CN2804803Y - Micro-mechanism-electronic system technical inertia measuring device - Google Patents
Micro-mechanism-electronic system technical inertia measuring device Download PDFInfo
- Publication number
- CN2804803Y CN2804803Y CN 200520078794 CN200520078794U CN2804803Y CN 2804803 Y CN2804803 Y CN 2804803Y CN 200520078794 CN200520078794 CN 200520078794 CN 200520078794 U CN200520078794 U CN 200520078794U CN 2804803 Y CN2804803 Y CN 2804803Y
- Authority
- CN
- China
- Prior art keywords
- main amplifier
- input end
- output terminal
- angular rate
- micro
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Abstract
The utility model relates to an inertia measuring device of the technology of a micro-electromechanical system, which is used for the technical field of missile control, industrial measurement and control, a strapdown inertial navigation system, etc. of the combination of triaxial solid state inertial sensors with six degrees of freedom used for measuring the angular rate and the linear acceleration of three shafts in a space coordinate system. The inertia measuring device is composed of three space shaft angular rate gyroscopes and three space shaft linear acceleration sensors, wherein each angular rate gyroscopes and each linear acceleration sensor are all composed of a sensitive circuit, a signal processor, a main amplifier, a zero bias controller, a nonlinear rectifying device, a range expander, a temperature drift compensator and a bandwidth expander which adopt the chips of the technology of the micro-electromechanical system; the output end of the sensitive circuit is connected with the input end of the main amplifier through the signal processor, the zero bias controller, the nonlinear rectifying device, the range expander and the temperature drift compensator are in parallel connection with the bandwidth expander, and the output end of the sensitive circuit is connected with the input end of the main amplifier. The inertia measuring device has the advantages of high reliability, and high firmness of encapsulation, has a self test function, and can accurately measure the angular rate and the linear acceleration of the three shafts in the space coordinate system.
Description
Affiliated technical field
The utility model content belongs to the inertia measurement device technical field, relate to a kind of angular speed of three axles of measurement space coordinate system and inertial measuring unit of linear acceleration of being used for, its product can be widely used in guided missile control, geologic prospecting, industrial measurement and control, aviation aircraft and stablize industry fields such as control, inertial navigation, automatic driving and robot control.
Background technology
The present inertial measurement unit (IMU) that in above-mentioned every profession and trade field, generally uses, comprise angular rate gyroscope (angular rate sensor) and linear acceleration transducer, its product overwhelming majority all is mechanical, floating or half liquid floating as liquid, the flexible angular rate gyroscope that rotation motor is arranged, the linear acceleration transducer of matter piece etc. is arranged, the outstanding shortcoming that these old-fashioned inertial measuring units exist in actual applications is that volume is big, cost an arm and a leg, fragile, impact-resistant acceleration is low, life-span is short, measurement range is little, and (old-fashioned angular rate gyroscope greatest measurement is 500 °/s only, the linear acceleration transducer greatest measurement is 10g only), frequency response low (mostly being 100HZ most) and how not possessing from detecting (Self-Test) function etc., even current advanced optical fiber or laser inertial measuring unit, also since its cost an arm and a leg and volume big etc. former thereby be difficult to be widely used.
The utility model content
The purpose of this utility model is the problem that prior art exists is solved, so provide that a kind of structural behaviour practicality is reasonable, easy to operate, volume is little, in light weight, cost is low, the micro-mechanical-electronic system technology inertial measurement device of applied range.
Be used to realize that the technical solution of foregoing invention purpose is such: the micro-mechanical-electronic system technology inertial measurement device that is provided has three and is respectively applied for measurement space X, Y, the angular rate gyroscope of Z shaft angle speed and three are respectively applied for measurement space X, Y, the linear acceleration transducer of z axis acceleration, make each angular rate gyroscope and the parallel setting of each linear acceleration transducer by an adaptive transit line plate, wherein each spatial axes angular rate gyroscope and each spatial axis acceleration transducer are by the sensitive circuit of the chip formation that adopts micro-mechanical-electronic system (MEMS) technology, signal processor (demodulator filter), main amplifier and zero offset controller, the brightness nonlinear correction device, range expander, the temperature drift compensation device, bandwidth extender is formed, the output terminal of sensitive circuit is connected to the input end of main amplifier through signal processor, the zero offset controller, the brightness nonlinear correction device, range expander, temperature drift compensation device and bandwidth extender are in parallel, and its common output end is connected to the input end of main amplifier.
Micro-mechanical-electronic system technology inertial measurement device described in the utility model is the combination of the solid-state inertial sensor of Triaxiality and six degrees of freedom, angular rate gyroscope in interior belongs to the solid-state angular rate sensor of motor without spin, linear acceleration transducer belongs to the sensor of no matter piece, their internal circuit working component all adopts the chip of micro-mechanical-electronic system (MEMS) technology, it makes the production technology of employing ambipolar metal-oxide semiconductor (MOS) (BIMOS) technology and the current-carrying welder technology that ball grid is arranged, product has high reliability and high encapsulation soundness, accurately X in the measurement space coordinate system, Y, the angular speed and the linear acceleration of three axles of Z; Measurement mechanism is built-in with temperature sensors of high precision, can provide temperature variant magnitude of voltage in the IMU; In the six-freedom degree sensor each all possesses self-checking function, can realize detecting (BIT) in the machine, and six-freedom degree is simulating signal output.In addition, also be provided with zero offset controller, brightness nonlinear correction device, range expander, temperature drift compensation device, bandwidth extender in the utility model, make product have zero offset calibration, temperature drift compensation, wide measurement range and bandwidth and brightness nonlinear correction function, also make it to have the working temperature of wide region simultaneously and volume is little, in light weight, it is fast to start, the life-span is long and characteristics such as impact-resistant acceleration height.
Description of drawings
Fig. 1 is total electrical design theory diagram of the present utility model.
Fig. 2 is the design concept block diagram of angular rate gyroscope.
Fig. 3 is the design concept block diagram of linear acceleration transducer.
Fig. 4 is the circuit theory diagrams of a specific embodiment of angular rate gyroscope.
Fig. 5 is the circuit theory diagrams of a specific embodiment of linear acceleration transducer.
Fig. 6 is the design concept block diagram of angular rate gyroscope or the used zero offset controller of linear acceleration transducer.
Fig. 7 is the electric circuit diagram of zero offset controller.
Fig. 8 is the design concept block diagram of angular rate gyroscope or the used brightness nonlinear correction device of linear acceleration transducer.
Fig. 9 is the electric circuit diagram of brightness nonlinear correction device.
Figure 10 is the design concept block diagram of angular rate gyroscope or the used range expander of linear acceleration transducer.
Figure 11 is the electric circuit diagram of range expander.
Figure 12 is the design concept block diagram of angular rate gyroscope or the used temperature drift compensation device of linear acceleration transducer.
Figure 13 is the electric circuit diagram of temperature drift compensation device.
Figure 14 is the design concept block diagram of angular rate gyroscope or the used bandwidth extender of linear acceleration transducer.
Figure 15 is the electric circuit diagram of bandwidth extender.
Embodiment
Referring to accompanying drawing, total electrical structure of micro-mechanical-electronic system technology inertial measurement device described in the utility model as shown in Figure 1, it comprises that three are respectively applied for measurement space X, Y, the angular rate gyroscope I of Z shaft angle speed, II, III and three are respectively applied for measurement space X, Y, the linear acceleration transducer IV of z axis acceleration, V, VI, make each angular rate gyroscope I by the adaptive transit line plate of a CS-01 type VII, II, III and each linear acceleration transducer IV, V, VI is parallel to be provided with, during use with each angular rate gyroscope I, II, III and each linear acceleration transducer IV, V, the input of VI and output terminal are connected the adaptive transit line plate of CS-01 type VII by cable and transfer accordingly in the hole.The principle of work structure of each the spatial axes angular rate gyroscope in the utility model design proposal as shown in Figure 2, the principle of work structure of each spatial axis acceleration transducer as shown in Figure 3, the sensitive circuit M that they constitute by the chip that adopts micro-mechanical-electronic system (MEMS) technology, signal processor 6, main amplifier 10 and zero offset controller 7, brightness nonlinear correction device 8, range expander 9, temperature drift compensation device 11, bandwidth extender 12 is formed, the output terminal of sensitive circuit M is connected to the input end of main amplifier 10 through signal processor 6, zero offset controller 7, brightness nonlinear correction device 8, range expander 9, temperature drift compensation device 11 and bandwidth extender 12 are in parallel, and its common output end is connected to the input end of main amplifier 10.The sensitive circuit M of each spatial axes angular rate gyroscope is made up of discrete controller 1, ST interface circuit 2, sensor 3, resonator 4 and driver 5 in this inertial measuring unit, the output terminal of discrete controller 1 and driver 5 is connected to the input end of sensor 3 respectively by ST interface circuit 2 resonator 4, the output terminal of sensor 3 connects with the input end of signal processor 6; Sensitive circuit M in each spatial axis acceleration transducer forms by discrete controller 1, ST interface circuit 2 and sensor 3, the output terminal of discrete controller 1 is connected to the input end of sensor 3 by ST interface circuit 2, and the output terminal of sensor 3 connects with the input end of signal processor 6.In the side circuit of angular rate gyroscope shown in Figure 4, the sensor 3 among the sensitive circuit M is that the Sensitive Apparatus chip of PO-XRS constitutes the input termination angular speed input signal ω of PO-XRS by model
InThe chip that resonator 4 is LTC2053 by two models is connected mutually and is formed, driver 5 is that the charge pump regulator of REG711-5 constitutes by model, and signal processor 6 is that the chip of LTC2053 and LB8207 constitutes by model, and main amplifier 10 is that the integrated chip of LTC2053 constitutes by model.In the side circuit of linear acceleration transducer shown in Figure 5, the sensor 3 among the sensitive circuit M is that the Sensitive Apparatus chip of PO-XL constitutes the input end wiring acceleration input signal a of PO-XL by model
In, signal processor 6 is that the chip of LB8207 constitutes by model, main amplifier 10 is that the integrated chip of LTC2053 constitutes by model.
The structure of each functional circuit of Fig. 6～shown in Figure 15 form and working forms as described below respectively.
Zero consistent under the discrepant different chips of performance partially for making, in inertial measuring unit, designed zero offset controller 7.Zero offset controller 7 is formed (Fig. 6) by main amplifier 7c, input circuit 7a, calibration loop 7b, backfeed loop 7d and arithmetical unit 7e, wherein the input end of main amplifier 7c connects with the output terminal of input circuit 7a, the output signal of main amplifier 7c can branch to the input end of backfeed loop 7d and arithmetical unit 78, arithmetical unit 7e output terminal behind calibration loop 7b with the input end of backfeed loop 7d output terminal tieback to main amplifier 7c.In real work circuit shown in Figure 7, input circuit 7a is made up of resistance R 1, R2 and capacitor C 1, main amplifier 7c is that the chip of LTC2053 constitutes by model, arithmetical unit 7e is that the chip of LM339 constitutes by model, standard loop 7b is made up of resistance R 3 and electronic switch K, and backfeed loop 7d is made of resistance R 4.The zero unanimity partially that each degree of freedom that can make in the IMU is set of zero offset controller 7 reaches 2.5 ± 0.1V, is convenient to user's use.
Requiring the accurately occasion of control, the client often requires non-linear the smaller the better, is provided with brightness nonlinear correction device 8 in inertial measuring unit for this reason.Brightness nonlinear correction device 8 is formed (Fig. 8) by main amplifier 8d, input circuit 8a, corrector 8b, backfeed loop 8e and arithmetical unit 8c, wherein the input end of main amplifier 8d connects with the output terminal of input circuit 8a, the output signal of main amplifier 8d can branch to the input end of backfeed loop 8e and arithmetical unit 8c, tieback is to the input end of main amplifier 8d again for arithmetical unit 8c output terminal and backfeed loop 8e output terminal, and corrector 8b exports the input end of termination arithmetical unit 8c.In real work circuit shown in Figure 9, input circuit 8a is made up of resistance R 5, R6 and capacitor C 2, main amplifier 8d is that the integrated chip of LTC2053 constitutes by model, arithmetical unit 8c is that the chip of LM339 constitutes by model, backfeed loop 8e is made of resistance R 7, and corrector 8b is that little converter chip of ADUC816 constitutes by model.The utility model brightness nonlinear correction device 8 is just the same concerning the linear acceleration transducer of the angular rate gyroscope of three axles and three axles, it can make product use under the occasion that requires non-linear index very little (non-linear index reach ± 0.1%), fully to satisfy user's requirement.
According to the requirement of market user to range, the utility model has designed range expander 9, this range expander 9 is formed (Figure 10) by main amplifier 9c, input circuit 9a, extension loop 9b and backfeed loop 9d, wherein the input end of main amplifier 9c connects with the output terminal of input circuit 9a, the output signal of main amplifier 9c can branch to the input end of backfeed loop 9d and extension loop 9b, and extension loop 9b output terminal is again with the input end of backfeed loop 9d output terminal tieback to main amplifier 9c.In real work circuit shown in Figure 11, input circuit 9a is made up of resistance R 8, R9 and capacitor C 3, and main amplifier 9c is that the chip of LTC2053 constitutes by model, and extension loop 9b is by resistance R
X1Constitute, backfeed loop 9d is made of resistance R 10.The measurement range that can make angular rate gyroscope product in this inertial measuring unit by being provided with of range expander 9 in 5 °/s～50000 °/s is optional, the range that makes X-axis linear acceleration transducer product and Y-axis linear acceleration transducer product ± 2g, ± 10g, ± the 50g third gear is optional, the range that makes z axis acceleration transducer product ± 5g, ± 50g, ± the 100g third gear is optional, to satisfy the requirement of user's different measuring scope.
The weakness of solid-state angular rate gyroscope or linear acceleration transducer is relatively more responsive to temperature, be easy to generate with temperature drift, for eliminating this drift, the utility model is ad hoc to be equipped with 11 pairs of outputs of temperature drift compensation device and to compensate with the drift of temperature, so that normal output valve is not subjected to the harmful effect that produces because of temperature variation.This temperature drift compensation device 11 is by input circuit 11a, main amplifier 11b, arithmetical unit 11c, temperature sensor 11d, constant current source 11e, differential amplifier 11f and backfeed loop 11g constitute (Figure 12), wherein the input end of main amplifier 11b connects with the output terminal of input circuit 11a, the output terminal of the output signal end of main amplifier 11b and constant current source 11e all is connected to the input end of differential amplifier 11f, tieback is to the input end of main amplifier 11b behind backfeed loop 11g and arithmetical unit 11c successively for the feedback output end of differential amplifier 11f, and the output terminal of temperature sensor 11d is connected to the input end of main amplifier 11b behind arithmetical unit 11c.In real work circuit shown in Figure 13, input circuit 11a is made up of resistance R 11, R12 and capacitor C 4, main amplifier 11b is that the integrated chip of LTC2053 constitutes by model, arithmetical unit 11c is that the integrated chip of LM339 constitutes by model, temperature sensor 11d is made of PTAT type integrated chip, constant current source 11e is made up of resistance R 13, voltage stabilizing diode D and triode T, and differential amplifier 11f is that the integrated chip of AD623 constitutes by model, and backfeed loop 11g is made of resistance R 14.In actual the use, this temperature drift compensation device 11 can compensate in-45 ℃～+ 85 ℃ temperature range, and wherein-45 ℃ in the temperature range are unique temperature of this product.
The bandwidth extender 12 that is provided with in this inertial measuring unit is formed (Figure 14) by main amplifier 12c, input circuit 12a, extender 12b and backfeed loop 12d, wherein the input end of main amplifier 12c connects with the output terminal of input circuit 12a, the output signal of main amplifier 12c can branch to the input end of backfeed loop 12d and extender 12b, and extender 12b output terminal is again with the input end of backfeed loop 12d output terminal tieback to main amplifier 12c.In real work circuit shown in Figure 15, input circuit 12a is made up of resistance R 15, R16 and capacitor C 5, and main amplifier 12c is that the chip of LTC2053 constitutes by model, and extender 12b is by capacitor C
x/ C6 constitutes, and backfeed loop 12d is by resistance R 17/R
xConstitute.Setting by bandwidth extender 12 can make the bandwidth of the angular rate gyroscope of three axles expand to 9HZ～500HZ from 40HZ, makes the bandwidth of the linear acceleration transducer of three axles expand to 5HZ～5KHZ from 40HZ, so just makes the usable range of product broader.
The physical dimension of the utility model product is 38 * 38 * 36mm
3, and the inertial sensor of Triaxiality and six degrees of freedom comprises that the linear acceleration transducer of the angular rate gyroscope of three axles and three axles and adaptive transit line plate, external plug seat all are installed within the housing rational and orderly.The weight of this product tape mechanical cover only is 90 grams, is at present both at home and abroad volume minimum, Triaxiality and six degrees of freedom IMU product that weight is the lightest.In addition, this product do not power, under any axle, 0.5ms condition, the impact acceleration that can bear 1000g; Under power supply, any axle, 0.5ms condition, the impact acceleration that can bear 500g, impact-resistant acceleration index are better than the existing similar technical products in this area greatly.
Claims (8)
1, a kind of micro-mechanical-electronic system technology inertial measurement device, it is characterized in that having three and be respectively applied for measurement space X, Y, angular rate gyroscope (the I of Z shaft angle speed, II, III) and three be respectively applied for measurement space X, Y, linear acceleration transducer (the IV of z axis acceleration, V, VI), make each angular rate gyroscope (I by an adaptive transit line plate (VII), II, III) and each linear acceleration transducer (IV, V, VI) the parallel setting, wherein each spatial axes angular rate gyroscope and each spatial axis acceleration transducer are by the sensitive circuit (M) of the chip formation that adopts micro-mechanical-electronic system (MEMS) technology, signal processor (6), main amplifier (10) and zero offset controller (7), brightness nonlinear correction device (8), range expander (9), temperature drift compensation device (11), bandwidth extender (12) is formed, the output terminal of sensitive circuit (M) is connected to the input end of main amplifier (10) through signal processor (6), zero offset controller (7), brightness nonlinear correction device (8), range expander (9), temperature drift compensation device (11) and bandwidth extender (12) are in parallel, and its common output end is connected to the input end of main amplifier (10).
2, micro-mechanical-electronic system technology inertial measurement device as claimed in claim 1, it is characterized in that the sensitive circuit (M) in each spatial axes angular rate gyroscope forms by discrete controller (1), ST interface circuit (2), sensor (3), resonator (4) and driver (5), the output terminal of discrete controller (1) and driver (5) is connected to the input end of sensor (3) respectively by ST interface circuit (2) resonator (4), the output terminal of sensor (3) connects with the input end of signal processor (6).
3, micro-mechanical-electronic system technology inertial measurement device as claimed in claim 1, it is characterized in that the sensitive circuit (M) in each spatial axis acceleration transducer forms by discrete controller (1), ST interface circuit (2) and sensor (3), the output terminal of discrete controller (1) is connected to the input end of sensor (3) by ST interface circuit (2), and the output terminal of sensor (3) connects with the input end of signal processor (6).
4, micro-mechanical-electronic system technology inertial measurement device as claimed in claim 1, it is characterized in that zero offset controller (7) in each spatial axes angular rate gyroscope and the spatial axis acceleration transducer is by main amplifier (7c), input circuit (7a), calibration loop (7b), backfeed loop (7d) and arithmetical unit (7e) are formed, wherein the input end of main amplifier (7c) connects with the output terminal of input circuit (7a), the output signal of main amplifier (7c) can branch to the input end of backfeed loop (7d) and arithmetical unit (7e), arithmetical unit (7e) output terminal after calibration loop (7b) with the input end of backfeed loop (7d) output terminal tieback to main amplifier (7c).
5, micro-mechanical-electronic system technology inertial measurement device as claimed in claim 1, it is characterized in that brightness nonlinear correction device (8) in each spatial axes angular rate gyroscope and the spatial axis acceleration transducer is by main amplifier (8d), input circuit (8a), corrector (8b), backfeed loop (8e) and arithmetical unit (8c) are formed, wherein the input end of main amplifier (8d) connects with the output terminal of input circuit (8a), the output signal of main amplifier (8d) can branch to the input end of backfeed loop (8e) and arithmetical unit (8c), tieback is to the input end of main amplifier (8d) again for arithmetical unit (8c) output terminal and backfeed loop (8e) output terminal, and corrector (8b) is exported the input end of termination arithmetical unit (8c).
6, micro-mechanical-electronic system technology inertial measurement device as claimed in claim 1, it is characterized in that range expander (9) in each spatial axes angular rate gyroscope and the spatial axis acceleration transducer is by main amplifier (9c), input circuit (9a), extension loop (9b) and backfeed loop (9d) are formed, wherein the input end of main amplifier (9c) connects with the output terminal of input circuit (9a), the output signal of main amplifier (9c) can branch to the input end of backfeed loop (9d) and extension loop (9b), and extension loop (9b) output terminal is again with the input end of backfeed loop (9d) output terminal tieback to main amplifier (9c).
7, micro-mechanical-electronic system technology inertial measurement device as claimed in claim 1, it is characterized in that temperature drift compensation device (11) in each spatial axes angular rate gyroscope and the spatial axis acceleration transducer is by input circuit (11a), main amplifier (11b), arithmetical unit (11c), temperature sensor (11d), constant current source (11e), differential amplifier (11f) and backfeed loop (11g) constitute, wherein the input end of main amplifier (11b) connects with the output terminal of input circuit (11a), the output terminal of the output signal end of main amplifier (11b) and constant current source (11e) all is connected to the input end of differential amplifier (11f), tieback is to the input end of main amplifier (11b) behind backfeed loop (11g) and arithmetical unit (11c) successively for the feedback output end of differential amplifier (11f), and the output terminal of temperature sensor (11d) is connected to the input end of main amplifier (11b) behind arithmetical unit (11c).
8, micro-mechanical-electronic system technology inertial measurement device as claimed in claim 1, it is characterized in that bandwidth extender (12) in each spatial axes angular rate gyroscope and the spatial axis acceleration transducer is by main amplifier (12c), input circuit (12a), extender (12b) and backfeed loop (12d) are formed, wherein the input end of main amplifier (12c) connects with the output terminal of input circuit (12a), the output signal of main amplifier (12c) can branch to the input end of backfeed loop (12d) and extender (12b), and extender (12b) output terminal is again with the input end of backfeed loop (12d) output terminal tieback to main amplifier (12c).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520078794 CN2804803Y (en) | 2005-05-19 | 2005-05-19 | Micro-mechanism-electronic system technical inertia measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520078794 CN2804803Y (en) | 2005-05-19 | 2005-05-19 | Micro-mechanism-electronic system technical inertia measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2804803Y true CN2804803Y (en) | 2006-08-09 |
Family
ID=36910092
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520078794 Expired - Lifetime CN2804803Y (en) | 2005-05-19 | 2005-05-19 | Micro-mechanism-electronic system technical inertia measuring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2804803Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100501330C (en) * | 2005-05-19 | 2009-06-17 | 西安中星测控有限公司 | Micro-mechanical- electronic system technology inertial measurement unit |
| CN103913177A (en) * | 2014-03-28 | 2014-07-09 | 吉林大学 | Monitoring device for flying state of rotor craft |
| CN104931047A (en) * | 2015-05-29 | 2015-09-23 | 苏州合欣美电子科技有限公司 | Micro-inertial measurement system based on voltage-stabilizing circuit |
| CN105841684A (en) * | 2015-01-29 | 2016-08-10 | 罗伯特·博世有限公司 | Rotation rate sensor and method for operating a rotation rate sensor |
-
2005
- 2005-05-19 CN CN 200520078794 patent/CN2804803Y/en not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100501330C (en) * | 2005-05-19 | 2009-06-17 | 西安中星测控有限公司 | Micro-mechanical- electronic system technology inertial measurement unit |
| CN103913177A (en) * | 2014-03-28 | 2014-07-09 | 吉林大学 | Monitoring device for flying state of rotor craft |
| CN105841684A (en) * | 2015-01-29 | 2016-08-10 | 罗伯特·博世有限公司 | Rotation rate sensor and method for operating a rotation rate sensor |
| CN104931047A (en) * | 2015-05-29 | 2015-09-23 | 苏州合欣美电子科技有限公司 | Micro-inertial measurement system based on voltage-stabilizing circuit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1152237C (en) | Miniature navigation system based on micro electromechanical techn. | |
| CN101059384B (en) | MEMS inertia measuring unit and mounting error calibration method | |
| CN102620719B (en) | Obliquity sensor with high accuracy and temperature compensation and dynamic compensation method thereof | |
| CN2804803Y (en) | Micro-mechanism-electronic system technical inertia measuring device | |
| CN1948906A (en) | Capacitive type complete decoupling horizontal axis miniature mechanical gyro | |
| CN100501330C (en) | Micro-mechanical- electronic system technology inertial measurement unit | |
| TW201310005A (en) | Inertia sensing apparatus | |
| CN108802427A (en) | Prefastening parallel connection six-dimension acceleration sensor and its measurement and Sensitivity Analysis Method | |
| CN110702088B (en) | Wheel type double-shaft micromechanical gyroscope | |
| US9879998B2 (en) | Angular velocity sensor | |
| CN102901520B (en) | Method for improving temperature stability of capacitor type micromechanical sensor and micromechanical sensor | |
| CN201327390Y (en) | Micromechanics inertial measuring instrument based on CAN bus | |
| CN201397343Y (en) | Inertial measurement device | |
| WO2019047560A1 (en) | Weight-bearing measuring device and method, and weight-bearing apparatus | |
| CN2783330Y (en) | Solid state angular rate gyro for micro mechanical-electronic system | |
| CN2828821Y (en) | Micromechanical triaxial angle rate sensor | |
| CN200982980Y (en) | Stabilizer | |
| CN100462723C (en) | Miniature mechanical three-axis angular rate sensor | |
| CN100593690C (en) | Digital inertia measuring unit | |
| CN101413798B (en) | Multiple-combined angular rate gyroscope | |
| CN201116875Y (en) | Micro-machinery inertial navigation device | |
| CN201293645Y (en) | High precision angular rate gyroscopes | |
| CN201247252Y (en) | Inertial sensor for automobile | |
| CN100510752C (en) | Solid state angle speed rate gyro of micromechanical electron system technology | |
| CN216900613U (en) | Three-axis accelerometer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20090617 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |