CN2735710Y - A plasma driving device - Google Patents
A plasma driving device Download PDFInfo
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- CN2735710Y CN2735710Y CN 200420029732 CN200420029732U CN2735710Y CN 2735710 Y CN2735710 Y CN 2735710Y CN 200420029732 CN200420029732 CN 200420029732 CN 200420029732 U CN200420029732 U CN 200420029732U CN 2735710 Y CN2735710 Y CN 2735710Y
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- plasma
- stator core
- driving device
- feed tube
- drive unit
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Abstract
The utility model provides a plasma driving device, belonging to the technical field of the plasma, and the plasma driving device is used for solving the problem that the plasma is served as driving dynamic force. The technical proposal is that: the plasma driving device comprises a vacuum chamber, a microwave source, a backing vacuum pump, an outlet valve and a plasma carrier pipe; a stator core is provided around the plasma carrier pipe, and one side of the stator core near the plasma carrier pipe is coiled with an alternating-current winding coil. The plasma driving device adopted the structure can realize that the driving of the plasma is totally-enclosed, non-contact and adjustable in high speed and low speed; the plasma driving device is suitable for ultra-high vacuum pumps, plasma filming under various speeds and low-pressure plasma particle beams, and the plasma driving device can realize the directional motion of other plasmas. As the method is easier to control the measurement, the purity and the atmosphere for treating the plasma, the plasma driving device is especially suitable for the field for researching and manufacturing high-grade, high-precision, advanced material sciences.
Description
Technical field
The utility model relates to a kind of plasma drive unit, belongs to technical field of plasma.
Background technology
Under normal temperature low pressure, people can obtain stable plasma by variety of ways such as heating, electrode discharge, microwaves.Plasma has a lot of application in fields such as industry and scientific researches, and for example arc-plasma is as concentrating heating source can be used for metal fever processing such as welding, cutting, surfacing; Utilize plasma coating can make coating more even, fine and close; The plasma particle beams that in some research works, also needs various pressure, or the like.In a lot of plasma applications processes, all need the plasma particle beams to do directed movement, this comprises that plasma film coating under the various speed, the low-voltage plasma particle beams and other require plasma to do the work of directed movement.Wherein, ionic pump is to need plasma to carry out one of equipment of directed movement, takes the DC driven mode in the design of ionic pump is used more, and this mode needs the DC electrode discharge, and electric arc is difficult for keeping stable in the discharge, influences equipment performance.According to Theory of Electromagnetic Field, after plasma is subjected to the action of a magnetic field, will be along doing directed movement with all vertical direction of magnetic field, electric field, the method for designing a kind of non-DC driven plasma under this theoretical direction is the very problem of reality that the technical staff faces.
Summary of the invention
Technical problem to be solved in the utility model provides a kind of stable plasma drive unit.
The technical scheme that addresses the above problem is;
A kind of plasma drive unit, it comprises vacuum chamber, microwave source, backing vacuum pump, outlet valve, plasma feed tube, its improvements are, are provided with stator core around the plasma feed tube, and stator core is wound with the AC Windings coil near plasma feed tube one side.
Above-mentioned plasma drive unit, described stator core are flat stator core, are configured in the upper and lower of plasma feed tube respectively.
Above-mentioned plasma drive unit, described plasma feed tube 5 adopts helical form, and stator core is along the equidistant coiled arrangement of plasma feed tube 5 peripheries, and space between the two is gap 9.
Above-mentioned plasma drive unit, described stator core are cylindric, and at the center of stator core, described AC Windings coil configuration is on the inside circumference of stator core cylinder along the axial arrangement of stator core cylinder for the plasma feed tube.
Above-mentioned plasma drive unit, the center of described cylindric stator core have round iron rod core, and the plasma feed tube is connected with gap between stator core cylindrical wall and the excellent core of round iron.
Adopt the plasma drive unit of this structure, it is totally-enclosed to realize that plasma drives, noncontact, high low speed is adjustable arbitrarily, can be used for ultrahigh vacuum pump, the plasma coating under the various speed, low pressure etc. are from the particle beams and realize the directed movement of other plasma, or the like.When it is used for ultrahigh vacuum pump, considerably beyond the vacuum degree of sliding vane rotary pump, lobe pump, can reach the vacuum levels of molecular pump and oil diffusion pump, its numerical value is up to 10-5～10-6PA.Because the measuring of the easier control plasma treatment of this method, purity and atmosphere are particularly suitable for high-grade, precision and advanced material science research and manufacturing field.
Description of drawings
Fig. 1 is an overall structure schematic diagram of the present utility model;
Fig. 2 is the structural representation of another kind of embodiment;
Fig. 3 is the A-A profile of Fig. 2.
Each label is among the figure: vacuum chamber 1, microwave source 2, backing vacuum pump 3, outlet valve 4, plasma feed tube 5, stator core 6, AC Windings coil 7, interior iron core 8, gap 9, round iron rod core 10.
Embodiment
See that from Fig. 1 this plasma drive unit comprises vacuum chamber 1, microwave source 2, backing vacuum pump 3, outlet valve 4, plasma feed tube 5, stator core 6, AC Windings coil 7.Vacuum chamber 1 is connected with backing vacuum pump 3 by plasma feed tube 5, and microwave source 2 also is connected with vacuum chamber 1.The effect of microwave source 2 is to produce plasma, and producing isoionic mode also can be varied.Because microwave can see through glass and reflect on metal covering, with gas ions without any contacting, so microwave mode the best.Backing vacuum pump 3 can make the air gap of vacuum chamber 1 reach certain vacuum degree, and gas is ionized easily, produces plasma.Show among the figure, be provided with stator core 6 and AC Windings coil 7 at the upper and lower of plasma feed tube 5, pass to the voltage of setpoint frequency when the AC Windings coil after, the air gap between the stator core 6 has just produced the alternating magnetic field with the magnetic direction vertical moving up and down.Backing vacuum pump 3 makes vacuum chamber 1 reach certain vacuum degree, start microwave source 2 and make generation plasma in the vacuum chamber 1, plasma has produced stressed (among the figure for to the right) of specific direction during by the electromagnetism air gap under action of alternating magnetic field, make plasma generation directed mobile, thereby realize the ultra high vacuum of vacuum chamber 1.The stressed size of plasma is relevant with factors such as magnetic field intensity, alternative frequency, plasma content, vacuum degrees with speed.
What Fig. 2, Fig. 3 showed is another embodiment schematic diagram, in this embodiment, stator core 6 is cylindric, plasma feed tube 5 is along the axial arrangement of the stator core 6 cylinders center at stator core 6, AC Windings coil 7 is configured on the inside circumference of stator core 6, and plasma moves along the axial direction of cylinder.In the present embodiment, can also increase round iron rod core 10, round iron rod core 10 is configured in the center of above-mentioned cylindric stator core 6, plasma passes through from the gap 9 between the cylindrical wall of stator core 10 and the round iron rod core 10, and the radial dimension that increases round iron rod core 10 can make plasma stressed evenly and improve magnetic field intensity.
The input of AC Windings coil generally can be designed to the power frequency three-phase alternating voltage, also can adopt variable frequency adjustment or Regulation Control.Load character is, vacuum degree is high more, and energy consumption is low more; Unionized gas is many more, and energy consumption is big more.Owing to must there be plasma ability operate as normal, therefore, this method can only be carried out work as the back level pump of ultrahigh vacuum pump under the cooperation of common (as machinery) vacuum pump (backing pump).
Claims (5)
1. plasma drive unit, it comprises vacuum chamber [1], microwave source [2], backing vacuum pump [3], outlet valve [4], plasma feed tube [5], it is characterized in that: be provided with stator core [6] around plasma feed tube [5], stator core [6] is wound with AC Windings coil [7] near a side of plasma feed tube [5].
2. plasma drive unit according to claim 1 is characterized in that: described stator core [6] is flat stator core, is configured in the upper and lower of plasma feed tube [5] respectively.
3. plasma drive unit according to claim 1 is characterized in that: described plasma feed tube [5] adopts helical form, and stator core is along the equidistant coiled arrangement of plasma feed tube [5] periphery, and space between the two is gap [9].
4. plasma drive unit according to claim 1, it is characterized in that: described stator core [6] is for cylindric, at the center of stator core [6], described AC Windings coil [7] is configured on the inside circumference of stator core [6] cylinder plasma feed tube [5] along the axial arrangement of stator core [6] cylinder.
5. plasma drive unit according to claim 4, it is characterized in that: there is round iron rod core [10] at the center of described cylindric stator core [6], and plasma feed tube [5] is connected with gap [9] between stator core [6] cylindrical wall and the excellent core of round iron [10].
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420029732 CN2735710Y (en) | 2004-09-11 | 2004-09-11 | A plasma driving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420029732 CN2735710Y (en) | 2004-09-11 | 2004-09-11 | A plasma driving device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2735710Y true CN2735710Y (en) | 2005-10-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420029732 Expired - Fee Related CN2735710Y (en) | 2004-09-11 | 2004-09-11 | A plasma driving device |
Country Status (1)
| Country | Link |
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| CN (1) | CN2735710Y (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102413627A (en) * | 2011-07-22 | 2012-04-11 | 中国科学院空间科学与应用研究中心 | Method for changing parameter of plasma |
| CN1822745B (en) * | 2005-02-17 | 2012-04-18 | 周星工程股份有限公司 | Plasma generation apparatus |
| CN103116178A (en) * | 2012-12-28 | 2013-05-22 | 湖州师范学院 | Radioactive ray detecting device and detecting method |
| CN108342713A (en) * | 2017-01-25 | 2018-07-31 | 馗鼎奈米科技股份有限公司 | Normal pressure plasma coating device |
-
2004
- 2004-09-11 CN CN 200420029732 patent/CN2735710Y/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1822745B (en) * | 2005-02-17 | 2012-04-18 | 周星工程股份有限公司 | Plasma generation apparatus |
| CN102413627A (en) * | 2011-07-22 | 2012-04-11 | 中国科学院空间科学与应用研究中心 | Method for changing parameter of plasma |
| CN103116178A (en) * | 2012-12-28 | 2013-05-22 | 湖州师范学院 | Radioactive ray detecting device and detecting method |
| CN108342713A (en) * | 2017-01-25 | 2018-07-31 | 馗鼎奈米科技股份有限公司 | Normal pressure plasma coating device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| ASS | Succession or assignment of patent right |
Owner name: SHIJIAZHUANG IRON AND STEEL CO., LTD. Free format text: FORMER OWNER: SHIJIAZHUANG IRON + STEEL HOLDINGS LTD. Effective date: 20060908 |
|
| C41 | Transfer of patent application or patent right or utility model | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20060908 Address after: 050031 No. 363 Heping East Road, Shijiazhuang, Hebei, Changan District Patentee after: Shijiazhuang Iron & Steel Co., Ltd. Address before: 050031 No. 363 Heping East Road, Shijiazhuang, Hebei, Changan District Patentee before: Shijiazhuang Iron and Steel Co., Ltd. |
|
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |