CN2773047Y - Electric heating box type furnace for producing micro-nano carbon material by chemical vapor deposition method - Google Patents
Electric heating box type furnace for producing micro-nano carbon material by chemical vapor deposition method Download PDFInfo
- Publication number
- CN2773047Y CN2773047Y CN 200520022784 CN200520022784U CN2773047Y CN 2773047 Y CN2773047 Y CN 2773047Y CN 200520022784 CN200520022784 CN 200520022784 CN 200520022784 U CN200520022784 U CN 200520022784U CN 2773047 Y CN2773047 Y CN 2773047Y
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- furnace core
- substrate
- carbon material
- furnace
- nano carbon
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- 239000003575 carbonaceous material Substances 0.000 title claims abstract description 28
- 229910021392 nanocarbon Inorganic materials 0.000 title claims abstract description 27
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 21
- 238000000034 method Methods 0.000 title claims description 17
- 238000005485 electric heating Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims abstract description 56
- 238000010438 heat treatment Methods 0.000 claims abstract description 12
- 238000004519 manufacturing process Methods 0.000 claims abstract description 11
- 229910052751 metal Inorganic materials 0.000 claims abstract description 9
- 239000002184 metal Substances 0.000 claims abstract description 9
- 238000009413 insulation Methods 0.000 claims description 10
- 238000010276 construction Methods 0.000 claims description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 abstract description 16
- 229910052799 carbon Inorganic materials 0.000 abstract description 11
- 229910021393 carbon nanotube Inorganic materials 0.000 abstract description 4
- 239000002041 carbon nanotube Substances 0.000 abstract description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 abstract description 4
- 229920000049 Carbon (fiber) Polymers 0.000 abstract description 2
- 239000004917 carbon fiber Substances 0.000 abstract description 2
- 238000004321 preservation Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 37
- 239000000463 material Substances 0.000 description 4
- 239000012495 reaction gas Substances 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 239000012071 phase Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 239000007921 spray Substances 0.000 description 3
- 239000010959 steel Substances 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 2
- 208000002925 dental caries Diseases 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 150000001721 carbon Chemical group 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- -1 pottery Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000004575 stone Substances 0.000 description 1
- 238000010189 synthetic method Methods 0.000 description 1
- 238000001947 vapour-phase growth Methods 0.000 description 1
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- Carbon And Carbon Compounds (AREA)
Abstract
The utility model relates to a CVD (chemical vapor deposition) stove, specifically speaking relate to a CVD stove of production micro-nano carbon material. The furnace core pipe (3), one end of the furnace core pipe (3) is opened, and an openable movable furnace door (8) is arranged at the opening of the furnace core pipe (3); a gas inlet pipe (6) and a gas outlet pipe (7) which are communicated with the cavity of the furnace core pipe (3) are respectively and vertically arranged on the upper wall and the lower wall of the furnace core pipe (3); a heating body (4) is arranged on the outer side of the upper wall and the lower wall of the furnace core pipe (3), and a heat-insulating layer (5) is wrapped outside the heating body (4) and the side wall of the furnace core pipe (3) except the furnace door; the outer of the heat preservation layer is a metal shell (9) with a frame structure; a substrate frame (2) is arranged in the middle of the cavity of the furnace core pipe (3), and a substrate (1) is arranged on the substrate frame (2). The utility model discloses can realize high quality, produce the micro-nano carbon material of various forms with high efficiency, including carbon nanotube, vapor growth carbon fiber, little carbon book.
Description
Technical field
The utility model relates to CVD (chemical vapour deposition) stove, relates in particular to a kind of CVD stove of producing the micro-nano carbon material.Described micro-nano carbon material comprises carbon nanotube, gas-phase growth of carbon fibre, micro carbon roll (carbon fiber with spirane structure).
Background technology
The micro-nano carbon material is one of field that research enlivens the most in the Materials science, and it comprises the carbon material of variforms such as carbon nanotube, gas-phase growth of carbon fibre, micro carbon roll.At present, this type of material is widely used in the middle of national defence and the national product, its purposes wide, effect is big, has become that people improve the quality of living and the foundation stone of scientific technological advance.The method of producing the micro-nano carbon material is a lot, and wherein the CVD method has that equipment is simple, flow process is short, cost is low, realizes advantage such as suitability for industrialized production easily, thereby often is used.So-called CVD method is exactly that a kind of chemical reaction that utilizes makes gas raw material cracking and deposition, can access the synthetic method with various form solid materials at last.This wherein comprises the substrate method again, exactly catalyst particle is at first loaded on the substrate, as the crystal seed of vapor phase growth.
The common way of utilizing substrate method growth of fine-nano carbon material is that metal fine particles such as Fe, the Ni shop as catalyzer is coated on the substrates such as quartz, pottery, graphite; Substrate is placed in the round tube type reaction tubes; Carbon-source gas such as methane, acetylene, benzene, carbon monoxide are in the conduit inflow reactor; Carbon-source gas decomposes after reactor is heated to certain temperature, and carbon atom is deposited down under the effect of catalyzer, forms various micro-nano carbon materials.This method is in actual production, and the form of product micro-nano carbon material is subjected to the flow direction of carbon-source gas and the relative position of catalyzer and carbon source air-flow to influence bigger.Therefore, utilize existing installation such as the prepared product of patent CN11202525C, patent publication No. CN1520473A, or form is inhomogeneous, or the furnace cavity effective rate of utilization that obtains even product is low.
Summary of the invention
The purpose of this utility model is to provide a kind of electric heating box-type furnace that chemical Vapor deposition process is produced the micro-nano carbon material that is used for, it can effectively control the flow direction of carbon-source gas, accurately regulate the relative position of catalyzer and carbon source air-flow, thereby obtain the uniform micro-nano carbon material of form product.And it can also fully effectively utilize furnace cavity, realizes the high quality of micro-nano carbon material, High-efficient Production.
The purpose of this utility model is achieved in that and is used for the electric heating box-type furnace that chemical Vapor deposition process is produced the micro-nano carbon material, comprises substrate, frame substrate, furnace core tube, heating element, thermal insulation layer, gas introduction tube, gas eduction tube, fire door, metal shell.
One furnace core tube 3, an end opening of furnace core tube 3 is equipped with openable movable fire door 8 at the opening part of furnace core tube 3; Gas introduction tube 6 and the gas eduction tube 7 that many (quantity is not limit, and installs as required) communicate with furnace core tube 3 cavitys vertically is installed respectively on lower wall on the furnace core tube 3, and airway is evenly arranged; Heating element 4 is equipped with in the outside of lower wall on the furnace core tube 3; In the outside of heating element 4, and the side wall perimeter of the furnace core tube 3 except that fire door parcel thermal insulation layer 5; Thermal insulation layer is outward the metal shell 9 of skeleton construction;
One frame substrate 2 is installed in intravital middle part, furnace core tube 3 chambeies, lays substrate 1 on frame substrate 2.
Have hole on the described substrate 1.
Characteristics of the present utility model: (one) adopts box furnace core tube; (2) can regulate substrate height; (3) source of the gas vertically sprays to substrate simultaneously through a plurality of ingress pipes from the top; (4) substrate has a plurality of holes, can allow gas discharge out of the furnace from delivery line by the back; (5) a plurality of gas eduction tubes are vertically mounted on the furnace core tube below.
Described body of heater primary structure material therefor is the same with common CVD stove.Substrate can be selected quartz, graphite and high temperature steel for use; Frame substrate can be selected high temperature steel, aluminum oxide, pottery for use; Furnace core tube and gas duct are optional with aluminum oxide, pottery, quartz, high temperature steel.
The principal character of described electric heating box-type furnace has:
(1) furnace core tube adopts the box structure of rectangular parallelepiped.Help like this outlet of a plurality of gas introduction tubes is placed on the same horizontal plane, thereby guarantee that the distance that each gas introduction tube exports to substrate is identical.Simultaneously, it also helps the utilization ratio that improves furnace cavity, has promptly improved the ratio of substrate area and furnace volume.
(2) substrate height can be regulated by frame substrate.That is to say with frame substrate and accurately regulate the distance of substrate, thereby can control the form of product micro-nano carbon material to the gas introduction tube outlet.Substrate should be between 10-300mm to the distance of gas introduction tube outlet.
(3) have a plurality of gas introduction tubes perpendicular to substrate.The internal diameter of conduit can be 4-20mm, and line-spacing can be 40-400mm with the row distance.Can make the reactor feed gas body evenly, vertically spray to substrate like this.Thereby guarantee that the relative position in the reaction gas flow of whole catalyzer place is basic identical, improve the homogeneity of product form.
(4) substrate has a plurality of holes.Hole location is decided according to gas introduction tube, and all there is a hole at the center of every corresponding four adjacent gas introduction tube outlets, and its diameter is 1-4 a times of gas introduction tube internal diameter.
(5) a plurality of gas eduction tubes of the vertical installation in furnace core tube below.Decide according to the substrate hole position of delivery line, and all there is a gas eduction tube at the center of every corresponding four adjacent substrate holes, and its diameter is 1-4 a times of substrate aperture hole dia.
Characteristics of the present utility model are: furnace core tube adopts case structure, gas duct positioned vertical lower wall on furnace core tube.Reaction gas flow can vertically spray to substrate equably, and can also regulate the distance between the outlet of catalyzer and gas introduction tube by frame substrate.Adopt the utility model, only need select appropriate catalyst for use, suitable reactant gas source, and suitable temperature can be synthesized the micro-nano carbon material of various forms, comprise carbon nanotube, gas-phase growth of carbon fibre, micro carbon roll.When using the utility model to produce this type of material, the products therefrom form is even, and therefore the utilization ratio height of furnace cavity can be realized high quality, produce expeditiously.
Below in conjunction with accompanying drawing the utility model is done further to discuss:
Description of drawings
Fig. 1 is a horizontal cross-sectional schematic of the present utility model.
Fig. 2 is vertical cross-sectional schematic of the present utility model.
Reference numeral
1. substrate 2. frame substrates 3. furnace core tubes 4. heating elements
5. thermal insulation layer 6. gas introduction tubes 7. gas eduction tubes 8. fire doors
9. metal shell
Embodiment
See also attached Fig. 1 and 2.Constitute primary structure of the present utility model and comprise substrate 1, frame substrate 2, furnace core tube 3, heating element 4, thermal insulation layer 5, gas introduction tube 6, gas eduction tube 7, fire door 8 and metal shell 9.
Furnace core tube is the rectangular structure of an end opening, at the opening part of furnace core tube 3 openable movable fire door 8 is installed, and opening is used for putting into substrate and takes out product; Many gas introduction tube 6 and gas eduction tubes 7 that communicate with furnace core tube 3 cavitys of vertical respectively installation on lower wall on the furnace core tube 3, airway is evenly arranged; Heating element 4 is equipped with in the outside of lower wall on the furnace core tube 3; In the outside of heating element 4, and the side wall perimeter of the furnace core tube 3 except that fire door parcel thermal insulation layer 5; Thermal insulation layer is outward the metal shell 9 of skeleton construction;
One frame substrate 2 is installed in intravital middle part, furnace core tube 3 chambeies, on frame substrate 2, lay the substrate 1 that has hole, close fire door after putting into the substrate that is covered with catalyzer, body of heater is heated to temperature required, reaction gas vertically arrives the catalyzer place through gas introduction tube, reaction after the substrate hole and around and discharge out of the furnace by gas eduction tube.Vertical gas importing, delivery line and substrate hole help reaction gas flow can pass through burner hearth equably.Add the frame substrate that can be used to regulate substrate height, the utility model can effectively be controlled the flow direction of carbon-source gas and the relative position of catalyzer and carbon source air-flow, thereby obtain the uniform micro-nano carbon material of form product, realize the high quality of micro-nano carbon material, High-efficient Production.
Claims (8)
1. one kind is used for the electric heating box-type furnace that chemical Vapor deposition process is produced the micro-nano carbon material, comprises substrate, frame substrate, furnace core tube, heating element, thermal insulation layer, gas introduction tube, gas eduction tube, fire door, metal shell; It is characterized in that:
One furnace core tube (3), an end opening of furnace core tube (3) is equipped with openable movable fire door (8) at the opening part of furnace core tube (3); Vertical respectively gas introduction tube (6) and the gas eduction tube (7) that communicates with furnace core tube (3) cavity of installing on the last lower wall of furnace core tube (3); Furnace core tube (3) the upward outside of lower wall is equipped with heating element (4), the outside in heating element (4), and the sidewall external parcel thermal insulation layer (5) of the furnace core tube (3) except that fire door;
One frame substrate (2) is installed in intravital middle part, furnace core tube (3) chamber, lays substrate (1) on frame substrate (2), has hole on substrate (1).
2. according to claim 1ly be used for the electric heating box-type furnace that chemical Vapor deposition process is produced the micro-nano carbon material, it is characterized in that: the distance that described substrate exports to gas introduction tube is between 10-300mm.
3. the electric heating box-type furnace that is used for chemical Vapor deposition process production micro-nano carbon material according to claim 1 and 2, it is characterized in that: the internal diameter of described gas introduction tube is 4-20mm, line-spacing is 40-400mm with the row distance.
4. the electric heating box-type furnace that is used for chemical Vapor deposition process production micro-nano carbon material according to claim 1 is characterized in that: described hole is that the center of every corresponding four adjacent gas introduction tubes outlets all has a hole.
5. according to claim 1 or the 4 described electric heating box-type furnaces that are used for chemical Vapor deposition process production micro-nano carbon material, it is characterized in that: the diameter of described hole is 1-4 a times of gas introduction tube internal diameter.
6. the electric heating box-type furnace that is used for chemical Vapor deposition process production micro-nano carbon material according to claim 1, it is characterized in that: described gas eduction tube is that the center of every corresponding four adjacent substrate holes all has a gas eduction tube.
7. according to claim 1 or the 6 described electric heating box-type furnaces that are used for chemical Vapor deposition process production micro-nano carbon material, it is characterized in that: the diameter of described gas eduction tube is 1-4 a times of substrate aperture hole dia.
8. the electric heating box-type furnace that is used for chemical Vapor deposition process production micro-nano carbon material according to claim 1, it is characterized in that: described thermal insulation layer is outward the metal shell (9) of skeleton construction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520022784 CN2773047Y (en) | 2005-01-31 | 2005-01-31 | Electric heating box type furnace for producing micro-nano carbon material by chemical vapor deposition method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200520022784 CN2773047Y (en) | 2005-01-31 | 2005-01-31 | Electric heating box type furnace for producing micro-nano carbon material by chemical vapor deposition method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2773047Y true CN2773047Y (en) | 2006-04-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200520022784 Expired - Fee Related CN2773047Y (en) | 2005-01-31 | 2005-01-31 | Electric heating box type furnace for producing micro-nano carbon material by chemical vapor deposition method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101075015B (en) * | 2006-05-19 | 2010-08-25 | 清华大学 | Polarized electronic emitting source and self-rotating polarized scanning tunnel microscope |
| CN102039206A (en) * | 2010-12-20 | 2011-05-04 | 成都东方凯特瑞环保催化剂有限责任公司 | Catalyst calcining box |
| CN107381540A (en) * | 2017-07-21 | 2017-11-24 | 南昌大学 | A kind of horizontal kiln for reinforcing body catalyst continuous production CNT |
-
2005
- 2005-01-31 CN CN 200520022784 patent/CN2773047Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101075015B (en) * | 2006-05-19 | 2010-08-25 | 清华大学 | Polarized electronic emitting source and self-rotating polarized scanning tunnel microscope |
| CN102039206A (en) * | 2010-12-20 | 2011-05-04 | 成都东方凯特瑞环保催化剂有限责任公司 | Catalyst calcining box |
| CN102039206B (en) * | 2010-12-20 | 2013-01-30 | 成都东方凯特瑞环保催化剂有限责任公司 | Catalyst calcining box |
| CN107381540A (en) * | 2017-07-21 | 2017-11-24 | 南昌大学 | A kind of horizontal kiln for reinforcing body catalyst continuous production CNT |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060419 Termination date: 20140131 |