CN209791522U - Particle and powder material plasma surface treatment equipment - Google Patents
Particle and powder material plasma surface treatment equipment Download PDFInfo
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- CN209791522U CN209791522U CN201920433680.4U CN201920433680U CN209791522U CN 209791522 U CN209791522 U CN 209791522U CN 201920433680 U CN201920433680 U CN 201920433680U CN 209791522 U CN209791522 U CN 209791522U
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Abstract
The utility model discloses a particle and powder material plasma surface treatment device, which comprises a vacuum outer cavity, a vacuum inner cavity, a particle stirring mechanism and a plasma generator, wherein the vacuum inner cavity is arranged in the vacuum outer cavity, and the particle stirring mechanism is arranged in the vacuum inner cavity; the right side of the vacuum outer cavity is provided with a vacuum pumping hole and an air inlet, the vacuum inner cavity comprises a reaction bin and a filter screen plate, and the air inlet is communicated with the right side of the vacuum inner cavity; the plasma generator comprises an electrode group and a plasma generating power supply. The utility model stirs the particles by the particle stirring mechanism, and the treatment is uniform; meanwhile, the vacuum outer cavity and the vacuum inner cavity are arranged, so that the sealing is good, and treated particles are prevented from overflowing; the filter screen plate is arranged in the vacuum inner cavity, the particle size range of the treatable particles and powder is wide, and the particle surfaces are subjected to hydrophilic, hydrophobic, coating and other functional treatments by exciting different types of plasmas.
Description
Technical Field
The utility model relates to a plasma technical application field especially relates to a granule and powder material plasma surface treatment equipment.
Background
The basic principle of the material surface modification treatment technology is that the material surface or interface is treated by physical, chemical, mechanical and other methods, the physical and chemical properties of the material surface, such as surface energy, surface wettability, electrical property, adsorption and reaction characteristics, surface structure, functional groups and the like, are purposefully changed, and finally the requirements of new technology of new materials are met. For particulate and powder materials, the methods of surface modification are more limited than for other shaped materials.
At present, the method for realizing the surface treatment of the particle and powder materials is usually a liquid phase reaction method (physical coating, chemical coating, precipitation coating, mechanochemical modification and the like), and the liquid phase reaction method has the defects of high energy consumption, environmental pollution and incapability of meeting the increasingly strict requirements on energy conservation and environmental protection.
the low-temperature plasma surface treatment is usually generated under the condition of negative pressure (vacuum), the reaction gas in a vacuum chamber generates plasma chemical reaction under the excitation action of an external electric field or magnetic field to generate plasma which is composed of a plurality of active particles such as positive ions, negative ions, particles, active free radicals and electrons, the plasma and the surface chemical structure of the material carry out physical and chemical reaction to change the physical structure and the chemical structure of the surface of the material, and the purpose of surface modification is achieved. The energy and the composition of plasmas generated by different reaction gases and different excitation electric fields are different, which brings more designability of low-temperature plasma surface modification.
However, the powder material is not completely the same as the granules, since it is fine particles consisting of a kind of dry, dispersed solid particles, and powder has a smaller particle size than granules. Because of the smaller size and the tendency to fly, the handling places more demands on the structure and operation of the equipment.
Chinese patent CN201120333715 discloses a particulate material surface low-temperature plasma processing apparatus, which uses a single rotary drum to perform surface processing on a larger particulate material, but the apparatus can only process the particulate material, and cannot process powder or metal powder, on one hand, the metal powder easily enters a vacuum pipeline system, and on the other hand, the metal powder easily adheres to the surface of a cylinder to form an electric field shield, so that gas in a vacuum chamber cannot be excited into plasma.
Chinese patent CN201110101689 discloses a method and a device for surface treatment of powder material by low-temperature plasma, wherein the device comprises the steps of filling the powder material into a fluidized bed, introducing reaction gas at the bottom of the fluidized bed, fluidizing the powder, applying an electric field to generate plasma to perform surface modification reaction; however, the amount of the metal powder to be processed is small, and the metal powder cannot meet the requirement of the processing
Accordingly, the prior art is deficient and needs improvement.
SUMMERY OF THE UTILITY MODEL
The utility model discloses the technical problem that will solve is: provides a plasma surface treatment device for particle and powder materials, which has compact structure, wide range of particle size to be treated, good sealing and uniform treatment.
The technical scheme of the utility model as follows: a particle and powder material plasma surface treatment device comprises a vacuum outer cavity, a vacuum inner cavity, a particle stirring mechanism and a plasma generator, wherein the vacuum inner cavity is arranged in the vacuum outer cavity; the right side of the vacuum outer cavity is provided with a vacuum pumping hole and an air inlet, the vacuum inner cavity comprises a reaction bin and a filter screen plate, the top of the reaction bin is provided with an opening, the filter screen plate is arranged at the top of the reaction bin, and the air inlet is communicated with the right side of the vacuum inner cavity; the plasma generator comprises an electrode group and a plasma generating power supply, and the electrode group is arranged above the filter screen plate.
According to the technical scheme, in the particle and powder material plasma surface treatment equipment, the particle stirring mechanism comprises a hollow rotating shaft and a plurality of stirring blades, the stirring blades are respectively connected with the hollow rotating shaft, a plurality of air distribution holes are respectively formed in the front and the back of the hollow rotating shaft, an air inlet pipe shaft is arranged on the right side of the hollow rotating shaft, and the air inlet pipe shaft is connected with an air inlet.
By adopting the technical schemes, in the particle and powder material plasma surface treatment equipment, the mesh number of the filter screen plate is 1000-5000 meshes.
By adopting the technical scheme, in the particle and powder material plasma surface treatment equipment, the pore diameter of the air distribution hole on the hollow rotating shaft is 0.1-2 mm.
By adopting the technical scheme, in the particle and powder material plasma surface treatment equipment, the vacuum outer cavity comprises a left cover body, a right cover body and an intermediate body, and two sides of the intermediate body are respectively connected with the left cover body and the right cover body.
By adopting the technical scheme, in the particle and powder material plasma surface treatment equipment, the intermediate is in any one of cylindrical or rectangular shape.
By adopting the technical scheme, in the particle and powder material plasma surface treatment equipment, the electrode group is a positive electrode, and the reaction bin is a negative electrode.
By adopting the technical scheme, in the particle and powder material plasma surface treatment equipment, the electrode group is a cathode, and the reaction bin is an anode.
By adopting the technical proposal, the utility model arranges the particles or the powder into the vacuum inner cavity, and the particles are stirred and dispersed by the particle stirring mechanism and are treated uniformly; the external vacuum pump is used for vacuumizing the vacuum outer cavity and the vacuum inner cavity, process gas is introduced into the vacuum inner cavity from the gas inlet, plasma is generated through ionization excitation of the plasma generator, and then plasma chemical reaction is carried out on particles in the vacuum inner cavity, so that particles and powder can be treated at the same time, and the treated particle size range is wide; the vacuum outer cavity and the vacuum inner cavity are arranged, so that the structure is compact, particles can be prevented from overflowing out of the vacuum inner cavity, and the sealing performance is good; the equipment can break through the limitation of powder materials, and can perform functional optimization treatments such as hydrophilic treatment, hydrophobic treatment, coating treatment and the like on the surface of the powder by inputting and exciting different types of plasmas.
Drawings
Fig. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic diagram of the explosion three-dimensional structure of the present invention;
FIG. 3 is a schematic view of the structure of the vacuum chamber of the present invention;
Fig. 4 is a schematic structural view of the particle stirring mechanism of the present invention.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
Example 1
As shown in fig. 1-4, a particle and powder material plasma surface treatment device comprises a vacuum outer cavity 1, a vacuum inner cavity 2, a particle stirring mechanism 4 and a plasma generator, wherein the vacuum inner cavity 2 is arranged in the vacuum outer cavity 1, the particle stirring mechanism 4 is arranged in the vacuum inner cavity 2, and the plasma generator is arranged on the particle stirring mechanism 4; the right side of the vacuum outer cavity 1 is provided with a vacuum pumping hole 15 and an air inlet 14, the vacuum inner cavity 2 comprises a reaction bin 21 and a filter screen plate 22, the top of the reaction bin 21 is provided with an opening, the filter screen plate 22 is arranged at the top of the reaction bin 21, and the air inlet 13 is communicated with the right side of the vacuum inner cavity 2; the plasma generator comprises an electrode group 31 and a plasma generating power supply, wherein the electrode group 31 is arranged above the filter screen plate 22.
As shown in fig. 2 and 3, the vacuum chamber 2 is used as a reaction chamber for stirring and ionizing the particulate material, and the vacuum chamber 2 includes a reaction chamber 21 and a filter screen 22. The top of the reaction bin 21 is opened, and the granular material is placed in the reaction bin 21 to be subjected to reaction treatment. The filter screen plate 22 is arranged at the top of the reaction chamber 21, and the vacuum inner cavity 2 is arranged in the vacuum outer cavity 1, and the vacuum outer cavity 1 is provided with the vacuum pumping hole 15. The vacuum pumping hole 15 can be connected with an external vacuum pump, and the vacuum outer cavity 1 and the vacuum inner cavity 2 can simultaneously keep a vacuum state through the vacuum pumping action of the vacuum pump. Preferably, in order to prevent the particles in the reaction chamber 21 from leaking from the filter screen 22 to the vacuum outer chamber 1, the mesh number of the filter screen 22 is 1000-5000 meshes. In this embodiment, the mesh number of the filter screen plate 22 is 1000 meshes.
As shown in fig. 1 and 2, in order to conveniently disassemble and assemble the vacuum outer chamber 1 and load the particles or dust to be treated, the vacuum outer chamber 1 preferably comprises a left cover body 12, a right cover body 13 and an intermediate body 11, and two sides of the intermediate body 11 are respectively connected with the left cover body 12 and the right cover body 13. The detachable vacuum outer cavity 1 structure ensures that the vacuum outer cavity 1 is simple to assemble while maintaining a vacuum environment, so that a user can conveniently load particles or dust to be treated into the vacuum inner cavity 2. Further, the intermediate body 11 may have a cylindrical or rectangular shape. In this embodiment, the intermediate body 11 is cylindrical, and the cylindrical intermediate body 11 facilitates sealing and has low processing cost.
As shown in fig. 2 and 4, the particle stirring mechanism 4 can sufficiently stir the particles in the vacuum chamber 2, so that the particle material can be uniformly treated, and the existence of a small amount of particle surfaces which do not react with the plasma is avoided. It should be noted that the particle stirring mechanism 4 is connected with an external stirring motor, the stirring motor is arranged at the right side of the vacuum outer cavity 1, and the particle stirring mechanism 4 is driven to rotate by the stirring motor. Preferably, the particle stirring mechanism 4 includes a hollow rotating shaft 41 and a plurality of stirring blades 42 for sufficiently stirring the particles and transporting the ionized operating gas, and each stirring blade 42 is connected to the hollow rotating shaft 41. In this embodiment, the particle stirring mechanism 4 includes two stirring blades 42, and the two stirring blades 42 are respectively connected to the hollow rotating shaft 41. The front and the back of the hollow rotating shaft 41 are respectively provided with a plurality of air distribution holes 43, the right side of the hollow rotating shaft 41 is provided with an air inlet pipe shaft 16, and the air inlet pipe shaft 16 is connected with the air inlet 14. In this embodiment, the inlet pipe shaft 16 is connected to an external agitator motor via a timing belt. In this way, when the granular material to be processed is filled in the vacuum cavity 2, the middle idle shaft 41 is driven to rotate by the stirring motor, so that the granular material is uniformly stirred by the stirring blades 42. Meanwhile, the inlet pipe shaft 16 connected with the inlet 14 can input working gas, and the working gas escapes into the vacuum cavity 2 through the plurality of gas distribution holes 43 arranged on the hollow rotating shaft 41 and is excited and ionized by the plasma generator, so that plasma is generated. Preferably, the pore diameter of the air distribution hole 43 on the hollow rotating shaft 41 is 0.1-2 mm. In this embodiment, the aperture of the air distribution hole 43 is set to 0.1mm, so that the working gas can be rapidly dissipated into the vacuum cavity 2, thereby shortening the working time of processing particles.
As shown in fig. 2, the plasma generator can convert the gas entering from the gas inlet 14 into plasma, and the plasma generator includes an electrode group 31 and a plasma generating power source, wherein the electrode group 31 is disposed above the filter screen plate 22. Preferably, the electrode group 31 is a positive electrode, and the reaction chamber 21 is a negative electrode. In this embodiment, the plasma generating power source is not shown, and the right cover 13 of the vacuum outer chamber 1 is further provided with an electrode column 32, and the electrode column 32 is connected with the electrode group 31 for connection. When the vacuum inner cavity 2 is filled with particle materials and is simultaneously pumped to a vacuum state, working gas is input from the gas inlet 13, the stirring motor and the plasma generating power supply are started, an exciting electric field is generated between the electrode group 31 and the reaction bin 21, the working gas is ionized into plasma, and the plasma and the particle surfaces are treated and reacted.
The operation process comprises the following steps: opening the left cover body 12 of the vacuum outer cavity 1, opening the filter screen plate 22 of the vacuum inner cavity 2, loading 500g of PP plastic particles with the diameter of 2.5mm and the length of about 3mm to be processed into the reaction bin 21, and packaging the filter screen plate 22 and the left cover body 12. Starting an external vacuum pump, pumping the air pressure of the vacuum outer cavity 1 and the vacuum inner cavity 2 to be below 15Pa through the vacuum pumping hole 15, and then closing the vacuum pump and the vacuum pumping hole 15. Inputting oxygen through an air inlet pipe shaft 16 of an air inlet 14, wherein the flow rate of the oxygen is 30sccm, the oxygen escapes to the vacuum inner cavity 2 through an air distribution hole 43 of a hollow rotating shaft 41, the vacuum degree of the vacuum outer cavity 1 is maintained to be 30Pa, at the moment, an external stirring motor and a plasma generation power supply are started, particles are fully stirred, meanwhile, an excitation electric field 450W is generated between an electrode group 31 and a reaction bin 21 to generate oxygen plasma, the oxygen plasma penetrates through a filter screen plate 22 to perform surface hydrophilic treatment reaction with PP plastic particles in the reaction bin 21, after 5min of treatment, the plasma generation power supply is turned off, the stirring motor is stopped, the vacuum is broken, the vacuum outer cavity 1 can be opened, and the treated PP plastic particles are taken out. The surface hydrophilicity and wettability of the treated PP plastic particles are greatly improved.
Example 2
As shown in fig. 1-4, a particle and powder material plasma surface treatment device comprises a vacuum outer cavity 1, a vacuum inner cavity 2, a particle stirring mechanism 4 and a plasma generator, wherein the vacuum inner cavity 2 is arranged in the vacuum outer cavity 1, the particle stirring mechanism 4 is arranged in the vacuum inner cavity 2, and the plasma generator is arranged on the particle stirring mechanism 4; the right side of the vacuum outer cavity 1 is provided with a vacuum pumping hole 15 and an air inlet 14, the vacuum inner cavity 2 comprises a reaction bin 21 and a filter screen plate 22, the top of the reaction bin 21 is provided with an opening, the filter screen plate 22 is arranged at the top of the reaction bin 21, and the air inlet 13 is communicated with the right side of the vacuum inner cavity 2; the plasma generator comprises an electrode group 31 and a plasma generating power supply, wherein the electrode group 31 is arranged above the filter screen plate 22.
As shown in fig. 2 and 3, the vacuum chamber 2 is used as a reaction chamber for stirring and ionizing the powder material, and the vacuum chamber 2 includes a reaction chamber 21 and a filter screen 22. The top of the reaction bin 21 is opened, and the powder material is placed in the reaction bin 21 to be reacted. The filter screen plate 22 is arranged at the top of the reaction chamber 21, and because the vacuum inner cavity 2 is arranged in the vacuum outer cavity 1 and the vacuum outer cavity 1 is provided with a vacuum pumping hole, the vacuum pumping hole 15 can be connected with an external vacuum pump, and the vacuum outer cavity 1 and the vacuum inner cavity 2 can simultaneously keep a vacuum state through the vacuum pumping action of the vacuum pump. Preferably, the mesh number of the filter screen 22 is 1000-. In this embodiment, the mesh number of the filter screen plate 22 is 4000 meshes.
as shown in fig. 1 and fig. 2, preferably, in order to facilitate the disassembly and assembly of the vacuum outer chamber 1 and load the particles or dust to be treated, the vacuum outer chamber 1 comprises a left cover 12, a right cover 13 and an intermediate body 11, and two sides of the intermediate body 11 are respectively connected with the left cover 12 and the right cover 13. The detachable vacuum outer cavity 1 structure ensures that the vacuum outer cavity 1 is simple to assemble while maintaining a vacuum environment, so that a user can conveniently load particles or dust to be treated into the vacuum inner cavity 2. Further, the intermediate body 11 may have a cylindrical or rectangular shape. In this embodiment, the intermediate body 11 is cylindrical, and the cylindrical intermediate body 11 facilitates sealing and has low processing cost.
As shown in fig. 2 and 4, the particle stirring mechanism 4 can sufficiently stir the powder in the vacuum chamber 2, so that the powder material can be uniformly treated, and the existence of a small amount of powder on the surface without reacting with the plasma is avoided. It should be noted that the particle stirring mechanism 4 is connected with an external stirring motor, the stirring motor is arranged at the right side of the vacuum outer cavity 1, and the particle stirring mechanism 4 is driven to rotate by the stirring motor. Preferably, the particle stirring mechanism 4 includes a hollow rotating shaft 41 and a plurality of stirring blades 42, and each stirring blade 42 is connected to the hollow rotating shaft 41, in order to sufficiently stir the powder and transport the ionized working gas. In this embodiment, the particle stirring mechanism 4 includes two stirring blades 42, and the two stirring blades 42 are respectively connected to the hollow rotating shaft 41. The front and the back of the hollow rotating shaft 41 are respectively provided with a plurality of air distribution holes 43, the right side of the hollow rotating shaft 41 is provided with an air inlet pipe shaft 16, and the air inlet pipe shaft 16 is connected with the air inlet 14. In this embodiment, the inlet pipe shaft 16 is connected to an external agitator motor via a timing belt. In this way, when the powder material to be processed is filled in the vacuum cavity 2, the middle idle shaft 41 is driven to rotate by the stirring motor, so that the powder material is uniformly stirred by the stirring blades 42. Meanwhile, the inlet pipe shaft 16 connected with the inlet 14 can input working gas, and the working gas escapes into the vacuum cavity 2 through the plurality of gas distribution holes 43 arranged on the hollow rotating shaft 41 and is excited and ionized by the plasma generator, so that plasma is generated. Preferably, the pore diameter of the air distribution hole 43 on the hollow rotating shaft 41 is 0.1-2 mm. In this embodiment, the aperture of the air distribution hole 43 is set to 0.1mm, so that the working gas can be dissipated into the vacuum cavity 2 more quickly, thereby shortening the working time of powder processing.
as shown in fig. 2, the plasma generator can convert the gas entering from the gas inlet 14 into plasma, and the plasma generator includes an electrode group 31 and a plasma generating power source, wherein the electrode group 31 is disposed above the filter screen plate 22. Preferably, the electrode group 31 is a negative electrode, and the reaction chamber 21 is a positive electrode. In this embodiment, the plasma generating power source is not shown, and the right cover 13 of the vacuum outer chamber 1 is further provided with an electrode column 32, and the electrode column 32 is connected with the electrode group 31 for connection. When powder materials are filled in the vacuum inner cavity 2 and are simultaneously pumped to a vacuum state, working gas is input from the gas inlet 14, an external stirring motor and a plasma generating power supply are started, an exciting electric field is generated between the electrode group 31 and the reaction bin 21, the working gas is ionized into plasma, and the plasma and the surface of the powder are subjected to treatment reaction.
The operation process comprises the following steps: opening the left cover body 12 of the vacuum outer cavity 1, opening the filter screen 22 of the vacuum inner cavity 2, loading the powder material with the grain size of more than 4000 meshes into the reaction bin 21, and packaging the filter screen 22 and the left cover body 12. Starting an external vacuum pump, pumping the air pressure of the vacuum outer cavity 1 and the vacuum inner cavity 2 to be below 15Pa through the vacuum pumping hole 15, and then closing the vacuum pump and the vacuum pumping hole 15. Acetylene gas is input through an air inlet pipe shaft 16 of an air inlet 13, the acetylene flow is 30sccm, the acetylene is dissipated to the vacuum inner cavity 2 through the air distribution holes 43 of the hollow rotating shaft 41, the vacuum degree of the vacuum outer cavity 1 is maintained to be 30Pa, at the moment, an external stirring motor and a plasma generation power supply are started, the powder is fully stirred, meanwhile, an excitation electric field is generated between the electrode group 31 and the reaction bin 21, the acetylene plasma is generated by exciting discharge, the acetylene plasma penetrates through the filter screen plate 22, and plasma polymerization coating is carried out on the surface of the powder in the reaction bin 21 to form a nano-level polyethylene film.
By adopting the technical proposal, the utility model arranges the particles or the powder into the vacuum inner cavity, and the particles are stirred and dispersed by the particle stirring mechanism and are treated uniformly; the external vacuum pump is used for vacuumizing the vacuum outer cavity and the vacuum inner cavity, process gas is introduced into the vacuum inner cavity from the gas inlet, plasma is generated through ionization excitation of the plasma generator, and then plasma chemical reaction is carried out on particles in the vacuum inner cavity, so that particles and powder can be treated at the same time, and the treated particle size range is wide; the vacuum outer cavity and the vacuum inner cavity are arranged, so that the structure is compact, particles can be prevented from overflowing out of the vacuum inner cavity, and the sealing performance is good; the equipment can break through the limitation of powder materials, and can perform functional optimization treatments such as hydrophilic treatment, hydrophobic treatment, coating treatment and the like on the surface of the powder by inputting and exciting different types of plasmas.
The above description is only exemplary of the present invention and should not be construed as limiting the present invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. A particle and powder material plasma surface treatment equipment is characterized in that: the particle stirring device comprises a vacuum outer cavity, a vacuum inner cavity, a particle stirring mechanism and a plasma generator, wherein the vacuum inner cavity is arranged in the vacuum outer cavity, the particle stirring mechanism is arranged in the vacuum inner cavity, and the plasma generator is arranged on the particle stirring mechanism; the right side of the vacuum outer cavity is provided with a vacuum pumping hole and an air inlet, the vacuum inner cavity comprises a reaction bin and a filter screen plate, the top of the reaction bin is provided with an opening, the filter screen plate is arranged at the top of the reaction bin, and the air inlet is communicated with the right side of the vacuum inner cavity; the plasma generator comprises an electrode group and a plasma generating power supply, and the electrode group is arranged above the filter screen plate.
2. The particle and powder material plasma surface treatment apparatus according to claim 1, characterized in that: the particle stirring mechanism comprises a hollow rotating shaft and a plurality of stirring blades, wherein each stirring blade is connected with the hollow rotating shaft, a plurality of air distribution holes are formed in the front and the back of the hollow rotating shaft respectively, an air inlet pipe shaft is arranged on the right side of the hollow rotating shaft, and the air inlet pipe shaft is connected with an air inlet.
3. The particle and powder material plasma surface treatment apparatus according to claim 1, characterized in that: the mesh number of the filter screen plate is 1000-.
4. The particle and powder material plasma surface treatment apparatus according to claim 2, characterized in that: the pore diameter of the air distribution hole on the hollow rotating shaft is 0.1-2 mm.
5. The particle and powder material plasma surface treatment apparatus according to claim 1, characterized in that: the vacuum outer cavity comprises a left cover body, a right cover body and an intermediate body, wherein two sides of the intermediate body are respectively connected with the left cover body and the right cover body.
6. The particle and powder material plasma surface treatment apparatus according to claim 5, characterized in that: the intermediate body is in any one of a cylindrical shape and a rectangular shape.
7. The particle and powder material plasma surface treatment apparatus according to claim 1, characterized in that: the electrode group is a positive electrode, and the reaction bin is a negative electrode.
8. The particle and powder material plasma surface treatment apparatus according to claim 1, characterized in that: the electrode group is a negative electrode, and the reaction bin is a positive electrode.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201920433680.4U CN209791522U (en) | 2019-04-01 | 2019-04-01 | Particle and powder material plasma surface treatment equipment |
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| CN201920433680.4U CN209791522U (en) | 2019-04-01 | 2019-04-01 | Particle and powder material plasma surface treatment equipment |
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| CN209791522U true CN209791522U (en) | 2019-12-17 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109865484A (en) * | 2019-04-01 | 2019-06-11 | 深圳市奥普斯等离子体科技有限公司 | A kind of particle and powder body material plasma surface processor |
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2019
- 2019-04-01 CN CN201920433680.4U patent/CN209791522U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109865484A (en) * | 2019-04-01 | 2019-06-11 | 深圳市奥普斯等离子体科技有限公司 | A kind of particle and powder body material plasma surface processor |
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