation comprises: be the various laser marking machines of light source with carbon dioxide laser or Nd:YAG solid state laser, they can various metals and nonmetal on mark, but in mark on glass, the mark that carves is very coarse, and, to greatest extent also can only some tiny letters of marking, so far, the online CO2 laser marking machine that we produce can only be on the glass kinescope the several letters of marking, it can not etch large-area decorative pattern or bar code, because can make glass surface burst phenomenon.

Summary of the invention

The purpose of this utility model is in order to change so far also the method in traditional chemical corrosion of using, overcome present use carbon dioxide laser marking machine, a series of defectives that import radio frequency CO2 marking machine is produced provide a kind of CD master-disc surface and inner accurate etching device of short-pulse laser of being used for.

The technical solution of the utility model is: a kind of CD master-disc surface and inner accurate etching device of short-pulse laser of being used for, it comprises: laser instrument, Laser Power Devices, water-cooling system, scanning galvanometer, F-θ lens, worktable, control device, be characterized in, described laser instrument is with the semiconductor diode pump ND:YVO solid frequency double laser of high repetition frequency, or with the ND:YAG lamp pump type solid frequency double laser of high repetition frequency, short pulse width in 10ns, pulsed frequency in the 100-1000HZ. pulse energy greater than 0.5mj (wavelength 532nm); The light beam that is sent by laser instrument passes through beam expanding telescope, two-dimentional X, and Y high-velocity scanning galvanometer, entering focal length is that 80-160mm is the F-Q optical focusing device; In described laser instrument, be provided with electric-optically Q-switched switch between completely reflecting mirror and the outgoing mirror and be provided with polaroid, the frequency-doubling crystal that has temperature control plate places between outgoing mirror and the short-pass; The laser conveyer that this device is selected for use is by the two-dimentional X of a cover, Y high-velocity scanning galvanometer and be made up of the three-dimensional working platform of stepper motor or driven by servomotor.

The beneficial effects of the utility model are to have overcome present use carbon dioxide laser marking machine, a series of defectives that import radio frequency CO2 marking machine is produced, utilize short-pulse laser can be on glass surface various patterns of etching and bar code, this device is mainly used in the etching of CD master-disc surface bar code and trade mark, can be the inferior surface etch portrait and the souvenir of ID card card, and any surface finish is harmless, and the method can be used for immediately taking instant etching, is enough to play antifalse effect.

Description of drawings

Fig. 1 is the utility model theory diagram;

Fig. 2 is the utility model structure principle chart;

Fig. 3 is a laser instrument basic composition synoptic diagram;

Fig. 4 is the control interface block scheme.

Embodiment

By shown in Figure 1, a kind of CD master-disc surface and inner accurate etching device of short-pulse laser of being used for, it comprises: laser instrument, Laser Power Devices, water-cooling system, scanning galvanometer, F-θ lens, worktable, control device, described laser instrument is with the semiconductor diode pump ND:YVO solid frequency double laser of high repetition frequency, or with the ND:YAG lamp pump type solid frequency double laser of high repetition frequency, short pulse width is in 10ns, and pulsed frequency is that the 100-1000HZ. pulse energy is greater than 0.5mj (wavelength 532nm); By shown in Figure 2, this device for mechanical structure division is by laser instrument 1, two-dimentional X, Y high-velocity scanning galvanometer 2,3, F-θ lens 4 are formed, workpiece 5 places on the worktable 6, the light beam that laser instrument sends passes through beam expanding telescope, two dimension X, Y high-velocity scanning galvanometer, entering focal length is that 80-160mm is the F-Q optical focusing device; By shown in Figure 3, laser instrument is made up of completely reflecting mirror 7, Q crystal 8, polaroid 9, laser pump cavity 10, outgoing mirror 11, frequency-doubling crystal 12, short-pass 13, beam expanding telescope 14, Q-switch 15 and temperature control plate 16, and electric-optically Q-switched switch and polaroid place between completely reflecting mirror and the outgoing mirror.The frequency-doubling crystal 12 that has temperature control plate 16 places between outgoing mirror 11 and the short-pass 13; The laser conveyer that this device is selected for use is by the two-dimentional X of a cover, Y high-velocity scanning galvanometer and form by the three-dimensional working platform of stepper motor or driven by servomotor, galvanometer can only be controlled at an interior among a small circle motion, the precision and the speed of its principal security etching, and on a large scale motion is that the motion by the high-precision three-dimensional worktable realizes.

The control device of this device is made up of control computer and interface circuit, and by shown in Figure 4, interface circuit is made up of decoding, driving circuit, D/A conversion, amplifier, and output is connected with Laser Power Devices, X galvanometer, Y galvanometer.This device is by the identification to various image software, engages, and editor is curled, and converts the software of laser ablation function identification after the repairing automatically to, then directly output.This device software is by two major parts: process software and Control Software.Process software: can discern desired picture proof, as: DXF file, BMP file, JPG file, PLT file etc.Parameter is set as requested, comprises the number of plies, superficial density, seamed edge density, convergent-divergent, translation, rotation etc.The point cloud of surface distributed can truly show the model of figure, can show some cloud effects, the optimization path of some cloud output, and scanning galvanometer and X that five dimensions are controlled, Y, the Z worktable can be by the time of saving most, the speed walking.Output with nexus cloud, the output that the some cloud produces can be 2 computers of networking, is not subjected to the restriction in distance and space, can increase other figures respectively and arbitrarily put by ranking in same figure.Control Software: comprise scanning galvanometer and worktable X, Y, the three-dimensional motion of Z axle, movement velocity is adjusted in the output of control laser spots, controls focal position of laser automatically, the position of automatic control module, the boundary treatment of control such as scanning galvanometer and worktable scope.

Claims

1, a kind of CD master-disc surface and inner accurate etching device of short-pulse laser of being used for, it comprises: laser instrument, Laser Power Devices, water-cooling system, scanning galvanometer, F-θ lens, worktable, control device, it is characterized in that, described laser instrument is with the semiconductor diode pump ND:YVO solid frequency double laser of high repetition frequency, or with the ND:YAG lamp pump type solid frequency double laser of high repetition frequency, short pulse width is in 10ns, pulsed frequency is at 100-1000HZ, and pulse energy is greater than 0.5mj (wavelength 532nm); The light beam that is sent by laser instrument passes through beam expanding telescope, two-dimentional X, and Y high-velocity scanning galvanometer, entering focal length is that 80-160mm is the F-Q optical focusing device; In described laser instrument, be provided with electric-optically Q-switched switch and polaroid between completely reflecting mirror and the outgoing mirror, the frequency-doubling crystal that has temperature control plate places between outgoing mirror and the short-pass; The laser conveyer that this device is selected for use is by the two-dimentional X of a cover, Y high-velocity scanning galvanometer and be made up of the three-dimensional working platform of stepper motor or driven by servomotor.