CN2804794Y - Optical measuring device for three-D shape and form of micro-objects - Google Patents
Optical measuring device for three-D shape and form of micro-objects Download PDFInfo
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- CN2804794Y CN2804794Y CN 200520096777 CN200520096777U CN2804794Y CN 2804794 Y CN2804794 Y CN 2804794Y CN 200520096777 CN200520096777 CN 200520096777 CN 200520096777 U CN200520096777 U CN 200520096777U CN 2804794 Y CN2804794 Y CN 2804794Y
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Abstract
The utility model relates to an optical measuring device for three-D shapes and forms of micro-objects, which is composed of a microscope, a CCD camera and a computer, wherein the CCD camera is arranged on the microscope and the data output end of the CCD camera is connected with the computer. The utility model is characterized in that a photoelectric read-in head is arranged near a moving knob in the longitudinal shaft direction of the microscope, and the output end of the photoelectric read-in head is connected with the computer through a counting and transmission circuit. The utility model has the functions that an ordinary optical microscope is used for recording a flat image and reconstructing the height information of the surface of a measuring object, and the three dimensional information of an object is recorded by a two-dimensional image.
Description
Technical field
The utility model belongs to a kind of measurement mechanism of three-dimensional surface, and is particularly a kind of under the microscope condition, measures micro-object three-dimensional appearance optical measuring device by image collecting device.
Background technology
Multiple optical 3-dimensional surface measurement device is arranged at present.Based on different optical physics phenomenons, after deliberation and use the heterodyne of interference microscope arranged, defocus and confocal microscope and various phase shift microscope.The method that these devices adopt all is to select several discrete surface images, is combined together to form 3-D view.
Above-mentioned measurement mechanism can be measured the 3 d surface topography information of object exactly, but these instruments are costly, and general R﹠D institution can't bear, and has greatly restricted the progress of scientific research and popularizing of technology.Many units that are engaged in biomedicine and material science research all are furnished with ordinary optical microscope, and these microscopes can only be noted three-dimensional body with the form of two-dimentional part focusedimage, and reason is as follows: according to convex lens (2) imaging formula
Object distance and image distance are one to one, because object distance and image distance do not match (Fig. 1), cause the inconsistent thereby generated out-of-focus image as plane and sensitive surface of object.The microscopical depth of field is limited, for microscopic system, its image distance (v) is that the sensitive surface of image capture device and the distance between the objective lens are fixed, Dui Ying object distance (u) is also determined with it, therefore when object is mobile on microscope stage, have only on the body surface from the object lens distance for the part of u (being the inner branch of the depth of field) could on the image capture device induction planes, become clearly as, remainder (be the depth of field outside divide) is not because the distance of itself and object lens is u, the picture that they can only become to blur on sensitive surface.Can't once observe object by microscope and be equipped with part difference in height.So just lose a large amount of useful three-dimensional informations, also limited the usable range of these instruments.
All require microscope that higher resolution is not only arranged from scientific development and economical and practical angle, and want and can can't harm chromatography sample, and then can complete three-dimensional structure of accurately reappearing micro-sample.
Summary of the invention
In order to solve the existing defective that can only write down two-dimentional part focussing plane information of optical microscope on three-dimensional surface measurement, the purpose of this utility model provides a kind of micro-object three-dimensional appearance optical measuring device, this device can be with the form record three-dimensional surface information of two-dimensional image sequence and one dimension altitude information, by obtaining three-dimensional surface information intuitively to these signal reconstructs.
To achieve these goals, the utility model is made of microscope, CCD camera and computing machine, wherein the CCD camera is arranged on the microscope, the data output end of CCD camera is connected with computing machine, be characterized in: move the knob side at the microscope y direction and be provided with a photoelectric read-in head, the output of photoelectric read-in head is connected with computing machine with transmission circuit by a counting.
Effect of the present utility model is: use ordinary optical microscope record plane picture and reconstruct Measuring Object surface elevation information, realized using the three-dimensional information of two dimensional image record object.
Description of drawings
Fig. 1 is the formation synoptic diagram of out-of-focus image.
Fig. 2 is microscope height measurement principle figure.
Fig. 3 is the principle schematic of the utility model embodiment 1.
Fig. 4 is the principle schematic of the utility model embodiment 2.
Fig. 5 is the synoptic diagram of rubber case among the utility model embodiment 3.
Fig. 6 is a principle schematic of using the rotary encoder counting among the utility model embodiment 3.
Fig. 7 be among the utility model embodiment 3 at rotary encoder on install the synoptic diagram of belt pulley additional.
Among the figure: the 1.-object, 2.-lens, 3-image capture device sensitive surface, 4-is as the plane, the 5-optical axis, 6-has the object of certain altitude, the 7-CCD camera, 8-part focusedimage sequence, coupling of 9-view data and process computer, the 10-microscope, the 11-photoelectric read-in head, the 12-knob, the 13-pulse signal, 14-counting and transmission circuit, 15-fine focus knob handle, the 16-rubber case, 17-is installed in the belt pulley in the rotary encoder rotating shaft, the 18-belt, the 19-rotary encoder, 20-is the pedestal of rotary encoder fixedly.
Embodiment
The invention will be further described below in conjunction with accompanying drawing and example.
The utility model is by adjusting the position of micro-object at microscope 10 y directions, utilization is installed in the consecutive image sequence that image acquisition equipment CCD camera 7 on the microscope 10 obtains micro-object, make whole sequence cover the full detail of object y direction in microscope 10, utilize photoelectricity to read in the elevation information of circuit 11 interlocks (with image acquisition equipment frequency together) every width of cloth image of record simultaneously with frequently, with two-dimentional part focusedimage sequence 8 and with its one to one the form of one dimension height number whole three-dimensional informations of object are noted, and give computing machine 9 with above-mentioned data transmission, in computing machine 9 is handled, according to the characteristics of part focusedimage, cut apart by filtering, image and count value coupling, stack waits the Computer Image Processing method to recover the three-dimensional surface height map of object.
Embodiment 1:
The utility model comprises three parts: be used for knob 12 is rotated sensor-photoelectric read-in head 11 that distance information is converted into pulse signal, be used to write down the body surface image information image capture device-CCD camera 7, count and count value be transferred to the counting and the transmission circuit 14 of computing machine, and be used to handle the computing machine 9 that these information are obtained final micro-object surface height map.
Principle of work of the present utility model is: at first be that to be used to read in knob 12 rotation information be the sensor of object height information, principle that 10 knob 12 scales count is similar to bar code scanning to use the reflecting light electric scanning to adjust the telescope to one's eyes.In the process of knob 12 rotations, scale mark and appearance in succession at interval produce pulse signal 13 before the photoelectric read-in head 11, and pulse signals has just obtained the lattice number that knob 12 turns over through rolling counters forward.Determine in the length of microscope 10 y direction correspondences because knob 12 rotates lattice, therefore, note the lattice number that knob 12 turns over, also just write down the distance that object moves at microscope 10 y directions.The effect of counting and transmission circuit 14 is that the pulse signal of photoelectric read-in head 11 outputs is counted, and then count value is passed to computing machine 9.At first be counting, select suitable counter chip according to the height that is observed object.The output of this counter can be connected to latch, reads in order to single-chip microcomputer.Owing to will make each two field picture in the video that corresponding count value is all arranged, thereby want the reading frequency of control single chip computer, make its frequency acquisition consistent with video image, guarantee that they are corresponding one by one; Image acquisition partly uses CCD camera 7 and image pick-up card collection to be observed subject image, adopts the form of video record that object in the microscope 10 objective table lifting process is noted through the part focusedimage that microscope 10 is become; Computer Processing comprises that partly image is carried out sharpness to be estimated, divide body surface in every two field picture in the depth of field the zone and the zone outside the depth of field, with count value and split image coupling, carry out the height assignment, and by image being superposeed one by one the surface elevation of the measured micro-object of reconstruct.
The image that the utility model is obtained by microscope 10 and image capture device is that part focuses on, wherein some is clearly, the part of its corresponding object in microscope 10 depth of field, remainder then blurs, the part of corresponding object outside microscope 10 depth of field.When object with objective table when microscope 10 y directions shift near object lens, the part of differing heights enters the field depth of microscope 10 successively on the object, shift out again then, thereby the picture that each part of object becomes on image capture device all will experience by fuzzy clear gradually and then fuzzy gradually process.Fuzzy part and clear part all can be arranged on every frame picture; The picture that each point on the body surface writes down in sequence of pictures all experiences order by bluring to clear again to fuzzy variation.Clear part homologue surface in every frame picture has the part of identical height.As Fig. 2, the body surface part difference in height of the clear part correspondence in two two field pictures is identical with object along the distance that microscope 10 y directions move, thereby the elevation information on Measuring Object surface, the only distance that need when every two field picture that microscope 10 y directions record object is taken in the objective table moving process, move.From the every frame picture of the angle analysis of frequency, part is strong owing to brightness between its adjacent image point point changes clearly, and corresponding high-frequency signal is stronger, and fuzzy part, owing to difference between the adjacent image point point is very little, corresponding stronger low frequency signal.According to these characteristics, from this class image, extract clear part, only need carry out filtering, extract the part of the high amplitude of frequency signal medium-high frequency, realized using the three-dimensional information of two dimensional image record object.
Embodiment 2:
In embodiment 1, use the scale rotation information of photoelectric read-in head record knob index dial to write down object height information, its shortcoming is that photoelectric read-in head is difficult to fix, improved method is that photoelectric read-in head is changed a direction, read in stripe information on the fine focus knob handle 15 with it, read head can be easy to be fixed on (see figure 4) on the microscope chassis like this.
Embodiment 3:
In last two embodiment, use photoelectric read-in head record object height information can only folk prescription to record knob rotation information, when retrograde rotation occurring, just can not correctly write down elevation information, improved method is to add a rubber sleeve 16 on fine focus knob handle 15, the rotary encoder 19 that has installed belt pulley 17 additional with a belt 18 and in rotating shaft links again, the rotation information of knob is sent to rotary encoder 19 by belt 18, and the output umber of pulse of adding up rotary encoder again obtains the height of microscope y direction.The accuracy of measuring for guaranteeing, rubber sleeve 16 should be combined closely with knob handle 15, with guarantee when using belt 18 transmissions, not occur between the rubber sleeve 16 and fine focus knob handle 15 along the knob arbor to the slip of sense of rotation.The belt pulley 17 that installs additional on the rotary encoder should be supporting with it, to guarantee not occur slip between them.
Just can judge the direction of rotation according to the relation of two outputs of rotary encoder, these two output signals be outputed to counter just can judge automatically that the direction of rotation realizes corresponding increase and decrease counting.Known that by Fig. 6 the radius of belt pulley 17 is big more, microscope knob 15 revolves that the umber of pulse exported of turning around is just more little, and the precision of counting is just low more, otherwise then precision is high more.Therefore when selected encoder-side belt pulley, should calculate the minimum diameter of selected belt pulley 17 earlier according to the rotating speed upper limit of microscope vernier adjustment knob maximum (top) speed and selected rotary encoder, selected belt pulley 17 diameters should be worth greater than this, if can't satisfy accuracy requirement this moment, it is higher then should to select precision, and the rotary encoder 19 that the rotating speed upper limit is bigger also recomputates.Just determine after belt pulley 17 diameters to calculate the distance of the microscope y direction of a pulse representative, and then converse highly according to the umber of pulse that writes down according to the umber of pulse that knob rotates usefulness output.
Embodiment 4:
In embodiment 3, use belt pulley to skid easily as gearing, make counting inaccurate, improved method is to use the belt pulley 17 usefulness gears with rotary encoder 19 ends to substitute, and also putting a gear on the rubber sleeve 16 of knob, the belt 18 of transmission then replaces with tooth bar.
The content that is not described in detail in this instructions belongs to this area professional and technical personnel's known prior art.
Claims (4)
1, a kind of micro-object three-dimensional appearance optical measuring device, constitute by microscope (10), CCD camera (7) and computing machine (9), wherein CCD camera (7) is arranged on the microscope (10), the data output end of CCD camera (7) is connected with computing machine (9), it is characterized in that: move knob (12) side at microscope (10) y direction and be provided with a photoelectric read-in head (11), the output of photoelectric read-in head (11) is connected with computing machine (9) with transmission circuit (14) by a counting.
2, object dimensional pattern optical measuring device as claimed in claim 1 is characterized in that: photoelectric read-in head (11) is fixed on microscope (10) chassis, and reads in stripe information on knob (12) handle with it.
3, object dimensional pattern optical measuring device as claimed in claim 1, it is characterized in that: on knob (12), add a rubber sleeve (16), and be connected with the rotary encoder (19) that belt pulley (17) have been installed on turning axle with a belt (18), realize two-way counting by output step-by-step counting to rotary encoder (19).
4, object dimensional pattern optical measuring device as claimed in claim 3 is characterized in that: use alternative belt (18) of gear and tooth bar and belt pulley (17) as gearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520096777 CN2804794Y (en) | 2005-06-16 | 2005-06-16 | Optical measuring device for three-D shape and form of micro-objects |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520096777 CN2804794Y (en) | 2005-06-16 | 2005-06-16 | Optical measuring device for three-D shape and form of micro-objects |
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| Publication Number | Publication Date |
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| CN2804794Y true CN2804794Y (en) | 2006-08-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200520096777 Expired - Fee Related CN2804794Y (en) | 2005-06-16 | 2005-06-16 | Optical measuring device for three-D shape and form of micro-objects |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104931397A (en) * | 2015-06-29 | 2015-09-23 | 广州机械科学研究院有限公司 | Three-dimensional digital particle image generation device and three-dimensional digital particle image generation method based on excitation suction |
| CN106781937A (en) * | 2016-12-29 | 2017-05-31 | 阜阳师范学院 | Newton's ring experimental teaching accessory system and method |
| CN109059810A (en) * | 2018-07-24 | 2018-12-21 | 天津大学 | Concretion abrasive abrasive surface landforms detection method and device |
| CN110824393A (en) * | 2019-09-04 | 2020-02-21 | 横店集团东磁股份有限公司 | Magnetic flux measuring device and measuring method thereof |
| CN111256615A (en) * | 2020-03-18 | 2020-06-09 | 北京工业大学 | Involute template measuring method based on direct reflection three-optical-path laser heterodyne interference |
-
2005
- 2005-06-16 CN CN 200520096777 patent/CN2804794Y/en not_active Expired - Fee Related
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104931397A (en) * | 2015-06-29 | 2015-09-23 | 广州机械科学研究院有限公司 | Three-dimensional digital particle image generation device and three-dimensional digital particle image generation method based on excitation suction |
| CN104931397B (en) * | 2015-06-29 | 2018-04-10 | 广州机械科学研究院有限公司 | 3-dimensional digital particle image generating means and method based on excitation absorption |
| CN106781937A (en) * | 2016-12-29 | 2017-05-31 | 阜阳师范学院 | Newton's ring experimental teaching accessory system and method |
| CN109059810A (en) * | 2018-07-24 | 2018-12-21 | 天津大学 | Concretion abrasive abrasive surface landforms detection method and device |
| CN109059810B (en) * | 2018-07-24 | 2020-05-26 | 天津大学 | Method and device for detecting surface landform of fixed abrasive grinding tool |
| CN110824393A (en) * | 2019-09-04 | 2020-02-21 | 横店集团东磁股份有限公司 | Magnetic flux measuring device and measuring method thereof |
| CN111256615A (en) * | 2020-03-18 | 2020-06-09 | 北京工业大学 | Involute template measuring method based on direct reflection three-optical-path laser heterodyne interference |
| CN111256615B (en) * | 2020-03-18 | 2021-06-04 | 北京工业大学 | Involute template measuring method based on direct reflection three-optical-path laser heterodyne interference |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060809 |