CN2828062Y - Preparation system for continous batch preparing diamond film - Google Patents
Preparation system for continous batch preparing diamond film Download PDFInfo
- Publication number
- CN2828062Y CN2828062Y CNU2005200763767U CN200520076376U CN2828062Y CN 2828062 Y CN2828062 Y CN 2828062Y CN U2005200763767 U CNU2005200763767 U CN U2005200763767U CN 200520076376 U CN200520076376 U CN 200520076376U CN 2828062 Y CN2828062 Y CN 2828062Y
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- Prior art keywords
- housing
- substrate
- expansion link
- sealing
- diamond film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- 229910003460 diamond Inorganic materials 0.000 title claims abstract description 53
- 239000010432 diamond Substances 0.000 title claims abstract description 53
- 238000002360 preparation method Methods 0.000 title claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 82
- 238000003825 pressing Methods 0.000 claims description 27
- 238000000151 deposition Methods 0.000 claims description 26
- 238000007789 sealing Methods 0.000 claims description 13
- 239000011521 glass Substances 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 3
- 230000008021 deposition Effects 0.000 abstract description 12
- 238000003763 carbonization Methods 0.000 abstract description 10
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 238000010000 carbonizing Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 10
- 239000007789 gas Substances 0.000 description 7
- 238000009434 installation Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 238000000576 coating method Methods 0.000 description 4
- 238000001816 cooling Methods 0.000 description 4
- 230000005611 electricity Effects 0.000 description 4
- ORILYTVJVMAKLC-UHFFFAOYSA-N adamantane Chemical compound C1C(C2)CC3CC1CC2C3 ORILYTVJVMAKLC-UHFFFAOYSA-N 0.000 description 3
- 229910001573 adamantine Inorganic materials 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000000110 cooling liquid Substances 0.000 description 3
- -1 electricity Substances 0.000 description 3
- 239000000376 reactant Substances 0.000 description 3
- 229910052715 tantalum Inorganic materials 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000033001 locomotion Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 239000002113 nanodiamond Substances 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000013543 active substance Substances 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000009347 mechanical transmission Effects 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The utility model designs a preparation system for continuously and multitudinously preparing diamond films for aiming at the present CVD diamond which has the problems of low efficiency and high cost in preparation. The utility model is characterized in that substrate storehouses (8) are arranged in a housing (26) and at the periphery of a substrate workbench (1), a mechanical handle (3) is connected with one end of a telescopic rod (27), and a draw rod (28) is arranged in the telescopic rod (27). One end of the draw rod (28) is screwed with an actuating mechanism (301) of the mechanical hand (3), and the other end is provided with a hand wheel (17). One end of a metal hose (11) is connected in seal with the housing (26) at the periphery of a conical hole (29), the other end is connected in seal with the telescopic rod (27), and the housing (26) is provided with a transparent closed observation window (30). The utility model ensures the continuous deposition of the CVD diamond films and the continuous use of lamp filaments after the carbonization, reduces the consumption of the lamp filaments, reduces the time for reinstalling the lamp filaments, pumping the vacuum, carbonizing the lamp filaments, inflating the air towards a vacuum chamber, etc., enhances the preparation efficiency of the diamond films and reduces the manufacturing cost of the CVD diamond films.
Description
Technical field
The utility model relates to a kind of chemistry for gas phase depositing diamond film manufacturing system, and especially a kind of energy continuous batch prepares the preparation system of diamond film.
Background technology
At present, every performances such as the adamantine mechanics of chemical vapour deposition (be called for short CVD), calorifics, acoustics, electricity, optics and chemistry have reached or near the performance of natural diamond, have had broad application prospects in current high-tech area.Heated filament CVD legal system is equipped with diamond film and has that the speed of growth is very fast, the growth conditions parameter control requires tight, chamber pressure a wider range, the film forming area is big, facility investment is little, simple in structure, can realize advantage such as suitability for industrialized production, heated filament CVD method is to prepare one of the most frequently used method of CVD diamond film at present.At first need the substrate material of depositing diamond film is placed in the vacuum chamber when adopting heated filament CVD method depositing diamond film, by vacuum pump the air in the vacuum chamber is extracted out, feed reactant gases to vacuum chamber then, the energy that reactant gases provides at heated filament issues estranged separating, and the active substance of generation generates diamond at substrate surface.The heated filament that hot wire process adopted is tungsten filament or tantalum wire, under deposition CVD adamantine condition, their can with the carbon generation chemical reaction in the reactant gases, generate metallic carbide.Theoretically; tungsten filament after the carbonization or tantalum wire have very long work-ing life; but the depositing system that adopts need be shut down and the substrate that has deposited the CVD diamond film could be taken out at present, changes new substrate could continue to carry out diamond film on the next batch substrate preparation then again.Can bring following problem like this:
1. the hot-wire temperature is from quickly falling to room temperature more than 2200 ℃ in stopping process, and fully the heated filament after the carbonization ruptures under the effect of thermal stresses easily, and post-rift heated filament can't continue to use, and causes the waste of filament like this.Because filament material tungsten and tantalum all are that the price of precious metal, particularly tantalum is very expensive, the consumption increase of filament can cause the manufacturing cost of CVD diamond film to increase.
2. reinstall filament at every turn and need about 20 minutes, substrate needs again equipment to be vacuumized after putting into vacuum chamber, the time that equipment is vacuumized approximately needs 30 minutes at every turn, each carbonized filament makes filament reach basicly stable state approximately needs 8 hours, taking-up has deposited the substrate of CVD diamond film and need inflate vacuum chamber, and the time of each inflation approximately needs 10 minutes.Preparation CVD diamond film like this, each owing to use aspects such as new filament is installed at filament, vacuumized, filament carbonization, vacuum chamber inflation just need spend more about 9 hours time of expense, cause the preparation efficiency of diamond film to reduce greatly.
Summary of the invention
The purpose of this utility model is at the deficiencies in the prior art, design a kind of new CVD diamond film continuous preparation system towards many substrates, this system had both guaranteed the non-stop run of depositing device, filament after the carbonization no longer ruptures, can use continuously, reduce the consumption of filament, reduced again reinstall filament, vacuumize, carbonized filament, vacuum chamber inflation equal time, improve the preparation efficiency of diamond film greatly, reduced the manufacturing cost of diamond film.
The technical solution of the utility model is:
A kind of continuous batch prepares the preparation system of diamond film, it mainly comprises a vacuum-tight housing 26 and is arranged in the substrate working platform 1 of the arrangement depositing diamond film substrate 2 of housing 26, it is characterized in that in housing 26, one or more substrate warehouse 8 is installed around the substrate working platform 1, mechanical manipulator 3 links to each other with locked spacer 5 by nut 6 with the end that expansion link 27 stretches in the housing 26, pull bar 28 is installed in the expansion link 27, the end that pull bar 28 is arranged in housing 26 stretches out topworks's 301 bolts (promptly being threaded) of expansion link 27 and mechanical manipulator 3, pull bar 28 is positioned at the housing 26 outer the other ends and also stretches out outside the expansion link 27, and handwheel 17 is installed on it; Housing 26 is provided with the tapered hole 29 that installs expansion link 27, and expansion link 27 is positioned on housing 26 end outward metallic hose 11 is installed, and an end of metallic hose 11 links to each other with tapered hole 29 housing 26 sealings on every side, and the other end links to each other with expansion link 27 sealings; With the housing 26 at tapered hole 29 relative position places on have airtight transparent windows 30.
The utility model has also further been taked following technical measures:
Described substrate working platform 1 is the lift rotary work-table, and described substrate warehouse 8 is for deciding angular turn formula warehouse.
One end of metallic hose 11 links to each other with housing 26 by pressing plate 10, and pressing plate 10 is weldingly connected with an end of metallic hose 11, and pressing plate 10 links to each other with housing 26, between pressing plate 10 and housing 26 sealing-ring 9 is installed, and in the periphery of pressing plate 10 water-cooled tube 25 is installed.
The other end of metallic hose 11 links to each other with expansion link 27 sealings by seat 12, sealing-ring 13, pressure ring 14, pressing plate 24, seat 12, sealing-ring 13, pressure ring 14, pressing plate 24 all are sleeved on the expansion link 27, sealing-ring 13 compresses in present 12 by pressure ring 14, pressure ring 14 is by in pressing plate 24 location present 12, and an end of metallic hose 11 links to each other with seat 12.
An end that does not link to each other with seat 22 of described control stick 21 is positioned on the supporting plate 18, and steady brace 19 is installed on the supporting plate 18.
Described transparent airtight observation window 30 is made up of vacuum high-temperature glass 31, sealing-ring 32, pressure ring 34, and water-cooled tube 33 is installed around pressure ring 34.
The beneficial effects of the utility model:
1, one-step installation has the substrate of all identical or different specifications to finish in a clamping process in vacuum oven, the peace loading and unloading of substrate is taken in the vacuum chamber and finishes in the situation that does not need to open vacuum chamber in this process, filament after the carbonization can not rupture because temperature reduces like this, and filament can use for a long time.Specifically, deposit substrate by a substrate warehouse, the substrate for the treatment of sedimentary substrate and having finished the CVD diamond film deposition all leaves on the substrate warehouse in the vacuum chamber, finishes installation, substrate the transmission worktable and substrate warehouse between of substrate at worktable by the operation of mechanical manipulator.The substrate warehouse cools off by recirculated water, and the temperature that keeps the substrate warehouse makes that substantially in room temperature the substrate that is placed on the substrate warehouse can carbon distribution in vacuum chamber.Size according to substrate is different with shape, adjusts substrate warehouse rotation respective angles, can realize substrate discharging in order on the substrate warehouse.As long as the size of the quantity in substrate warehouse and vacuum chamber allows, a clamping can realize that short run, many kinds or few kind, successive sedimentation in enormous quantities prepare the CVD diamond coatings in theory.
2, operator operate the mechanical manipulator in the vacuum chamber by observation window outside vacuum chamber.The function part of mechanical manipulator adopts metallic hose and vacuum chamber to flexibly connect, and this helps the extracting of mechanical manipulator and operation such as moves.Moving by covering device control (being expansion link 27) of mechanical manipulator, this covering device can realize from substrate working platform realizing that to moving the substrate warehouse substrate transmits between substrate working platform and substrate warehouse.The clamping of mechanical manipulator with loosen by another set of device control (being pull bar 28), clamp substrate after, control device can not cause coming off of substrate in the operation of mobile manipulator.Vacuum chamber connects the manipulator's of vacuum chamber connection portion outward and adopts vacuum-sealing, and extraneous air does not enter vacuum chamber when guaranteeing operation.The starting point of mechanical manipulator and the position of terminal point determine by locating device, and operation can quick and precisely be finished to make that the peace loading and unloading of substrate is got etc.
3, on the substrate of different shapes, different sizes during the depositing diamond film, can finish the peace loading and unloading of the substrate of different shapes, different sizes such as is got at operation by changing corresponding mechanical manipulator.
4, the recirculated water cooling is partly adopted in the function part of mechanical manipulator and vacuum-sealing, guarantees that these parts can not be subjected to the radiation temperature rising of heated filament because of mechanical manipulator.
5, improve adamantine preparation efficiency, reduce manufacturing cost.
6, be the concrete implementation result example of the utility model below:
(1) behind employing the utility model, at H
2-CH
4Prepare diamond-coated tools under the system, adopting diameter is the substrate working platform of φ 60mm, heated filament adopts tantalum wire, the substrate working platform last time can be placed 6 cutters, the substrate warehouse last time can be placed 18 cutters, and the cost that deposits 24 cutter tantalum wires like this is about 50 yuan, filament installation, filament carbonization, vacuumizes equal time about 9 hours, every batch of depositing time is about 6 hours, about 24 hours of the depositing time of 24 cutter diamond coatings.And do not adopt the utility model to prepare diamond-coated tools, filament is installed and once can be deposited 6 cutters, the cost of tantalum wire is about 200 yuan when depositing 24 cutters, filament installation, filament carbonization, vacuumizes equal time about 36 hours, about 24 hours of the depositing time of diamond coatings.Adopt behind the utility model deposition of diamond coatings on 24 cutters equally, 150 yuan of the costs of saving tantalum wire, save filament installation, filament carbonization, vacuumized equal time 27 hours, about 540 yuan of the cost of saving water, electricity, gas, the cost of average every diamond-coated tools can reduce by 28.75 yuan.
(2) behind employing the utility model, at H
2-C
2H
5Prepare diamond thick-film under the OH system, adopting diameter is φ 60mm molybdenum substrate, heated filament adopts φ 0.6mm tantalum wire, diamond film deposition thickness is 0.5mm, on a substrate warehouse, once place 3 of φ 60mm molybdenum substrates, a heated filament is installed like this, the diamond film that can to deposit 4 diameters be φ 60mm.Compare with not adopting the utility model, the diamond film that to prepare 4 diameters equally be φ 60mm can be saved 180 yuan of heated filament expenses, reduces filament installation, filament carbonization, vacuumizes equal time about 27 hours, saves about 810 yuan of deposition expense such as water, electricity, gas.
(3) behind employing the utility model, at H
2-CH
4Carry out the mechanism research trial of nano-diamond membrane under the-Ar system on ceramic matrix, adopt orthogonal test, considered 5 factors, each factor is got 3 levels, selects L
27(3
13) orthogonal table, each pilot adopts 2 test specimens, and finishing a no multiple orthogonal test needs 54 test specimens.For the precision of warranty test, each pilot adopts 4 revision tests, and total test number (TN) is 108 times, and the test specimen sum needs 216.It is the substrate working platform of φ 30mm that diameter is adopted in test, places 2 test specimens on each test substrate worktable, and heated filament adopts tantalum wire.32 test specimens can be laid in the substrate warehouse, and adopting 7 filaments of the utility model installation just can finish one has multiple L 4 times
27(3
13) the mechanism research orthogonal test of nano-diamond membrane.Compare with not adopting the utility model, can reduce heated filament and install 101 times, save about 3000 yuan of filament expense, about 900 hours of minimizing time, about 13600 yuan of deposition expenses such as saving water, electricity, gas.
Description of drawings
Fig. 1 is a structural representation of the present utility model.
Fig. 2 is a viewing window structural representation of the present utility model.
Fig. 3 is the structural representation of mechanical manipulator of the present utility model.
Embodiment
Below in conjunction with drawings and Examples the utility model is further described.
As shown in Figure 1, 2, 3.
Fig. 1 is the synoptic diagram of CVD diamond film continuous preparation system.Among the figure, the substrate 2 of depositing diamond film is placed on the substrate water-cooled worktable 1, treat sedimentary substrate 7 be placed on can substrate warehouse 8 by certain angle rotation on, realize the deposition substrate 7 for the treatment of on the substrate warehouse 8 is placed on the worktable 1 by manipulator 3, and the substrate of having finished the CVD diamond film deposition on the worktable 1 got back on the substrate warehouse 8, substrate warehouse 8 both can adopt single storehouse shown in Figure 1, single layer structure, also can be designed to the many chamber structures of individual layer as required, each substrate warehouse rotates around the center under the drive of conventional mechanical transmission mechanism, substrate warehouse 8 also can be designed to multilayer, many chamber structures, the Machine Design by routine guarantee that mechanical manipulator 3 can obtain treating deposition substrate 7 and return in the substrate warehouse 8 sedimentary substrate on the worktable 1 is in time total on each substrate warehouse 8 easily.Mechanical manipulator 3 links to each other with expansion link 27 by nut 6, and locked spacer 5 prevents that nut 6 is loosening, makes mechanical manipulator 3 reliable with being connected of expansion link 27.Operation handle arm 21 drive mechanical manipulators 3 move along the axis direction of expansion link 27, the accurate location of moving determines that by three steady braces 19 that are fixed on the supporting plate 18 position of steady brace 19 on supporting plate 18 can be regulated to adapt to the operation of different shapes and big or small substrate.Expansion link 27 passes the taper hole 29 on the housing 26, and can do the rotation of certain angle in taper hole 29, so as to allow mechanical manipulator 3 grasp exactly depositing diamond substrate 2 or etc. the substrate 7 of depositing diamond.The shaft shoulder on the pull bar 28 and collar 4 make pull bar 28 to rotate along the axis of pull bar 28 and can not move along the axis direction of pull bar 28, handwheel 17 turns clockwise, handwheel 17 drives pull bars 28 and clockwise rotates, and the screw rod on the pull bar 28 drives mechanical manipulator 3 motions, makes mechanical manipulator 3 closures, thereby clamping work pieces, be rotated counterclockwise handwheel 17, handwheel 17 drives pull bar 28 and clockwise rotates, and the screw rod on the pull bar 28 drives mechanical manipulator 3 motions, make mechanical manipulator 3 unclamp, thereby unclamp workpiece.Pressing plate 10, metallic hose 11, seat 12 and 26 flexible linking to each other of vacuum chamber housing make expansion link 27 to better meet the operation of mechanical manipulator 3 with certain angular region swing.Metallic hose 11 is realized connecting and vacuum-sealing by welding with pressing plate 10, seat 12, and pressing plate 10 realizes that by sealing-ring 9 vacuum-sealing with vacuum chamber housing 26, pressing plate 24, sealing-ring 13 and pressure ring 14 realize the vacuum-sealing of seat 12 and expansion link 27.Pressing plate 20, sealing-ring 15 and pressure ring 16 are realized the vacuum-sealing of seat 22 and pull bar 28.Circulating cooling liquid in the cooling tube 23 is used to reduce the temperature of seat 22, protection sealing-ring 15 and operation handle arm 21, operation handwheel 17.Circulating cooling liquid in the cooling tube 25 is used to reduce the temperature of pressing plate 10, protection sealing-ring 9.
Fig. 2 is the structural representation of airtight transparent sight hole 30.Among the figure; the high temp glass 31 that sees through observation window can observe the operational circumstances of mechanical manipulator 3 shown in (being Fig. 1) in the vacuum chamber from the outside; high temp glass 31 is installed on the vacuum chamber housing 26 of metallic hose 11 tops by pressure ring 34; realize the vacuum-sealing of high temp glass 31 and vacuum chamber housing 26 by sealing-ring 32; circulating cooling liquid in the cooling tube 33 is used to reduce the temperature of vacuum chamber housing 26, protection sealing-ring 32.
State graph when Fig. 3 is mechanical manipulator 3 clamping work pieces.3 is mechanical manipulator among the figure, cylindrical component for deposition substrate 2 or etc. deposition substrate 7.
The mounting means of the heated filament that present embodiment does not relate to, vacuum extractor, electric control gear etc. are all same as the prior art.
Claims (8)
1, a kind of continuous batch prepares the preparation system of diamond film, it mainly comprises a vacuum-tight housing (26) and is arranged in the substrate working platform (1) of the arrangement depositing diamond film substrate (2) of housing (26), it is characterized in that in housing (26), substrate warehouse (8) is installed around the substrate working platform (1), mechanical manipulator (3) links to each other with the end that expansion link (27) stretches in the housing (26), pull bar (28) is installed in the expansion link (27), the end that pull bar (28) is arranged in housing (26) stretches out topworks (301) bolt of expansion link (27) and mechanical manipulator (3), pull bar (28) is positioned at the outer the other end of housing (26) and also stretches out outside the expansion link (27), and handwheel (17) is installed on it; Housing (26) is provided with the tapered hole (29) that installs expansion link (27), expansion link (27) is positioned on the outer end of housing (26) metallic hose (11) is installed, one end of metallic hose (11) links to each other with tapered hole (29) housing (26) sealing on every side, and the other end links to each other with expansion link (27) sealing; With the housing (26) at tapered hole (29) relative position place on have airtight transparent windows (30).
2, continuous batch according to claim 1 prepares the preparation system of diamond film, it is characterized in that described substrate working platform (1) is the lift rotary work-table, and described substrate warehouse (8) is for deciding angular turn formula warehouse.
3, continuous batch according to claim 1 prepares the preparation system of diamond film, an end that it is characterized in that metallic hose (11) links to each other with housing (26) by pressing plate (10), pressing plate (10) links to each other with housing (26), between pressing plate (10) and housing (26), sealing-ring (9) is installed, water-cooled tube (25) is installed in the periphery of pressing plate (10).
4, continuous batch according to claim 1 prepares the preparation system of diamond film, the other end that it is characterized in that metallic hose (11) links to each other with expansion link (27) sealing by seat (12), sealing-ring (13), pressure ring (14), pressing plate (24), seat (12), sealing-ring (13), pressure ring (14), pressing plate (24) all are sleeved on the expansion link (27), sealing-ring (13) compresses in present (12) by pressure ring (14), pressure ring (14) is by in pressing plate (24) location present (12), and an end of metallic hose (11) links to each other with seat (12).
5, continuous batch according to claim 1 prepares the preparation system of diamond film, it is characterized in that expansion link (27) is positioned at is equipped with seat (22), a sealing-ring (15), pressure ring (16) and pressing plate (20) on the outer end end of housing (26), pull bar (28) passes seat (22) and pressing plate (20), sealing-ring (15) is sleeved on pull bar (28) and goes up and be positioned under the effect of pressure ring (16) in the seat (22), pressure ring (16) is by in pressing plate (20) location present (22) that links to each other with seat (22), and the outside of seat (22) also is equipped with water-cooled tube (23); The control stick (21) of expansion link (27) links to each other with seat (22).
6, continuous batch according to claim 5 prepares the preparation system of diamond film, it is characterized in that an end that does not link to each other with seat (22) of described control stick (21) is positioned on the supporting plate (18), and steady brace (19) is installed on the supporting plate (18).
7, continuous batch according to claim 1 prepares the preparation system of diamond film, it is characterized in that described transparent airtight observation window (30) is made up of vacuum high-temperature glass (31), sealing-ring (32), pressure ring (34), water-cooled tube (33) is installed around pressure ring (34).
8, continuous batch according to claim 1 prepares the preparation system of diamond film, it is characterized in that described substrate warehouse (8) is multilayer, many chamber structures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005200763767U CN2828062Y (en) | 2005-10-14 | 2005-10-14 | Preparation system for continous batch preparing diamond film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU2005200763767U CN2828062Y (en) | 2005-10-14 | 2005-10-14 | Preparation system for continous batch preparing diamond film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2828062Y true CN2828062Y (en) | 2006-10-18 |
Family
ID=37079620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU2005200763767U Expired - Lifetime CN2828062Y (en) | 2005-10-14 | 2005-10-14 | Preparation system for continous batch preparing diamond film |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2828062Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100387752C (en) * | 2005-10-14 | 2008-05-14 | 南京航空航天大学 | System for continuous batch preparing diamond film |
| CN101560649B (en) * | 2009-06-03 | 2010-11-10 | 中南大学 | Multipurpose industrial equipment for mass production of CVD diamond film |
| CN107400875A (en) * | 2017-07-12 | 2017-11-28 | 华中科技大学 | A kind of hot-filament chemical vapor deposition equipment |
-
2005
- 2005-10-14 CN CNU2005200763767U patent/CN2828062Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100387752C (en) * | 2005-10-14 | 2008-05-14 | 南京航空航天大学 | System for continuous batch preparing diamond film |
| CN101560649B (en) * | 2009-06-03 | 2010-11-10 | 中南大学 | Multipurpose industrial equipment for mass production of CVD diamond film |
| CN107400875A (en) * | 2017-07-12 | 2017-11-28 | 华中科技大学 | A kind of hot-filament chemical vapor deposition equipment |
| CN107400875B (en) * | 2017-07-12 | 2019-10-08 | 华中科技大学 | A kind of hot-filament chemical vapor deposition equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20080514 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |