CN2783330Y - Solid state angular rate gyro for micro mechanical-electronic system - Google Patents

Solid state angular rate gyro for micro mechanical-electronic system Download PDF

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Publication number
CN2783330Y
CN2783330Y CNU200420042233XU CN200420042233U CN2783330Y CN 2783330 Y CN2783330 Y CN 2783330Y CN U200420042233X U CNU200420042233X U CN U200420042233XU CN 200420042233 U CN200420042233 U CN 200420042233U CN 2783330 Y CN2783330 Y CN 2783330Y
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China
Prior art keywords
main amplifier
input end
output terminal
backfeed loop
circuit
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Expired - Fee Related
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CNU200420042233XU
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Chinese (zh)
Inventor
谷荣祥
张志英
何永革
董红娟
金皖田
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XI'AN ZHONGXING OBSERVE AND CONTROL CO Ltd
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XI'AN ZHONGXING OBSERVE AND CONTROL CO Ltd
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Abstract

The utility model relates to a gyroscope used for measuring the angular rate in the technical field of missile control, geological exploration, industrial measurement and control, aircraft stabilization control, a strapdown inertial navigation system, automatic drive for an automobile, etc., which is composed of a sensitive circuit, a signal processor, a main amplifier, a zero bias controller, a nonlinear rectifying device, a range expander, a temperature drift compensator and a bandwidth expander which adopt the chips of the technology of a micro-electromechanical system, wherein the output end of the sensitive circuit is connected with the input end of the main amplifier through the signal processor, the zero bias controller, the nonlinear rectifying device, the range expander and the temperature drift compensator are in parallel connection with the bandwidth expander, and the output end of the sensitive circuit is connected with the input end of the main amplifier. The gyroscope has the advantages of high reliability, and high firmness of encapsulation, has a self test function, can realize detection; besides, the gyroscope has the functions of zero bias calibration, temperature drift compensation, wide measuring range, and bandwidth and nonlinear rectification, and has the characteristics of wide range of working temperature, small size, light weight, high impact resistance and acceleration resistance.

Description

The solid-state angular rate gyroscope of micro-mechanical-electronic system technology
Affiliated technical field
The utility model content belongs to the inertia measurement device technical field, relate to a kind of gyro (also claiming angular rate sensor) that is used for measured angular speed, its product can be widely used in guided missile control, geologic prospecting, industrial measurement and control, aviation aircraft and stablize industry fields such as control, inertial navigation, automatic driving and robot control.
Background technology
Angular rate gyroscope (angular rate sensor) overwhelming majority of generally using in above-mentioned every profession and trade field all is mechanical at present, floating or half liquid floating, the flexible angular rate gyroscope that rotation motor is arranged etc. as liquid, the outstanding shortcoming that these old-fashioned angular rate gyroscopes exist in actual applications be volume big, cost an arm and a leg, fragile, impact-resistant acceleration is low, the life-span is short, measurement range little (only 500 ° of maximums/s), frequency response low (mostly being 100HZ most) and how not possess from detecting (Self-Test) function etc.In above every shortcoming: volume is big, has limited the installation and the application of product; Cost an arm and a leg (most), make the general user be difficult to bear more than 20,000 yuan; Fragile is that these rotating parts damage easily because old-fashioned angular rate gyroscope all has the motor of high speed rotating and high-accuracy framework; The reason that impact-resistant acceleration is low is that rotation motor belongs to the accurate device be difficult for being hit, and after inherent sensitive element (pick-off) is subjected to greater impact, can be shifted, and influences precision; Life-span is short mainly because of due to the wearing and tearing of moving part; Certainly the disappearance that detects (Self-Test) function then means in the control system of using the mechanical type angular rate gyroscope can't realize detecting in the machine BIT (Built-in-Test) function.Even optical fiber or laser gyro also since its cost an arm and a leg and volume big etc. former thereby be difficult to be widely used.
The utility model content
The purpose of this utility model is the problem that prior art exists is solved, so provide that a kind of structural behaviour practicality is reasonable, easy to operate, volume is little, in light weight, cost is low, the solid-state angular rate gyroscope of the micro-mechanical-electronic system technology of applied range.
Be used to realize that the technical solution of foregoing invention purpose is such: the sensitive circuit that the solid-state angular rate gyroscope of the micro-mechanical-electronic system technology that is provided is made of the chip that adopts micro-mechanical-electronic system (MEMS) technology, signal processor, main amplifier and zero offset controller, the brightness nonlinear correction device, range expander, the temperature drift compensation device, bandwidth extender is formed, the output terminal of sensitive circuit is connected to the input end of main amplifier through signal processor, the zero offset controller, the brightness nonlinear correction device, range expander, temperature drift compensation device and bandwidth extender are in parallel, and its common output end is connected to the input end of main amplifier.
Angular rate gyroscope described in the utility model belongs to the solid-state angular rate sensor of motor without spin, its internal circuit working component adopts the chip of micro-mechanical-electronic system (MEMS) technology, it makes the production technology of employing ambipolar metal-oxide semiconductor (MOS) (BIMOS) technology and the current-carrying welder technology that ball grid is arranged, product has high reliability and high encapsulation soundness, and possess self-checking function, can realize detecting in the machine (BIT).In addition, the utility model is provided with zero offset controller, brightness nonlinear correction device, range expander, temperature drift compensation device, bandwidth extender, make product have zero offset calibration, temperature drift compensation, wide measurement range and bandwidth and brightness nonlinear correction function, also make it to have simultaneously the characteristics of little, the in light weight and anti-high-impact acceleration of working temperature, the volume of wide region.
Description of drawings
Fig. 1 is a design concept block diagram of the present utility model.
Fig. 2 is the circuit theory diagrams of a specific embodiment of the utility model.
Fig. 3 is the design concept block diagram of zero offset controller.
Fig. 4 is the electric circuit diagram of zero offset controller.
Fig. 5 is the design concept block diagram of brightness nonlinear correction device.
Fig. 6 is the electric circuit diagram of brightness nonlinear correction device.
Fig. 7 is the design concept block diagram of range expander.
Fig. 8 is the electric circuit diagram of range expander.
Fig. 9 is the design concept block diagram of temperature drift compensation device.
Figure 10 is the electric circuit diagram of temperature drift compensation device.
Figure 11 is the design concept block diagram of bandwidth extender.
Figure 12 is the electric circuit diagram of bandwidth extender.
Embodiment
Referring to accompanying drawing, the solid-state angular rate gyroscope of micro-mechanical-electronic system technology described in the utility model partly is made up of sensitive circuit I, signal processor 6, main amplifier 10 and zero offset controller 7, brightness nonlinear correction device 8, range expander 9, temperature drift compensation device 11, bandwidth extender 12 etc.Wherein: the output terminal of sensitive circuit I is connected to the input end of main amplifier 10 through signal processor 6, and the output terminal of zero offset controller 7, brightness nonlinear correction device 8, range expander 9, temperature drift compensation device 11 and bandwidth extender 12 these five circuit also all is connected to the input end of main amplifier 10.The sensitive circuit I of this device is made up of discrete controller 1, ST interface circuit 2, sensor 3, resonator 4 and driver 5, the output terminal of discrete controller 1 and driver 5 is connected to the input end of sensor 3 respectively by ST interface circuit 2 resonator 4, the output terminal of sensor 3 connects with the input end of signal processor 6.In side circuit shown in Figure 2, the sensor 3 among the sensitive circuit I is that the Sensitive Apparatus chip of PO-XRS and integrated chip that model is LTC2053 constitute the input termination angular speed input signal ω of PO-XRS by model In, the chip that resonator 4 is LTC2053 by two models is connected mutually and is formed, and driver 5 is that the charge pump regulator of REG711-5 constitutes by model; Signal processor 6 is that the chip of LB8207 constitutes by model; Main amplifier 10 is that the integrated chip of LTC2053 constitutes by model.
The structure of each functional circuit of Fig. 3～shown in Figure 12 form and working forms as described below respectively.
Zero offset controller 7 is made up of main amplifier 7c, input circuit 7a, standard loop 7b, backfeed loop 7d and arithmetical unit 7e, wherein the input end of main amplifier 7c connects with the output terminal of input circuit 7a, the output signal of main amplifier 7c can branch to the input end of backfeed loop 7d and arithmetical unit 7e, arithmetical unit 7e output terminal behind standard loop 7b with the input end of backfeed loop 7d output terminal tieback to main amplifier 7c.In real work circuit shown in Figure 4, input circuit 7a is made up of resistance R 1, R2 and capacitor C 1, main amplifier 7c is that the chip of LTC2053 constitutes by model, arithmetical unit 7e is that the chip of LM339 constitutes by model, standard loop 7b is made up of resistance R 3 and electronic switch K, and backfeed loop 7d is made of resistance R 4.Zero offset controller 7 the zero offset unanimity that can make the discrepant different chips of each properties of product is set, reach 2.5 ± 0.1V, be convenient to user's use.
Brightness nonlinear correction device 8 is made up of main amplifier 8d, input circuit 8a, corrector 8b, backfeed loop 8e and arithmetical unit 8c, wherein the input end of main amplifier 8d connects with the output terminal of input circuit 8a, the output signal of main amplifier 8d can branch to the input end of backfeed loop 8e and arithmetical unit 8c, tieback is to the input end of main amplifier 8d again for arithmetical unit 8c output terminal and backfeed loop 8e output terminal, and corrector 8b exports the input end of termination arithmetical unit 8c.In real work circuit shown in Figure 6, input circuit 8a is made up of resistance R 5, R6 and capacitor C 2, main amplifier 8d is that the integrated chip of LTC2053 constitutes by model, arithmetical unit 8c is that the chip of LM339 constitutes by model, backfeed loop 8e is made of resistance R 7, and corrector 8b is that little converter chip of ADUC816 constitutes by model.Being provided with of brightness nonlinear correction device 8 can make product use under the very little occasion of non-linear index requiring, fully to satisfy user's requirement.
Range expander 9 is made up of main amplifier 9c, input circuit 9a, extension loop 9b and backfeed loop 9d, wherein the input end of main amplifier 9c connects with the output terminal of input circuit 9a, the output signal of main amplifier 9c can branch to the input end of backfeed loop 9d and extension loop 9b, and extension loop 9b output terminal is again with the input end of backfeed loop 9d output terminal tieback to main amplifier 9c.In real work circuit shown in Figure 8, input circuit 9a is made up of resistance R 8, R9 and capacitor C 3, and main amplifier 9c is that the chip of LTC2053 constitutes by model, and extension loop 9b is by resistance R X1Constitute, backfeed loop 9d is made of resistance R 10.The measurement range that can make this product by being provided with of range expander 9 in 5 °/s～50000 °/s is optional, satisfies the requirement of user's different measuring scope.
The weakness of solid-state angular rate gyroscope is relatively more responsive to temperature, be easy to generate with temperature drift, for eliminating this drift, the utility model is ad hoc to be equipped with 11 pairs of outputs of temperature drift compensation device and to compensate with the drift of temperature, so that normal output valve is not subjected to the harmful effect that produces because of temperature variation.This temperature drift compensation device 11 is by input circuit 11a, main amplifier 11b, arithmetical unit 11c, temperature sensor 11d, constant current source 11e, differential amplifier 11f and backfeed loop 11g constitute, wherein the input end of main amplifier 11b connects with the output terminal of input circuit 11a, the output terminal of the output signal end of main amplifier 11b and constant current source 11e all is connected to the input end of differential amplifier 11f, tieback is to the input end of main amplifier 11b behind backfeed loop 11g and arithmetical unit 11c successively for the feedback output end of differential amplifier 11f, and the output terminal of temperature sensor 11d is connected to the input end of main amplifier 11b behind arithmetical unit 11c.In real work circuit shown in Figure 10, input circuit 11a is made up of resistance R 11, R12 and capacitor C 4, main amplifier 11b is that the integrated chip of LTC2053 constitutes by model, arithmetical unit 11c is that the integrated chip of LM339 constitutes by model, temperature sensor 11d is made of PTAT type integrated chip, constant current source 11e is made up of resistance R 13, voltage stabilizing diode D and triode T, and differential amplifier 11f is that the integrated chip of AD623 constitutes by model, and backfeed loop 11g is made of resistance R 14.In actual the use, this temperature drift compensation device 11 can compensate in-45 ℃～+ 85 ℃ temperature range, and wherein-45 ℃ in the temperature range are unique temperature of this product.
Bandwidth extender 12 is made up of main amplifier 12c, input circuit 12a, extender 12b and backfeed loop 12d, wherein the input end of main amplifier 12c connects with the output terminal of input circuit 12a, the output signal of main amplifier 12c can branch to the input end of backfeed loop 12d and extender 12b, and extender 12b output terminal is again with the input end of backfeed loop 12d output terminal tieback to main amplifier 12c.In real work circuit shown in Figure 12, input circuit 12a is made up of resistance R 15, R16 and capacitor C 5, and main amplifier 12c is that the chip of LTC2053 constitutes by model, and extender 12b is by capacitor C x/ C6 constitutes, and backfeed loop 12d is by resistance R 17/R X2Constitute.The bandwidth that the setting of bandwidth extender 12 can make product expands to 41HZ～500HZ, so just makes the usable range of product broader from≤40HZ.
The physical dimension of the utility model product is 28 * 28 * 12.8mm 3, the physical dimension with mechanical cover is not 20.3 * 20.3 * 8mm 3The weight of band mechanical cover is 26 grams, does not have only 6 grams with the weight of mechanical cover, and volume is little, and is in light weight.In addition, this product do not power, under any axle, 0.5ms condition, the impact acceleration that can bear 2000g; Under power supply, any axle, 0.5ms condition, the impact acceleration that can bear 1000g, impact-resistant acceleration index are better than the existing similar technical products in this area greatly.

Claims (7)

1, the solid-state angular rate gyroscope of a kind of micro-mechanical-electronic system technology, it is characterized in that the sensitive circuit (I) that it is made of the chip that adopts micro-mechanical-electronic system technology, signal processor (6), main amplifier (10) and zero offset controller (7), brightness nonlinear correction device (8), range expander (9), temperature drift compensation device (11), bandwidth extender (12) is formed, the output terminal of sensitive circuit (I) is connected to the input end of main amplifier (10) through signal processor (6), zero offset controller (7), brightness nonlinear correction device (8), range expander (9), temperature drift compensation device (11) and bandwidth extender (12) are in parallel, and its common output end is connected to the input end of main amplifier (10).
2, the solid-state angular rate gyroscope of micro-mechanical-electronic system technology as claimed in claim 1, it is characterized in that said sensitive circuit (I) is made up of discrete controller (1), ST interface circuit (2), sensor (3), resonator (4) and driver (5), the output terminal of discrete controller (1) and driver (5) is connected to the input end of sensor (3) respectively by ST interface circuit (2) resonator (4), the output terminal of sensor (3) connects with the input end of signal processor (6).
3, the solid-state angular rate gyroscope of micro-mechanical-electronic system technology as claimed in claim 1, it is characterized in that said zero offset controller (7) is by main amplifier (7c), input circuit (7a), standard loop (7b), backfeed loop (7d) and arithmetical unit (7e) are formed, wherein the input end of main amplifier (7c) connects with the output terminal of input circuit (7a), the output signal of main amplifier (7c) can branch to the input end of backfeed loop (7d) and arithmetical unit (7e), arithmetical unit (7e) output terminal behind standard loop (7b) with the input end of backfeed loop (7d) output terminal tieback to main amplifier (7c).
4, the solid-state angular rate gyroscope of micro-mechanical-electronic system technology as claimed in claim 1, it is characterized in that said brightness nonlinear correction device (8) is by main amplifier (8d), input circuit (8a), corrector (8b), backfeed loop (8e) and arithmetical unit (8c) are formed, wherein the input end of main amplifier (8d) connects with the output terminal of input circuit (8a), the output signal of main amplifier (8d) can branch to the input end of backfeed loop (8e) and arithmetical unit (8c), tieback is to the input end of main amplifier (8d) again for arithmetical unit (8c) output terminal and backfeed loop (8e) output terminal, and corrector (8b) is exported the input end of termination arithmetical unit (8c).
5, the solid-state angular rate gyroscope of micro-mechanical-electronic system technology as claimed in claim 1, it is characterized in that said range expander (9) is made up of main amplifier (9c), input circuit (9a), extension loop (9b) and backfeed loop (9d), wherein the input end of main amplifier (9c) connects with the output terminal of input circuit (9a), the output signal of main amplifier (9c) can branch to the input end of backfeed loop (9d) and extension loop (9b), and extension loop (9b) output terminal is again with the input end of backfeed loop (9d) output terminal tieback to main amplifier (9c).
6, the solid-state angular rate gyroscope of micro-mechanical-electronic system technology as claimed in claim 1, it is characterized in that said temperature drift compensation device (11) is by input circuit (11a), main amplifier (11b), arithmetical unit (11c), temperature sensor (11d), constant current source (11e), differential amplifier (11f) and backfeed loop (11g) constitute, wherein the input end of main amplifier (11b) connects with the output terminal of input circuit (11a), the output terminal of the output signal end of main amplifier (11b) and constant current source (11e) all is connected to the input end of differential amplifier (11f), tieback is to the input end of main amplifier (11b) behind backfeed loop (11g) and arithmetical unit (11c) successively for the feedback output end of differential amplifier (11f), and the output terminal of temperature sensor (11d) is connected to the input end of main amplifier (11b) behind arithmetical unit (11c).
7, the solid-state angular rate gyroscope of micro-mechanical-electronic system technology as claimed in claim 1, it is characterized in that said bandwidth extender (12) is by main amplifier (12c), input circuit (12a), extender (12b) and backfeed loop (12d) are formed, wherein the input end of main amplifier (12c) connects with the output terminal of input circuit (12a), the output signal of main amplifier (12c) can branch to the input end of backfeed loop (12d) and extender (12b), and extender (12b) output terminal is again with the input end of backfeed loop (12d) output terminal tieback to main amplifier (12c).
CNU200420042233XU 2004-07-23 2004-07-23 Solid state angular rate gyro for micro mechanical-electronic system Expired - Fee Related CN2783330Y (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100510752C (en) * 2004-07-23 2009-07-08 西安中星测控有限责任公司 Solid state angle speed rate gyro of micromechanical electron system technology

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100510752C (en) * 2004-07-23 2009-07-08 西安中星测控有限责任公司 Solid state angle speed rate gyro of micromechanical electron system technology

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Granted publication date: 20060524