CN2760048Y - 真空镀膜机的抽气系统 - Google Patents

真空镀膜机的抽气系统 Download PDF

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Publication number
CN2760048Y
CN2760048Y CN 200420055965 CN200420055965U CN2760048Y CN 2760048 Y CN2760048 Y CN 2760048Y CN 200420055965 CN200420055965 CN 200420055965 CN 200420055965 U CN200420055965 U CN 200420055965U CN 2760048 Y CN2760048 Y CN 2760048Y
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China
Prior art keywords
pump
slide valve
gas
vacuum film
film plating
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Expired - Lifetime
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CN 200420055965
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English (en)
Inventor
范多旺
邓志杰
于正勤
武福
范多进
王汉安
解武波
孔令刚
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Lanzhou Dacheng Technology Co., Ltd.
Original Assignee
DACHENG AUTOMATION ENGINEERING Co Ltd LANZHOU
Lanzhou Jiaotong University
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Priority to CN 200420055965 priority Critical patent/CN2760048Y/zh
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Publication of CN2760048Y publication Critical patent/CN2760048Y/zh
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Abstract

本实用新型提供了一种真空镀膜机的立体抽气系统，该系统利用一个支架将整个系统的结构、管路进行立体式配置，大大缩小了整个排气系统的体积、节约了系统的占地面积，同时缩短了整个系统的管道线路，有效提高了泵的抽速和效率。

Description

真空镀膜机的抽气系统
技术领域
本实用新型涉及一种真空镀膜机的辅助系统，尤其涉及一种真空镀膜机的抽气系统。
背景技术
利用真空蒸发技术在工件表面镀保护膜的技术，已经成熟应用于工业生产。目前应用最广的是由两个真空室出气口、两路抽气系统组成的真空镀膜机，这种排气系统的结构、配置和管路等整个采用平面布置(如图1)，而且现有设备的三个机械泵和一个作维持用的机械泵均采用的是分散排气(即用四个过滤罐和排气口，维持泵距离设备也非常远，使系统的管路长、占地面积大，直接影响了泵的效率。
发明内容
本实用新型的目的是提供一种管路短、空间利用率高、效率高的立体式真空镀膜机的抽气系统。
本实用新型的目的可以通过以下措施实现：
一种真空镀膜机的抽气系统，将原有的旋片式机械泵改为抽速快而且综合性能更高的滑阀泵，它由滑阀泵经罗茨泵接予抽阀、扁阀后与真空室相连，排放的气体由滑阀泵和维持泵经过滤罐从排气口排出；其中滑阀泵、罗茨泵及维持泵共用一个过滤罐，且罗茨泵和过滤罐固定设置在支架上；维持泵和滑阀泵设置在支架内。
本实用新型与现有技术相比具有以下优点：
本实用新型的结构、管路采用立体式配置，大大缩小了整个抽气系统的体积、节约了系统的占地面积，同时缩短了整个系统的管道线路，有效提高了泵的抽速和效率。
附图说明
图1为现有技术中抽气系统的的平面布置图。
图2为本实用新型抽气系统的立体设置图
具体实施方式
参照图2，一种真空镀膜机的立体抽气系统，由滑阀泵1经罗茨泵2，再接予抽阀3、扁阀后与真空室(图中未标出)相连；滑阀泵1、罗茨泵2及维持泵4共用一个过滤罐5，它们排放的气体经过滤罐5后从排气口6排出。其中罗茨泵1和过滤罐5固定设置在一个支架7上；维持泵4和滑阀泵1设置在支架7内，这样整个系统形成一个立体结构。

Claims (1)

1、一种真空镀膜机的立体抽气系统，由滑阀泵(1)经罗茨泵(2)、接予抽阀(3)、扁阀后与真空室相连，排放的气体由滑阀泵(1)和维持泵(4)经过滤罐(5)从排气口(6)排出，其特征在于：所述滑阀泵(1)、罗茨泵(2)及维持泵(4)共用一个过滤罐(5)，且罗茨泵(1)和过滤罐(5)固定设置在支架(7)上；维持泵(4)和滑阀泵(1)设置在支架(7)内。
CN 200420055965 2004-12-31 2004-12-31 真空镀膜机的抽气系统 Expired - Lifetime CN2760048Y (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200420055965 CN2760048Y (zh) 2004-12-31 2004-12-31 真空镀膜机的抽气系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200420055965 CN2760048Y (zh) 2004-12-31 2004-12-31 真空镀膜机的抽气系统

Publications (1)

Publication Number Publication Date
CN2760048Y true CN2760048Y (zh) 2006-02-22

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CN 200420055965 Expired - Lifetime CN2760048Y (zh) 2004-12-31 2004-12-31 真空镀膜机的抽气系统

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107051849A (zh) * 2017-04-09 2017-08-18 上海车功坊汽车服务有限公司 一种采用真空镀膜的汽车外观件再制造镀覆方法
CN115677176A (zh) * 2022-11-15 2023-02-03 青岛融合光电科技有限公司 一种玻璃液通道负压均化澄清装置与澄清方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107051849A (zh) * 2017-04-09 2017-08-18 上海车功坊汽车服务有限公司 一种采用真空镀膜的汽车外观件再制造镀覆方法
CN115677176A (zh) * 2022-11-15 2023-02-03 青岛融合光电科技有限公司 一种玻璃液通道负压均化澄清装置与澄清方法

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TR01 Transfer of patent right

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Address after: 730000 Lanzhou hi tech Industrial Development Zone, Gansu province (No. 575 Zhang ha Beach)

Patentee after: Lanzhou Dacheng Technology Co., Ltd.

Address before: 508 box 118, Anning West Road, Anning District, Gansu 730070, Lanzhou

Co-patentee before: Lanzhou Jiaotong Univ.

Patentee before: Dacheng Automation Engineering Co., Ltd., Lanzhou

EE01 Entry into force of recordation of patent licensing contract

Assignee: Changzhou Dacheng Green Coating Science & Technology Co., Ltd.

Assignor: Lanzhou Dacheng Technology Co., Ltd.

Contract record no.: 2011320000522

Denomination of utility model: Gas-extraction system for vacuum film plating machine

Granted publication date: 20060222

License type: Exclusive License

Record date: 20110406

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Expiration termination date: 20141231

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