CN2796097Y - Wafer locating device - Google Patents
Wafer locating device Download PDFInfo
- Publication number
- CN2796097Y CN2796097Y CN 200520017089 CN200520017089U CN2796097Y CN 2796097 Y CN2796097 Y CN 2796097Y CN 200520017089 CN200520017089 CN 200520017089 CN 200520017089 U CN200520017089 U CN 200520017089U CN 2796097 Y CN2796097 Y CN 2796097Y
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- wafer
- axle
- model
- magnet fluid
- utility
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- Expired - Fee Related
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses a wafer positioning device, which comprises a magnetic fluid sealed shaft, a sealed flange, a crystal pallet and a positioning sensor, the sealed flange is arranged in the axial position of the magnetic fluid sealed shaft, the crystal pallet is arranged at a shaft head end of the magnetic fluid sealed shaft and the positioning sensor is arranged on one side of the crystal pallet. The utility model ha the advantages of high stability of the movement of wafers, high positioning response speed, high positioning accuracy, small size and multiple methods of installation.
Description
Technical field
The utility model relates to a kind of wafer orientation device, relates to ion implantor especially, belongs to semiconductor fabrication.
Background technology
Ion implantor is the exemplary apparatus that the semiconductor technology intermediate ion mixes, ion source produces the ion beam that needs doping, ion beam passes through quality analysis, correction, acceleration again, be transferred to the wafer surface that is in the terminal processes cavity, and the wafer station that wafer is transferred to the terminal processes cavity from valut needs to utilize the wafer transmission manipulator, in transmission course, need to know the otch of wafer or the correct orientation of side cut, therefore need position processing to wafer, the qualification rate that the reliability of location and precision have influence on technology, the efficiency of transmission of the effectiveness affects wafer of location.Therefore, under the accurate prerequisite that guarantees wafer orientation, improving its operational efficiency is a problem that urgency is to be solved that faces.
Summary of the invention
The utility model promptly is the requirement at wafer transmission system, and a kind of wafer orientation device that proposes, this device can be realized wafer orientation fast and accurately, satisfies the requirement of wafer ion doping technology.
The utility model is achieved through the following technical solutions:
A kind of wafer orientation device comprises a magnet fluid sealing axle, a sealing flange, a crystal pallet, an alignment sensor, and described sealing flange is arranged on the axial location of magnet fluid sealing axle; Described crystal pallet is installed in a spindle nose end of magnet fluid sealing axle; Described alignment sensor is arranged on a side of crystal pallet.
Described magnet fluid sealing axle is made up of with outer shaft the interior axle of realizing sealing by magnetic fluid, and interior axle can relatively rotate with outer shaft; Described alignment sensor is selected the light shading type photoelectric sensor for use.
The utlity model has following remarkable advantage:
1. improved the stationarity of movement of wafers;
2. Ding Wei response speed is fast, positioning accuracy is high;
3. volume is little, and multiple mounting means can be arranged.
Description of drawings
Fig. 1 is the structure chart of wafer orientation device of the present utility model;
Fig. 2 is the otch schematic diagram of wafer;
Fig. 3 is the side cut schematic diagram of wafer.
Embodiment
Below in conjunction with the drawings and specific embodiments the utility model is further detailed, but not as to qualification of the present utility model.
With reference to figure 1, a kind of wafer orientation device comprises a magnet fluid sealing axle 1, a sealing flange 2, a crystal pallet 3, an alignment sensor 5.Wherein, magnet fluid sealing axle 1 is made up of with outer shaft the interior axle of realizing sealing by magnetic fluid, and interior axle can relatively rotate with outer shaft; Sealing flange 2 is arranged on the axial location of magnet fluid sealing axle 1, the dynamic seal (packing) that realization moves both vertically, and crystal pallet 3 is installed in a spindle nose end of magnet fluid sealing axle 1, is used for bearing wafer 4; Alignment sensor 5 is selected the light shading type photoelectric sensor for use, is arranged on a side of crystal pallet 3, is made up of light curtain transmitting terminal 51, receiving terminal 52 and sensor controller, can make between light curtain transmitting terminal 51 and the receiving terminal 52 that the wafer 4 on the crystal pallet 3 passes through.
The concrete motion process of this device is: when manipulator is placed on wafer 4 on the chip tray 3, magnet fluid sealing axle 1 rotates under the driving of external motor, make wafer 4 rise along with the rising of chip tray 3, break away from the manipulator plane simultaneously, and continue to rise, but be no more than the end face of alignment sensor 5 transmitting terminals; Axle rotates under the driving of another external motor in the magnet fluid sealing axle 1, thereby realize the fast rotational of chip tray 3, thereby 4 rotations of the wafer on it, alignment sensor 5 can detect the otch 41 of wafer 4 or 42 the position of cutting edge, when alignment sensor 5 detect wafer notch 41 or cut edge 42 the time, motor stops the rotation, and rotating shaft descends, and the wafer 4 of having located is reapposed on the manipulator.
Specific embodiment of the present utility model elaborates content of the present utility model.For persons skilled in the art, any conspicuous change of under the prerequisite that does not deviate from the utility model spirit it being done all constitutes the infringement to the utility model patent, with corresponding legal responsibilities.
Claims (3)
1. a wafer orientation device comprises a magnet fluid sealing axle, a sealing flange, a crystal pallet, an alignment sensor, and it is characterized in that: described sealing flange is arranged on the axial location of magnet fluid sealing axle; Described crystal pallet is installed in a spindle nose end of magnet fluid sealing axle; Described alignment sensor is arranged on a side of crystal pallet.
2. a kind of wafer orientation device as claimed in claim 1 is characterized in that: described magnet fluid sealing axle is made up of with outer shaft the interior axle of realizing sealing by magnetic fluid, and interior axle can relatively rotate with outer shaft.
3. a kind of wafer orientation device as claimed in claim 1, it is characterized in that: described alignment sensor is selected the light shading type photoelectric sensor for use.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520017089 CN2796097Y (en) | 2005-04-22 | 2005-04-22 | Wafer locating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520017089 CN2796097Y (en) | 2005-04-22 | 2005-04-22 | Wafer locating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2796097Y true CN2796097Y (en) | 2006-07-12 |
Family
ID=36813846
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520017089 Expired - Fee Related CN2796097Y (en) | 2005-04-22 | 2005-04-22 | Wafer locating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2796097Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102067303B (en) * | 2009-02-18 | 2012-11-28 | 株式会社爱发科 | Wafer conveying tray and method of securing wafer on tray |
| CN110459497A (en) * | 2018-05-08 | 2019-11-15 | 北京北方华创微电子装备有限公司 | Wafer is pre-positioned method |
-
2005
- 2005-04-22 CN CN 200520017089 patent/CN2796097Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102067303B (en) * | 2009-02-18 | 2012-11-28 | 株式会社爱发科 | Wafer conveying tray and method of securing wafer on tray |
| CN110459497A (en) * | 2018-05-08 | 2019-11-15 | 北京北方华创微电子装备有限公司 | Wafer is pre-positioned method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |