CN2718948Y - Plasma material processing equipment - Google Patents
Plasma material processing equipment Download PDFInfo
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- CN2718948Y CN2718948Y CN 200420066560 CN200420066560U CN2718948Y CN 2718948 Y CN2718948 Y CN 2718948Y CN 200420066560 CN200420066560 CN 200420066560 CN 200420066560 U CN200420066560 U CN 200420066560U CN 2718948 Y CN2718948 Y CN 2718948Y
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Abstract
The utility model relates to a plasma material processing device, comprising a bed body which is fabricated by the insulation material. The lower port of the bed body is provided with an air distributor, the lower face of the air distributor is provided with an air inlet which is in a funnel shape, and the air inlet is connected with the air supply through a duct with an air flowmeter. The side wall of the upper part of the bed body is opened with an air outlet, and the position of the air outlet of the bed body is opened with a hole. A feed pipe with a valve is inserted into the hole, and the feed pipe is communicated with a feed hopper. The outer electrode is arranged on the outer wall which belongs to a section from the bottom of the air outlet of the bed body down to the air distributor, and the outer electrode is electrically connected with one electrode of the high-pressure alternating current power supply. The inner electrode is inserted into the bed body and fixed on the upper port of the bed body in a sealing way, and the inner electrode which is exposed from the upper port of the bed body is electrically connected with the other electrode of the high-pressure alternating current power supply. The utility model can be run with no need of the vacuum device under the normal temperature atmospheric pressure, with low operation cost. Besides, the powder material cannot be damaged, and the applicable modified material ranges a wide range.
Description
Technical field
The utility model relates to a kind of plasma processing apparatus that is used for material is carried out the modification processing, particularly relates to a kind of equipment that can carry out plasma treatment under the normal temperature atmospheric pressure to material.
Technical background
Current fluid unit and technology are ripe relatively, are used widely at chemical enterprise.The technology of material being handled with plasma is comparative maturity also, the applicant with regard to this subject application some patents.And the plasma fluidisation bed that physical method is combined with chemical method and makes, still just begun development in the world, from external report a kind of radio frequency plasma fluid bed is arranged, as document 1:Plasma fluidized bedimaging and possible strong coupling effects, APPLIED PHYSICSLETTERS, Vol76No.18,2000.5. introduced: this plasma fluidisation bed mainly contains four parts and forms: fluidizing gas control, gas distributor, produce the radio frequency induction coil of plasma, quartz ampoule.The fluidizing gas control system is an importance of fluid bed regulation and control, and it can have influence on the fluidisation degree of particle, and gas distributor can make air-flow be evenly distributed, and coil links to each other with radio frequency source and will produce plasma in the quartz ampoule that the certain vacuum degree is arranged.Quartzy light transmission is good, utilizes the quartz ampoule can be to the relevant parameter of batch (-type) plasma fluidisation bed, measures as the electron temperature of plasma and density etc.This radio frequency plasma fluid bed as shown in Figure 1, its operation principle uses the 13.56MHz radio-frequency power supply to produce plasma at the glass tube internal induction of certain vacuum degree, the bottom of fluid bed leads to argon gas, and when argon gas reached certain air-flow, the particle in the pipe will suspend and produce the fluidisation phenomenon.This device only could produce plasma under the certain vacuum condition, vacuum equipment can increase operating cost, and the existence of vacuum condition has simultaneously influenced its scope of application.
Also has a kind of direct-current plasma fluid bed, as document 2:A direct current, plasmafluidized bed reactor:its characteristics and application in diamondsynthesis, POWDER TECHNOLOGY, the batch (-type) fluid bed that 88 (1996) 65-70 are introduced, this batch (-type) fluid bed as shown in Figure 2, the logical argon gas in bottom makes the powder particle fluidisation, reacting gas enters from wall one side, the generation of plasma relies on draws electric arc to realize between negative and positive the two poles of the earth, the argon gas that the plasma that generates is fed by the bottom is blown in the fluid bed, reacting gas feeds from the side of gas distributor position, need use water quench because electrode temperature is higher, limit material modified kind.Owing to the existence of these shortcomings, influenced the effective utilization of this two classes plasma fluidisation bed.
Summary of the invention
The purpose of this utility model is to overcome the defective of above-mentioned prior art; A kind of degradation treatment that is suitable for sewage waste gas is provided; Can carry out the surface modification treatment of thin-film material and various dusty materials again, the applicability of particularly non-conductive dusty material better processing effect is wide, can carry out the equipment of plasma treatment under the normal temperature atmospheric pressure to material.
The purpose of this utility model is achieved in that
The plasma apparatus of under the normal temperature atmospheric pressure material being handled that the utility model provides comprises: a body 13, its body 13 lower port are provided with a gas distributor 6, with installation one infundibulate air inlet 14 below gas distributor 6, air inlet 14 links to each other with source of the gas 1 by the pipeline 15 of band gas flowmeter 16; Have gas vent 12 on the sidewall on bed body 13 tops, perforate on the position of the gas vent 12 of bed body, the feed pipe 23 of a band valve is installed in this hole, and its pipeline is communicated with a feed hopper 3; On 6 one sections outer walls of gas distributor an external electrode 2 to be set, external electrode 2 is connected with lead with a utmost point of high-voltage ac power 9 at the gas vent 12 of bed body; Interior electrode 8 inserts in the bed body, and passes through an insulation board 5 sealing and fixing in bed body upper port, and the interior electrode 8 that exposes a body upper port is connected with lead with another utmost point of high-voltage ac power 9; Described bed body 13 usefulness insulating material are made.
Described gas distributor 6 is a nonmetallic slices, has circular hole on it, and the size in aperture is decided according to material modified particle diameter, is generally less than pending material modified particle diameter.This nonmetallic slices comprises organic or inorganic material, for example polymethyl methacrylate, engineering plastics, ceramic material or glass etc.
The dispatch from foreign news agency that is provided with on described bed body 13 outer walls is a hollow shell very, and the top of this shell has conducting liquid outlet 4, and its underpart has conducting liquid inlet 7, is filled with conducting liquid 24 in it; Perhaps dispatch from foreign news agency very coats a body 13 outer wall last layer conducting films; Perhaps uniform winding conductive filament, and isolate with insulating material between the internal and external electrode.
Electrode can be that conducting metal rod, conductive metal pipe or conducting metal are made annular electrode etc. in described, and interior number of electrodes is at least one, is arranged in the pipe.
Described high-voltage ac power 9 adopts voltage at 0-30KV, and frequency is at the adjustable ac high voltage source of 20-40KHz.
Described modified gas can feed from air inlet, also can feed with fluidizing gas from the bottom, and fluidizing gas is air, argon gas, nitrogen etc.
Described conducting liquid comprise by the liquid of conductive materials preparation all can, for example: running water, water-soluble inorganic salt solution etc.
Described bed body 13 usefulness insulating material are made, and insulating material comprises polymethyl methacrylate, engineering plastics, ceramic material, quartz glass etc.
Described conducting liquid comprise by the liquid of conductive materials preparation all can, for example: running water, water-soluble inorganic salt solution etc.
Advantage of the present utility model is: the plasma apparatus that material is handled that the utility model provides adopts continuous feeding and external electrode conductive structure, and can move under the normal temperature atmospheric pressure does not need vacuum equipment, and operating cost is low.Moreover since fluid bed in temperature near normal temperature, can not damage dusty material, material modified scope applicatory is wide, and modification is even.External electrode is a conductive and heat-conductive liquid, so can well lead away the heat on the discharge medium pipe, this device can be worked for a long time; This device is the continuity operation, can obviously enhance productivity; And simple in structure, cost is low.
Modification is by installing top funnel continuous charging for dusty material to utilize device of the present utility model, when the bottom feeds air-flow in a certain speed, gravity and buoyancy that dusty material is suffered reach balance, at this moment particle will be suspended in and do not taken out of (at this moment the speed of gas is fluidizing velocity) in the fluid bed, can add modified gas in company with air-flow.When interior electrode and outside when adding the high frequency high tension voltage between the conducting liquid (external electrode), will between quartzy tube wall and interior electrode, produce plasma, owing to contain a large amount of charged particles in the plasma, particle can with the modified gas molecular collision, so just, produce many active groups, active group will become functional film layer at the dusty material surface aggregate, thereby reach the purpose of dusty material modification, add air flow after modification is finished again the powder of modification is taken out of separation (speed at this moment is carrying velocity).This processing method is simple, and does not need vacuum equipment, reduces operating cost widely.
Description of drawings
Fig. 1 is existing radio frequency plasma fluidized-bed structure schematic diagram
Fig. 2 is existing direct-current plasma fluidized-bed structure schematic diagram
Fig. 3 is an apparatus for processing plasma structural representation of the present utility model
The drawing explanation
1. source of the gas 2. external electrodes 3. feed hoppers
4. conducting liquid exports 6. gas distributor of 5. fixed heads (various insulating material)
7. electrode 9. high voltage sourcies in the liquid-inlet 8.
10. lead 11. valves 12. gas vents
13 body 14 air inlets 15 pipelines
16 gas flowmeters, 17 radio frequency induction coils, 18 quartz ampoules
19 negative electrodes, 20 anodes, 21 cooling waters
22 plasmas, 23 feed pipes, 24 conducting liquids
Embodiment
With reference to Fig. 3, to make one and can handle dusty material, water is the apparatus for processing plasma that external electrode is worked under the normal temperature atmospheric pressure.
Adopt insulating material, for example a diameter is that the polymethyl methacrylate cylinder of φ 20mm * long 150mm is done a body 13, bed body 13 lower port are installed a gas distributor 6, this gas distributor 6 is for evenly having the circular hole that diameter is alternately arranged for φ 0.2mm on the machine glass flake, number is decided (also can use the general gas distributor of fluid bed) according to the granular size of concrete material, with the infundibulate air inlet 14 that a polymethyl methacrylate system is installed below gas distributor 6, air inlet 14 links to each other with source of the gas 1 by the pipeline 15 of band valve; Have gas vent 12 on the sidewall on bed body 13 tops, perforate on the position of the gas vent 12 of bed body, the feed pipe 23 of a band valve is installed in this hole, and its feed pipe 16 is communicated with a funnel shaped feed hopper 3; At the gas vent 12 of bed body so that one section hollow shell to be set on the outer wall of gas distributor 6, the top of this shell has conducting liquid outlet 4, its underpart has conducting liquid inlet 7, be filled with conducting liquid 24 in it as external electrode 2, external electrode 2 is connected with lead 10 with a utmost point of high-voltage ac power 9; The interior electrode 8 that stainless steel tube (electrode material that uses in the plasma processing apparatus all can) is usually made inserts in the bed bodies, and pass through an insulation poly (methyl methacrylate) plate 5 sealing and fixing on bed body 3 upper port, the interior electrode 8 that exposes a body upper port is connected with another polar conductor of high-voltage ac power 8, high-voltage ac power 9 adopts voltage at 0-30KV, and frequency is at the adjustable power supply of 20-40KHz.
External electrode 8 also can be at the conducting film of buying on market on bed body 13 outer walls and coats one deck; Perhaps with the conductive filament uniform winding of buying on the market, but to keep apart with insulating material between the internal and external electrode.
Interior electrode 8 can be that any conducting metal rod, conductive metal pipe or the conducting metal bought on the market are made annular electrode etc., and interior electrode can be provided with more than 2, evenly is arranged in the pipe.
The atmospheric pressure plasma fluid bed shown in Figure 3 of utilizing the foregoing description to make, material is carried out the embodiment that modification is handled:
One, for example utilize Fig. 3 to realize modification to Paris white powder material hydrophilicity: calcium carbonate powder is a very excellent material of a kind of hydrophilicity, and make it become non-hydrophilicity material only needs get final product at powder surface coating one deck low-surface-energy material.
1. at first in the hollow shell of plasma fluidisation bed external electrode, feed ordinary tap water, and a utmost point of high-voltage ac power is inserted the connection of conducting liquid internal fixation; Perhaps the metal external electrode directly is connected with a utmost point of high-voltage ac power;
2. the gas distributor that will have 5 microns in an aperture is put into the fluid bed bottom and is installed;
3. in funnel 3, add diameter again and be about 5 microns calcium carbonate powder, open the calcium carbonate powder of valve then this dusty material transfer predetermined amounts in fluid bed;
4. interior electrode is linked to each other with lead with another electrode of high-voltage ac power;
5. open the argon gas valve and adjust gas flow rate to 3L/s, the calcium carbonate powder in the fluid bed will fluidisation, and by the gas flowmeter control gaseous flow velocity on the gas circuit, when gas flow rate reached predetermined fluidizing velocity, dusty material will be in the fluidisation attitude; (different granular sizes, different air velocities);
6. regulate high-voltage ac power and will in fluid bed, produce plasma to 10KV, at this moment in argon gas, add HMDO steam, this organosilicon steam will be ionized into active group under action of plasma, form organosilyl low surface aggregate thing on the calcium carbonate powder surface, calcium carbonate powder just becomes hydrophobic material like this.
Claims (8)
1. plasma material treatment facility, comprise: a body (13), its body (13) lower port is provided with a gas distributor (6), with installation one infundibulate air inlet (14) below gas distributor (6), air inlet (14) links to each other with source of the gas (1) by the pipeline (15) of band gas flowmeter (16); Have gas vent (12) on the sidewall on bed body (13) top, it is characterized in that: also be included in perforate on the position of gas vent (12) of a body, the pipeline of a band valve is installed in this hole, and its pipeline is communicated with a feed hopper (3); On (6) one sections outer walls of gas distributor an external electrode (2) to be set, external electrode (2) is electrically connected with a utmost point of high-voltage ac power (9) at the gas vent (12) of bed body; Interior electrode (8) inserts in the bed body, and passes through an insulation board (5) sealing and fixing in bed body upper port, and the interior electrode (8) that exposes a body upper port is electrically connected with another utmost point of high-voltage ac power (9); Described bed body (13) is made of insulating material.
2. by the described plasma material treatment facility of claim 1, it is characterized in that: described gas distributor (6) is a nonmetallic slices, have circular hole on it, the size in aperture is decided according to material modified particle diameter, and this aperture is less than pending material modified particle diameter.
3. by the described plasma material treatment facility of claim 2, it is characterized in that: described nonmetallic slices comprises polymethyl methacrylate, engineering plastics, ceramic material or glass.
4. by the described plasma material treatment facility of claim 1, it is characterized in that: described external electrode (2) is for being provided with a hollow shell on bed body (13) outer wall, the top of this shell has conducting liquid import (4), its underpart has conducting liquid outlet (7), is filled with conducting liquid (24) in it and forms.
5. by the described plasma material treatment facility of claim 1, it is characterized in that: described external electrode (8) is for coating bed body (13) outer wall last layer conducting film; Perhaps uniform winding conductive filament, and isolate with insulating material between the internal and external electrode.
6. by the described plasma material treatment facility of claim 1, it is characterized in that: electrode (8) is that conducting metal rod, conductive metal pipe or conducting metal are made annular electrode in described, and interior number of electrodes is at least one, is arranged in the pipe.
7. by the described plasma material treatment facility of claim 1, it is characterized in that: described high-voltage ac power (9) adopts voltage at 0-30KV, and frequency is at the adjustable ac high voltage source of 20-40KHz.
8. by the equipment of the described plasma material processing of claim 1, it is characterized in that: described conducting liquid comprises by the liquid of conductive materials preparation, water-soluble inorganic salt solution or running water.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420066560 CN2718948Y (en) | 2004-06-23 | 2004-06-23 | Plasma material processing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420066560 CN2718948Y (en) | 2004-06-23 | 2004-06-23 | Plasma material processing equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2718948Y true CN2718948Y (en) | 2005-08-17 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 200420066560 Expired - Fee Related CN2718948Y (en) | 2004-06-23 | 2004-06-23 | Plasma material processing equipment |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100482031C (en) * | 2006-03-14 | 2009-04-22 | 中国科学院物理研究所 | Barrier glow discharging plasma generator and generation with atmosphere medium |
| CN101479393B (en) * | 2006-06-28 | 2011-10-05 | 西门子公司 | Method and device for introducing dust into a molten both of a pyrometallurgical installation |
| WO2012097496A1 (en) * | 2011-01-17 | 2012-07-26 | 深圳市泓耀环境科技发展股份有限公司 | Plasma device for solid-fuel combustion additive and method of application thereof |
| CN103594319A (en) * | 2013-11-27 | 2014-02-19 | 苏州市奥普斯等离子体科技有限公司 | Powder material surface plasma processing device |
| CN105719931A (en) * | 2012-11-30 | 2016-06-29 | 神华集团有限责任公司 | Powder or particle plasma processing device |
| CN108012400A (en) * | 2017-11-24 | 2018-05-08 | 电子科技大学 | A kind of normal pressure high frequency cold plasma processing unit |
| CN111320227A (en) * | 2020-02-28 | 2020-06-23 | 大连理工大学 | Liquid electrode dielectric barrier discharge device |
-
2004
- 2004-06-23 CN CN 200420066560 patent/CN2718948Y/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100482031C (en) * | 2006-03-14 | 2009-04-22 | 中国科学院物理研究所 | Barrier glow discharging plasma generator and generation with atmosphere medium |
| CN101479393B (en) * | 2006-06-28 | 2011-10-05 | 西门子公司 | Method and device for introducing dust into a molten both of a pyrometallurgical installation |
| WO2012097496A1 (en) * | 2011-01-17 | 2012-07-26 | 深圳市泓耀环境科技发展股份有限公司 | Plasma device for solid-fuel combustion additive and method of application thereof |
| CN103098557A (en) * | 2011-01-17 | 2013-05-08 | 深圳市泓耀环境科技发展股份有限公司 | Plasma device for solid-fuel combustion additive and method of application thereof |
| CN105719931A (en) * | 2012-11-30 | 2016-06-29 | 神华集团有限责任公司 | Powder or particle plasma processing device |
| CN105719931B (en) * | 2012-11-30 | 2017-09-08 | 神华集团有限责任公司 | A kind of powder or particle plasma body processing unit |
| CN103594319A (en) * | 2013-11-27 | 2014-02-19 | 苏州市奥普斯等离子体科技有限公司 | Powder material surface plasma processing device |
| CN108012400A (en) * | 2017-11-24 | 2018-05-08 | 电子科技大学 | A kind of normal pressure high frequency cold plasma processing unit |
| CN111320227A (en) * | 2020-02-28 | 2020-06-23 | 大连理工大学 | Liquid electrode dielectric barrier discharge device |
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Legal Events
| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |