CN2630798Y - Huge magneto-resistance magnetic coder - Google Patents
Huge magneto-resistance magnetic coder Download PDFInfo
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- CN2630798Y CN2630798Y CN 03236973 CN03236973U CN2630798Y CN 2630798 Y CN2630798 Y CN 2630798Y CN 03236973 CN03236973 CN 03236973 CN 03236973 U CN03236973 U CN 03236973U CN 2630798 Y CN2630798 Y CN 2630798Y
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Abstract
The utility model provides a device which is provided with a spin valve or a metal multi-layer membrane colossal magneto resistance thin film used as a sensitive material, the utility model is composed of a colossal magneto resistance sensitive element chip (1), a multi-pole magnetized plastic bonding permanent magnet magnetic drum (2), a circuit board (3) of signal processing circuit and a fixed connection mechanical structure (4). The space between the magnetic drum and the colossal magneto resistance sensitive element chip which is disposed along the radial direction of the circular magnetic drum is maintained. The strong or weak change of the magnetic field, which is transferred into the change of the output voltage of an electric bridge, can be felt by the colossal magneto resistance sensitive element chip with the rotation of the magnetic drum. The change of the output voltage of an electric bridge can be transferred into a rectangular square-wave pulse output signal with high-low potential variation through signal processing, then a shaft output, a hole output and a magnetic encoder which is integrated with an electrical motor are formed. The utility model, which has advantages that the magnetic encoder has high sensitivity, high temperature stability and big signal-to-noise ratio and subsequent electric signal processing can be easily complemented, has low cost.
Description
Technical field
The utility model provides a kind of employing Spin Valve or metallized multilayer film giant magnet resistance film material to make sensitive element chip, the magnetic drum of making in conjunction with multipole magnetization plastic bonding permanent magnet, constitute axle output, hole output and with the method for making of the integrated incremental magnetic coder of motor.
Background technology
Scrambler is displacement (translation, rotation) or the rotating speed object, utilizes the periodicity of inner structure, changes into a kind of sensor of height potential change digital signal.Scrambler mainly contains photoelectric type, capacitor type, inductive type and magnetic responsive type.At present, in actual applications, what use in a large number is photoelectric encoder.The photoelectric encoder structure mainly is made up of luminotron, electrooptical device and the code-disc that has a light and dark striped.There is certain serviceable life in photoelectric device, and at mal-conditions such as water, oil, dust, corrosive gass, transmittance is subject to disturb, and the accuracy of opto-electronic conversion reduces, and can only adopt the mode of body seal to solve the environmental suitability problem at present.Owing to there is the material of category of glass in the photoelectric encoder, so anti-vibration, impact resistance are subjected to certain restriction.Capacitance-type encoder is only applicable to the lower occasion of frequency, and is vulnerable to such environmental effects such as ambient temperature, humidity, should use to have certain limitation.The inductive type sensor since low frequency magnetic induction signal a little less than, and high frequency since induction reactance strengthen with frequency, can only in certain frequency band, use; And the mechanical dimension of inductive type detection probe is bigger, is difficult to make high resolution encoder.So the scrambler of above-mentioned various principles uses the restriction that all is subjected to certain condition.
Magnetic coder is divided into Hall element type, anisotropy magnetosensitive resistance (AMR) type and giant magnetoresistance (GMA) type again according to the difference of sensitive element chip.The Hall element signal triggering need have the permanent magnet of certain magnetic field intensity, and the magnetic field intensity deficiency that is produced for the plastic bonding permanent magnet of multipole magnetization has triggered hall device.And hall device is difficult to satisfy the requirement of 90 ° of phasic difference output signals of scrambler two-way, so can only make the magnetic coder of single channel output, low resolution.Anisotropy magnetosensitive resistance film has 2～3% room-temperature magnetoresistance rate of change under low-intensity magnetic field.By the sensitive element chip structural design, under by the effect of the plastic bonding permanent magnet of multipole magnetization, can obtain to have two-way 90 ° of phasic differences, sizes and reach tens millivolts voltage output signal.
Summary of the invention
The object of the present invention is to provide a kind of giant magnetoresistance magnetic coder, in the industrial usable range of routine,, small and light fast with its response speed, under rugged surroundings, have long service life and high reliability, simple in structure, the anti-vibrating and impact performance is good, each main manufacturing process is easy to standardization control, is easy to characteristics such as cost degradation, ratio of performance to price excellence.
The structure of the giant magnetoresistance magnetic coder that the utility model is related as shown in Figure 1, major part is by the wiring board 3 of giant magnetoresistance sensitive element chip 1, multipole magnetization permanent magnet magnetic drum 2, signal processing circuit and be connected and fixed physical construction 4 and form.
Multipole magnetization permanent magnet magnetic drum 2, it is the periodically variable field region of λ that its circumference is formed distance between two poles by multipole magnetization.When magnetic pole during along with the mechanical rotation system motion, mistor sensitive element chip 1 by non-contacting form induced field intensity variation and change into the variation of resistance sizes, obtain the standard rectangular pulse signal through signal Processing, thereby realize that digitizing transforms.The umber of pulse of magnetic coder revolution output is many more, and resolution is high more.
The basic functional principle of Spin Valve giant magnet resistance film material on substrate 5, plates alternate have certain thickness conductive membrane layer 7, two-layer ferromagnetic thin film 6,8 and pinning layer 9 respectively as shown in Figure 2.Ferromagnetic thin film 6 and 8 has magnetic dipole orientation separately, the direction shown in arrow among Fig. 2 respectively.When applying when adding low-intensity magnetic field, ferromagnetic thin film layer 8 is subjected to the effect of pinning layer 9, and the magnetic dipole orientation is constant substantially, and the magnetic dipole orientation of ferromagnetic thin film layer 6 can change, make magnetoresistive ratio in very little magnetic field range, take place sharply to change, as shown in Figure 3.This magnetoresistive ratio can reach 8%.Magnetic field sensitivity and signal-to-noise performance obviously improve.
The basic structure of multilayer film giant magnet resistance film material as shown in Figure 4, ferromagnetic thin film layer 10,12,14, conductive membrane layer 11,13, substrate 5.When externally-applied magnetic field changes, the magnetic moment orientation of middle ferromagnetic thin film layer 12 changes, because the layer coupling between each ferromagnetic material layers and its effect to the free electron scattering, resistance value changes, its family curve is shown in 15 among Fig. 5, and 16 among Fig. 5 is the family curve of anisotropy magnetosensitive resistance film material permalloy.Can find out obviously that from the contrast of two curves the magnetic field sensitivity of multilayer film giant magnet resistance film material reaches 8～12%, higher more than 3 times than the magnetic field sensitivity of anisotropy magnetosensitive resistance film material permalloy.
The utility model is made the giant magnet resistance film material to satisfy the sensitive element chip that the magnetic coder signals collecting requires, and its feature structure as shown in Figure 6.The magnetic drum 2 that the permanent magnet of plastic bonding multipole magnetization is made.The striped of giant magnetoresistance sensitive element chip 1 is formed with resistor stripe R1, R2, R3, R4, R5, R6, R7, the R8 of 8 space λ/4 (i.e. 90 ° of phasic differences), and wherein R1, R2, R3, R4 one end are connected on the common port A, connect the positive pole of power supply; R5, R6, R7, R8 one end are connected on the common port B, connect the negative pole of power supply.8 resistor stripes are divided into two groups, connect into two Wheatstone bridges as shown in Figure 7.A Wheatstone bridge is by R1, R3, R5, R7 forms, the position of magneto-resistor bar concerns that R1 and R3 satisfy phasic difference (n+1/2) λ, and its maximum deflection difference value is within ± 30%, and wherein n is a natural integer, scope is 0-1000, λ is magnetize a spacing between the magnetic pole of magnetic drum, and R1 and R7 satisfy phasic difference (n+1/2) λ, and its maximum deflection difference value is within ± 30%, R1 and R5 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%; Another Wheatstone bridge is by R2, R4, R6, R8 forms, and R2 and R4 satisfy phasic difference (n+1/2) λ, and its maximum deflection difference value is within ± 30%, R2 and R8 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, and R2 and R6 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%.When magnetic drum 2 rotates, the giant magnetoresistance sensitive element chip of placing with certain interval 1 constitutes the full-bridge difference structure, producing the two output voltage signal between C, the D and between C ', the D ' respectively, have 90 ° of phasic differences between this two paths of signals, greater than 100 millivolts voltage signal, obtain the square wave electric signal of 90 ° of phasic differences of two-way as shown in Figure 8 through the oversampling circuit shaping.
Because spinning valve type giant magnet resistance film material has magnetic direction selectivity (only to N extreme direction sensitivity), as shown in Figure 3.The cycle λ of the sensitive element chip of magnetic coder is the distance between the N-N utmost point, as shown in Figure 6.Only relevant with magnetic field intensity for the magnetoresistance characteristics of multilayer film giant magnet resistance film material, with pole orientation irrelevant (as shown in Figure 5), this moment, λ was to be the cycle with the distance between the N-S utmost point, as shown in Figure 9.Therefore, for identical magnetic drum, the resulting output signal of sensitive element chip that adopts multilayer film giant magnet resistance film material to make magnetic coder is two times of Spin Valve giant magnetoresistance sensitive element chip.
In order to improve temperature stability and the antijamming capability that magnetic coder is used in industrial circle, require to constitute in the giant magnetoresistance magnetic coder sensitive element chip resistance value of each brachium pontis of Wheatstone bridge, comprise lead resistance, consistent as much as possible.In order to satisfy above-mentioned requirements, the utility model adopts structure as shown in figure 10, form a full-bridge by resistor stripe R13, R14, R15, R16 in the sensitive element chip, R13 and R14 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, wherein n is a natural integer, scope is 0-1000, λ is the magnetic drum spacing that magnetizes, R13 and R16 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, and R13 and R15 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%; Form another full-bridge by R11, R12, R17, R18, R11 and R12 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, R11 and R18 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, R11 and R17 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%; Two full-bridge position translation λ/4 or 3 λ/4, shown in Figure 11.H connects positive source, and G connects power cathode, and differing in the optimum bit of output electric signal between E, the F and between E ', the F ' is 90 ° or 270 °.
The utility model adopt above-mentioned Spin Valve giant magnetoresistance sensitive element chip and multilayer film giant magnetoresistance sensitive element chip developed axle output, hole output and with the incorporate magnetic coder of motor.
Axle output magnetic coder structure as shown in figure 12, multipole magnetization magnetic drum 2 is fixed in the commentaries on classics 17 of 2～50 millimeters of diameters, rotating shaft is with two bearings 19,19 ' be fixed on the end cap 18, giant magnetoresistance sensitive element chip 1 is welded on the wiring board 3 with electric signal processing circuit, wiring board is fixed on the end cap 18 corresponding positions when guaranteeing to have 0.05～1.5mm radial distance gap delta between giant magnetoresistance sensitive element chip 1 and the magnetic drum 2, by lead or lead terminal 20 output signal of magnetic coder is drawn shell 21.The giant magnetoresistance sensitive element chip of installing in the circuit board (1) also can be placed on the fixed support, is connected with the signal processing circuit plate with lead-in wire.
Hole output magnetic coder structure as shown in figure 13, multipole magnetization magnetic drum 2 is fixed on the rotating shaft cover 22 with 2～50 millimeters endoporus of diameter, rotating shaft is with two bearings 24,24 ' be fixed on the end cap 23, giant magnetoresistance sensitive element chip 1 is welded on the wiring board 3 with electric signal processing capacity, wiring board is fixed on the end cap 23 corresponding positions when guaranteeing to have 0.05～1.5mm radial distance gap delta between giant magnetoresistance sensitive element chip 1 and the magnetic drum 2, by lead or lead terminal 20 output signal of magnetic coder is drawn shell 25.
With the incorporate magnetic coder structure of motor as shown in figure 14, multipole magnetization magnetic drum 2 and lining 28 directly are fixed on rotating shaft 27 1 sides with bilateral axle motor 26, giant magnetoresistance sensitive element chip 1 is welded on the wiring board 3 with electric signal processing capacity, wiring board is fixed on the end cap 29 corresponding positions of motor when guaranteeing to have 0.05～1.5mm radial distance gap delta between giant magnetoresistance sensitive element chip 1 and the magnetic drum 2, by lead or lead terminal 20 output signal of magnetic coder is drawn motor casing 30.
Advantage of the present utility model is: the Spin Valve of employing and metallized multilayer film giant magnet resistance film material have higher magnetic field sensitivity and better temperature stability than metallic film anisotropic magnetoresistance membraneous material.Its key property shows as: Spin Valve giant magnet resistance film material is near a certain magnetic field value that is lower than under the 20 oersted magnetic fields, and the room-temperature magnetoresistance rate of change can reach 8%, is higher than under the magnetic field of 20 oersteds, and the magneto-resistor variation reaches capacity; Multilayer film giant magnet resistance film material is in the magnetic field of ± 90 oersteds, and the room-temperature magnetoresistance rate of change reaches 8～10%; Both temperature-coefficient of electrical resistances are about 0.12%, and the magneto-resistor temperature coefficient is about 0.001%; Noise voltage is about 40 μ V.Make Wheatstone bridge type magnetic coder sensitive element chip with Spin Valve and metallized multilayer film giant magnet resistance film material, under 5 volts of direct-current working volts conditions, under identical multipole magnetization magnetic drum effect, output voltage the best is 120 millivolts.Original detection signal increases several times, and signal to noise ratio (S/N ratio) obviously improves, and has strengthened the antijamming capability that uses under the industrial environment condition.Serviceability temperature is in 80～120 ℃ of scopes the time, and chip bridge circuit mid point temperature is floated 0.9 millivolt, has improved the temperature stability of magnetic coder greatly.
The utility model has also that response speed is fast, small and light, more be applicable to rugged surroundings such as service water, oil, gas, confused dirt, salt dirt, and have long serviceable life and higher reliability, simple in structure, the anti-vibrating and impact performance is good, each main manufacturing process is easy to advantages such as standardization control, ratio of performance to price excellence.Integrated magnetic coder of motor and aforementioned axis output, hole output magnetic coder have relatively omitted accessories such as end cap, bearing, have avoided external scrambler installation process, additional accessory, installation accuracy may cause the harmful effect that motor is used; Simultaneously, stationarity, vibration, noise and the diameter run-out of shaft of motor rotation generally all are better than plain bearing.Realize that magnetic coder and motor are integrated, be easy to realize cost degradation, improve the serviceable life and the reliability of magnetic coder.
Description of drawings
Fig. 1 is the basic structure schematic diagram of magnetic coder.Giant magnetoresistance sensitive element chip 1, multipole magnetization magnetic drum 2, signal processing circuit 3, pedestal 4.
Fig. 2 is a Spin Valve giant magnet resistance film material basic structure synoptic diagram.Substrate 5, ferromagnetic thin film layer 6,8, conductive membrane layer 7, pinning layer 9.
Fig. 3 is the relation curve that the resistance change rate of Spin Valve giant magnet resistance film material changes with externally-applied magnetic field.Magnetoresistive ratio reaches 8% under 10～20 gauss magnetic field effects.
Fig. 4 is a multilayer film giant magnet resistance film material basic structure synoptic diagram.Ferromagnetic thin film layer 10,12,14, conductive membrane layer 11,13, substrate 5.
Fig. 5 is the characteristic comparison curves of multilayer film giant magnet resistance film material and permalloy anisotropic magnetoresistance (AMR) membraneous material.15 is the change curve of the resistance change rate of multilayer film giant magnet resistance film material with externally-applied magnetic field, and 16 is the change curve of the resistance change rate of permalloy anisotropic magnetoresistance (AMR) membraneous material with externally-applied magnetic field.
Fig. 6 is the design concept figure of the giant magnetoresistance sensitive element chip of magnetic coder.By the magnetic drum 2 that the permanent magnet of plastic bonding multipole magnetization is made, distance between two poles is λ, and λ is the distance between the N-N utmost point.The striped of giant magnetoresistance sensitive element chip is formed with resistor stripe R1, R2, R3, R4, R5, R6, R7, the R8 of 8 space λ/4 (i.e. 90 ° of phasic differences), and wherein R1, R2, R3, R4 one end are connected a common port A, connect the positive pole of power supply; R5, R6, R7, R8 one end are connected a common port B, connect the negative pole of power supply.
Fig. 7 is the wiring schematic diagram of the giant magnetoresistance sensitive element chip of magnetic coder.8 resistor stripes shown in Figure 6 are divided into two groups of R1, R3, R5, R7 and R2, R4, R6, R8, constitute and have 90 ° of two Wheatstone bridges that the phasic difference full-bridge is differential.A connects the positive pole of power supply, and B connects the negative pole of power supply, and C, D and C ', D ' are respectively the signal output part of above-mentioned two Wheatstone bridges.
Fig. 8 is for when magnetic drum 2 rotates, and the two-way through oversampling circuit amplification shaping that Fig. 6 and giant magnetoresistance sensitive element chip shown in Figure 7 are exported between C, D and C ', D ' has 90 ° of phasic difference square wave electric signal synoptic diagram.
Fig. 9 is the design concept figure of multilayer film giant magnetoresistance sensitive element chip.By the magnetic drum 2 that the permanent magnet of plastic bonding multipole magnetization is made, distance between two poles is λ, and λ is the distance between the N-S utmost point.The striped of giant magnetoresistance sensitive element chip is formed with resistor stripe R1, R2, R3, R4, R5, R6, R7, the R8 of 8 space λ/4 (i.e. 90 ° of phasic differences), and wherein R1, R2, R3, R4 one end are connected a common port A, connect the positive pole of power supply; R5, R6, R7, R8 one end are connected a common port B, connect the negative pole of power supply.
Figure 10 is the giant magnetoresistance sensitive element chip of a kind of structure of raising magnetic coder temperature stability and antijamming capability design.By R1, R2, R7, R8 resistor stripe with respect to R3, R4, R5, R6 resistor stripe shifted by lambda/4 or 3 λ/4 displacements.
Figure 11 forms a full-bridge by resistor stripe R3, R4, R5, R6 by schematic structure, and R1, R2, R7, R8 form another full-bridge by schematic structure, and the phasic difference of two full-bridges is λ/4=90 °.
Figure 12 is an axle output magnetic coder structural representation.Giant magnetoresistance sensitive element chip 1, multipole magnetization magnetic drum 2 has the wiring board 3 of electric signal processing circuit, rotating shaft 17, two bearings 19,19 ', end cap 18, lead or lead terminal 20, shell 21.
Figure 13 is hole output magnetic coder structural representation.Giant magnetoresistance sensitive element chip 1, multipole magnetization magnetic drum 2 has the wiring board 3 of electric signal processing circuit, and lead or lead terminal 20 have the rotating shaft cover 22 of endoporus, end cap 23, bearing 24,24 ', shell 25.
The incorporate magnetic coder structural representation of Figure 14 and motor.Giant magnetoresistance sensitive element chip 1, multipole magnetization magnetic drum 2 has the wiring board 3 of electric signal processing circuit, and lead or lead terminal 20 have the motor 26 of bilateral axle, rotating shaft 27, neck bush 28, the end cap 29 of motor, shell 30.
Embodiment:
Axle output magnetic coder, basic structure as shown in figure 12.Be to have filled 600 magnetic poles on the plastic bonding permanent magnet magnetic drum 2 of 35mm at external diameter, i.e. 300 pairs of N-S utmost points; The magnetic drum of multipole magnetization is fixed on rotating shaft 17 1 ends that diameter is φ 6mm, rotating shaft with two internal diameters for φ 6mm with bearing 19,19 ' be fixed on the external diameter φ 52mm end cap 18; With Spin Valve giant magnet resistance film material, adopt technologies such as microfabrication photoetching and cooked rice etching, produce as shown in Figure 6 the position of 1,8 resistor stripe of giant magnetoresistance sensitive element chip of figure and arrange and be provided with by cycle λ=366 μ m; The giant magnetoresistance sensitive element chip is welded on assurance by Fig. 7 line, and have on the wiring board 3 of electric signal processing circuit, wiring board is guaranteeing to have under the condition of radial play δ=0.05～0.20mm between giant magnetoresistance sensitive element chip 1 and the magnetic drum 2, be fixed on the corresponding position of end cap (18), the voltage signal of the 90 ° of phasic differences of (umber of pulse of each commentaries on classics) two-way of 300ppr as shown in Figure 8 that will export by lead or lead terminal 20.If adopt multilayer film giant magnet resistance film made sensitive element chip, 8 responsive fringe positions of this moment are arranged and are provided with by cycle λ=184 μ m, obtain the output voltage signal of 600ppr.
Hole output magnetic coder structure is to have filled 500 magnetic poles on the plastic bonding permanent magnet magnetic drum 2 of 35mm at external diameter as shown in figure 13, i.e. 250 pairs of N-S utmost points; The magnetic drum of multipole magnetization is fixed on the rotating shaft cover 22 with 8 millimeters endoporus of diameter, and axle is with two bearings 24,24 ' be fixed on the end cap 23; With Spin Valve giant magnet resistance film material, adopt technologies such as microfabrication photoetching and cooked rice etching, produce as shown in figure 10 the position of 1,8 resistor stripe of giant magnetoresistance sensitive element chip of figure and arrange and be provided with by cycle λ=440 μ m; The giant magnetoresistance sensitive element chip is welded on assurance by Figure 11 line and have on the wiring board 3 of electric signal processing circuit, wiring board 3 is guaranteeing to have under the condition of radial play δ=0.05～0.20mm between giant magnetoresistance sensitive element chip 1 and the magnetic drum 2, be fixed on the corresponding position of end cap (23), the voltage signal of the 90 ° of phasic differences of the two-way of 250ppr as shown in Figure 8 that will export by lead or lead terminal 20.If adopt multilayer film giant magnet resistance film made sensitive element chip, arranging and be provided with by cycle λ=220 μ m in the position of 8 resistor stripes of this moment, obtains the output voltage signal of corresponding 500ppr.
With the incorporate magnetic coder structure of motor as shown in figure 14, be to have filled 1024 magnetic poles on the plastic bonding permanent magnet magnetic drum 2 of 68mm at external diameter, i.e. 512 pairs of N-S utmost points; The magnetic drum 2 of multipole magnetization is fixed on the neck bush 28 of 28 millimeters of diameter of bores, multipole magnetization magnetic drum 2 and neck bush 28 directly are fixed on a side of rotating shaft 27 with bilateral axle motor 26, with Spin Valve giant magnet resistance film material, adopt technologies such as microfabrication photoetching and dry etching, producing as shown in figure 10 the position of 1,8 resistor stripe of giant magnetoresistance sensitive element chip of figure arranges and is provided with by cycle λ=418 μ m; The giant magnetoresistance sensitive element chip is welded on assurance by Figure 11 line, and have on the wiring board 3 of electric signal processing circuit, wiring board 3 is guaranteeing to have under the condition of radial play δ=0.05～0.20mm between sensitive element chip 1 and the magnetic drum 2, be fixed on motor rear end plate 29 corresponding positions, the voltage signal of the 90 ° of phasic differences of the two-way of 512ppr as shown in Figure 8 that will export by lead or lead terminal 20.If adopt multilayer film giant magnet resistance film made chip, arranging and be provided with by cycle λ=208 μ m in the position of 8 resistor stripes of this moment, obtains the output voltage signal of corresponding 1024ppr.
Claims (6)
1, a kind of giant magnetoresistance magnetic coder, it is characterized in that: by the wiring board (3) of the plastic bonding permanent magnet magnetic drum (2) of giant magnetoresistance sensitive element chip (1), multipole magnetization, signal processing circuit and be connected and fixed physical construction (4) and constitute, the distance between giant magnetoresistance sensitive element chip (1) and the magnetic drum (2) is 0.05～1.5 millimeter; Specifically constitute:
Spin Valve giant magnet resistance film material in a, the giant magnetoresistance sensitive element chip (1) is by two-layer ferromagnetic thin film layer (6,8), form between have conductive membrane layer (7) and pinning layer (9) between them, multilayer film giant magnet resistance film material in the giant magnetoresistance sensitive element chip (1) is by ferromagnetic thin film layer (10), (12), (14), and have conductive membrane layer (11), (13) between the adjacent two layers ferromagnetic thin film layer are formed;
B, when magnetic coder is axle output magnetic coder, multipole magnetization magnetic drum (2) is fixed in the rotating shaft (17) of 2～50 millimeters of diameters, rotating shaft is fixed on the end cap (18) with two bearings (19) (19 '), giant magnetoresistance sensitive element chip (1) is welded on the wiring board (3) with electric signal processing circuit, wiring board (3) is guaranteeing to have 0.05～1.5mm radial distance gap delta between giant magnetoresistance sensitive element chip (1) and the magnetic drum (2), be fixed on simultaneously on the corresponding position of end cap (18), the output signal of magnetic coder drawn shell (21) by lead or lead terminal (20);
2, according to the described a kind of giant magnetoresistance magnetic coder of claim 1, it is characterized in that: the giant magnetoresistance sensitive element chip is by the Spin Valve giant magnet resistance film material or the 3-9 tunic giant magnet resistance film material that are grown on the substrate (5), two Hui Sideng full-bridges that the magneto-resistor bar that process microfabrication photoetching and dry etching or chemical erosion technology are made is formed constitute, a Wheatstone bridge is by R1, R3, R5, R7 forms, the position of magneto-resistor bar concerns that R1 and R3 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, and wherein n is a natural integer; Scope is 0-1000, and R1 and R7 satisfy phasic difference (n+1/2) λ, and its maximum deflection difference value is within ± 30%, and R1 and R5 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%; Another Wheatstone bridge is by R2, R4, R6, R8 forms, and R2 and R4 satisfy phasic difference (n+1/2) λ, and its maximum deflection difference value is within ± 30%, R2 and R8 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, and R2 and R6 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%; More than the optimum bit of the voltage output signal that produces of two full-bridges to differ be 90 °, for Spin Valve giant magnet resistance film material, λ is magnetize a spacing between the N-N utmost point of magnetic drum, to multilayer film giant magnet resistance film material, λ is magnetize a spacing between the N-S utmost point of magnetic drum.
3, according to claim 1 or 2 described a kind of giant magnetoresistance magnetic coders, it is characterized in that: a Wheatstone bridge in two Hui Sideng full-bridges is made up of R13, R14, R15, R16, R13 and R14 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value at its maximum deflection difference value within ± 30% within ± 30%, wherein n is a natural integer, scope is 0-1000, R13 and R16 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, R13 and R15 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%; R11, R12, R17, R18 form another full-bridge, R11 and R12 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, R11 and R18 satisfy phasic difference (n+1/2) λ, its maximum deflection difference value is within ± 30%, R11 and R17 satisfy phasic difference n λ, and its maximum deflection difference value is within ± 30%; Two full-bridge position translation λ/4 or 3 λ/4, H connects positive source, and G connects power cathode, and differing in the optimum bit of output electric signal between E, the F and between E ', the F ' is 90 ° or 270 °.
4, according to claim 1 or 2 described a kind of giant magnetoresistance magnetic coders, it is characterized in that: when magnetic coder is hole output magnetic coder, multipole magnetization magnetic drum (2) is fixed on the rotating shaft cover (22) with 2～50 millimeters endoporus of diameter, rotating shaft is fixed on the end cap (23) with two bearings (24) (24 '), giant magnetoresistance sensitive element chip (1) is welded on the wiring board (3) with electric signal processing capacity, wiring board is guaranteeing to have 0.05～1.5mm radial distance gap delta between giant magnetoresistance sensitive element chip (1) and the magnetic drum (2), be fixed on simultaneously on the corresponding position of end cap (23), the output signal of magnetic coder drawn shell (25) by lead or lead terminal (20).
5, according to claim 1 or 2 described a kind of giant magnetoresistance magnetic coders, it is characterized in that: magnetic coder is during with the incorporate magnetic coder of motor, multipole magnetization magnetic drum (2) and lining (28) directly are fixed on a side of the rotating shaft (27) with bilateral axle motor (26), giant magnetoresistance sensitive element chip (1) is welded on the wiring board (3) with electric signal processing capacity, wiring board is guaranteeing to have 0.05～1.5mm radial distance gap delta between giant magnetoresistance sensitive element chip (1) and the magnetic drum (2), be fixed on simultaneously on the corresponding position of end cap (29) of motor, the output signal of magnetic coder drawn shell (30) by lead or lead terminal (20).
6, according to claim 1 or 2 described a kind of giant magnetoresistance magnetic coders, it is characterized in that: the giant magnetoresistance sensitive element chip of installing in the circuit board (1) also can be placed on the fixed support, is connected with the signal processing circuit plate with lead-in wire.
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| CN100378429C (en) * | 2004-11-16 | 2008-04-02 | 株式会社思考技研 | Magnetic position detecting apparatus |
| CN101646923B (en) * | 2007-03-28 | 2011-04-27 | 日立金属株式会社 | Magnetic encoder |
| CN102042840A (en) * | 2010-09-07 | 2011-05-04 | 株洲威森机车配件有限公司 | Two-channel Gray code magnetic coding device |
| CN101663564B (en) * | 2007-04-20 | 2011-11-30 | 三菱电机株式会社 | Magnetic rotating angle detector |
| WO2012031551A1 (en) * | 2010-09-07 | 2012-03-15 | 江苏多维科技有限公司 | Magnetic encoder using giant-hall-effect magnetic sensing element |
| CN102538835A (en) * | 2010-12-20 | 2012-07-04 | 长春荣德光学有限公司 | Non-contact annular magnetoelectric rotary encoder |
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| CN101646923B (en) * | 2007-03-28 | 2011-04-27 | 日立金属株式会社 | Magnetic encoder |
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| WO2012031551A1 (en) * | 2010-09-07 | 2012-03-15 | 江苏多维科技有限公司 | Magnetic encoder using giant-hall-effect magnetic sensing element |
| CN102538835A (en) * | 2010-12-20 | 2012-07-04 | 长春荣德光学有限公司 | Non-contact annular magnetoelectric rotary encoder |
| CN102650531B (en) * | 2011-02-22 | 2016-02-17 | 日本电产三协株式会社 | Rotary encoder |
| CN102650531A (en) * | 2011-02-22 | 2012-08-29 | 日本电产三协株式会社 | Rotary encoder |
| CN109910061A (en) * | 2019-03-13 | 2019-06-21 | 北京金钢科技有限公司 | Separate type magnetic Dual-encoder |
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