CN2903096Y - Geseous phase penetration/deposition apparatus of carbonyl metal compound - Google Patents
Geseous phase penetration/deposition apparatus of carbonyl metal compound Download PDFInfo
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- CN2903096Y CN2903096Y CN 200620003951 CN200620003951U CN2903096Y CN 2903096 Y CN2903096 Y CN 2903096Y CN 200620003951 CN200620003951 CN 200620003951 CN 200620003951 U CN200620003951 U CN 200620003951U CN 2903096 Y CN2903096 Y CN 2903096Y
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- heater
- furnace
- metal compound
- deposition apparatus
- vibrations
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Abstract
The utility model comprises a furnace body, an air inlet port (16), an exhaust gas vent (1), an electrical heating and temperature controlling system, an air cooling system, a furnace base (11) and a shaking system. The utility model is characterized in that the furnace body comprises a hemispheroid (8) arranged at the furnace bottom, a furnace tube (4) and a buffer (2) arranged at the furnace roof, wherein each portion of the hemispheroid is connected by a flange, the electrical heating and temperature controlling system is provided at the outboard of the furnace body. The shaking system comprises a shaking panel (12), a spring and a fixed leg (13), a shaking grate (14) and a shaking generator (14), wherein the air cooling system is arranged at the bottom of the furnace body. The utility model has the advantages of that it is suitable to the infiltration or deposition of ultra-fine metallic particles or thin films into the substrates having small dimensions and good fluidity. Further, the utility model has low cost, high production efficiency, and is suitable to industrial production.
Description
Affiliated technical field
The utility model relates to a kind of gas-phase permeation/deposition apparatus, relates in particular to a kind of carbonyl metal compound gas-phase permeation/deposition apparatus.
Background technology
The film that has ad hoc structure in the substrate material surface deposition, can improve such as many-sided performances such as high-temperature mechanical property, wear resisting property, etch resistant properties, and the metal deposition that nickel, palladium etc. is had a catalytic activity is on the holey carrier, can improve the dispersiveness of active ingredient, with gas phase deposition technology metal refining and compound film thereof, be the active demand in fields such as electronics, material, chemical industry catalysis.Present industrial method and the corresponding apparatus for preparing metal and compound film thereof has chemical vapor deposition (CVD) and physical vapor deposition (PVD), and wherein PVD comprises technology such as sputter coating and ion film plating.The CVD depositing temperature is too high, needs to quench again, and distortion is serious; PVD then needs 10
-5The high vacuum that mmHg is above, and generally to make workpiece in equipment, make complicated rotation and revolution, equipment manufacturing cost and use and maintenance cost costliness.United States Patent (USP) (the patent No. 3,858,547) introduced a kind of coating apparatus that adjustable swivel arrangement is arranged, the major part of this equipment is sealed in the vacuum chamber, vacuum chamber bottom has evaporation source, top that the supportive device that rotator and the quilt on rotator are coated with matrix is installed.In order to improve coating quality, the matrix supporter can rotation and around the evaporation source revolution, and rotation is parallel with hollow shaft also can be in an acute angle mutually, and in order to adapt to the coated matrix of different size specification, the distance between each matrix supporter can be adjusted.This device is only applicable to the matrix of large-size on structure formation, be not easy for little and the basal body coating layer that quantity is big of dimensions, in addition, the angle variation range between deposition source and matrix is little, thereby each position of matrix is to the little and probability inequality of scope of deposition source exposure.Metal organic chemical vapor deposition (MOCVD) technology has outstanding feature: the component proportions adjustable extent of (1) synthetic materials is big, can reach the purpose of the composition of controlling diaphragm by the mol ratio of adjusting mixed gas.(2) depositing temperature is low, and the film forming area is big.Because the speed of growth of film is to determine that by the reactant gas molecules concentration on surface and density the quick conveying of uniform pressure of matrix surface and reactant gases makes the even film forming of big area become possibility.Select for use lower group bond energy to make it under lower temperature, to rupture, thereby make this technology can under temperature, obtain the good fine and close film of quality far below material melting point.(3) deposit thickness is even, and variable range is wide, can deposit the uniform mould of wall thickness, also can evenly apply the heterotypic material surface.(4) by switching, can deposit composite membrane or gradient film to source of the gas.(5) because chemical source of the gas has unique purification techniques, can deposit high purity films.(6) can make metastable state phase structure film.But present MOCVD technology is not suitable for different size specification, difform coated matrix, and the cost height.
The utility model content
The utility model has overcome above shortcoming; providing a kind of is the organometallic chemistry gas-phase permeation/deposition apparatus of vapor deposition source with the carbonyl metal compound; it not only can be at the matrix surface depositing metal films; but also the inside that can be penetrated into porous matrix deposits with the form of ultra-fine metallic particles; thereby further improved the range of application of vapour deposition; and the particular substrate material had high sedimentation effect; the utility model device does need vacuumize; do not need base matter in equipment, to do complicated rotation yet; cost is low; be suitable for to dimensions little; flowability is matrix permeability/deposition ultra-fine metallic particles or film preferably, the production efficiency height.
Gas-phase permeation/deposition apparatus provided by the utility model partly is made up of body of heater, inlet mouth, tail gas outlet, electrically heated and temperature controlling system, air cooling system, stove seat, vibroseis etc., body of heater is made up of furnace bottom hemisphere, boiler tube and furnace roof snubber three parts, the furnace bottom hemisphere is connected by flange with boiler tube, boiler tube is connected by flange with the furnace roof snubber, be convenient to the dismounting cleaning, there are an electrically heated and temperature controlling system in the body of heater outside.The snubber of furnace roof makes ebullient be deposited thing and obtains buffering, it is more abundant to impel matrix and carbonyl compound steam to contact (infiltration), reducing lighter base matter is simultaneously taken away by carrier gas, vibroseis partly is made up of vibrations panel, spring and fixed leg, vibrations grate, vibration motor etc., whole body of heater is installed in earlier on the stove seat, and then be installed on the vibrations grate, the vibrations panel is fixedlyed connected with stove seat bottom, one air cooling system is arranged at the body of heater bottom, makes the base matter in the boiler tube obtain uniform deposition by vibroseis.By Ar, N
2Or CO gas carrier band carbonyl metal compound steam enters in the stove by the bottom inlet mouth, and carbonyl metal compound permeates/is deposited on the matrix thing of packing in advance in the boiler tube under certain Heating temperature.Bigger carrier band air-flow has the power of necessarily blowing to the matrix thing that is deposited in the boiler tube, make it produce certain fluidity, add the vibrations of vibration motor on the vibrations panel, be transferred to boiler tube by spring, make that being deposited thing seethes with excitement in boiler tube, thereby reach uniformly penetrating/sedimentary purpose.
The vibrations panel that another aspect of the present utility model is a vibroseis is connected by pin with stove seat bottom.
Another aspect of the present utility model is that electrically heated and temperature controlling system are made up of stainless steel casing, globars heating member, thermal insulation layer, thermometer hole and PID temperature-controlled box, the profile of electrically heated part is two half-cylindrical heating jackets, during the desire heating two semicolumn heating jackets are incorporated in the outside of boiler tube, and when needs cool off rapidly, the semicolumn heating jacket opened get final product quick heat radiating, structure opens and closes flexibly, and it is convenient to heat, cool off, and the heating constituent element is a globars.
Another aspect of the present utility model is the air cooling system of body of heater bottom, is made up of gas inlet, air, cooling air jacket etc., is used for the rapid cooling of furnace bottom, avoids carbonyl compound to decompose at furnace bottom and stops up opening for feed.
The beneficial effects of the utility model:
The vapour deposition temperature is at 60-300 ℃; neither need to vacuumize; do not need base matter in equipment, to do complicated rotation yet; be suitable for, flowability little matrix permeability/deposition ultra-fine metallic particles or film preferably to dimensions; equipment manufacturing cost and use and maintenance cost are low; the production efficiency height is applicable to industrial production.
Description of drawings
Below in conjunction with accompanying drawing the utility model is elaborated.
Fig. 1 is a structural representation of the present utility model.
Embodiment
Technical characterstic of the present utility model is that whole body of heater is installed in earlier on the stove seat 11, and then is installed on the vibrations grate, relies on the boiling that realizes being deposited thing with the mechanical shock system jointly of blowing of carrier band gas.The vibrations system is by vibrations panel 12, spring, spring fixed column 13, vibrations grate 14 and vibration motor 15 formed, make carbonyl compound can uniform deposition to being deposited on the thing surface.The cooling air jacket 10 of furnace bottom can make furnace bottom cool off rapidly, avoids carbonyl compound to decompose in the bottom and stops up opening for feed.Body of heater is made up of furnace bottom hemisphere 8, boiler tube 4 and furnace roof snubber 2 three parts, is connected by flange 3 between snubber and boiler tube, and boiler tube is connected by flange 9 with the bottom hemisphere, unpicks and washes conveniently.The snubber of furnace roof makes ebullient be deposited thing and obtains buffering, and it is more abundant to impel matrix and carbonyl compound steam to contact (infiltration), reduces lighter base matter simultaneously and is taken away by carrier gas.Electrically heated and temperature controlling system are made up of stainless steel casing, globars heating member 5, thermal insulation layer 6, thermometer hole 7 and PID temperature-controlled box, the profile of electrically heated part is two half-cylindrical heating jackets, during the desire heating two semicolumn heating jackets are incorporated in the outside of boiler tube, and when needs cool off rapidly, the semicolumn heating jacket opened get final product quick heat radiating, structure opens and closes flexibly, and heating, cooling are conveniently.The air cooling system of body of heater bottom is made up of gas inlet (17), air (18), cooling air jacket (10) etc., is used for the rapid cooling of furnace bottom, avoids carbonyl compound to decompose at furnace bottom and stops up opening for feed.
Claims (4)
1, a kind of carbonyl metal compound gas-phase permeation/deposition apparatus, by body of heater, inlet mouth (16), tail gas outlet (1), electrically heated and temperature controlling system, air cooling system, stove seat (11), vibroseises etc. are partly formed, it is characterized in that described body of heater is by furnace bottom hemisphere (8), boiler tube (4) and furnace roof snubber (2) three parts are formed, furnace bottom hemisphere (8) is connected by flange (9) with boiler tube (4), boiler tube (4) is connected by flange (3) with furnace roof snubber (2), the outer survey of body of heater has an electrically heated and temperature controlling system, vibroseis is by vibrations panel (12), spring and fixed leg (13), vibrations grate (14), part such as vibration motor (15) is formed, whole body of heater is installed in earlier on the stove seat (11), and then be installed on the vibrations grates (14), vibrations panels (12) are fixedlyed connected with stove seat (11) bottom, and an air cooling system is arranged at the body of heater bottom.
2, carbonyl metal compound gas-phase permeation/deposition apparatus according to claim 1 is characterized in that shaking panel (12) and is connected by pin with stove seat (11) bottom.
3, carbonyl metal compound gas-phase permeation/deposition apparatus according to claim 1, it is characterized in that electrically heated and temperature controlling system be made up of stainless steel casing, globars heating member (5), thermal insulation layer (6), thermometer hole (7) and PID temperature-controlled box, the profile of electrically heated part is two half-cylindrical heating jackets, and the heating constituent element is a globars.
4, carbonyl metal compound gas-phase permeation/deposition apparatus according to claim 1 is characterized in that the air cooling system of body of heater bottom is made up of gas inlet (17), air (18), cooling air jacket (10) etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620003951 CN2903096Y (en) | 2006-02-14 | 2006-02-14 | Geseous phase penetration/deposition apparatus of carbonyl metal compound |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200620003951 CN2903096Y (en) | 2006-02-14 | 2006-02-14 | Geseous phase penetration/deposition apparatus of carbonyl metal compound |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2903096Y true CN2903096Y (en) | 2007-05-23 |
Family
ID=38078504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200620003951 Expired - Lifetime CN2903096Y (en) | 2006-02-14 | 2006-02-14 | Geseous phase penetration/deposition apparatus of carbonyl metal compound |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2903096Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103146935A (en) * | 2013-03-15 | 2013-06-12 | 金川集团股份有限公司 | Pyrolyzing furnace for preparing nickel rod through chemical vapor deposition method and method for preparing nickel rod |
| CN105651644A (en) * | 2014-11-14 | 2016-06-08 | 中国石油天然气股份有限公司 | Effective substance content tester for emulsified asphalt |
-
2006
- 2006-02-14 CN CN 200620003951 patent/CN2903096Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103146935A (en) * | 2013-03-15 | 2013-06-12 | 金川集团股份有限公司 | Pyrolyzing furnace for preparing nickel rod through chemical vapor deposition method and method for preparing nickel rod |
| CN105651644A (en) * | 2014-11-14 | 2016-06-08 | 中国石油天然气股份有限公司 | Effective substance content tester for emulsified asphalt |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: BEIJING STEEL INSTITUTE GAONA TECHNOLOGY LIMITED Free format text: FORMER OWNER: IRON AND STEEL RESEARCH GEUERAL INST. Effective date: 20080418 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20080418 Address after: Beijing City, Haidian District Daliushu Village No. 19, zip code: 100081 Patentee after: Beijing Gaona technology limited liability company Address before: No. 76 South College Road, Beijing, 100081 Patentee before: Central Iron & Steel Research Institute |
|
| ASS | Succession or assignment of patent right |
Owner name: GAUNA BEIJING INSTITUTE OF TECHNOLOGY CO. Free format text: FORMER OWNER: IRON AND STEEL RESEARCH GEUERAL INST. Effective date: 20080530 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20080530 Address after: Beijing City, Haidian District Daliushu Village No. 19, zip code: 100081 Patentee after: BEIJING CISRI-GAONA MATERILALS & TECHNOLOGY Co., LTD. Address before: No. 76 South College Road, Beijing, 100081 Patentee before: Central Iron & Steel Research Institute |
|
| CX01 | Expiry of patent term |
Granted publication date: 20070523 |
|
| EXPY | Termination of patent right or utility model |