CN2655271Y - laser energy uniform distribution device - Google Patents

Abstract

The laser energy uniform distribution device is characterized by being a combined prism of a cylinder and a rectangular pyramid which are processed, and the splitting angle of each pyramid is 7-12 degrees. When the splitting angle is 10 degrees and the laser spot is obtained at the position with the distance of 1.1 times of the aperture of the light beam from the prism, the uniformity of the energy distribution of the laser spot reaches about 3 percent.

Description

The laser energy uniform distribution device

Technical field

The utility model relates to laser measurement, particularly a kind of laser energy uniform distribution device.

Background technology

In the laser damage threshold test process of optical element, material, need know that laser beats the facula area on sample.But it is uneven that the energy space of laser beam distributes because in the ordinary course of things.Only under the complete equally distributed situation of energy, the geometric area of calculating laser facula is only effectively.

What at present survey area adopted is the wedge method, promptly by means of the repeatedly reflection of wedge, laser beam is divided into multi beam, i.e. direction of propagation difference, but energy distribution constant rate and Strength Changes beamlet is as can be known got a row damage spot on the drawing on the scene.After data processing, measure useful area.

The problem that said method exists mainly is: even to the laser beam that symmetric space distributes that has of Gaussian or nearly Gaussian, because the edge of hot spot is fuzzyyer, accurately measure also pretty troublesomely during measurement, error ratio is bigger.

Summary of the invention

The technical problems to be solved in the utility model is to overcome above-mentioned the deficiencies in the prior art, a kind of laser beam uniforming device is provided, after making that energy is this device of laser beam process of gaussian shaped profile, the energy distribution of laser facula reaches homogenising, does not have tangible peak energy to distribute.Calculate the geometric area of laser facula like this with regard to available simple method.

Technical solution of the present utility model is:

A kind of laser energy uniform distribution device is characterized in that it is a garden post that processes and the combined prism of rectangular pyramid, and the angle of splitting of every rectangular pyramid is the 7-12 degree.

The described angle of splitting is 10 degree, is 1.1 times place of beam size when obtaining laser facula in the distance with prism, and the energy distribution of this laser facula is the most even.

Have laser energy and be Gaussian distribution Aexp (2r when one ²/ a ²) laser beam during from circular flat normal incidence and by the kaleidoscope prism outgoing, this Gaussian beam is divided into four beamlets by kaleidoscope prism, the xsect of each beamlet be shaped as 1/4th circles.Four beamlets like this are reassembled into a square laser facula after the optical axis direction refraction of kaleidoscope prism.The homogeneity that reconfigures the energy space distribution of the laser facula that forms like this obtains very big improvement, almost is the flat-top shape and distributes.Change the distance between kaleidoscope prism and the laser facula, the area of square laser facula and energy distribution uniformity also change thereupon.Experiment finds, when the ratio of the distance between kaleidoscope prism and the laser facula and beam size was 1.1, the spot intensity distributing homogeneity was best.

In the arbitrfary point of square laser facula (x, intensity distributions I y) (x y) is:

$I(x,y)=\mathrm{Aexp}(-2\frac{x^2+y^2}{a^2})+\mathrm{Aexp}(-2\frac{x^2+{(y-l)}^2}{a^2})$

$+\mathrm{Aexp}(-2\frac{{(x-l)}^2+{(y-l)}^2}{a^2})+\mathrm{Aexp}(-2+\frac{{(x-l)}^2+y^2}{a^2})$

(x wherein ²+ y ²=r ²)

Advantage of the present utility model: behind the utility model laser energy uniform distribution device, make the laser beam that is Gaussian distribution originally through behind this kaleidoscope prism, on a certain distance of this prism, the xsect energy distribution of laser beam is flat-top and evenly distributes.This laser damage threshold test for optical element provides very big convenience.As long as it is just passable directly to measure the geometric area of the laser facula on the sample.Need not measure the useful area of hot spot.

Description of drawings

Fig. 1 is the utility model laser energy uniform distribution device synoptic diagram.

Fig. 2 is the light path synoptic diagram.

Embodiment

The structure of the utility model laser energy uniform distribution device embodiment as shown in Figure 1, it is the combined prism 1 of a garden post that processes and rectangular pyramid, the kaleidoscope prism of this combination is made with quartz glass, is of a size of φ 15mm.The angle of wedge is 10 degree.When laser beam 2 that energy distribution is Gauss's shape impinges perpendicularly on the kaleidoscope prism 1 of this combination (optical axis of laser beam and the optical axis coincidence of kaleidoscope prism), as shown in Figure 2, be broken down into four beamlets.The shape of cross section of each beamlet is 1/4th of a circle, is fan-shaped.Be combined as the laser square focus spot 3 that an energy even distributes on a certain distance behind the kaleidoscope prism 1, the homogeneity of this hot spot reaches about 3%.

Claims (2)

1, a kind of laser energy uniform distribution device is characterized in that it is the combined prism of a garden post (11) that processes and rectangular pyramid (12), and the angle of splitting of every pyramid (12) is the 7-12 degree.

2, laser energy uniform distribution device according to claim 1, it is characterized in that the described angle of splitting is 10 degree, in the distance with prism (1) is that 1.1 times place of beam size obtains laser facula (3), and the energy distribution of this laser facula (3) is the most even.

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