CN2651263Y - Vacuum coating film apparatus with double-chamber - Google Patents
Vacuum coating film apparatus with double-chamber Download PDFInfo
- Publication number
- CN2651263Y CN2651263Y CN 03243370 CN03243370U CN2651263Y CN 2651263 Y CN2651263 Y CN 2651263Y CN 03243370 CN03243370 CN 03243370 CN 03243370 U CN03243370 U CN 03243370U CN 2651263 Y CN2651263 Y CN 2651263Y
- Authority
- CN
- China
- Prior art keywords
- vacuum
- pump
- chamber
- valve
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
A dual-chamber vacuum coating device is provided, which comprises a set of vacuum-receiving equipment unit, a set of evaporation heating power source device, and two matched vacuum chambers. Wherein, the vacuum-receiving equipment set is composed of a primary air drafting vacuum pump unit and a deep air drafting vacuum pump unit; the former comprises a vacuum pump and a lobular pump, which are respectively connected with two vacuum chambers through a bypass valve, a vacuum valve and pipelines; the latter comprises a vacuum maintaining pump, a lobular pump and a diffusion pump, which forms a separate circuit through upstream valves and connection vacuum valves and etc; besides, two vacuum chambers should be connected in parallel. Inside the vacuum chamber, an evaporation heater is provided, as well as an evaporation heating power source device comprising a set of such electrical equipment as externally-mounted circuit breakers, contactors, voltage regulators and transformers and etc. Wherein, two sets of change-over switches supply power for them alternately, so that, in case of one vacuum chamber being coated, the other one can support such operations as vacuum release, workpiece assembling and disassembling and etc. Or, when one vacuum chamber is performing primary air drafting, the other vacuum can be used to perform deep air drafting. The device saves invested equipment, and compared with prior two single-chambered coating devices, saves energy by 30 percent. Meanwhile, the utility model can improve product quality, and the two chambers in different sizes have wider adaptability, in order to be used to machine different sizes of workpieces. Therefore, the utility model is a new generation of upgrade product, which can make for all kinds of vacuum coating equipment.
Description
Technical field
The utility model relates to a kind of vacuum apparatus, particularly a kind of vacuum coater.
Background technology
So-called vacuum coater is a kind of in being the vacuum chamber of condition of high vacuum degree, makes plating material (as aluminium, metal strip etc.) flash to gaseous molecular, on the surface attached to workpiece to be plated, and applies the used complexes of last layer metallic membrane.This device comprises the plated film vacuum chamber, a cover pumping equipment and a cover evaporation heating power supply.Pumping equipment is by one group of elementary vacuum pump group of bleeding (being commonly called as " slightly taking out " unit), a degree of depth the bleed diffusion pump and the holding vacuum pump of (" essence is taken out "), the vacuum system device of being formed (containing supporting vacuum pipe and vacuum valve); It made filming equipment obtain vacuum and keep high vacuum state in the work period; The evaporation heating power supply evaporation heater supplying energy in being arranged on vacuum chamber then places plating material in the vacuum chamber in order to heating under vacuum state, and makes the evaporation of plating material, is attached on the workpiece, thereby reaches the purpose of plated film.In the prior art, join a cover pumping equipment and a cover evaporation heating power supply by a vacuum chamber.Promptly, be connected on the vacuum chamber through vacuum valve and vacuum pipe by a thick vacuum pumping pump last lobe pump of connecting.In vacuum chamber, be provided with evaporation heater.And during the vacuum tightness in needs continue to improve vacuum chamber, lean on a diffusion pump to carry out the what is called " essence is taken out " that the degree of depth is bled, be connected to vacuum chamber after the vacuum pipe merging of this diffusion pump through a vacuum valve and above-mentioned " slightly taking out ".Diffusion pump is connected with " slightly taking out " unit.Another outlet of diffusion pump then connects a holding vacuum pump.By the switching of valve, make elementary vacuumize to vacuumize with plated film with the degree of depth carry out stage by stage.Repeat following operation so again and again: clamping workpiece → " slightly taking out " stage → " essence is taken out " stage → heating evaporation (plated film) → finish plated film → stop to heat → unload vacuum → new workpiece of taking-up workpiece → clamping.In cycle, the filming process of core only needs 60 seconds in whole production, and other operation then expends the plenty of time, and equipment component such as diffusion pump, holding pump, thick vacuum pumping pump etc. need long-term operation.Each workpiece loading and unloading carries out off and on, so the work period is longer, plant factor is lower, and the electric energy and heat energy loss is serious, and energy consumption is bigger, greatly increases production cost undoubtedly.
Summary of the invention
The purpose of this utility model is to avoid above-mentioned weak point of the prior art and provides a kind of work period shorter, and plant factor is higher, the double-chamber vacuum film coating apparatus that energy consumption is lower.
The purpose of this utility model can reach by following measure:
The utility model double-chamber vacuum film coating apparatus, include vacuum chamber, be arranged on the evaporation heater in this vacuum chamber, external evaporation heating power supply device, and supporting pumping equipment group, by disposing the vacuum pipe of required vacuum valve on the pipeline, each individual equipment in the said apparatus is coupled together, make it to constitute a system and device, wherein, the pumping equipment group includes link to each other with vacuum chamber elementary vacuum pump group and the degree of depth vacuum pump group of bleeding of bleeding, it is characterized in that described vacuum chamber, by being constituted by the A vacuum chamber of parallel connection and B vacuum chamber, be provided with first evaporation heater in the A vacuum chamber, be provided with second evaporation heater in the B vacuum chamber.On the other hand, the described elementary vacuum pump group of bleeding is made up of one first vacuum pump last one first lobe pump of connecting, the vacuum pipe of bleeding of drawing from first lobe pump, be divided into two, one is connected on the A vacuum chamber through first vacuum valve, other end second vacuum valve, be connected to above the B vacuum chamber, the vacuum pump group and the above-mentioned degree of depth is bled, then formed by one the second vacuum pump last diffusion pump of connecting, for further raising the efficiency, also can be by one second vacuum pump last one second lobe pump of series connection earlier, through a forvacuum valve, be connected in series on the diffusion pump again.The degree of depth of drawing from the diffusion pump vacuum pipe of bleeding has passed through the vacuum valve that changes the effect of cutting, and is divided into two equally, and one is connected on the A vacuum chamber, and the other end is connected to above the B vacuum chamber.The bleed pipeline of vacuum pump group of above-mentioned elementary bleed vacuum pump group and the degree of depth is connected on the vacuum chamber respectively separately, and both are not disturbed mutually, and vacuum chamber is vacuumized.
The above-mentioned degree of depth is bled on the vacuum pump group, a kind of vacuum valve between from the diffusion pump to the vacuum chamber, it can be a disjunctor vacuum valve, promptly the valve body of two vacuum valves fuses, form an A valve by first valve body, first cylinder and first valve gap, from the vacuum pipe that this valve body is drawn, be connected to the A vacuum chamber; Form another B valve by second valve body, second cylinder and second valve gap, the vacuum pipe of drawing from this valve body then is connected on the B vacuum chamber.First valve body and second valve body fuse.Draw vacuum pipe respectively from first valve body and second valve body, be connected on A vacuum chamber and the B vacuum chamber separately.Like this, be more convenient for switching, two vacuum chambers are put into operation respectively.
For saving facility investment, the utility model adopts a cover evaporation heating power supply, successively the evaporation heater in two vacuum chambers is powered respectively.This cover evaporation heating power supply device is made up of isolating switch, contactor, voltate regulator, transformer and first transfer lever and second transfer lever.When first transfer lever was connected, (second transfer lever disconnects simultaneously) through this switch, to the power supply of first evaporation heater, made its heating through the power supply of above-mentioned controller switching equipment adjustment and configuration.Otherwise when second transfer lever is connected (first transfer lever disconnects simultaneously), power supply is through this switch, to the power supply of second evaporation heater, heating.Like this, adapted to the alternately needs of running of two vacuum chambers, and saving equipment.
In addition,, on relevant device and pipeline, the inflation valve that some are used to unload vacuum need be set according to the requirement of vacuum apparatus, and by-pass valve.On two vacuum chambers and on the pipeline of two groups of vacuum pump groups, be provided with inflation valve, between first vacuum pump and first lobe pump, be provided with a by-pass valve, the gas-flow resistance during with minimizing " slightly taking out ".
The schedule of operation of the utility model double-chamber vacuum film coating apparatus is as follows:
Prepare before the start: open water coolant, open compressed gas source, drive second vacuum pump, second lobe pump, open diffusion pump, preheating 40 minutes.Vacuum obtains to divide " slightly taking out " and " essence is taken out " stage.At first, start first vacuum pump, open on by-pass valve and the elementary pump-line and to lead to wherein vacuum chamber, A vacuum chamber for example, on first vacuum valve, the A vacuum chamber is vacuumized, when waiting to reach about 500Pa vacuum tightness, shut by-pass valve, start first lobe pump, by placed in-line first vacuum pump and first lobe pump, system is continued to vacuumize, when waiting to reach 3Pa vacuum tightness, shut first vacuum valve, close first lobe pump, open foreline valve, open the A valve on the disjunctor vacuum valve, the A vacuum chamber is carried out the degree of depth vacuumize, when waiting to reach the processing condition of plated film, by the evaporation heating power supply device, first evaporation heater is heated and carries out plated film.On the other hand, regulate, can set about tentatively vacuumizing the B vacuum chamber by the switch of valve.Treat that A vacuum chamber plated film finishes, unload vacuum (promptly opening inflation valve), when taking out workpiece, the B vacuum chamber also just enters degree of depth vacuumizing phase, enters coating operation thereupon.So, two vacuum chambers alternately vacuumize, plated film or unload vacuum, and the operation of the workpiece of removing stage makeup and costume makes vacuum pump, holding pump, diffusion pump, evaporation heater etc. can keep secular running, has improved plant factor.This is installed each equipment regulate, can be manually, also can regulate automatically by self-service instrument.
The utility model device has the following advantages:
1, the throughput of conserve energy the utility model device one cover, be equivalent to the existing single chamber film coating apparatus of two covers, and shorten standby time greatly, and because vacuum apparatus can continuous operation, this device is also saved power consumption 30% than the latter's two covering devices, and improved plant factor, shorten the work period.
2, improved coating quality the utility model device and can make vacuum chamber reach stable higher vacuum tightness, improved quality product, reduced and returned oily phenomenon, reduced and occur the aluminium point on the product surface.
3, reduce the shared cover vacuum pump group of two vacuum chambers of cost of investment, a shared cover evaporation heating power supply device has greatly reduced equipment investment cost.
4, wide accommodation can be placed the workpiece of different size as two vacuum chambers being made the space size that varies in size, and has solved cell and has not plated big workpiece, and big chamber plating small workpiece is wasted the contradiction that cost is high again.
Description of drawings:
Fig. 1 is the equipment layout synoptic diagram of existing vacuum coater;
Fig. 2 is the equipment configuration schematic diagram of the utility model device;
Fig. 3 is the structural representation of disjunctor vacuum valve;
Fig. 4 is the structural representation of single vacuum valve;
Fig. 5 is the circuit diagram of evaporation heating power supply device.
Among each figure, the 1st, A vacuum chamber, 1` are the B vacuum chambers; 2,2` is the inflation valve on the vacuum chamber; 3 is first vacuum valves, and 3` is second vacuum valve, the 4th, and the inflation valve on the backing pump group, 5 is first vacuum valves, and 6 is first vacuum pumps, the 7th, and by-pass valve, the 8th, the disjunctor vacuum valve comprises A valve and B valve, the 9th, and the inflation valve on the degree of depth off-gas pump group, 10 is second vacuum pumps, and 11 is second lobe pumps, the 12nd, and the forvacuum valve, the 13rd, diffusion pump, 14 is first evaporation heaters, 15 first transfer leveres, the 16th, isolating switch, the 17th, contactor, the 18th, voltate regulator, the 19th, transformer, 20 is second transfer leveres, 21 is second evaporation heaters, and PV is a voltmeter, and PA is a reometer, 8-1 is first valve body on the disjunctor vacuum valve 8,8-2 is first cylinder on it, and 8-3 is first valve gap, and 8-1` is second valve body, 8-2` is second cylinder, and 8-3` is second valve gap.
Embodiment:
As shown in drawings, manufacture and design two vacuum chambers, A vacuum chamber 1 is of a size of 2520 * 1150 * 2000mm, B vacuum chamber 1` is 2300 * 1150 * 1700mm, first lobe pump 5 is selected the ZJP-1200 lobe pump for use, first vacuum pump 6 is selected the H-150 slide valve pump for use, inflation valve 4 is selected the CQV-40 pneumavalve for use, by-pass valve 7 is selected the high vacuum flapper valve for use, first vacuum valve 3 and the second vacuum valve 3` adopt GDQ-J250 high vacuum flapper valve, by aforesaid device and accessory as shown in Figure 2, be assembled into the elementary vacuum pump group of bleeding.Second vacuum pump 10 is selected the 2X-70 sliding vane rotary pump for use, second lobe pump 11 is selected the ZJP-300 lobe pump for use, diffusion pump 13 is selected the KT-800 diffusion pump for use, add inflation valve 9, inflation valve 2,2` select the CQV-40 pneumavalve for use, and forvacuum valve 12 is selected GDQ-J150 high vacuum flapper valve for use, and disjunctor vacuum valve 8 is selected GDQ-J800 for use, with vacuum pipe as shown in Figure 2, connect into one group of degree of depth vacuum pump group of bleeding.Above-mentioned two groups of pump groups are together in parallel A vacuum chamber 1 and B vacuum chamber 1` respectively, and first evaporation heater 14 and second evaporation heater 21 are set respectively in two vacuum chambers; And the evaporation heating power supply device includes isolating switch 16, contactor 17, voltate regulator 18 (selecting KTF1-164/3-380 silicon-controlled voltage regulation device for use), transformer 19 (selecting the SG-51 dry type transformer for use); Central by first transfer lever 15, on first evaporation heater 14,, power supply is received on second evaporation heater 21 power connection by second transfer lever 20.Press the blas operation, alternately in two vacuum chambers, carry out vacuum plating.Two one of them connections of transfer lever, another then disconnects, and alternately the evaporation heater to two vacuum chambers heats.The double-chamber vacuum film coating apparatus of as above being formed can be used for the glass of 6 2440 * 1830mm sizes and 6 2130 * 1520mm sizes is carried out vacuum plating.Certainly, plate the workpiece of same specification, two vacuum chambers are designed to same size get final product as need.
Claims (5)
1, a kind of double-chamber vacuum film coating apparatus, include vacuum chamber, be arranged on the evaporation heater in this vacuum chamber, external evaporation heating power supply device, and pumping equipment group, by disposing the vacuum pipe of vacuum valve, each individual equipment in the said apparatus is coupled together, make it to constitute a system and device, wherein, the pumping equipment group includes link to each other with vacuum chamber elementary vacuum pump group and the degree of depth vacuum pump group of bleeding of bleeding, it is characterized in that, described vacuum chamber is by being constituted by A vacuum chamber (1) and B vacuum chamber (1`) in parallel, be provided with first evaporation heater (14) in the A vacuum chamber (1), be provided with second evaporation heater (21) in the B vacuum chamber (1`), described elementary bleed vacuum pump group and the degree of depth vacuum pump group of bleeding is separated, the former is made up of one first vacuum pump (6), one first lobe pump of series connection (5), the vacuum pipe of drawing from first lobe pump (5), through first vacuum valve (3) and second vacuum valve (3`) A vacuum chamber (1) and B vacuum chamber (1`) are together in parallel separately, and the latter's the degree of depth vacuum pump group of bleeding is made up of a diffusion pump of one second vacuum pump (10) series connection (13), the degree of depth of drawing from diffusion pump (13) vacuum pipe of bleeding, through a kind of vacuum valve, be connected on A vacuum chamber (1) and the B vacuum chamber (1`) separately.
2, double-chamber vacuum film coating apparatus according to claim 1, it is characterized in that, the described degree of depth vacuum pump group of bleeding, be included on the vacuum pipe that second vacuum pump (10) draws, elder generation's series connection last one second lobe pump (11), through a forvacuum valve (12), be connected in series to again on the diffusion pump (13).
3, double-chamber vacuum film coating apparatus according to claim 1 and 2, it is characterized in that, described pipeline of drawing from diffusion pump (13), separately be connected between A vacuum chamber and the B vacuum chamber a kind of vacuum valve of process, it is a disjunctor vacuum valve (8), this disjunctor vacuum valve (8) is by first valve body (8-1), first cylinder (8-2), first valve gap (8-3) and second valve body (8-1`), second cylinder (8-2`), second valve gap (8-3`) is formed, and first valve body (8-1) fuses with second valve body (8-1`), draw vacuum pipe respectively from first valve body and second valve body, be connected on A vacuum chamber (1) and the B vacuum chamber (1`) separately.
4, double-chamber vacuum film coating apparatus according to claim 1 and 2, it is characterized in that, described evaporation heating power supply device, by isolating switch (16), contactor (17), voltate regulator (18), transformer (19), and first transfer lever (15) and second transfer lever (20) form, when first transfer lever (15) was connected, power supply was powered to first evaporation heater (14); When second transfer lever (20) was connected, power supply was powered to second evaporation heater (21).
5, double-chamber vacuum film coating apparatus according to claim 3, it is characterized in that, described evaporation heating power supply device, by isolating switch (16), contactor (17), voltate regulator (18), transformer (19), and first transfer lever (15) and second transfer lever (20) form, when first transfer lever (15) was connected, power supply was powered to first evaporation heater (14), when second transfer lever (20) was connected, power supply was powered to second evaporation heater (21).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03243370 CN2651263Y (en) | 2003-03-26 | 2003-03-26 | Vacuum coating film apparatus with double-chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03243370 CN2651263Y (en) | 2003-03-26 | 2003-03-26 | Vacuum coating film apparatus with double-chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2651263Y true CN2651263Y (en) | 2004-10-27 |
Family
ID=34326964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03243370 Expired - Lifetime CN2651263Y (en) | 2003-03-26 | 2003-03-26 | Vacuum coating film apparatus with double-chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2651263Y (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100436641C (en) * | 2004-12-31 | 2008-11-26 | 兰州大成自动化工程有限公司 | Vacuum filming configuration process control method |
| CN102350972A (en) * | 2011-09-06 | 2012-02-15 | 郭传渠 | Thermoplastic soft vehicle logo and manufacturing method thereof |
| CN103486090A (en) * | 2012-06-14 | 2014-01-01 | 浙江五环钛业股份有限公司 | Vacuum self-consuming furnace cooling energy-saving device |
| CN103741098A (en) * | 2014-01-19 | 2014-04-23 | 遵化市超越钛金设备有限公司 | Dual-body double-faced vacuum coating equipment |
| CN105648406A (en) * | 2016-01-31 | 2016-06-08 | 李晓马 | Horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films |
| CN109536895A (en) * | 2018-11-13 | 2019-03-29 | 宝鸡文理学院 | A kind of substrate strong adaptability nano material homogeneous film formation method and device thereof |
| CN110938809A (en) * | 2019-11-29 | 2020-03-31 | 湖南旭昱新能源科技有限公司 | Vacuum coating device for amorphous silicon solar wafer |
| CN111471964A (en) * | 2020-04-28 | 2020-07-31 | 深圳天成真空技术有限公司 | Coating of vacuum coating equipment and coating method |
| CN112760599A (en) * | 2020-12-27 | 2021-05-07 | 玛奇纳米科技(苏州)有限公司 | Nano vacuum thickness measuring film plating machine |
| CN112795894A (en) * | 2020-12-27 | 2021-05-14 | 玛奇纳米科技(苏州)有限公司 | Nano material vacuum coating machine |
| CN113265629A (en) * | 2021-06-30 | 2021-08-17 | 纳峰真空镀膜（上海）有限公司 | Double-body film coating machine |
| CN113355640A (en) * | 2021-07-20 | 2021-09-07 | 苏州佑伦真空设备科技有限公司 | Vacuum evaporation machine with double-pump structure |
| CN114246026A (en) * | 2021-11-25 | 2022-03-29 | 北京胜泰东方科技有限公司 | Method and apparatus for coating and storing low-moisture seeds |
| CN115110040A (en) * | 2022-06-20 | 2022-09-27 | 北京维开科技有限公司 | Independent double-chamber electron beam evaporation coating equipment |
-
2003
- 2003-03-26 CN CN 03243370 patent/CN2651263Y/en not_active Expired - Lifetime
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100436641C (en) * | 2004-12-31 | 2008-11-26 | 兰州大成自动化工程有限公司 | Vacuum filming configuration process control method |
| CN102350972A (en) * | 2011-09-06 | 2012-02-15 | 郭传渠 | Thermoplastic soft vehicle logo and manufacturing method thereof |
| CN103486090A (en) * | 2012-06-14 | 2014-01-01 | 浙江五环钛业股份有限公司 | Vacuum self-consuming furnace cooling energy-saving device |
| CN103741098A (en) * | 2014-01-19 | 2014-04-23 | 遵化市超越钛金设备有限公司 | Dual-body double-faced vacuum coating equipment |
| CN105648406A (en) * | 2016-01-31 | 2016-06-08 | 李晓马 | Horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films |
| CN109536895A (en) * | 2018-11-13 | 2019-03-29 | 宝鸡文理学院 | A kind of substrate strong adaptability nano material homogeneous film formation method and device thereof |
| CN110938809A (en) * | 2019-11-29 | 2020-03-31 | 湖南旭昱新能源科技有限公司 | Vacuum coating device for amorphous silicon solar wafer |
| CN111471964B (en) * | 2020-04-28 | 2022-09-27 | 深圳天成真空技术有限公司 | Coating method of vacuum coating equipment |
| CN111471964A (en) * | 2020-04-28 | 2020-07-31 | 深圳天成真空技术有限公司 | Coating of vacuum coating equipment and coating method |
| CN112760599A (en) * | 2020-12-27 | 2021-05-07 | 玛奇纳米科技(苏州)有限公司 | Nano vacuum thickness measuring film plating machine |
| CN112795894A (en) * | 2020-12-27 | 2021-05-14 | 玛奇纳米科技(苏州)有限公司 | Nano material vacuum coating machine |
| CN113265629A (en) * | 2021-06-30 | 2021-08-17 | 纳峰真空镀膜（上海）有限公司 | Double-body film coating machine |
| CN113355640A (en) * | 2021-07-20 | 2021-09-07 | 苏州佑伦真空设备科技有限公司 | Vacuum evaporation machine with double-pump structure |
| CN114246026A (en) * | 2021-11-25 | 2022-03-29 | 北京胜泰东方科技有限公司 | Method and apparatus for coating and storing low-moisture seeds |
| CN115110040A (en) * | 2022-06-20 | 2022-09-27 | 北京维开科技有限公司 | Independent double-chamber electron beam evaporation coating equipment |
| CN115110040B (en) * | 2022-06-20 | 2024-05-14 | 北京维开科技有限公司 | Independent double-chamber electron beam evaporation coating equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN2651263Y (en) | Vacuum coating film apparatus with double-chamber | |
| CN1286203C (en) | Method for increasing the operational efficiency of a fuel cell power plant | |
| CN107365973B (en) | Vacuum coating production line and coating method | |
| CN113216326B (en) | Non-negative pressure water supply equipment with night small-flow function and water supply method | |
| CN111250358A (en) | Automatic coating system and coating process for catalyst slurry | |
| CN111058008A (en) | Portable sample platform device of temperature rise or fall based on liquid nitrogen refrigeration | |
| CN207308236U (en) | A kind of glue spreading apparatus and automatic pasting equipment | |
| CN2918044Y (en) | Polyamine ester synchronization driving belt hot pressing fusion jointing press | |
| CN208869293U (en) | A kind of quick caging unit of industrial chemicals | |
| CN200979337Y (en) | Vacuum freezing and drying apparatus | |
| CN102151789A (en) | Fully-automatic circular wax-supplying system and working method thereof | |
| CN212871635U (en) | Multi-station helium mass spectrometer leak detection system with pre-evacuation function | |
| CN212408257U (en) | Steel bottle vacuum pumping system | |
| CN211284527U (en) | Portable sample platform device of temperature rise or fall based on liquid nitrogen refrigeration | |
| CN201615054U (en) | Experimental device for testing short period intermittent durability of compressor | |
| CN204058586U (en) | Double door vacuum plating unit used by a kind of pottery | |
| CN215030267U (en) | Positioning device for spraying motor cover of crane motor | |
| CN1338531A (en) | Technological arrangement of continuous in-line plating equipment for multi-layer film | |
| CN216868192U (en) | High-pressure large-flow oil-free compressed air supply system suitable for real-time air supply | |
| CN220707049U (en) | Flow control system with energy-saving compressed air | |
| CN215771233U (en) | Integrated test equipment for PEMFC (proton exchange membrane fuel cell) system | |
| CN214485738U (en) | Chromatographic separation device | |
| CN105854502A (en) | Molecular sieve regeneration gas heating waterproof method | |
| CN113204206B (en) | PLC-based multi-test-bed extrusion type medium supply control system and method | |
| CN215211296U (en) | Air pressure type constant pressure water supply equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C32 | Full or partial invalidation of patent right | ||
| IP01 | Partial invalidation of patent right |
Decision date of declaring invalidation: 20070601 Decision number of declaring invalidation: 9957 |
|
| DD01 | Delivery of document by public notice |
Addressee: Su Guifang Document name: Notification to Pay the Fees |
|
| DD01 | Delivery of document by public notice |
Addressee: Su Guifang Document name: Notification to Pay the Fees |
|
| DD01 | Delivery of document by public notice |
Addressee: Su Guifang Document name: Notification of Termination of Patent Right |
|
| DD01 | Delivery of document by public notice |
Addressee: Su Guifang Document name: Notification to Go Through Formalities Rectification of Restoration of Right |
|
| C17 | Cessation of patent right | ||
| CX01 | Expiry of patent term |
Expiration termination date: 20130326 Granted publication date: 20041027 |