WO2019127858A1 - Optical beam splitter and optical device comprising optical beam splitter - Google Patents
Optical beam splitter and optical device comprising optical beam splitter Download PDFInfo
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- WO2019127858A1 WO2019127858A1 PCT/CN2018/075936 CN2018075936W WO2019127858A1 WO 2019127858 A1 WO2019127858 A1 WO 2019127858A1 CN 2018075936 W CN2018075936 W CN 2018075936W WO 2019127858 A1 WO2019127858 A1 WO 2019127858A1
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/12—Beam splitting or combining systems operating by refraction only
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/106—Beam splitting or combining systems for splitting or combining a plurality of identical beams or images, e.g. image replication
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- the present invention relates to an optical device, and more particularly to an optical beam splitter and an optical device including the same optical beam splitter.
- Optical beam splitters are one of the most widely used devices in optical applications such as optical communication, optical shaping and optical detection.
- the beam splitting angle, spot uniformity on the target surface after splitting, and dispersion characteristics are key indicators for determining device performance.
- the commonly used optical beam splitter is composed of a diffractive optical structure.
- the grating is diffracted two-dimensionally by the principle of grating diffraction, and then the pixels are arranged and combined to form a coded phase distribution after passing through the grating diffraction structure. Strong coherence, its encoded phase distribution will produce interference and form a specific spectroscopic result after the beam is transmitted to the far field.
- the central zero-order intensity of this beam splitting structure is very sensitive to the depth of the grating structure. A slight error in the grating depth will produce a strong zero-order light, resulting in uneven beam splitting.
- its pixelated features The size is closely related to the beam splitting angle. The smaller the pixelized feature size, the larger the beam splitting angle, but the too small feature size is very difficult to process the device.
- the diffraction structure is very sensitive to the wavelength of the incident light and is a strong Dispersion structure, the beam splitting angle is very different after incident at different wavelengths.
- the invention provides an optical beam splitter, the optical beam splitter comprising a plurality of optical splitting units, each of the optical splitting units being composed of a plurality of optically refractive surfaces of different directions, each of the optical The refractive surface satisfies the following relationship:
- Each of the optical refractive surfaces refracts the incident parallel light to a different direction to form a split beam, and the splitting angle ⁇ of the split beam satisfies the following relationship:
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface.
- each of the optical refractive surfaces refracts the incident parallel light to a different direction, and the energy of the beam spot on which the split beam is incident on the target surface is equal to the refractive surface of the beam spot. It is proportional to the projected area of the plane perpendicular to the incident light.
- the material of the optical beam splitter is an optical plastic or an optical glass.
- the lateral dimension of each of the beam splitting units is less than the incident beam spot size such that the incident beam at least completely covers the beam splitting unit.
- each of said beam splitting units is arranged in a periodic array.
- the beam split by the beam splitter can form a regular beam splitting arrangement on the target surface.
- the beam split by the beam splitter can form a random beam split arrangement on the target surface.
- the invention also provides an optical device comprising the optical beam splitter.
- the present invention adopts the above technical solutions, and can achieve the following beneficial effects:
- the optical beam splitter provided by the present invention comprises a plurality of optical splitting units, each of the optical splitting units being composed of a plurality of optical refractive surfaces of different directions, each of the optical refractive surfaces satisfying the following relationship:
- the optical refractive surface refracts the incident parallel light to different directions to form a splitting beam, and the splitting angle ⁇ satisfies the following relationship:
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface
- each of the optical refractive surfaces refracts the incident parallel light to a different direction, and the energy of the beam spot on which the split beam is incident on the target surface corresponds to the beam spot.
- the refractive surface is proportional to the projected area perpendicular to the incident light, such that the splitting energy of the optical beam splitter on the target surface is determined by the angle between the corresponding refractive surface and the plane perpendicular to the incident light, and is no longer subject to The depth of the microstructure is limited, so there is no strong central zero-order light.
- the optical beam splitter provided by the present invention has optical dispersion material which is much smaller than the dispersion characteristic of the diffraction structure due to the use of optical plastic or optical glass material, and the dispersion degree is much lower than that of the diffraction type beam splitter, and the applicable optical band range of the device is more width.
- FIG. 1 is a schematic view showing the operation of an optical beam splitter according to Embodiment 1 of the present invention.
- Figure 2 is a cross-sectional view showing an optical beam splitter according to Embodiments 1 and 4 of the present invention.
- FIG 3 is a plan view of each of the optical splitting units in the optical beam splitter according to Embodiment 1 of the present invention.
- FIG. 4 is a plan view of an optical beam splitter according to Embodiment 1 of the present invention.
- Figure 5 is a cross-sectional view showing an optical beam splitter according to Embodiments 2 and 3 of the present invention.
- Figure 6 is a plan view of each of the optical splitting units in the optical beam splitter according to Embodiment 2 of the present invention.
- Figure 7 is a plan view of an optical beam splitter according to Embodiment 2 of the present invention.
- Figure 8 is a plan view of each of the optical splitting units in the optical beam splitter according to Embodiment 3 of the present invention.
- Fig. 9 is a plan view showing each of the optical splitting units in the optical beam splitter according to the fourth embodiment of the present invention.
- the optical beam splitter 11 includes a plurality of optical splitting units (not shown), and each of the optical splitting units is composed of several different
- the optical refractive surface of the direction is composed, and each of the optical refractive surfaces satisfies the following relationship:
- Each of the optical refractive surfaces refracts the incident parallel light 13 in a different direction to form a split beam 14 whose splitting angle ⁇ satisfies the following relationship:
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface
- the optical beam splitter provided by the present invention is more likely to realize large-angle splitting because its beam splitting angle is only related to the tilt angle of the refractive surface and the refractive index of the material, regardless of its feature size.
- each of the optically refractive surfaces refracts the incident parallel light 13 in a different direction to form an energy level of the beam spot 15 incident on the target surface 12 by the split beam 14 and the beam spot.
- the corresponding refractive surface of the 15 is proportional to the projected area of the plane perpendicular to the incident light, such that the splitting energy of the optical beam splitter on the target surface 12 is determined by the angle between the corresponding refractive surface and the plane perpendicular to the incident light. It is no longer limited by the depth of the microstructure, so there is no strong central zero-order light.
- the material of the optical beam splitter is an optical plastic or an optical glass.
- the optical beam splitter adopts optical plastic or optical glass material, its dispersion characteristic is much smaller than that of the diffraction structure, and its dispersion degree is much lower than that of the diffraction type beam splitter, and the device has a wider optical band range.
- the lateral dimension of each of the beam splitting units is less than the incident beam spot size such that the incident beam at least completely covers the beam splitting unit.
- each of said beam splitting units is arranged in a periodic array.
- the three-dimensional diffraction unit is not limited to the periodic array arrangement, and may actually be a random arrangement.
- the beam split by the beam splitter can form a regular beam splitting arrangement on the target surface.
- the beam split by the beam splitter can form a random beam split arrangement on the target surface.
- the optical beam splitter provided by the present invention comprises a plurality of optical splitting units, each of the optical splitting units being composed of a plurality of optical refractive surfaces of different directions, each of the optical refractive surfaces satisfying the following relationship:
- the optical refractive surface refracts the incident parallel light to different directions to form a splitting beam, and the splitting angle ⁇ satisfies the following relationship:
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface, due to the optical beam splitter
- the beam splitting angle is only related to the angle of inclination of the refractive surface and the refractive index of the material, and is independent of its feature size, so it is easier to achieve large angle splitting.
- the present invention provides an optical apparatus comprising the above-described optical beam splitter.
- FIG. 2 is a cross-sectional view of the optical beam splitter provided in the first embodiment, wherein the upper surface is represented as an optical refractive surface having different inclination angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter.
- FIG. 3 and FIG. 4 are top views of each of the optical splitting units in the optical beam splitter according to the embodiment.
- the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 2*2 optical beam splitter, and the tilt angle ⁇ i of each optical refractive surface in each optical splitting unit is 43 degrees.
- the optical splitting half angle ⁇ is 38.45 degrees
- the formed 2*2 splitting full angle is 76.9 degrees.
- the applicable band is from near ultraviolet to near infrared.
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface
- FIG. 5 is a cross-sectional view of the optical beam splitter according to Embodiment 2, wherein the upper surface is represented as an optical refractive surface having different inclination angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter.
- a split beam of light in different directions, the material of which is optical glass D-ZK3, refractive index n 1.59.
- FIG. 6 and FIG. 7 are top views of each of the optical splitting units in the optical beam splitter according to the embodiment.
- the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 3*3 optical beam splitter, and the tilt angle ⁇ i of each optical refractive surface in each optical splitting unit is 38 degrees.
- the optical splitting half angle ⁇ is obtained as 40.2 degrees
- the formed 3*3 splitting full angle is 80.4 degrees
- the applicable wavelength band is from near ultraviolet to near infrared.
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface
- Embodiment 5 is a cross-sectional view of the optical beam splitter according to Embodiment 3, wherein the upper surface is represented as an optical refractive surface having different oblique angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter.
- FIG. 8 is a top view of each optical splitting unit in the optical beam splitter provided by this embodiment.
- the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 4*4 optical beam splitter, and the tilt angle ⁇ i of each optical refractive surface in each optical splitting unit is 39 degrees.
- the optical splitting half angle ⁇ is 46.92 degrees
- the formed 4*4 splitting full angle is 93.84 degrees
- the applicable wavelength band is visible light and near infrared.
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface
- FIG. 2 is a cross-sectional view of the optical beam splitter according to Embodiment 4, wherein the upper surface is represented as an optical refractive surface having different inclination angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter.
- a beam splitting beam of different directions, the material of which is an optical plastic polymethyl methacrylate with a refractive index n 1.49.
- FIG. 9 is a top view of each of the optical splitting units in the optical beam splitter provided by this embodiment.
- the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 5*5 optical beam splitter, and the tilt angle ⁇ i of each of the optical refractive surfaces in each of the optical splitting units is 42 degrees.
- the optical splitting half angle ⁇ is 43.56 degrees
- the formed 5*5 splitting full angle is 87.12 degrees
- the applicable wavelength band is visible light and near infrared.
- n is the refractive index of the material constituting the optical refractive surface
- ⁇ i is the angle between the optical refractive surface and the plane perpendicular to the incident light
- ⁇ o is the angle of refraction after the light passes through the optical refractive surface
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Abstract
Provided in the present invention is an optical beam splitter, comprising a plurality of optical beam splitting units, each beam splitting unit being composed of a plurality of optical refraction surfaces of different directions, each optical refraction surface satisfying the following relationship: each optical refraction surface refracts parallel incident light in different directions to form a split beam, the angle α of the split beam satisfying the following relationship: Sinθo=nSinθi, α=θo-θi, n being the refractive index of the material of the optical refraction surfaces, θ being the angle between the optical refraction surfaces and the perpendicular plane of the incident light, and θo being the angle of refraction of the light ray after passing through the optical refractive surfaces. The split beam angle of the optical beam splitter of the present invention is only related to the angle of inclination and the refractive index of the material of the refractive surfaces, and is not related to the feature size thereof, so that it is easier to implement large angle beam splitting.
Description
本发明涉及一种光学器件,尤其涉及一种光分束器及包含相同光分束器的光学设备。The present invention relates to an optical device, and more particularly to an optical beam splitter and an optical device including the same optical beam splitter.
光分束器是光通讯、光整形和光探测等光学应用中大量使用的器件之一,其分束角度、分束后目标面上的光斑均匀度以及色散特性均是决定器件性能的关键指标。Optical beam splitters are one of the most widely used devices in optical applications such as optical communication, optical shaping and optical detection. The beam splitting angle, spot uniformity on the target surface after splitting, and dispersion characteristics are key indicators for determining device performance.
目前常用的光分束器采用衍射光学结构构成,利用光栅衍射的原理,对光栅进行二维像素化,然后通过像素的排列组合,使激光经过光栅衍射结构后形成编码的相位分布,由于入射激光强烈的相干性,其编码后的相位分布将产生干涉,并在光束传递至远场后形成特定的分光结果。At present, the commonly used optical beam splitter is composed of a diffractive optical structure. The grating is diffracted two-dimensionally by the principle of grating diffraction, and then the pixels are arranged and combined to form a coded phase distribution after passing through the grating diffraction structure. Strong coherence, its encoded phase distribution will produce interference and form a specific spectroscopic result after the beam is transmitted to the far field.
然而,这一分束结构的中央零级光强对光栅结构的深度非常敏感,光栅深度稍有误差均会产生很强的零级光,导致分束不均;其次,其像素化后的特征尺寸与其分束角度密切相关,像素化的特征尺寸越小,分束角度越大,但过小的特征尺寸在器件加工上非常困难;此外,衍射结构对入射光波长非常敏感,是一种强色散结构,不同波长入射后,其光分束角度差异很大。However, the central zero-order intensity of this beam splitting structure is very sensitive to the depth of the grating structure. A slight error in the grating depth will produce a strong zero-order light, resulting in uneven beam splitting. Secondly, its pixelated features The size is closely related to the beam splitting angle. The smaller the pixelized feature size, the larger the beam splitting angle, but the too small feature size is very difficult to process the device. In addition, the diffraction structure is very sensitive to the wavelength of the incident light and is a strong Dispersion structure, the beam splitting angle is very different after incident at different wavelengths.
因此,这一类器件在应用中受到很大限制。Therefore, this type of device is greatly limited in application.
发明内容Summary of the invention
有鉴如此,有必要提供一种光分束器,旨在解决现有技术中提供的光分束器的应用限制。In view of this, it is necessary to provide an optical beam splitter aimed at solving the application limitations of the optical beam splitter provided in the prior art.
为实现上述目的,本发明采用下述技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:
一方面,本发明提供的光分束器,所述光分束器包括若干个光分束单元,每个所述光分束单元由若干个不同方向的光学折射面组成,每个所述光学折射面满足下述关系:In one aspect, the invention provides an optical beam splitter, the optical beam splitter comprising a plurality of optical splitting units, each of the optical splitting units being composed of a plurality of optically refractive surfaces of different directions, each of the optical The refractive surface satisfies the following relationship:
每个光学折射面将入射的平行光折射向不同的方向,形成分束光束,所述分束光束的分束角度α满足如下关系:Each of the optical refractive surfaces refracts the incident parallel light to a different direction to form a split beam, and the splitting angle α of the split beam satisfies the following relationship:
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角。。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface. .
在一些较佳实施例中,每个所述光学折射面将入射的平行光折射向不同的方向后形成分束光束入射至目标面上的光束光斑的能量大小与所述光束光斑对应折射面在与所述入射光垂直平面的投影面积呈正比。在一些较佳实施例中,所述光分束器的材料为光学塑料或光学玻璃。In some preferred embodiments, each of the optical refractive surfaces refracts the incident parallel light to a different direction, and the energy of the beam spot on which the split beam is incident on the target surface is equal to the refractive surface of the beam spot. It is proportional to the projected area of the plane perpendicular to the incident light. In some preferred embodiments, the material of the optical beam splitter is an optical plastic or an optical glass.
在一些较佳实施例中,每个所述光分束单元的横向尺寸小于入射光束光斑大小,以使所述入射光束至少完全覆盖所述光分束单元。In some preferred embodiments, the lateral dimension of each of the beam splitting units is less than the incident beam spot size such that the incident beam at least completely covers the beam splitting unit.
在一些较佳实施例中,每个所述光分束单元呈周期性阵列排布。In some preferred embodiments, each of said beam splitting units is arranged in a periodic array.
在一些较佳实施例中,经所述光分束器分束后的光束在目标面上可形成规则的分束排布。In some preferred embodiments, the beam split by the beam splitter can form a regular beam splitting arrangement on the target surface.
在一些较佳实施例中,经所述光分束器分束后的光束在目标面上可形成随 机的分束排布。In some preferred embodiments, the beam split by the beam splitter can form a random beam split arrangement on the target surface.
另一方面,本发明还提了一种包含所述的光分束器的光学设备。In another aspect, the invention also provides an optical device comprising the optical beam splitter.
本发明采用上述技术方案,能够实现下述有益效果:The present invention adopts the above technical solutions, and can achieve the following beneficial effects:
本发明提供的光分束器,包括若干个光分束单元,每个所述光分束单元由若干个不同方向的光学折射面组成,每个所述光学折射面满足下述关系:每个光学折射面将入射的平行光折射向不同的方向,形成分束,分束角度α满足如下关系:The optical beam splitter provided by the present invention comprises a plurality of optical splitting units, each of the optical splitting units being composed of a plurality of optical refractive surfaces of different directions, each of the optical refractive surfaces satisfying the following relationship: The optical refractive surface refracts the incident parallel light to different directions to form a splitting beam, and the splitting angle α satisfies the following relationship:
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角,本发明提供的光分束器,其分束角度仅由折射面的倾斜角度和材料折射率有关,而与其特征尺寸无关,因此更容易实现大角度分束。Wherein n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface, and the light provided by the present invention The beam splitter, whose beam splitting angle is only related to the tilt angle of the refractive surface and the refractive index of the material, is independent of its feature size, so it is easier to achieve large angle splitting.
此外,本发明提供的光分束器,每个所述光学折射面将入射的平行光折射向不同的方向后形成分束光束入射至目标面上的光束光斑的能量大小与所述光束光斑对应折射面在与所述入射光垂直平面的投影面积呈正比,从而使得光分束器在目标面上的分束能量比仅由对应折射面在与入射光垂直平面的夹角决定,不再受微结构的深度限制,因此不存在很强的中央零级光。In addition, the optical beam splitter according to the present invention, each of the optical refractive surfaces refracts the incident parallel light to a different direction, and the energy of the beam spot on which the split beam is incident on the target surface corresponds to the beam spot. The refractive surface is proportional to the projected area perpendicular to the incident light, such that the splitting energy of the optical beam splitter on the target surface is determined by the angle between the corresponding refractive surface and the plane perpendicular to the incident light, and is no longer subject to The depth of the microstructure is limited, so there is no strong central zero-order light.
另外,本发明提供的光分束器,由于采用光学塑料或光学玻璃材料,其色散特性远小于衍射结构的色散特性,其色散程度远低于衍射型分束器,器件适用的光波段范围更宽。In addition, the optical beam splitter provided by the present invention has optical dispersion material which is much smaller than the dispersion characteristic of the diffraction structure due to the use of optical plastic or optical glass material, and the dispersion degree is much lower than that of the diffraction type beam splitter, and the applicable optical band range of the device is more width.
图1为本发明实施例1提供的光分束器的工作示意图。1 is a schematic view showing the operation of an optical beam splitter according to Embodiment 1 of the present invention.
图2为本发明实施例1及4提供的光分束器的剖面图。Figure 2 is a cross-sectional view showing an optical beam splitter according to Embodiments 1 and 4 of the present invention.
图3为本发明实施例1提供的光分束器中每个光分束单元的俯视图。3 is a plan view of each of the optical splitting units in the optical beam splitter according to Embodiment 1 of the present invention.
图4为本发明实施例1提供的光分束器的俯视图。4 is a plan view of an optical beam splitter according to Embodiment 1 of the present invention.
图5为本发明实施例2及3提供的光分束器的剖面图。Figure 5 is a cross-sectional view showing an optical beam splitter according to Embodiments 2 and 3 of the present invention.
图6为本发明实施例2提供的光分束器中每个光分束单元的俯视图。Figure 6 is a plan view of each of the optical splitting units in the optical beam splitter according to Embodiment 2 of the present invention.
图7为本发明实施例2提供的光分束器的俯视图。Figure 7 is a plan view of an optical beam splitter according to Embodiment 2 of the present invention.
图8为本发明实施例3提供的光分束器中每个光分束单元的俯视图。Figure 8 is a plan view of each of the optical splitting units in the optical beam splitter according to Embodiment 3 of the present invention.
图9为发明本实施例4提供的光分束器中每个光分束单元的俯视图。Fig. 9 is a plan view showing each of the optical splitting units in the optical beam splitter according to the fourth embodiment of the present invention.
为了使本发明的目的、技术方案及优点更加清楚明白,以下结合附图及实施例,对本发明进行进一步详细说明。应当理解,此处所描述的具体实施例仅仅用以解释本发明,并不用于限定本发明。The present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It is understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
请参阅图1,本发明提供的光分束器的工作原理图,所述光分束器11包括若干个光分束单元(图未示),每个所述光分束单元由若干个不同方向的光学折射面组成,每个所述光学折射面满足下述关系:Referring to FIG. 1 , a working principle diagram of an optical beam splitter provided by the present invention, the optical beam splitter 11 includes a plurality of optical splitting units (not shown), and each of the optical splitting units is composed of several different The optical refractive surface of the direction is composed, and each of the optical refractive surfaces satisfies the following relationship:
每个光学折射面将入射的平行光13折射向不同的方向,形成分束光束14,所述分束光束14的分束角度α满足如下关系:Each of the optical refractive surfaces refracts the incident parallel light 13 in a different direction to form a split beam 14 whose splitting angle α satisfies the following relationship:
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface.
可以理解,本发明提供的光分束器,由于其分束角度仅由折射面的倾斜角度和材料折射率有关,而与其特征尺寸无关,因此更容易实现大角度分束。It can be understood that the optical beam splitter provided by the present invention is more likely to realize large-angle splitting because its beam splitting angle is only related to the tilt angle of the refractive surface and the refractive index of the material, regardless of its feature size.
在一些较佳实施例中,每个所述光学折射面将入射的平行光13折射向不同的方向后形成分束光束14入射至目标面12上的光束光斑15的能量大小与所述光束光斑15对应折射面在与所述入射光垂直平面的投影面积呈正比,从而使得光分束器在目标面12上的分束能量比仅由对应折射面在与入射光垂直平面的夹角决定,不再受微结构的深度限制,因此不存在很强的中央零级光。In some preferred embodiments, each of the optically refractive surfaces refracts the incident parallel light 13 in a different direction to form an energy level of the beam spot 15 incident on the target surface 12 by the split beam 14 and the beam spot. The corresponding refractive surface of the 15 is proportional to the projected area of the plane perpendicular to the incident light, such that the splitting energy of the optical beam splitter on the target surface 12 is determined by the angle between the corresponding refractive surface and the plane perpendicular to the incident light. It is no longer limited by the depth of the microstructure, so there is no strong central zero-order light.
在一些较佳实施例中,所述光分束器的材料为光学塑料或光学玻璃。In some preferred embodiments, the material of the optical beam splitter is an optical plastic or an optical glass.
可以理解,由于光分束器采用光学塑料或光学玻璃材料,其色散特性远小于衍射结构的色散特性,其色散程度远低于衍射型分束器,器件适用的光波段范围更宽。It can be understood that since the optical beam splitter adopts optical plastic or optical glass material, its dispersion characteristic is much smaller than that of the diffraction structure, and its dispersion degree is much lower than that of the diffraction type beam splitter, and the device has a wider optical band range.
在一些较佳实施例中,每个所述光分束单元的横向尺寸小于入射光束光斑大小,以使所述入射光束至少完全覆盖所述光分束单元。In some preferred embodiments, the lateral dimension of each of the beam splitting units is less than the incident beam spot size such that the incident beam at least completely covers the beam splitting unit.
在一些较佳实施例中,每个所述光分束单元呈周期性阵列排布。In some preferred embodiments, each of said beam splitting units is arranged in a periodic array.
可以理解,所述三维衍射单元并不局限上周期性阵列排布,实际中还可以为随机性的排布。It can be understood that the three-dimensional diffraction unit is not limited to the periodic array arrangement, and may actually be a random arrangement.
在一些较佳实施例中,经所述光分束器分束后的光束在目标面上可形成规则的分束排布。In some preferred embodiments, the beam split by the beam splitter can form a regular beam splitting arrangement on the target surface.
在一些较佳实施例中,经所述光分束器分束后的光束在目标面上可形成随 机的分束排布。In some preferred embodiments, the beam split by the beam splitter can form a random beam split arrangement on the target surface.
本发明提供的光分束器,包括若干个光分束单元,每个所述光分束单元由若干个不同方向的光学折射面组成,每个所述光学折射面满足下述关系:每个光学折射面将入射的平行光折射向不同的方向,形成分束,分束角度α满足如下关系:The optical beam splitter provided by the present invention comprises a plurality of optical splitting units, each of the optical splitting units being composed of a plurality of optical refractive surfaces of different directions, each of the optical refractive surfaces satisfying the following relationship: The optical refractive surface refracts the incident parallel light to different directions to form a splitting beam, and the splitting angle α satisfies the following relationship:
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角,由于光分束器,其分束角度仅由折射面的倾斜角度和材料折射率有关,而与其特征尺寸无关,因此更容易实现大角度分束。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface, due to the optical beam splitter The beam splitting angle is only related to the angle of inclination of the refractive surface and the refractive index of the material, and is independent of its feature size, so it is easier to achieve large angle splitting.
此外,本发明还提供了一种包括上述光分束器的光学设备。Further, the present invention provides an optical apparatus comprising the above-described optical beam splitter.
以下结合具体实施例对本发明的具体实现进行详细描述:The specific implementation of the present invention is described in detail below in conjunction with specific embodiments:
实施例1:Example 1:
请参阅图2,为本实施例1提供的光分束器的剖面图,其中,上表面表示为不同倾斜角度的光学折射面,S0-S5为平行光束经所述光分束器后形成的不同方向的分束光束,所述光分束器的材料为光学玻璃石英,折射率n=1.45。2 is a cross-sectional view of the optical beam splitter provided in the first embodiment, wherein the upper surface is represented as an optical refractive surface having different inclination angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter. A split beam of light in different directions, the material of the beam splitter being optical glass quartz with a refractive index n=1.45.
请参阅图3及图4,为本实施例提供的光分束器中每个光分束单元的俯视图。Please refer to FIG. 3 and FIG. 4 , which are top views of each of the optical splitting units in the optical beam splitter according to the embodiment.
在本实施例中,每个光分束单元内的折射面朝不同方向倾斜,构成2*2光分束器,每个光分束单元内每个光学折射面的倾斜角度θi为43度,根据下 述公式,获取其光分束半角α为38.45度,形成的2*2分束全角为76.9度,适用波段从近紫外到近红外波段In this embodiment, the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 2*2 optical beam splitter, and the tilt angle θi of each optical refractive surface in each optical splitting unit is 43 degrees. According to the following formula, the optical splitting half angle α is 38.45 degrees, and the formed 2*2 splitting full angle is 76.9 degrees. The applicable band is from near ultraviolet to near infrared.
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface.
实施例2:Example 2:
请参阅图5,为本实施例2提供的光分束器的剖面图,其中,上表面表示为不同倾斜角度的光学折射面,S0-S5为平行光束经所述光分束器后形成的不同方向的分束光束,所述光分束器的材料为光学玻璃D-ZK3,折射率n=1.59。5 is a cross-sectional view of the optical beam splitter according to Embodiment 2, wherein the upper surface is represented as an optical refractive surface having different inclination angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter. A split beam of light in different directions, the material of which is optical glass D-ZK3, refractive index n = 1.59.
请参阅图6及图7,为本实施例提供的光分束器中每个光分束单元的俯视图。Please refer to FIG. 6 and FIG. 7 , which are top views of each of the optical splitting units in the optical beam splitter according to the embodiment.
在本实施例中,每个光分束单元内的折射面朝不同方向倾斜,构成3*3光分束器,每个光分束单元内每个光学折射面的倾斜角度θi为38度,根据下述公式,获取其光分束半角α为40.2度,形成的3*3分束全角为80.4度,适用波段从近紫外到近红外波段。In this embodiment, the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 3*3 optical beam splitter, and the tilt angle θi of each optical refractive surface in each optical splitting unit is 38 degrees. According to the following formula, the optical splitting half angle α is obtained as 40.2 degrees, and the formed 3*3 splitting full angle is 80.4 degrees, and the applicable wavelength band is from near ultraviolet to near infrared.
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface.
实施例3:Example 3:
请参阅图5,为本实施例3提供的光分束器的剖面图,其中,上表面表示为不同倾斜角度的光学折射面,S0-S5为平行光束经所述光分束器后形成的不同方向的分束光束,所述光分束器的材料为光学塑料聚碳酸酯,折射率n=1.585。5 is a cross-sectional view of the optical beam splitter according to Embodiment 3, wherein the upper surface is represented as an optical refractive surface having different oblique angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter. A split beam of light in different directions, the material of the beam splitter being an optical plastic polycarbonate having a refractive index n = 1.585.
请参阅图8,为本实施例提供的光分束器中每个光分束单元的俯视图。Please refer to FIG. 8 , which is a top view of each optical splitting unit in the optical beam splitter provided by this embodiment.
在本实施例中,每个光分束单元内的折射面朝不同方向倾斜,构成4*4光分束器,每个光分束单元内每个光学折射面的倾斜角度θi为39度,根据下述公式,获取其光分束半角α为46.92度,形成的4*4分束全角为93.84度,适用波段为可见光和近红外波段。In this embodiment, the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 4*4 optical beam splitter, and the tilt angle θi of each optical refractive surface in each optical splitting unit is 39 degrees. According to the following formula, the optical splitting half angle α is 46.92 degrees, and the formed 4*4 splitting full angle is 93.84 degrees, and the applicable wavelength band is visible light and near infrared.
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface.
实施例4:Example 4:
请参阅图2,为本实施例4提供的光分束器的剖面图,其中,上表面表示为不同倾斜角度的光学折射面,S0-S5为平行光束经所述光分束器后形成的不同方向的分束光束,所述光分束器的材料为光学塑料聚甲基丙烯酸甲酯,折射率n=1.49。2 is a cross-sectional view of the optical beam splitter according to Embodiment 4, wherein the upper surface is represented as an optical refractive surface having different inclination angles, and S0-S5 are formed by parallel beams passing through the optical beam splitter. A beam splitting beam of different directions, the material of which is an optical plastic polymethyl methacrylate with a refractive index n=1.49.
请参阅图9,为本实施例提供的光分束器中每个光分束单元的俯视图。Please refer to FIG. 9 , which is a top view of each of the optical splitting units in the optical beam splitter provided by this embodiment.
在本实施例中,每个光分束单元内的折射面朝不同方向倾斜,构成5*5光分束器,每个光分束单元内每个光学折射面的倾斜角度θi为42度,根据下述公式,获取其光分束半角α为43.56度,形成的5*5分束全角为87.12度,适用波段为可见光和近红外波段。In this embodiment, the refractive surfaces in each of the optical splitting units are inclined in different directions to form a 5*5 optical beam splitter, and the tilt angle θi of each of the optical refractive surfaces in each of the optical splitting units is 42 degrees. According to the following formula, the optical splitting half angle α is 43.56 degrees, and the formed 5*5 splitting full angle is 87.12 degrees, and the applicable wavelength band is visible light and near infrared.
sin θo=n sin θiSin θo=n sin θi
α=θo-θiα=θo-θi
其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface.
以上所述仅为本发明的较佳实施例而已,并不用以限制本发明,凡在本发明的精神和原则之内所作的任何修改、等同替换和改进等,均应包含在本发明的保护范围之内。The above is only the preferred embodiment of the present invention, and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection of the present invention. Within the scope.
Claims (8)
- 一种光分束器,其特征在于,所述光分束器包括若干个光分束单元,每个所述光分束单元由若干个不同方向的光学折射面组成,每个所述光学折射面满足下述关系:An optical beam splitter, characterized in that the optical beam splitter comprises a plurality of optical splitting units, each of the optical splitting units being composed of a plurality of optically refractive surfaces of different directions, each of the optical refractions The face meets the following relationship:每个光学折射面将入射的平行光折射向不同的方向,形成分束光束,所述分束光束的分束角度α满足如下关系:Each of the optical refractive surfaces refracts the incident parallel light to a different direction to form a split beam, and the splitting angle α of the split beam satisfies the following relationship:sin θo=n sin θiSin θo=n sin θiα=θo-θiα=θo-θi其中,n为构成所述光学折射面的材料折射率,θi为所述光学折射面与入射光垂直平面的夹角,θo为光线经过所述光学折射面后的折射角。Where n is the refractive index of the material constituting the optical refractive surface, θi is the angle between the optical refractive surface and the plane perpendicular to the incident light, and θo is the angle of refraction after the light passes through the optical refractive surface.
- 根据权利要求1所述的光分束器,其特征在于,每个所述光学折射面将入射的平行光折射向不同的方向后形成分束光束入射至目标面上的光束光斑的能量大小与所述光束光斑对应折射面在与所述入射光垂直平面的投影面积呈正比。The optical beam splitter according to claim 1, wherein each of said optical refractive surfaces refractions the incident parallel light to a different direction to form a beam spot of the beam spot incident on the target surface. The beam spot corresponds to a refractive surface that is proportional to a projected area perpendicular to the plane of the incident light.
- 根据权利要求1所述的光分束器,其特征在于,所述光分束器的材料为光学塑料或光学玻璃。The optical beam splitter according to claim 1, wherein the material of the optical beam splitter is an optical plastic or an optical glass.
- 根据权利要求1所述的光分束器,其特征在于,每个所述光分束单元的横向尺寸小于入射光束光斑大小,以使所述入射光束至少完全覆盖所述光分束单元。The optical beam splitter according to claim 1, wherein each of said optical splitting units has a lateral dimension smaller than an incident beam spot size such that said incident beam completely covers said beam splitting unit at least completely.
- 根据权利要求1所述的光分束器,其特征在于,每个所述光分束单元呈周期性阵列排布。The optical beam splitter according to claim 1, wherein each of said optical splitting units is arranged in a periodic array.
- 根据权利要求1所述的光分束器,其特征在于,经所述光分束器分束后 的光束在目标面上可形成规则的分束排布。The optical beam splitter according to claim 1, wherein the beam split by said beam splitter forms a regular splitting arrangement on the target surface.
- 根据权利要求1所述的光分束器,其特征在于,经所述光分束器分束后的光束在目标面上可形成随机的分束排布。The optical beam splitter according to claim 1, wherein the beam split by said beam splitter forms a random splitting arrangement on the target surface.
- 一种包含根据权利要求1所述的光分束器的光学设备。An optical device comprising the optical beam splitter of claim 1.
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CN101256287A (en) * | 2008-04-16 | 2008-09-03 | 中国航空工业第一集团公司北京航空制造工程研究所 | Laser beam reshaping five-portion lens and four-portion lens |
CN102334060A (en) * | 2009-02-26 | 2012-01-25 | Limo专利管理有限及两合公司 | Device for homogenizing laser radiation |
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