CN105648406A - Horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films - Google Patents
Horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films Download PDFInfo
- Publication number
- CN105648406A CN105648406A CN201610063209.1A CN201610063209A CN105648406A CN 105648406 A CN105648406 A CN 105648406A CN 201610063209 A CN201610063209 A CN 201610063209A CN 105648406 A CN105648406 A CN 105648406A
- Authority
- CN
- China
- Prior art keywords
- pumps
- arc ion
- pipelines
- stainless steel
- steel vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention relates to a horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films. An H-shaped communication pipeline is arranged on the upper portion of cooling wells above two diffusion pumps; the upper portions of the pipeline are each provided with a high valve; the high valves are used for connecting the diffusion pumps with two furnace bodies; the two high valves are provided with rough-vacuum pump-out pipelines correspondingly; the pipelines are provided with rough pumping valves for controlling opening and closing of the pipelines; and the two pipelines are connected together and then connected with 1200 lobed element pumps and 70 pumps. Therefore, the rough-vacuum pump set can vacuumize the two furnace bodies, and the high-vacuum pump set can vacuumize the two furnace bodies.
Description
Technical field
The present invention relates to stainless-steel vacuum multi-arc ion plating film special horizontal connected furnace, utilize a set of vacuum pump group to replace evacuation work to two coated stoves of vacuum, be mainly used in corrosion resistant plate vacuum coating production and processing field.
Background technology
At present, the conventional coated stove of rustless steel is all a set of single-unit furnace form, and a set of vacuum pump group individually joined by a coated stove, and such structure and combining form have the disadvantage that: 1, take up room big; 2, equipment is many, and cost is high; 3, energy consumption is high. Therefore, for disadvantages described above, existing stainless-steel vacuum multi-arc ion plating film horizontal chamber furnace (oven) structure and configuration are properly improved, so as to more reasonable and efficient energy-saving.
Summary of the invention
For disadvantages described above, the present invention provides a set of new type stainless steel. corrosion resistance vacuum coating Special-purpose conjoined stove, and topmost advantage is: compact conformation, cost are low, saves space, and energy consumption is low.
Stainless-steel vacuum multi-arc ion plating film special horizontal connected furnace of the present invention adopt technical scheme: above 2 diffusion pumps cooling well be provided above a H type connecting pipe, a high threshold it is respectively provided with above pipeline, high threshold is used for connecting diffusion pump and 2 bodies of heater, it is respectively provided with 2 pump-lines taking out coarse vacuum 2 high threshold sides, pipeline is respectively equipped with the roughing valve controlling opening and closing pipeline, 2 pipelines through and stream after be connected with 1200 lobe pumps, 70 pumps. Therefore, the pump group taking out coarse vacuum can respectively to two body of heater evacuation, and the pump group of pumping high vacuum can give two body of heater evacuation respectively.
Stainless-steel vacuum plated film Special-purpose conjoined stove major advantage of the present invention has:
1, compact conformation, rationally distributed.
2, space, cost are saved low.
3, energy consumption is low.
Accompanying drawing explanation
Fig. 1 is the overall structure schematic diagram of stainless-steel vacuum multi-arc ion plating film special horizontal connected furnace of the present invention.
Description of reference numerals: 1-stove, 2-cools down well, 3-foreline valve, 4-1200 lobe pump, 5-70 pump, 6-30 pump, 7-600 lobe pump, 8-diffusion pump, 9-roughing valve, 10-high threshold.
Detailed description of the invention
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
In order to be easier to understand the present invention, describe embodiments of the present invention in detail with specific embodiment below.
As shown in Figure 1, stainless-steel vacuum multi-arc ion plating film special horizontal connected furnace of the present invention, cooling well (2) in 2 diffusion pumps (8) top be provided above a H type connecting pipe, a high threshold (10) it is respectively provided with above described H type connecting pipe, high threshold is respectively used to connect diffusion pump and 2 bodies of heater, it is respectively provided with 2 pump-lines taking out coarse vacuum 2 high threshold sides, pipeline is respectively equipped with the roughing valve (9) controlling opening and closing pipeline, 2 pipelines through and stream after be connected with 1200 lobe pumps (4), 70 pumps (5);It is respectively equipped with pump-line in the bottom of 2 diffusion pumps (8), described pump-line connects with 600 lobe pumps (7) after confluxing, the bottom of 600 described lobe pumps connects with 1 70 pump, 30 pumps, and 70 pumps are as the roughing vacuum pump of 600 pumps, and 30 pumps maintain pump as it.
In sum; content of the present invention and detailed description of the invention thereof; merely to essence and the intension of the present invention is clearly described by way of example; not outside being limited to the variation pattern on present inventive concept basis in the way of limitation; those skilled in the art can on the concept of the present invention; arbitrary change, but as it is based on the invention thinking known general knowledge in conjunction with this area and customary means, still fall within protection scope of the present invention.
Claims (1)
1. stainless-steel vacuum multi-arc ion plating film special horizontal connected furnace, it is characterized in that: the cooling well (2) in 2 diffusion pumps (8) top be provided above a H type connecting pipe, a high threshold (10) it is respectively provided with above described H type connecting pipe, high threshold is respectively used to connect diffusion pump and 2 bodies of heater, the pipeline of stove (1) connection high threshold (10) is provided with roughing valve (9), connecting and be provided with 600 lobe pumps (7) on the pipeline of diffusion pump (8), the right lower quadrant of 600 lobe pumps (7) is provided with 30 pumps (6).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610063209.1A CN105648406A (en) | 2016-01-31 | 2016-01-31 | Horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610063209.1A CN105648406A (en) | 2016-01-31 | 2016-01-31 | Horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105648406A true CN105648406A (en) | 2016-06-08 |
Family
ID=56489068
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610063209.1A Pending CN105648406A (en) | 2016-01-31 | 2016-01-31 | Horizontal connected furnace special for stainless steel vacuum multi-arc ion coating films |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105648406A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105970161A (en) * | 2016-06-24 | 2016-09-28 | 李晓马 | Stainless steel vacuum multi-arc ion plating horizontal furnace |
| CN117845185A (en) * | 2024-01-12 | 2024-04-09 | 青岛优百宇真空设备股份有限公司 | DLC coating processing equipment |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2119428U (en) * | 1991-09-24 | 1992-10-21 | 航空航天工业部第五研究院五一一研究所 | Double-vacuum-chamber film coating equipment |
| CN2542681Y (en) * | 2002-03-08 | 2003-04-02 | 徐惠生 | Ion coating machine with two separated chambers |
| CN2651263Y (en) * | 2003-03-26 | 2004-10-27 | 苏贵方 | Vacuum coating film apparatus with double-chamber |
| CN102994957A (en) * | 2012-11-06 | 2013-03-27 | 上海宏昊企业发展有限公司 | No-diffusion-pump type coating machine for composite films |
-
2016
- 2016-01-31 CN CN201610063209.1A patent/CN105648406A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2119428U (en) * | 1991-09-24 | 1992-10-21 | 航空航天工业部第五研究院五一一研究所 | Double-vacuum-chamber film coating equipment |
| CN2542681Y (en) * | 2002-03-08 | 2003-04-02 | 徐惠生 | Ion coating machine with two separated chambers |
| CN2651263Y (en) * | 2003-03-26 | 2004-10-27 | 苏贵方 | Vacuum coating film apparatus with double-chamber |
| CN102994957A (en) * | 2012-11-06 | 2013-03-27 | 上海宏昊企业发展有限公司 | No-diffusion-pump type coating machine for composite films |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105970161A (en) * | 2016-06-24 | 2016-09-28 | 李晓马 | Stainless steel vacuum multi-arc ion plating horizontal furnace |
| CN117845185A (en) * | 2024-01-12 | 2024-04-09 | 青岛优百宇真空设备股份有限公司 | DLC coating processing equipment |
| CN117845185B (en) * | 2024-01-12 | 2024-10-08 | 青岛优百宇真空设备股份有限公司 | DLC coating processing equipment |
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|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160608 |