CN2700874Y - Three-dimensional high precision multifunctional thermal deformation experimenting equipment - Google Patents
Three-dimensional high precision multifunctional thermal deformation experimenting equipment Download PDFInfo
- Publication number
- CN2700874Y CN2700874Y CN 200420026841 CN200420026841U CN2700874Y CN 2700874 Y CN2700874 Y CN 2700874Y CN 200420026841 CN200420026841 CN 200420026841 CN 200420026841 U CN200420026841 U CN 200420026841U CN 2700874 Y CN2700874 Y CN 2700874Y
- Authority
- CN
- China
- Prior art keywords
- measuring
- temperature
- worktable
- measurement
- climatic chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The utility model discloses a three-dimensional high precision multifunctional thermal deformation experimenting device, which is composed of a temperature measuring and control system, a support and regulating system, a slight deformation measurement system and an aiming positioning system. The utility model is characterized in that a homoiothermal humidity chamber and a temperature measurement circuit are arranged. A two-dimension working platform is arranged in the homoiothermal humidity chamber, and a dual-frequency laser interferometer is adopted in the slight deformation measurement system. One end of a measuring rod in the aiming positioning system is fixed with an electric inductance probe, and the other end of the measuring rod penetrates through the side wall of the homoiothermal humidity chamber and is fixedly connected with an X-direction working platform via a measuring rod seat. The utility model can be used in the measurement of the thermal deformation of mechanical parts of a complicated geometry shape and the detection of the expansion coefficient of materials.
Description
Technical field:
The utility model relates to mechanical photo-electric precision measurement technology, particularly a kind of measurement mechanism that is used to carry out Precision Machinery Elements thermal deformation measurement, research mechanical component thermal deformation theory.
Background technology:
People notice the influence of hot error to mechanical precision, measuring accuracy very early, and have carried out a large amount of research from all angles.The measuring method that proposes according to the particular studies purpose, and not following tens kinds of the measurement mechanism of design.At present, main measuring method has: push rod method, optical lever method, optical interferometry etc., typical surveying instrument has interferometer, optical lever instrument, rotating mirror instrument, pull spring ocular microscopes etc.But existing these surveying instruments mostly are only applicable to measure small size, specific thin bar class body, generally can only measure with national standard in the similar body of standard sample in the material linear expansion coefficient determining rules, promptly specimen length between 50mm～120mm, the elongated body of diameter between 3mm～5mm.
Directly come the thermal deformation of measurement mechanical part to have the problem of the following aspects with them: existing thermal expansion measurement device has limited the shape and the size of measurand; The direction of measuring is single, regulates and adjusts difficulty; The temperature range of measuring is wide, can not realize high precision; Bidimensional is seldom arranged, and the domestic still incompetent special-purpose experimental provision of realizing three-dimensional measurement generally is unsuitable for directly the thermal expansion of mechanical component being measured, and especially is unsuitable for the mechanical component of complicated geometirc physique are measured.
Summary of the invention:
The utility model is for the weak point of avoiding above-mentioned prior art to exist, and a kind of three-dimensional high-precision multifunctional heating deformation experiment device is provided, and is used to measure the thermal deformation of the mechanical component of complex object.
The technical scheme that the utility model technical solution problem is adopted is:
The utility model device is made up of survey, temperature-controlling system, support and Adjustment System, little deformation measuring system and aiming positioning system.
The design feature of the utility model device is:
A, climatic chamber and temperature measurement circuit are set in described survey, temperature-controlling system;
B, described support and Adjustment System are for being arranged on two-dimentional work bench in the climatic chamber, described two-dimentional work bench is made of to adjusting platform to adjusting platform and top layer Y fixed base plate, middle layer Z, wherein, described fixed base plate is by the cramp bar supporting that is independent of climatic chamber;
C, adopt two-frequency laser interferometer in described little deformation measuring system, its spectroscope is fixed on the micro displacement workbench base plate, and the target mirror is fixed on X on worktable, and described X leads with rolling guide-rail pairs to worktable, and is driving with thousand fens screw thread pairs;
D, described aiming positioning system are made up of inductance amesdial, measuring rod seat, measuring staff and inductance probe, and measuring staff one end and inductance probe are fixed, and the other end runs through the sidewall of climatic chamber, and connects firmly to worktable by measuring rod seat and X.
The utility model is a kind of photoelectricity mechanical type measurement mechanism.Provide stable temperature field to tested sample, and accurately measure the measured piece temperature with survey, temperature-controlling system; Support to be used to support tested sample, and the drive sample is realized two dimensional motion in sweat box with Adjustment System; Little distortion and measuring system are used to measure the feature dimension that is subjected to temperature front and back sample; The aiming positioning system then is for little amoeboid movement system provides accurate location, is the third dimension in the measuring system.During measurement, sample is placed in the climatic chamber, drive little anamorphotic system by aiming and positioning system and spread out of constant temperature oven and measure by measuring system with measured.When realizing different measurement functions, the aiming positioning system of measuring system and length measuring system can carry out exchange function in case of necessity.
Compared with the prior art, the beneficial effects of the utility model are embodied in:
This device not only can be measured the expansion coefficient of material, the thermal deformation that can also measure the mechanical component of complex object.Because this device has been realized the function of three-dimensional measurement, and the useful space in the constant temperature oven is bigger, the adjustment of three dimension directions is easy to adjust, therefore with respect to existing measurement mechanism, the measurement range of this covering device, no matter be the physical dimension size of measuring object, or the complexity of physique structure, existing apparatus all far surpassed.
Fig. 1 is the utility model structural representation.
Fig. 2 is in worktable plan structure synoptic diagram in the constant humidity constant humidity cabinet for the utility model.
Fig. 3 is used for the gauge head installation way synoptic diagram of the little deformation measurement of directions X for the utility model.
Fig. 4, Fig. 5 are the other two kinds of installation way synoptic diagram of the utility model gauge head.
Number in the figure: 1 two-frequency laser interferometer, 2 inching gears, 3 spectroscopes, 4 micro displacement workbench base plates, 5 is that X is to worktable, 6 target mirrors, 7 measuring rod seats, 8 is that X is to rolling guide-rail pairs, 9 measuring staffs, 10 inductance amesdials, 11 is that Y is to adjusting handwheel, 12 climatic chambers, 13 conical gear pairs, 14 test specimens, 15 inductance probes, 16 platinum resistance temperature sensors, 17 is that Y is to adjusting platform, 18 is that Y is to guideway, 19 is that Z is to adjusting platform, 20 is that Z is to guideway, 21 is that Z is to adjusting screw thread pair, 22 is that Z is to adjusting handwheel, 23 fixed base plates, 24 cramp bars.
Embodiment:
Referring to Fig. 1, present embodiment is made up of survey, temperature-controlling system, support and Adjustment System, little deformation measuring system and aiming positioning system.
Referring to Fig. 2, Fig. 3, in concrete the enforcement, survey, temperature-controlling system are made up of EL-04AGT type climatic chamber 12 and high-precision platinum resistor temperature sensor 16.Climatic chamber 12 is intelligentized equipment, can carry out programming Control, and its temperature control scope is-40 ℃～+ 150 ℃, and effectively inside dimension is 600 * 850 * 800mm, and temperature measurement accuracy is ± 0.2 ℃, and temperature-controlled precision is ± 0.5 ℃.In order to guarantee measuring accuracy, select A level industry thermometric platinum resistance temperature sensor 16 for use, the diameter of this sensor has only 1.5mm, length to be about 5mm, and volume is very little, and thermal capacity is little, rapidly the response environment variation of temperature.In metering circuit, cooperate 7151 type digital multimeters to form the high-precision temp measuring system of a cover with the temperature measurement circuit of four-wire system.Advantage for the good stability that makes full use of platinum resistance temperature sensor 16 thermometrics further improves temperature measurement accuracy, and we have carried out resistance---temperature curve match to each platinum resistance.Whole device thermometric is accurately quick, convenient temperature control is reliable.
Support and Adjustment System:
Worktable is made of to adjusting platform 17 to adjusting platform 19 and top layer Y bottom fixed base plate 23, middle layer Z, wherein, fixed base plate 23 is by cramp bar 24 supportings that are independent of climatic chamber 12, Z is bearing on the fixed base plate 23 to guideway 20 by Z to adjusting platform 19, and Z is set to adjusting screw thread pair 21 and Z to adjusting handwheel 22; Y is supported to adjusting platform 19 by Z to guideway 18 by Y to adjusting platform 17, and to be provided with conical gear pair 13 be that the Y of transmission component is to adjusting handwheel 11.
Worktable in the climatic chamber 12 is that this device is realized the key component that multifunction three-dimensional is measured, and mainly is to be used for supporting and adjusting test specimen 14, has the function of part subsidiary concurrently.Because of this worktable is in the inside of climatic chamber 12, need stand variation of temperature, in order to reduce temperature to the influence of worktable and reduce the thermal capacity of worktable, we have adopted the design of symmetry with thin-walled as far as possible under the prerequisite of the stability that guarantees supporting system.The motion of worktable is driven to adjusting handwheel 22 to adjusting handwheel 11 and Z by Y respectively.In concrete the enforcement, as shown in Figure 1 and Figure 2, to guideway 18, Z comprises left side two secondary and right side one pairs to three secondary guideways have been installed to Y to the parallel two secondary high-accuracy rolling formula Y that installed.Under the acting in conjunction of drive system and high-accuracy rolling guideway, can realize worktable along Y to, Z to move steadily, flexibly the guiding accuracy height of motion.In addition, worktable is supporting system independently, makes in measuring process, and the vibration of sweat box can not have influence on worktable, thereby guarantees the high precision of measurement.
About little deformation measuring system
Little anamorphotic system is also very important in this device, and it directly drives little deformation measuring system, so its kinematic error will directly have influence on the measuring accuracy of measuring system.The range of the little amoeboid movement system of this device is 250mm, adopt close tolerance seal rolling guide-rail pairs guiding, fine motion is driven by thousand fens screw thread pairs, and carry locking device, therefore both can realize fast moving on a large scale, can realize fine motion among a small circle again, be convenient to quick, the accurate location of measurement point.
Measure little distortion with two-frequency laser interferometer 1, the spectroscope 3 of two-frequency laser interferometer 1 is fixed on the micro displacement workbench base plate 4, target mirror 6 directly is fixed on X on worktable 5, like this, as the X in the inching gear 2 during to rolling guide-rail pairs 8 motion, target mirror 6 changes with the distance of spectroscope 3 thereupon, and two-frequency laser interferometer 1 just can be measured the move distance of worktable.
Consider that the precision of two-frequency laser interferometer 1 can be subjected to the influence of environmental baseline, in order further to improve measuring accuracy, must monitor some parameter (mainly being temperature, humidity and atmospheric pressure) of measurement environment, thereby utilize error correction software that measurement result is revised.In the experiment we to have selected resolution be that 0.1 ℃ mercury thermometer and indicating value is that relative humidity, resolution are 2% psychrometer; And atmospheric monitoring tool has adopted meteorological station to be used for measuring atmospheric high precision cursor type DYMI type moving cistern mercurial barometer, and the resolution of this table can reach 0.1Pa.
About aiming at positioning system:
Form to inductance probe 15 by inductance amesdial 10, measuring rod seat 7, measuring staff 9, side.
Because test specimen 14 is in the temperature field of variation, and accurate length measuring system can not be worked in the temperature field that changes, for fear of the influence to measuring system and little anamorphotic system of the temperature variation of climatic chamber 12, we have designed once the cover locating device and have made two-frequency laser interferometer 1 can record in the climatic chamber 12 length of test specimen 14 under the different temperatures in the outside of climatic chamber 12.
Shown in Figure 3, linear measure longimetry at directions X, use the other accurate position from measured point under same temperature field to inductance probe 15 that determine of two DGC-6PG/A, send the zero signal of two measured points, the process measuring staff 9 of the distance between the measured point spreads out of and is measured by the two-frequency laser interferometer 1 of constant humidity constant humidity cabinet 12 outsides.
The size of little amoeboid movement system displacement is accurately measured by little deformation measuring system, and they are in constant temperature constant temperature oven outside, only are subjected to the influence of environment temperature; Like this, place the side in the constant temperature oven only to play the effect of location and be not measurement, so temperature is minimum to the influence of measuring accuracy to the influence of sensor performance to inductive head.
Because this apparatus function is various, complex structure should be noted that the high precision of following these problems to guarantee to measure in the process of using.
(1) unit clamp and gauge head clamping
To being subjected to the warm deformation measuring system, its inductance probe adopts other to inductance probe (as shown in Figure 3) as X.The realization of other measurement function is for example measured linearity, flatness is subjected to the situation of change after the temperature, the side should be changed to axial inductance probe to inductance probe, and changes the clamping method of inductance probe.Fig. 4 can be respectively applied for the flatness of measuring on test specimen 14 Different Plane with inductance probe 15 different installation way shown in Figure 5 and be subjected to warm situation of change.In the measuring process, inductance probe has become measuring sensor, and original measuring sensor---laser interferometer has become the positioning system in the whole device.In this case, owing to survey sensor places in the temperature field of variation, so measuring accuracy is not as measured X height when being subjected to warm deformation.If a rotary table is installed on interior worktable, this device just can be realized multidimensional measure.
Use aided measurement device, for example unit clamp can bring new error source, and modal is owing to causing Abbe error on the slotted line of gauge head and the no longer same straight line of measurand.According to the computing method of Abbe error, the Abbe error that the measurement annex causes is:
δ
a＝s×sinθa
Wherein, s is the distance between the line of motion and the slotted line; θ a is the kinematic error of gauge head at the measurement point guide rail.θ a causes to the kinematic error of guide rail by X, but the just motion repeatability of guide rail that the heat distortion amount measurement result is exerted an influence.
(2) other factors that should consider in the measurement
Because in the part measuring system of this device and the measured temperature field that is in variation simultaneously, so measuring system varies with temperature the uncertainty component that causes and can influence measurement result.
Inductance probe has the variation of two aspects along with variation of temperature: zero point drift and non-linear, the two is to the difference that influences of different measuring methods.When inductance probe uses as the aiming element, have only zero point drift influential to measurement result; When inductance probe is measuring sensor, drift and non-linear tangible influence arranged all.Can be before measurement to the drift of inductance probe with non-linearly measure and demarcate.
When using two sides to the two-way aiming of inductance probe, the anchor clamps of clamping gauge head can be subjected to warm deformation along with temperature variation, cause the variation of the relative position of inductance probe, systematic error hereto, employing after the comparison of the very little standard quartz of 0～50 ℃ of interval expansion coefficient temperature sex change rod is demarcated, in measurement result with its rejecting.
The distortion of measuring staff in measuring process mainly contains along Z direction force deformation with along the temperature deformation of directions X.The former can ignore when the thermal deformation of measured X direction, and the latter can ignore when measuring the thermal deformation of Z direction.Because the hysteresis of temperature deformation can be ignored during single measurement.
Interior worktable is along with variation of temperature can rotate, inclination and lifting, cause the variation of relative position between test specimen and the aiming positioning system, to sample be placed on position when therefore measuring near the absolute center of worktable as far as possible, and each measurement all will be readjusted Y to worktable when measuring the thermal deformation of solid of revolution, the searching flex point also aims at, to eliminate its influence.
To measure internal radius (shown in Figure 2) is the course of work that example illustrates this experimental provision.
Behind the temperature stabilization of test specimen, be moved to the left X to worktable, measuring staff, gauge head, after left gauge head was near sample, X was to worktable in locking, and turn fine motion screw thread makes gauge head contact sample and makes the inductance amesdial pointer near null value; Turn Y is to adjusting handwheel then, worktable and sample are slowly moved along the Y direction, when maximal value appears in the swing of inductance amesdial pointer, inductance probe is in the maximum gauge place of annulus, this moment, the inductance amesdial indicating value was zero when adjusting inching gear, then with the indicating value zero clearing of two-frequency laser interferometer; Unclamp latch mechanism, move right X to worktable, measuring staff, gauge head, behind right gauge head another wall near annulus, lock X again to guide rail, use the fine motion adjustment instead, indicating value until inductance probe is entirely zero, and this moment, the indicating value of two-frequency laser interferometer measuring system was exactly a measured value, promptly is needed tested value with this value and gauge head system with the length addition under this temperature of standard quartz rod demarcation.
Certainly, if measure the uneven annulus of internal diameter, or taper hole, then can on Z-direction, get a plurality of measurement faces and measure, measuring process is just the same, just will select tested surface to adjusting handwheel adjustment test specimen and Z to the height of worktable by Z before the tested surface of measuring differing heights.
Because the thermal deformation that this device can be measured the mechanical component of various geometrical bodies, for difform measurand, measuring method is difference to some extent, and each error source is also different to the measurement result influence, must carry out analytical calculation at concrete measuring object during measurement.Consider the walk about combined influence of error factors of residual error after the distortion correction of the thermal deformation of survey, temperature-controlling system, supporting and Adjustment System, little distortion and measuring system, aiming positioning system, gauge head Metal Ball, other drift, gauge head anchor clamps, mechanical shock, experimenter to inductive head, measuring internal diameter is the steel annulus of 80mm, and the line taking expansion coefficient is λ=11.6 * 10
-6/ ℃, then the synthetic standards uncertainty of measurement is: U=0.28um.
Claims (3)
1, three-dimensional high-precision multifunctional heating deformation experiment device is made up of survey, temperature-controlling system, support and Adjustment System, little deformation measuring system and aiming positioning system, it is characterized in that:
A, climatic chamber (12) and temperature measurement circuit are set in described survey, temperature-controlling system;
B, described support and Adjustment System are for being arranged on two-dimentional work bench in the climatic chamber (12), described two-dimentional work bench is made of to adjusting platform (17) to adjusting platform (19) and top layer Y fixed base plate (23), middle layer Z, wherein, described fixed base plate (23) is supported by the cramp bar that is independent of climatic chamber (12) (24);
C, in described little deformation measuring system, adopt two-frequency laser interferometer (1), its spectroscope (3) is fixed on the micro displacement workbench base plate (4), target mirror (6) is fixed on X on worktable (5), described X to worktable (5) with X to rolling guide-rail pairs (8) guiding, and be driving with thousand fens screw thread pairs;
D, described aiming positioning system are made up of inductance amesdial (10), measuring rod seat (7), measuring staff (9) and inductance probe (15), measuring staff (9) one ends and inductance probe (15) are fixing, the other end runs through the sidewall of climatic chamber (12), and connects firmly to worktable (5) with X by measuring rod seat (7).
2, three-dimensional high-precision multifunctional heating deformation experiment device according to claim 1 is characterized in that adopting platinum resistance temperature sensor (16) in described temperature measurement circuit.
3, three-dimensional high-precision multifunctional heating deformation experiment device according to claim 1, it is characterized in that the Z in the described two-dimentional work bench is bearing on the fixed base plate (23) to guideway (20) by Z to adjusting platform (19), and Z is set to adjusting screw thread pair (21) and Z to adjusting handwheel (22); Described Y is supported to adjusting platform (19) by Z to guideway (18) by Y to adjusting platform (17), and to be provided with conical gear pair (13) be that the Y of transmission component is to adjustment handwheel (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420026841 CN2700874Y (en) | 2004-04-30 | 2004-04-30 | Three-dimensional high precision multifunctional thermal deformation experimenting equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200420026841 CN2700874Y (en) | 2004-04-30 | 2004-04-30 | Three-dimensional high precision multifunctional thermal deformation experimenting equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2700874Y true CN2700874Y (en) | 2005-05-18 |
Family
ID=34771424
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200420026841 Expired - Lifetime CN2700874Y (en) | 2004-04-30 | 2004-04-30 | Three-dimensional high precision multifunctional thermal deformation experimenting equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2700874Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102156143A (en) * | 2011-03-15 | 2011-08-17 | 哈尔滨工业大学 | Three-dimensional adjustable heat-preventing/insulating material ground simulation test device |
-
2004
- 2004-04-30 CN CN 200420026841 patent/CN2700874Y/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102156143A (en) * | 2011-03-15 | 2011-08-17 | 哈尔滨工业大学 | Three-dimensional adjustable heat-preventing/insulating material ground simulation test device |
| CN102156143B (en) * | 2011-03-15 | 2012-07-25 | 哈尔滨工业大学 | Three-dimensional adjustable heat-preventing/insulating material ground simulation test device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1263998C (en) | Three dimensional high precision multifunctional thermal deformation experimental apparatus | |
| CN112504069B (en) | Non-contact precision measuring instrument | |
| US3898836A (en) | Differential dilatometer | |
| CN107462181A (en) | A kind of multi-functional heat distortion test device of three-dimensional high-precision | |
| Lian et al. | Block thickness measurement of using the structured light vision | |
| CN1975335A (en) | Universal precision displacement measurement auxiliary device and measuring method | |
| CN112066881B (en) | Use method of control system for precisely measuring Abbe error | |
| CN2700874Y (en) | Three-dimensional high precision multifunctional thermal deformation experimenting equipment | |
| CN206531473U (en) | Non-contact thickness measuring device | |
| CN110332892A (en) | A kind of accurate detecting method | |
| CN217604945U (en) | Linear displacement sensor calibrating device | |
| CN110017803A (en) | A kind of REVO gauge head B axle error of zero scaling method | |
| US4211013A (en) | Gauge | |
| CN113494890B (en) | Fiber bragg grating strain sensor precision measuring device and method based on FPI interferometer | |
| Jakštas et al. | Investigation of calibration facilities of precision line scales | |
| Eom et al. | A precision length measuring system for a variety of linear artefacts | |
| CN114280096A (en) | Temperature-span-domain bidirectional thermal expansion/contraction deformation accurate testing device and testing method | |
| CN211453218U (en) | In-situ indentation testing device considering deformation of force sensor | |
| CN109115826B (en) | Thermal expansion measuring instrument and using method | |
| Virdee | Non-contacting straightness measurement to nanometre accuracy | |
| Stoup et al. | Accuracy and versatility of the NIST M48 coordinate measuring machine | |
| CN113282055B (en) | Small-stroke and high-precision two-axis linkage error measurement system and control method | |
| CN218469786U (en) | Precision thickness correlation measuring device based on spectrum confocal principle | |
| Stoup et al. | Measurements of large silicon spheres using the NIST M48 coordinate measuring machine | |
| CN2385310Y (en) | High precision measurer for measuring precision part thermal deformation |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| AV01 | Patent right actively abandoned |
Effective date of abandoning: 20040430 |
|
| C25 | Abandonment of patent right or utility model to avoid double patenting |