CN102650531B - Rotary encoder - Google Patents
Rotary encoder Download PDFInfo
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- CN102650531B CN102650531B CN201210044521.8A CN201210044521A CN102650531B CN 102650531 B CN102650531 B CN 102650531B CN 201210044521 A CN201210044521 A CN 201210044521A CN 102650531 B CN102650531 B CN 102650531B
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- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
A kind of rotary encoder, can reliably and easily make magnetic scale align with the radial position of magnetoresistive element.In rotary encoder (1), the keeper (8) of sensor unit (5) comprises the circumferential section (inner peripheral portion (82a) and outer peripheral portion (81)) using the center (O8) of the center of sensor unit (5) (O5) and keeper (8) as circle center, and magnetic scale (2) comprises the circumferential section (inner peripheral portion (21) of yoke plate (20) and outer peripheral portion (22)) concentric with magnetic track (31).Therefore, when magnetic scale (2) is installed on rotary body, and when sensor unit (5) is installed on fixed body, as long as make the circumferential section of keeper (8) and the circumferential section aligned in position of magnetic scale (2), just keeper (8) and sensor unit (5) can be configured concentrically with magnetic track (31).
Description
Technical field
The present invention relates to a kind of magnetic-type rotary encoder using magnet and magneto sensor.
Background technology
Relative to the rotary encoder that the rotation of fixed body detects, generally there is the structure relative with magnetic scale such as the magneto sensor that makes magnetoresistive element to rotary body, wherein, this magnetic scale comprises the magnetic track (such as with reference to patent documentation 1 ~ 3) being configured with N pole and S pole in the circumferential.
Prior art document
Patent documentation
Patent documentation 1: Japanese Patent Laid-Open 2007-271608 publication
Patent documentation 2: Japanese Patent Laid-Open 2000-121384 publication
Patent documentation 3: Japanese Patent Laid No. 3200361 publications
Magnetic scale in above-mentioned rotary encoder and magneto sensor are along in the rotary encoder of the relative structure in the rotation center axis direction of rotary encoder, if the radial position accuracies of magnetic scale and magneto sensor is lower, then detection sensitivity can reduce.But, because magneto sensor is installed on keeper etc., therefore, exist and not easily make magnetic scale align with magneto sensor direct position such problem.
In addition, in the rotary encoder of the magnetic scale structure relative along the rotation center axis direction of rotary body with magneto sensor, use circular sensor magnet as magnetic scale.The sensor magnet be by with the outer peripheral portion of magnetic and inner peripheral portion for benchmark magnetizes rear manufacture to being molded into circular magnetic.But, because the magnetic dimensional accuracy after shaping, the form accuracy that use in sensor magnet are lower, therefore, if with the outer peripheral portion of magnetic and inner peripheral portion for after benchmark magnetizes, the aligned in position of sensor magnet and magneto sensor is made for benchmark, then lower the and lower such problem of detection sensitivity, accuracy of detection of the positional precision that there is magnetic track and magneto sensor with above-mentioned outer peripheral portion and inner peripheral portion.Especially, if use plastic magnet in sensor magnet, then can because of dimensional accuracy and form accuracy lower, and the lower such problem of the positional precision that there is magnetic track and magneto sensor.
Summary of the invention
In view of the above problems, the first technical matters of the present invention is to provide a kind of rotary encoder that can reliably and easily make magnetic scale align with the radial position of magnetoresistive element.
In addition, even if the second technical matters of the present invention is to provide in a kind of sensor magnet when forming magnetic track when using plastic magnet etc., the rotary encoder that detection sensitivity and accuracy of detection are also higher.
For solving above-mentioned first technical matters, rotary encoder of the present invention detects the rotation of rotary body relative to fixed body, it is characterized in that, comprising: magnetic scale, and this magnetic scale has the magnetic track being configured with N pole and S pole in the circumferential; And sensor unit, this sensor unit is configured at position relative with above-mentioned magnetic scale on the rotation center axis direction of above-mentioned rotary body, and in the sensor unit, magneto sensor is held in keeper, above-mentioned keeper has the circumferential section using the center of above-mentioned keeper as circle center, and above-mentioned magnetic scale has the circumferential section concentric with above-mentioned magnetic track.
In addition, in the present invention, it is characterized in that, under the state that rotary encoder is installed in various equipment, the center of above-mentioned keeper and being centrally located on the rotation center axis of above-mentioned rotary body of above-mentioned magnetic track.
In the present invention, the keeper maintaining magneto sensor has using the center of keeper as the circumferential section justifying center, and magnetic scale has the circumferential section concentric with magnetic track.Therefore, such as, when magnetic scale being installed on rotary body and sensor unit being installed on fixed body, if make the circumferential section of keeper and the circumferential section aligned in position of magnetic scale, then keeper and magnetic track can be configured concentrically.In addition, under the state that rotary encoder is installed in various equipment, the center of keeper and being centrally located on the rotation center axis of rotary body of magnetic track can be adopted.At this, because magneto sensor is held in keeper, therefore, magneto sensor is higher relative to the positional precision at the center of keeper.Therefore, if make the circumferential section of keeper and the circumferential section aligned in position of magnetic scale, then can magnetic scale reliably and be easily made to align with the radial position of magneto sensor.
In the present invention, it is characterized in that, the sensor unit comprises the flexible base plate being provided with above-mentioned magneto sensor, above-mentioned keeper comprises the limited section limited the radial position of above-mentioned magneto sensor, and above-mentioned flexible base plate bends to the shape that can produce the acting force that above-mentioned magneto sensor is abutted with above-mentioned limited section.According to said structure, when assembling sensor unit, reliably magneto sensor can be configured at the assigned position on keeper.Therefore, if correctly make keeper and magnetic scale aligned in position, then can reliably and easily make magnetic scale align with the radial position of magneto sensor.
In the present invention, it is preferable that, above-mentioned magneto sensor by multiple magnetic resistance pattern and interarea shape be formed with above-mentioned magnetic resistance pattern device substrate form, above-mentioned keeper is formed the peristome for above-mentioned magneto sensor being configured in inner side, in the inner peripheral portion of above-mentioned peristome, the edge of the center side of above-mentioned keeper is divided as above-mentioned limited section.
In the present invention, it is preferable that, be formed with inner side towards above-mentioned peristome with the outstanding multiple teats of mode respect to one another in the inner peripheral portion of above-mentioned peristome, make above-mentioned magneto sensor overlap the upper surface of above-mentioned teat, to position above-mentioned magneto sensor in a thickness direction.In addition, in the present invention, it is preferable that, above-mentioned magneto sensor is being fixed on above-mentioned teat because abutting with above-mentioned limited section by under the state of locating.
In the present invention, it is preferable that, the sensor unit has the circuit substrate of rigidity, this circuit substrate is under the state making the first substrate being provided with electronic devices and components in first substrate face and second substrate face facing to above-mentioned keeper, the rear side contrary with the face side at above-mentioned magnetic scale place is configured in overlappingly in above-mentioned keeper, above-mentioned keeper comprises: plate-like portion, and this plate-like portion is relative with foregoing circuit substrate; Substrate supporting stage portion, this substrate supporting stage portion in the above-mentioned first substrate face of above-mentioned rear side local support of above-mentioned plate-like portion, thus guarantees gap between above-mentioned plate-like portion and above-mentioned first substrate face; And peristome, this peristome is formed at above-mentioned plate-like portion, for above-mentioned magneto sensor being configured in inner side.According to said structure, the slimming of sensor unit can be realized.
In the present invention, it is preferable that, foregoing circuit substrate is double-sided substrate, and the protective layer surface being formed with the region of Wiring pattern at least in above-mentioned second substrate face is also provided with the printed layers of insulativity.According to said structure, such as, when sensor unit is installed on metal fixed body, even if relative under such circumstances with the second substrate face of circuit substrate at metal fixed body, also dielectric voltage withstand higher between circuit substrate and fixed body can be guaranteed.
Effective especially when applying the present invention to that above-mentioned magneto sensor is and many imaginary lines extending from the center of above-mentioned keeper towards radial direction have the magnetoresistive element of magnetic resistance pattern respectively.On each bar line in many imaginary lines radially extended from the center of keeper of the magnetic resistance pattern arrangement of magnetoresistive element (magneto sensor), magnetic resistance pattern be in desirable corresponding with the magnetizing pattern of magnetic track towards, therefore, sensitivity can be improved.But when adopting said structure, if the radial position offset of magnetic scale and magnetoresistive element, then sensitivity can significantly reduce.But, according to the present invention, owing to can reliably make magnetic scale align with the radial position of magneto sensor, therefore, can give full play to by each bar line of magnetic resistance pattern arrangement in many imaginary lines extended from the center of keeper towards radial direction time effect.
In addition, for solving above-mentioned second technical matters, rotary encoder of the present invention comprises magneto sensor and has the magnetic scale being configured with N pole and S pole in the circumferential, and the rotation of rotary body relative to fixed body is detected, it is characterized in that, above-mentioned magnetic scale has: the circular sensor magnet forming above-mentioned magnetic track; And be fixed on the circular yoke plate of one side side of the sensor magnet.
In the present invention, because the one side side at sensor magnet is fixed with circular yoke plate, therefore, changes of magnetic field when can detect that sensor magnet rotates relatively in high sensitivity with magneto sensor.In addition, because yoke plate is circular, therefore, if with the outer peripheral portion of above-mentioned yoke plate and inner peripheral portion for benchmark carries out the magnetization to sensor magnet, afterwards, with the outer peripheral portion of yoke plate and inner peripheral portion for benchmark carries out to the installation of rotary body or the aligned in position etc. with sensor unit, even if then the form accuracy of sensor magnet, dimensional accuracy are lower, also magnetic track and magneto sensor aligned in position can be made with higher precision.Therefore, even if when using plastic magnet etc. in the sensor magnet forming magnetic track, detection sensitivity and accuracy of detection are also higher.
In the present invention, it is preferable that, the width dimensions of above-mentioned yoke plate is larger than the width dimensions of the sensor magnet, and the inner peripheral of above-mentioned yoke plate is positioned at the inner side of the inner peripheral of the sensor magnet, and the outer peripheral edges of above-mentioned yoke plate are positioned at the outside of the outer peripheral edges of the sensor magnet.According to said structure, because yoke plate is outstanding from sensor magnet towards the both sides radial direction, therefore, easily carry out the operation of magnetic scale, with the outer peripheral portion of yoke plate or inner peripheral portion for magnetic scale to be installed to the operation etc. of rotary body by benchmark.
In the present invention, it is preferable that, the sensor magnet is magnetized for benchmark with the round-shaped of above-mentioned yoke plate.According to said structure, if with the outer peripheral portion of yoke plate and inner peripheral portion for benchmark carries out the installation etc. towards rotary body, even if then the form accuracy of sensor magnet, dimensional accuracy are lower, also magnetic track and magneto sensor aligned in position can be made with higher precision.
In the present invention, it is preferable that, the sensor magnet is the plastic magnet be shaped by film-form cast gate, above-mentioned film-form cast gate be located at the sensor magnet become the all-round upper of the part of inner peripheral surface or the sensor magnet become the part of outer peripheral face all-round on.According to said structure, owing to there is not parting line in the part becoming inner peripheral surface of sensor magnet or the part place becoming outer peripheral face of sensor magnet, therefore, the reduction etc. of the magnetization precision caused because of above-mentioned parting line can not be produced.
In the present invention, it is preferable that, the sensor magnet is that above-mentioned film-form cast gate side is polished and there is not the plastic magnet of parting line and gate vestiges.That is, it is preferable that, for for the shaping plastic magnet of film-form cast gate, use and wait the magnet after removing gate vestiges as sensor magnet by grinding.That is, it is preferable that, the face of the side that is at least magnetized in two faces of the sensor magnet is ground.
In the present invention, it is preferable that, the sensor magnet is the plastic magnet that the face of the lower side of residual bubble density in two face is magnetized.When using by the shaping plastic magnet of film-form cast gate as sensor magnet, easily produce residual bubble in the position away from cast gate side, above-mentioned residue gas is steeped oneself-meeting and is caused magnetic characteristic when magnetizing to reduce.But if film-form cast gate side magnetized, then or residual bubble non-existent side lower to the density of the residual bubble of magnetization side is magnetized.Therefore, the reduction etc. of magnetization precision is not easily produced because of residual bubble.
In the present invention, it is preferable that, be formed with demoulding cone in the side of the sensor magnet, in this demoulding cone, make the width in the face be magnetized in two of the sensor magnet faces larger than the width in the face of opposite side.When adopting plastic magnet, demoulding cone being set in the side of sensor magnet easily to carry out the demoulding, when adopting film-form cast gate mode, being provided with the demoulding cone making the width of cast gate side become so greatly.Therefore, if cast gate side is set to magnetizing surface, then the or non-existent side of residual bubble lower to the density of residual bubble is magnetized, thus not easily produces the reduction etc. of magnetization precision because of residual bubble.
Invention effect
According to the rotary encoder of the first invention, the keeper maintaining magneto sensor has using the center of keeper as the circumferential section justifying center, and magnetic scale has the circumferential section concentric with magnetic track.Therefore, such as, when magnetic scale being installed on rotary body and sensor unit being installed on fixed body, if make the circumferential section of keeper and the circumferential section aligned in position of magnetic scale, then keeper and magnetic track can be configured concentrically.In addition, under the state that rotary encoder is installed in various equipment, the center of keeper and being centrally located on the rotation center axis of rotary body of magnetic track can be adopted.At this, because magneto sensor is held in keeper, therefore, magneto sensor is higher relative to the positional precision at the center of keeper.Therefore, if make the circumferential section of keeper and the circumferential section aligned in position of magnetic scale, then can magnetic scale reliably and be easily made to align with the radial position of magneto sensor.
In addition, according to the rotary encoder of the second invention, because the one side side at sensor magnet is fixed with circular yoke plate, therefore, the changes of magnetic field of sensor magnet can be detected in high sensitivity with magneto sensor.In addition, because yoke plate is circular, therefore, if with the outer peripheral portion of above-mentioned yoke plate and inner peripheral portion for benchmark carries out the magnetization to sensor magnet, afterwards, with the outer peripheral portion of yoke plate and inner peripheral portion for benchmark carries out the installation etc. to rotary body, even if then the form accuracy of sensor magnet, dimensional accuracy are lower, also magnetic track and magneto sensor aligned in position can be made with higher precision.Therefore, even if when using plastic magnet etc. in the sensor magnet forming magnetic track, detection sensitivity and accuracy of detection are also higher.
Accompanying drawing explanation
Fig. 1 is the key diagram of the basic structure representing rotary encoder of the present invention etc.
Fig. 2 is the key diagram of the concrete structure example representing rotary encoder of the present invention.
Fig. 3 is the key diagram of the sensor unit representing rotary encoder of the present invention.
Fig. 4 is the exploded perspective view of the sensor unit representing rotary encoder of the present invention.
Fig. 5 is the key diagram of the magneto sensor representing rotary encoder of the present invention.
Fig. 6 is the key diagram representing the keeper used in the sensor unit of rotary encoder of the present invention.
Fig. 7 is the key diagram representing the flexible base plate that uses in the sensor unit of rotary encoder of the present invention etc.
Fig. 8 is the key diagram representing form magneto sensor being fixed on keeper in the sensor unit of rotary encoder of the present invention.
Fig. 9 is the key diagram of the magnetic scale representing rotary encoder of the present invention.
(symbol description)
1 rotary encoder
2 magnetic scales
5 sensor units
6 magnetoresistive elements
7 circuit substrates
8 keepers
9 flexible base plates
20 yoke plates
30 sensor magnets
31 magnetic tracks
50 composite base plates
76 printed layers
85 substrate supporting stage portion
86 peristomes
89 limited sections (Japanese: degree is when り portion)
96 conductive patterns
97 insulating protective layers
The ora terminalis of 970 insulating protective layers
The barbed portion (stress easing portion) of 971 insulating protective layers
982 virtual terminals (stress easing portion)
Embodiment
Below, be described with reference to the embodiment of accompanying drawing to application rotary encoder of the present invention.In addition, in rotary encoder, when detecting relative to the rotation of fixed body rotary body, the structure can adopt and magnetic scale is located at fixed body, magneto sensor (sensor unit) is located at rotary body and magneto sensor (sensor unit) is located at fixed body, any one structure magnetic scale is located in the structure of rotary body, but in the following description, so that magneto sensor (sensor unit) is located at fixed body, magnetic scale is located at centered by the structure of rotary body and is described.In addition, in the accompanying drawing of institute's reference below, the structure of magnet and magneto sensor etc. is schematically illustrated.
(basic structure of rotary encoder)
Fig. 1 is the key diagram of the basic structure representing rotary encoder 1 of the present invention etc., Fig. 1 (a) is the key diagram schematically illustrating position relationship between magnetic scale and magneto sensor etc., Fig. 1 (b) is the key diagram of the output signal from magneto sensor, and Fig. 1 (c) represents the key diagram from the relation between the output signal of magneto sensor and the angular position (electrical angle) of rotary body.
As shown in Figure 1, in the rotary encoder 1 of present embodiment, magnetic scale 2 is arranged on and rotates side, and sensor unit 5 is arranged on fixing side.Magnetic scale 2 makes the magnetic track 31 of N pole and S pole alternating magnetization in the circumferential towards the side L1 of shaft axis direction L, and sensor unit 5 is included in the side L1 of the shaft axis direction L magneto sensor 6 (sensor element) relative with magnetic track 31.In the present embodiment, magnetic track 31 is in being formed with Liang Lie road 311,312 side by side with heart shaped.In above-mentioned magnetic track 31, between Liang Liedao 311,312, the position of N pole and S pole offsets in the circumferential, and in the present embodiment, between Liang Liedao 311,312, stagger a pole in the circumferential in N pole and S pole.
In the present embodiment, magneto sensor 6 is magnetoresistive elements, its phase place being included in magnetic track 31 has each other A phase (SIN) magnetic resistance pattern and B phase (COS) the magnetic resistance pattern of 90 ° of phase differential.In above-mentioned magneto sensor (magnetoresistive element), A phase magnetic resistance pattern comprises and has+a phase (SIN+) magnetic resistance pattern 64 that 180 ° of phase differential movements to rotary body detect and-a phase (SIN-) magnetic resistance pattern 62, B phase magnetic resistance pattern and comprise the magnetic resistance pattern 61 with+b phase (COS+) magnetic resistance pattern 63 that 180 ° of phase differential movements to rotary body detect and-b phase (COS-).Magnetic resistance pattern 64 and the-a phase magnetic resistance pattern 62 of+a phase form bridge circuit, and one end is connected with power supply terminal (Vcc), and the other end is connected with ground terminal (GND).In addition, be provided with the terminal (+a) exporting+a phase at the point midway of+a phase magnetic resistance pattern 64, be provided with the terminal (-a) exporting-a phase at the point midway of-a phase magnetic resistance pattern 62.In addition, the magnetic resistance pattern 63 of+b phase and the magnetic resistance pattern 61 of-b phase are also the same with+a phase magnetic resistance pattern 64 and-a phase magnetic resistance pattern 62, form bridge circuit, one end is connected with power supply terminal (Vcc), and the other end is connected with ground terminal (GND).In addition, be provided with the terminal (+b) exporting+b phase at the point midway of+b phase magnetic resistance pattern 63, be provided with the terminal (-b) exporting-b phase at the point midway of-b phase magnetic resistance pattern 61.
The magneto sensor 6 of said structure is configured in the side L1 of the shaft axis direction L position overlapping with the boundary member 313 in road 311,312 adjacent in magnetic track 31.Therefore, the magnetic resistance pattern 61 ~ 64 of magneto sensor 6 can detect the rotating magnetic field that upward direction square in the face of magnetic track 31 changes under the magnetic field intensity more than the saturated sensitive area of the magnetic resistance value of each magnetic resistance pattern 61 ~ 64.That is, on the boundary member 313 in adjacent road 311,312, under the magnetic field intensity more than the saturated sensitive area of the magnetic resistance value of each magnetic resistance pattern 61 ~ 64, the rotating magnetic field that the direction in the face in generation road 311,312 on direction gradually changes in the circumferential.Saturated sensitive area generally refers to the region outside the region that can represent with the formula of " k ∝ H2 " approx with magnetic field intensity H at magnetic resistance value variable quantity k.In addition, principle when detecting rotating magnetic field (rotation of magnetic vector) direction under the magnetic field intensity more than saturated sensitive area utilizes under the state be energized to the magnetic resistance pattern 61 ~ 64 be made up of ferromagnetism metal, when being applied with the saturated magnetic field intensity of magnetic resistance value, between the magnetic resistance value R of the angle θ that magnetic field and direction of current are formed and magnetic resistance pattern 61 ~ 64, there is the relation be expressed from the next.
R＝R0-k×sin2θ
R0: without the magnetic resistance value under magnetic field
K: magnetic resistance value variable quantity (being constant time more than saturated sensitive area)
If detect rotating magnetic field based on above-mentioned principle, then due to angle θ once changing, magnetic resistance value R along sine wave change, therefore, the higher A phase of waveform quality and B phase can be obtained.
In the rotary encoder 1 of said structure, magneto sensor 6 is provided with amplifying circuit 13,14 or CPU10 (computing circuit) etc., this CPU10 carries out interpolation processing or various calculation process to sine wave signal sin, cos of being exported by above-mentioned amplifying circuit 13,14, based on the output from magneto sensor 6, detect that rotary body is relative to the rotational speed of fixed body, sense of rotation, angle position.More particularly, in rotary encoder 1, rotary body often rotates a circle around magnetic pole, just exports sine wave signal sin, the cos shown in Fig. 1 (b) in two cycles from magneto sensor 6.Therefore, after utilizing amplifying circuit 13,14 offset of sinusoidal ripple signal sin, cos to amplify, as shown in Fig. 1 (c), as long as obtain θ=tan by sine wave signal sin, cos in CPU10
-1(sin/cos), the angular position of just known rotary body.
(concrete structure of rotary encoder 1)
Fig. 2 is the key diagram of the concrete structure example representing rotary encoder 1 of the present invention, Fig. 2 (a) is the side view of rotary encoder 1, Fig. 2 (b) is the stereographic map from sensor unit 5 unilateral observation magnetic scale 2, Fig. 2 (c) is the key diagram of the magnetic track 31 of magnetic scale 2, and Fig. 2 (d) is the stereographic map of sensor unit 5.In addition, illustrated in Fig. 2 (d) from the surface of magneto sensor 6 and peeled the state after sealant tape off.Fig. 3 is the key diagram of the sensor unit 5 of rotary encoder 1 of the present invention, Fig. 3 (a) is the vertical view observing sensor unit 5 from the sensor cover side of magneto sensor 6, Fig. 3 (b) is the side view of sensor unit 5, Fig. 3 (c) is the upward view observing sensor unit 5 from the opposition side of sensor cover, and Fig. 3 (d) represents the key diagram peeling the state after sealant tape from the surface of magneto sensor 6 off.Fig. 4 is the exploded perspective view of the sensor unit 5 of rotary encoder 1 of the present invention, Fig. 4 (a) is the stereographic map of the state after being pulled down from keeper by circuit substrate etc. in sensor unit 5, Fig. 4 (b) is the stereographic map of the state after being pulled down from circuit substrate by flexible base plate etc., Fig. 4 (c) is the stereographic map of the state after being launched by flexible base plate, and Fig. 4 (d) is the stereographic map observing the state of circuit substrate from rear side (opposition side of sensor cover).
As shown in Fig. 2 (a), Fig. 2 (b), Fig. 2 (d), in the rotary encoder 1 of present embodiment, magnetic scale 2 and sensor unit 5 are all circular, and be configured on the shaft axis direction L of rotary body relative, and the center O5 of the center O2 of magnetic scale 2 and sensor unit 5 is positioned on the shaft axis direction L of rotary body.
As shown in Fig. 2 (b), magnetic scale 2 comprises: the metal circular yoke plate 20 such as SPPC (cold-rolled steel sheet) and the circular sensor magnet 30 be fixed on this yoke plate 20 surface (side at sensor unit 5 place), as shown in Fig. 2 (c), be provided with on the surface (face 33 be magnetized) of sensor magnet 30 the circular magnetic track 31 extended in the circumferential.Magnetic track 31 by the radial direction side by side and the road 312 in the road 311 of the inner side extended in the circumferential and outside form.Above-mentioned road 311,312 is arranged by utilizing magnetic head to magnetize sensor magnet 30.
As shown in the dotted line of Fig. 2 (b), the surface (face 33 be magnetized) of sensor magnet 30 is provided with the circular screening glass 40 be made up of nonmagnetic substances such as stainless steels.In this example, magnetic track 31 is divided into 90 parts in the circumferential and is alternately magnetized into N pole and S pole, and the angular range that each magnetic pole is magnetized is 4 °.In addition, the flat shape of each S pole and each N pole be width narrow gradually from periphery towards inner circumferential side fan-shaped.In addition, also screening glass 40 can be saved from magnetic scale 2.
As shown in Fig. 2 (a), Fig. 2 (d), Fig. 3 and Fig. 4, sensor unit 5 comprises: the circular keeper 8 be made up of zinc casting or aluminium casting; Be installed on the circuit substrate 7 of the rigidity of this keeper 8 rear side (opposition side of side, magnetic scale 2 place); The flexible base plate 9 be electrically connected with circuit substrate 7; And the magneto sensor 6 to be electrically connected with flexible base plate 9, in magneto sensor 6, the face of magnetic scale 2 side is sensor cover 6a.Circuit substrate 7 is provided with the connector 15 output from circuit substrate 7 being exported to the CPU10 shown in Fig. 1 (a).On the sensor cover 6a of magneto sensor 6, the sealant tape 66 (with reference to Fig. 3 (a)) of metal clad is used as the measure tackling electrical noise, and sensor cover 6a is covered by sealant tape 66.
(the concrete structure example of magneto sensor 8)
Fig. 5 is the key diagram of the magneto sensor 6 of rotary encoder 1 of the present invention, and Fig. 5 (a) is the vertical view of magneto sensor 6, and Fig. 5 (b) is the key diagram of the laminated arrangement of the magnetic resistance pattern schematically illustrated in magneto sensor 6.In addition, in Fig. 5 (a), represent the road 311,312 be oppositely disposed with each magnetic resistance pattern overlapping and with each magnetic resistance pattern.
In Figure 5, + a phase magnetic resistance pattern 64 (SIN+) and+b phase magnetic resistance pattern 63 (COS+) of the magneto sensor 6 that present embodiment uses are formed on the interarea 60a of device substrate 60, using as the first cascade magnetic resistance pattern 601 be laminated across interlayer dielectric, the interarea 60a side of device substrate 60 is sensor cover 6a.It is relative with the boundary member 313 in road 311,312 that+a phase magnetic resistance pattern 64 (SIN+) and+b phase magnetic resistance pattern 63 (COS+) are configured to respective center on the radial direction of magnetic track 31, and in the circumference of magnetic track 31, be configured in that to make+a phase detected by+a phase magnetic resistance pattern 64 (SIN+) and+b detected by+b phase magnetic resistance pattern 63 (COS+) be mutually the minimum mechanical angular deviation position of minimum phase difference.That is ,+a phase magnetic resistance pattern 64 (SIN+) and+b phase magnetic resistance pattern 63 (COS+) are configured in and can go out the angle position of the phase co-wavelength obtained from magnetic track 2 with the phase difference detection of 90 °.In this example ,+a phase magnetic resistance pattern 64 (SIN+) is configured on the position of the circumferential upper deviation 1 ° with+b phase magnetic resistance pattern 63 (COS+).In addition, in the present embodiment, as shown in Fig. 5 (b), the interarea 60a of device substrate 60 is formed with+b phase magnetic resistance pattern 63 (COS+), and+a phase magnetic resistance pattern 64 (SIN+) is layered on+b phase magnetic resistance pattern 63 (COS+).In addition, minimum phase difference is the phase differential of 90 °, and+a phase magnetic resistance pattern 64 (SIN+) also can be conversely with the upper and lower relation of+b phase magnetic resistance pattern 63 (COS+).
-a phase magnetic resistance pattern 62 (SIN-) and-b phase magnetic resistance pattern 61 (COS-) the same with+a phase magnetic resistance pattern 64 (SIN+) and+b phase magnetic resistance pattern 63 (COS+), as the be laminated across interlayer dielectric second stacked magnetic resistance pattern 602 on the interarea 60a being also formed in device substrate 60.It is relative with the boundary member 313 in road 311,312 that-a phase magnetic resistance pattern 62 (SIN-) and-b phase magnetic resistance pattern 61 (COS-) are configured to respective center on the radial direction of magnetic track 31, and in the circumference of magnetic track 31, be configured in that to make-a phase detected by-a phase magnetic resistance pattern 62 (SIN-) and-b detected by-b phase magnetic resistance pattern 61 (COS-) be mutually the minimum mechanical angular deviation position of minimum phase difference.That is ,-a phase magnetic resistance pattern 62 (SIN-) and-b phase magnetic resistance pattern 61 (COS-) are configured in and can go out the angle position of the phase co-wavelength obtained from magnetic track 2 with the phase difference detection of 90 °.In this example ,-a phase magnetic resistance pattern 62 (SIN-) is configured on the position of the circumferential upper deviation 1 ° with-b phase magnetic resistance pattern 61 (COS-).In addition, in the present embodiment, as shown in Fig. 5 (b), the interarea 60a of device substrate 60 is formed with-a phase magnetic resistance pattern 62 (COS-), and-b phase magnetic resistance pattern 61 (SIN-) is layered on-a phase magnetic resistance pattern 62 (COS-).In addition, minimum phase difference is the phase differential of 90 °, and-a phase magnetic resistance pattern 62 (SIN-) also can be conversely with the layered relationship of-b phase magnetic resistance pattern 61 (COS-).
Then, first cascade magnetic resistance pattern 601 and the second stacked magnetic resistance pattern 602 are configured in the circumferential on nonoverlapping position.In more detail, first cascade magnetic resistance pattern 601 and the second folded magnetic resistance pattern 602 are configured in upper/lower positions, + a the phase that this position is detected by first cascade magnetic resistance pattern 601+a phase magnetic resistance pattern 64 (SIN+) and-a detected by-a phase magnetic resistance pattern 62 (SIN-) of the second stacked magnetic resistance pattern 602 form the position of the phase differential of 180 ° mutually, and+b the phase detected by first cascade magnetic resistance pattern 601+b phase magnetic resistance pattern 63 (COS+) and-b that detected by-b phase magnetic resistance pattern 61 (COS-) of the second stacked magnetic resistance pattern 602 form the position of the phase differential of 180 ° mutually.And, first cascade magnetic resistance pattern 601 and the second stacked magnetic resistance pattern 602 be configured in separate the minor increment that electrical interference or magnetic interference can not occur angle position on.In this example ,+a phase magnetic resistance pattern 64 (SIN+) of first cascade magnetic resistance pattern 601 is configured to depart from the circumferential on the position of 22 ° with-a phase magnetic resistance pattern 62 (SIN-) of the second stacked magnetic resistance pattern 602.+ b phase magnetic resistance pattern 63 (COS+) of first cascade magnetic resistance pattern 601 is configured to depart from the circumferential on the position of 22 ° with-b phase magnetic resistance pattern 61 (COS-) of the second stacked magnetic resistance pattern 602 similarly.
At this, each magnetic resistance pattern 61 ~ 64 is not parallel to each other, but be positioned at many imaginary lines radially extending from the center O8 (the center O5 of sensor unit 5) of the keeper 8 shown in Fig. 3 etc., and extend along the radial direction of keeper 8 and sensor unit 5.By utilizing semiconductor technology by magnetic film-stack such as ferromagnetic NiFe on the device substrate 60 be made up of glass or silicon, thus form above-mentioned magnetic resistance pattern 61 ~ 64.Device substrate 60 is rectangle, and each magnetic resistance pattern 61 ~ 64 is formed in the middle section of device substrate 60.Be formed with multiple terminal 68 in the end of device substrate 60 along a long limit, above-mentioned terminal 68 can be used for being electrically connected with flexible base plate 9 as shown in Figure 4, etc.In addition, each magnetic resistance pattern 61 ~ 64 is covered by for avoiding the protective seams (not shown) such as epoxy resin that terminal 68 formed, and above-mentioned protective seam is such as formed by serigraphy.
(detailed construction of circuit substrate 7)
As shown in Figure 4, circuit substrate 7 has roughly corresponding to the peripheral shape of keeper 8 shape, is formed with circular hole 78 in central authorities.Foregoing circuit substrate 7 is the rigid substrates such as Glass-Epoxy substrate, overlaps in the rear side of keeper 8, and is fixed to keeper 8 by screw.Therefore, the multiple holes 77 screwed for screw are formed at the outer circumferential side of circuit substrate 7.
In circuit substrate 7, the first substrate face 71 being positioned at keeper 8 side is provided with electronic devices and components 79 and the connector 15 of the amplifying circuit 13,14 shown in pie graph 1 (a) etc.In addition, near the circular hole 78 in the first substrate face 71 of circuit substrate 7, position is formed with multiple terminal (circuit substrate side terminal), and these terminals can be used for being electrically connected with flexible base plate 9.Waiting to describe hereinafter with reference to Fig. 7 uses above-mentioned terminal 73 to carry out the connection with flexible base plate 9.In the present embodiment, as terminal 73, be formed with eight altogether, six terminals 731 that amount in above-mentioned terminal (circuit substrate side terminal) 73 except both sides terminal 732 can be used for being electrically connected with flexible base plate 9.To this, the terminal 732 of both sides to be connected with flexible base plate 9 by scolding tin but not with the virtual terminal in being electrically connected.The width dimensions of above-mentioned virtual terminal 732 is larger than the width dimensions of other six terminals 731, and is configured in the slightly outside by radial direction of other six terminals 731.
Circuit substrate 7 is double-sided substrates, the second substrate face 72 of the opposition side of side, keeper 8 place is formed with various Wiring pattern, but in the very large region comprising the region being formed with Wiring pattern, covering the protective layer (Japanese: レ ジ ス ト of Wiring pattern
) surface be also formed with the printed layers 76 (with the region that grey represents in Fig. 3 (c) and Fig. 4 (d)) of insulativity.
(detailed construction of keeper 8)
Fig. 6 is the key diagram of the keeper 8 used in the sensor unit 5 of rotary encoder 1 of the present invention, Fig. 6 (a) is the vertical view observing keeper 8 from sensor cover 6a side, Fig. 6 (b) is the side view of keeper 8, Fig. 6 (c) is the upward view observing keeper 8 from the opposition side of sensor cover 6a, the peristome periphery configured for magneto sensor 6 is amplified the vertical view represented by Fig. 6 (d), and Fig. 6 (e) is E-E ' cut-open view.
As shown in Fig. 2, Fig. 3, Fig. 4 and Fig. 6, keeper 8 is in having circular dish (tray) shape on the whole, and its main part is made up of circular plate-like portion 80.Plate-like portion 80 is formed with circular medium pore 82, and the outer peripheral portion 81 of plate-like portion 80 is in the circle concentric with medium pore 82.Therefore, keeper 8 comprises with the center O8 of keeper 8 for the outer peripheral portion 81 (circumferential section) of the arc-shaped at circle center with the inner peripheral portion 82a (circumferential section) of the center O8 of keeper 8 for the circle at circle center.
In addition, the rear side that keeper 8 is included in plate-like portion 80 supports the substrate supporting stage portion 85 in the first substrate face 71 of circuit substrate 7 partly, in Fig. 6 (c), the part being equivalent to substrate supporting stage portion 85 is expressed as the region of grey.Aforesaid substrate supporting stage portion 85 is positioned at the position slightly higher than other region of plate-like portion 80 rear side, in the rear side of plate-like portion 80, in more shallow recess when the region not being formed with substrate supporting stage portion 85 is observed from substrate supporting stage portion 85.Therefore, when circuit substrate 7 overlap is fixed on the rear side of keeper 8, between the rear side of plate-like portion 80 and the first substrate face 71 of circuit substrate 7, guarantee there is narrower gap.
In keeper 8, plate-like portion 80 is formed with the substantially rectangular peristome 86 being configured in inner side for magneto sensor 6, is being formed with the breach 87 being configured in inner side for connector 15 relative to peristome 86 across outer peripheral portion 81 place of the position, opposition side of center O8.
In above-mentioned keeper 8, the edge of the center O8 side in the inner peripheral portion of peristome 86 is as the limited section 89 for carrying out magneto sensor 6 location diametrically.In addition, keeper 8 is formed with outstanding two teats 881,882 of the inner side mode respect to one another towards peristome 86.Teat 881,882 is formed at the half-way on the thickness direction of plate-like portion 80 in the mode with the size thinner than the size of plate-like portion 80, the upper surface of teat 881,882 is in lower position when the face side of keeper 8 is observed.With reference to Fig. 8 also as described later, above-mentioned teat 881,882 positions magneto sensor 6 in a thickness direction and supplies the part that magneto sensor 6 utilizes bonding agent fixing.
(detailed construction of flexible base plate 9)
Fig. 7 is the key diagram of flexible base plate 9 grade used in the sensor unit 5 of rotary encoder 1 of the present invention, Fig. 7 (a) is the vertical view of flexible base plate 9, Fig. 7 (b) is the vertical view of position relationship each other when being connected with flexible base plate 9 with circuit substrate 7 by magneto sensor 6, Fig. 7 (c) is the cut-open view after scolding tin connects, and Fig. 7 (d) is the cut-open view representing state flexible base plate 9 being bent to U-shaped.
As shown in Figure 7, flexible base plate 9 has rectangular flat shape, and is formed with linearly extended in the longitudinal direction multiple conductive pattern 96.In addition, in flexible base plate 9, the base ends 9s of length direction side is provided with along the Width of flexible base plate 9 the multiple terminals (flexible base plate side terminal) 98 be connected with circuit substrate 7, and on the base ends 9t of length direction opposite side, is provided with the multiple terminals (flexible base plate side terminal) 99 be connected with magneto sensor 6 along the Width of flexible base plate 9.
In the present embodiment, conductive pattern 96 amounts to formation six, and terminal 99 amounts to formation eight.Namely, total six terminals 991 in eight terminals (flexible base plate side terminal) 99 except the terminal 992 of both sides can be used for being electrically connected with magneto sensor 6, and the terminal 992 of both sides utilizes scolding tin to be connected with magneto sensor 6 but do not have with the virtual terminal be electrically connected (Japanese: ダ ミ mono-terminal).Therefore, six terminals 991 form the end as conductive pattern 96, but two of both sides terminals 992 are connected with conductive pattern 96.
In addition, terminal 98 is the same with terminal 99, also formation eight is amounted to, six terminals 981 that amount in eight terminals (flexible base plate side terminal) 98 except the terminal 982 of both sides are connected for being electrically connected with circuit substrate 7 with six terminals 731 of circuit substrate 7, and two of both sides terminals 982 are the virtual terminals utilizing scolding tin to be connected with the virtual terminal 732 of circuit substrate 7.Therefore, six terminals 981 form the end as conductive pattern 96, but two of both sides terminals 982 are connected with conductive pattern 96.
The flexible base plate 9 of said structure has insulativity base material film 95, the multiple conductive patterns 96 be formed on a face of base material film 95, covers the single substrate of the insulating protective layer 97 on the surface of multiple conductive pattern 96, in first substrate face 91 and second substrate face 92, be only formed with conductive pattern 96 and terminal 98,99 in side, first substrate face 91.At this, for avoiding base ends 9s, 9t of length direction two side of flexible base plate 9 and forming insulating protective layer 97.That is, the edge that insulating protective layer 97 is formed in apart from flexible base plate 9 at the base ends 9s of side has on the position of given size, and the ora terminalis 970 of insulating protective layer 97 and edge abreast straight line extend.Therefore, six terminals 981 are made up of the part exposed from insulating protective layer 97 in conductive pattern 96.In addition, the edge that insulating protective layer 97 is also formed in apart from flexible base plate 9 at the base ends 9t of opposite side has on the position of given size, and six terminals 982 are made up of the part exposed from insulating protective layer 97 in conductive pattern 96.In addition, conductive pattern 96 is made up of copper foil pattern, implements the plating such as zinc-plated, copper facing to the surface of copper foil pattern of the part being equivalent to terminal 98,99.
When magneto sensor 6 is electrically connected with the flexible base plate 9 of said structure, on the base ends 9t of flexible base plate 9, scolding tin 67 is utilized to be connected with the terminal 68 of magneto sensor 6 by the terminal 99 of flexible base plate 9 to make first substrate face 91 state relative with the interarea 60a side (sensor cover 6a side) of the device substrate 60 that magneto sensor 6 uses.
In addition, when flexible base plate 9 is electrically connected with circuit substrate 7, on the base ends 9s of flexible base plate 9, by scolding tin 90, the terminal 98 of flexible base plate 9 is connected with the terminal 73 of circuit substrate 7.Now, flexible base plate 9 is single substrate, and, need flexible base plate 9 to be bent to U-shaped to make the face side of sensor cover 6a towards keeper 8 of magneto sensor 6.
Therefore, in the present embodiment, when being electrically connected with circuit substrate 7 by flexible base plate 9, first, the base ends 9s of the side of flexible base plate 9 overlaps on circuit substrate 7 with the form of the side, first substrate face 91 making terminal 98 and expose towards the opposition side of side, circuit substrate 7 place.In this case, the terminal 73 of circuit substrate 7 is in the state exposed from the base ends 9s of flexible base plate 9, and the terminal 98 of flexible base plate 9 has relation relative one by one and linearly arrangement with the terminal 73 of circuit substrate 7.In this case, scolding tin 90 is arranged to cross over terminal 73,98, and by scolding tin 90, terminal 73 is connected with terminal 98.
In this way flexible base plate 9 is connected with circuit substrate 7 and forms composite base plate 50.Therefore, the signal exported from magneto sensor 6 is output to circuit substrate 7 via flexible base plate 9, and after the amplifying circuit 13,14 be formed on circuit substrate 7 amplifies, is output to CPU10 via connector 15.Therefore, owing to not needing to export by connector 15 the faint simulating signal exported from magneto sensor 6, therefore, signal is there will not be to be deteriorated.In addition, because magneto sensor 6 is connected with flexible base plate 9, therefore, having just can towards advantages such as the face side of keeper 8 by making flexible base plate 9 bend.
(reinforcement to flexible base plate 9)
In the sensor unit 5 be illustrated with reference to Fig. 7 etc. and composite base plate 50; at the base ends 9s place of flexible base plate 9 side; the edge that insulating protective layer 97 is formed in apart from flexible base plate 9 has on the position of given size, and the ora terminalis 970 of insulating protective layer 97 and edge abreast straight line extend.In addition, flexible base plate 9 bends to U-shaped between base ends 9s, 9t.Therefore, be applied to the stress on flexible base plate 9 and concentrate along the ora terminalis 970 of insulating protective layer 97, thus may occur that break at ora terminalis 970 place such unfavorable condition or flexible base plate 9 of conductive pattern 96 breaks at ora terminalis 970 place such unfavorable condition.
Therefore; in the present embodiment; as illustrated hereinafter with reference to Fig. 7; the extended line of the ora terminalis 970 of the insulating protective layer 97 at the both ends place on the Width of flexible base plate 9 is provided with stress easing portion; this stress easing portion relaxes bending stress concentrating, to prevent from occurring unfavorable condition at ora terminalis 970 place to ora terminalis 970.
First; in the present embodiment; as relaxing the stress easing portion concentrated of bending stress to the ora terminalis 970 of insulating protective layer 97, the extended line of the ora terminalis 970 of the insulating protective layer 97 at the both ends place of the Width of flexible base plate 9 is provided with the barbed portion 971 (the non-formation part/stress easing portion of insulating protective layer 97) of insulating protective layer 97.At this, the barbed portion 971 of insulating protective layer 97 is cut into bending shaped depressions.Therefore, when stress is applied to flexible base plate 9, the barbed portion 971 that above-mentioned stress is located at the insulating protective layer 97 at Width both ends absorbs, thus can relax stress and transmit strongly along the ora terminalis 970 of insulating protective layer 97 is linearly.And; barbed portion 971 due to insulating protective layer 97 is cut into bending shaped depressions; therefore; when stress is applied to flexible base plate 9; above-mentioned stress is absorbed along the shape that barbed portion 971 is bending, thus effectively can relax stress and transmit strongly along the ora terminalis 970 of insulating protective layer 97 is linearly.Therefore, conductive pattern 96 can be prevented in situations such as ora terminalis 970 place's cut-outs of insulating protective layer 97.
In addition; in the present embodiment; as relaxing the stress easing portion concentrated of bending stress to the ora terminalis 970 of insulating protective layer 97, the extended line of the ora terminalis 970 of the insulating protective layer 97 at the both ends place of the Width of flexible base plate 9 is provided with two virtual terminals (the virtual terminal of flexible base plate 9 side) 982 (the stress easing portion) that be positioned at both sides that be not used as and be electrically connected with circuit substrate 7.And the virtual terminal 982 of flexible base plate 9 is fixed by scolding tin 90 and two the virtual terminals (the virtual terminal of circuit substrate 7 side) 732 being positioned at circuit substrate 7 both sides.Therefore; when stress is applied to flexible base plate 9; because above-mentioned stress is disperseed by the virtual terminal 732 of the virtual terminal 982 of flexible base plate 9 side and circuit substrate 7 side, therefore, effectively can relax stress to transmit strongly along the ora terminalis 970 of insulating protective layer 97 is linearly.Therefore, conductive pattern 96 can be prevented in situations such as ora terminalis 970 place's cut-outs of insulating protective layer 97.
(location structure of magneto sensor 6)
Fig. 8 is the key diagram representing the state after magneto sensor 6 being fixed on keeper 8 in the sensor unit 5 of rotary encoder 1 of the present invention, Fig. 8 (a) is the vertical view of the state after being fixed by magneto sensor 6 of observing from face side, and Fig. 8 (b) is the key diagram of the state after being fixed by magneto sensor 6 of observing from rear side.
In the present embodiment, the flexible base plate 9 illustrated with reference to Fig. 7 bends to U-shaped to make the surface of sensor cover 6a towards keeper 8 of magneto sensor 6, and in this case magneto sensor 6 is fixed to keeper 8.Specifically, as shown in Fig. 7 (d), flexible base plate 9 is bent to U-shaped, as shown in Figure 8, magneto sensor 6 is configured in the peristome 86 of keeper 8.Now, magneto sensor 6 is overlapped the upper surface of the teat 881,882 of keeper 8.In this case, on magneto sensor 6, effect has the elastic force of flexible base plate 9, and magneto sensor 6 is exerted a force by the center O8 towards keeper 8.Consequently, magneto sensor 6 abuts with the limited section 89 of keeper 8, carries out the location of magneto sensor 6.Therefore, to abut with the limited section 89 of keeper 8 and by under the state of locating at magneto sensor 6, as long as make bonding agent 28 apply in the mode of crossing over teat 881,882 and magneto sensor 6 and solidify, magneto sensor 6 just can be fixed on the assigned position in the radial direction of keeper 8.Therefore, many imaginary lines each magnetic resistance pattern 61 ~ 64 be illustrated with reference to Fig. 5 being positioned at extend from the center O8 (the center O5 of sensor unit 5) of keeper 8 towards radial direction.
(detailed construction of magnetic scale 2)
Fig. 9 is the key diagram of the magnetic scale of rotary encoder 1 of the present invention, Fig. 9 (a) is the vertical view of magnetic scale, Fig. 9 (b) is the cut-open view of magnetic scale, Fig. 9 (c) is the vertical view of sensor magnet, Fig. 9 (d) is the vertical view of yoke plate, Fig. 9 (e) be shaping after the key diagram of sensor magnet of (before grinding).As being described with reference to Fig. 2 (b), in the rotary encoder 1 of present embodiment, magnetic scale 2 comprises circular yoke plate 20 and is fixed on the circular sensor magnet 30 of this yoke plate 20 surface (sensor unit 5 side).As shown in Figure 9, the width dimensions of yoke plate 20 is larger than the width dimensions of sensor magnet 30, and the inner peripheral portion 21 of yoke plate 20 is positioned at the inner side of the inner peripheral 35 of sensor magnet 30, and the outer peripheral portion 22 of yoke plate 20 is positioned at the outside of the outer peripheral edges 32 of sensor magnet 30.Therefore, the circular outer circumference of magnetic scale 2 and circular inner peripheral are equivalent to inner peripheral portion 21 and the outer peripheral portion 22 of yoke plate 20.
In the magnetic scale 2 of said structure, sensor magnet 30 is magnetized for benchmark with the round-shaped of yoke plate 20.More particularly, utilizing bonding agent by being molded into after circular magnetic is fixed on yoke plate 20, by grinding the surface of magnetic, after this carrying out magnetization to form magnetic track 31, thus forming sensor magnet 30.When carrying out above-mentioned magnetization, in the present embodiment, magnetize for benchmark with the round-shaped of the yoke plates 20 such as the inner peripheral portion 21 of yoke plate 20 or outer peripheral portion 22, instead of round-shaped for benchmark with sensor magnet 30 (magnetic).Therefore, in magnetic scale 2, the inner peripheral portion 21 of magnetic track 31 and yoke plate 20 and outer peripheral portion 22 are in same heart shaped.
At this, sensor magnet 30 is by the plastic magnet of thermoplastic resin material (plastic material) mixed-formings such as the magnetics such as ferrite (magnet raw material) and PPS (polyphenylenesulfide: polyphenylene sulfide).In the present embodiment, sensor magnet 30 is plastic magnets shaping by film-form cast gate (filmgate) (flash formula cast gate (flashgate)) in various plastic magnet.Undertaken by above-mentioned film-form cast gate shaping in, use film-form (membranaceous) cast gate, and this film-form cast gate is arranged on the part of the inner peripheral surface as circular sensor magnet 30 all-round after carry out shaping.Therefore, there is not parting line (partingline) in the face 34 of the opposition side in the face 33 of the side that is magnetized of the sensor magnet 30 of present embodiment and the face 33 of the side that is magnetized.In addition, when using film-form cast gate, as in Fig. 9 (e) by represented by the position arrow G of cast gate, the cast gate place of the ora terminalis of the inner peripheral surface of sensor magnet 30 after formation all-round on there is gate vestiges 39.Therefore, in the present embodiment, sensor magnet 30, after passing through film-form cast gate and be shaping, grinds side, the face entirety at cast gate place, removes gate vestiges.Therefore, no matter whether sensor magnet 30 is plastic magnets, all gate vestiges can not be there is.In addition, in two faces of sensor magnet 30, the flatness in the face 33 of the side that is magnetized is higher than the flatness in the face 34 of opposition side.But, for sensor magnet 30, as long as at least grind the face 33 be magnetized, also all can grind two of sensor magnet 30 face.
In addition, when removing gate vestiges, also there is the method removed by the inside surface that fixture etc. inserts sensor magnet 30.But now, owing to also may there is breach (breakage) on the end face of sensor magnet 30 while removing gate vestiges, therefore, in this, it is ideal for grinding side, the face entirety at cast gate place in sensor magnet 30.In addition, as long as owing to grinding side, the face entirety at cast gate place in sensor magnet 30, the higher even surface of flatness just can be obtained, therefore, there is the advantage that above-mentioned even surface can be utilized as magnetizing surface.
At this, the cast gate side of sensor magnet 30 is ground, and the face after grinding is magnetized.Therefore, when shaping by film-form cast gate, even if be mixed into bubble, lower owing to remaining bubble density at side place, cast gate place, bubble density is remained higher in the opposite sides of side, cast gate place, therefore, the sensor magnet 30 of present embodiment is the plastic magnet after the face of the residual lower side of bubble density in two faces of sensor magnet 30 is magnetized.In addition, owing to grinding the cast gate side of sensor magnet 30, and the face after grinding is magnetized, therefore, at medial surface and lateral surface formation demoulding cone (Japanese: order I テ mono-パ) of sensor magnet 30, this demoulding cone makes the width in the face 33 be magnetized in two of sensor magnet 30 faces be formed as wider than the width in the face 34 of opposition side.In addition, film-form cast gate also can be located at the outer peripheral edges of sensor magnet 30 sometimes.
(main efficacy results of present embodiment)
As mentioned above, in the rotary encoder 1 of present embodiment, it is the circumferential section (inner peripheral portion 82a and outer peripheral portion 81) justifying center that the keeper 8 of sensor unit 5 comprises with the center O8 of the center O5 of sensor unit 5 and keeper 8, and magnetic scale 2 comprises with magnetic track 31 in concentric circumferential section (inner peripheral portion 21 of yoke plate 20 and outer peripheral portion 22).Therefore, when magnetic track 2 being installed on rotary body, sensor unit 5 being installed on fixed body, if use fixture by the circumferential section aligned in position of the circumferential section of keeper 8 and magnetic scale 2, then keeper 8 and sensor unit 5 and magnetic track 31 can be configured concentrically.In addition, under the state that rotary encoder 1 is installed in various equipment, the state be centrally located on the rotation center axis L of rotary body making the center O8 of keeper 8 and magnetic track 31 can also easily be formed.At this, because magneto sensor 6 remains on keeper 8, therefore, magneto sensor 6 is high relative to the positional precision of the center O8 of keeper 8.Therefore, if make the circumferential section of keeper 8 and the circumferential section aligned in position of magnetic scale 2, then can magnetic scale 2 reliably and be easily made to align with the radial position of magneto sensor 6.
In addition, keeper 8 comprises the limited section 89 limited the radial position of magneto sensor 6, and flexible base plate 9 bends to the shape producing the acting force that magneto sensor 6 is abutted with limited section 89.Therefore, when assembling sensor unit 5, reliably magneto sensor 6 can be configured in the assigned position in the radial direction of keeper 8.Therefore, if correctly make keeper 8 and magnetic scale 2 aligned in position, then can magnetic scale 2 reliably and be easily made to align with the radial position of magneto sensor 6.Particularly in the present embodiment, magneto sensor 6 is magnetoresistive elements that each bar line in many imaginary lines extended towards radial direction from the center O8 of keeper 8 comprises magnetic resistance pattern 61 ~ 64.So because magnetic resistance pattern 61 ~ 64 is in corresponding direction better for the magnetizing pattern of magnetic track 31, therefore, not only can not improve sensitivity, on the contrary when the radial position offset of magnetic scale 2 with magneto sensor 6, sensitivity can obviously reduce.But effect when according to the present invention, owing to can reliably make magnetic scale 2 align with the radial position of magneto sensor 6, therefore, can give full play on each bar line many imaginary lines magnetic resistance pattern 61 ~ 64 being configured in and extending from the center O8 of keeper 8 towards radial direction.
In addition, in sensor unit 5, keeper 8 comprises: carry out local support to the first substrate face 71 of circuit substrate 7 and between the plate-like portion 80 and first substrate face 71 of keeper 8, guarantee the substrate supporting stage portion 85 in gap and be configured in the peristome 86 of inner side for magneto sensor 6.Therefore, even if circuit substrate 7 to be overlapped the rear side of keeper 8, the interference of electronic devices and components 79 and keeper 8 also can not occur, and magneto sensor 6 is not overlapping with keeper 8.Therefore, the slimming of sensor unit 5 can be realized.
In addition, circuit substrate 7 is double-sided substrates, but the surface of the protective layer in second substrate face 72 is also provided with the printed layers 76 of insulativity, therefore, such as when sensor unit 5 is installed on metal fixed body, even if relative under such circumstances with the second substrate face 72 of circuit substrate 7 at metal fixed body, also can guarantee there is higher dielectric voltage withstand between circuit substrate 7 and fixed body.
In addition, in the rotary encoder 1 of present embodiment, magnetic scale 2 has the circular yoke plate 20 of the circular sensor magnet 30 forming magnetic track 31 and the side, a face being fixed on sensor magnet 30.Therefore, changes of magnetic field when can detect that sensor magnet 30 rotates in high sensitivity with magneto sensor 6.In addition, because yoke plate 20 is in circular, therefore, if with the outer peripheral portion 22 of above-mentioned yoke plate 20 and inner peripheral portion 21 for benchmark carries out the magnetization to sensor magnet 30, afterwards, with the outer peripheral portion 22 of yoke plate 20 and inner peripheral portion 21 for benchmark carries out to the installation of rotary body or the aligned in position etc. with sensor unit 5, even if then the form accuracy of sensor magnet 30, dimensional accuracy are lower, magnetic track 31 and magneto sensor 6 aligned in position also can be made with higher precision.Therefore, even if when using plastic magnet etc. in the sensor magnet 30 forming magnetic track 31, detection sensitivity and accuracy of detection are also higher.And the width dimensions of yoke plate 20 is larger than the width dimensions of sensor magnet 30, and the inner peripheral portion 21 of yoke plate 20 is positioned at the inner side of the inner peripheral 35 of sensor magnet 30, and the outer peripheral portion 22 of yoke plate 20 is positioned at the outside of the outer peripheral edges 32 of sensor magnet 30.Thus, because the circular outer circumference of magnetic scale 2 and circular inner peripheral are equivalent to inner peripheral portion 21 and the outer peripheral portion 22 of yoke plate 20, therefore, easily carry out the operation of magnetic scale 2, with the outer peripheral portion 22 of yoke plate 20 or inner peripheral portion 21 for magnetic scale 2 to be installed to the operation etc. of rotary body by benchmark.
In addition, because sensor magnet 30 is by the shaping plastic magnet of film-form cast gate, therefore, there is not parting line in the face 34 of the opposition side in the face 33 of the side that is magnetized of sensor magnet 30 and the face 33 of the side that is magnetized.Therefore, can not occur to cause magnetization precision reduction etc. because of parting line.In addition, the cast gate side of sensor magnet 30 is ground, and the face after grinding is magnetized.Therefore, in sensor magnet 30, not easily there is the magnetization precision reduction etc. because gate vestiges, residual bubble cause.
In addition; in the rotary encoder 1 of present embodiment; use the composite base plate 50 that flexible base plate 9 is connected with circuit substrate 7; in above-mentioned composite base plate 50, the extended line of the ora terminalis 970 of the insulating protective layer 97 at the both ends place on the Width of flexible base plate 9 is provided with barbed portion 971 and virtual terminal (the virtual terminal of flexible base plate 9 side) the 982 equal stress easing portion of insulating protective layer 97.Therefore; when stress is applied to flexible base plate 9; bending stress can be concentrated along the ora terminalis 970 of insulating protective layer 97; but above-mentioned stress is relaxed by the barbed portion 971 of insulating protective layer 97 and virtual terminal 982 equal stress easing portion, thus bending stress can be avoided to concentrate on the ora terminalis 970 of insulating protective layer 97.Therefore, conductive pattern 96 can be prevented in situations such as ora terminalis 970 place's cut-outs of insulating protective layer 97.
Particularly, in the present embodiment, the barbed portion 971 due to insulating protective layer 97 is cut into bending shaped depressions, therefore, can relax stress more reliably and transmit strongly along the ora terminalis 970 of insulating protective layer 97 is linearly.Therefore, conductive pattern 96 can be prevented more reliably in situations such as ora terminalis 970 place's cut-outs of insulating protective layer 97.
In addition; in the present embodiment; because flexible base plate 9 is bent to U-shaped; therefore, easily larger stress is applied to flexible base plate 9 because of torsion now etc., but in the present embodiment; owing to being provided with barbed portion 971 and virtual terminal (the virtual terminal of flexible base plate 9 side) the 982 equal stress easing portion of insulating protective layer 97; therefore, conductive pattern 96 can be prevented in situations such as ora terminalis 970 place's cut-outs of insulating protective layer 97, thus can higher reliability be obtained.
In addition, in the sensor unit 5 and composite base plate 50 of present embodiment, when flexible base plate 9 is electrically connected with circuit substrate 7, the base ends 9s of the side of flexible base plate 9 overlaps on circuit substrate 7 with the side, first substrate face 91 making terminal 98 and expose towards the form of the opposition side of side, circuit substrate 7 place, and in this case, scolding tin 90 is arranged to cross over terminal 73,98, and by scolding tin, terminal (circuit substrate side terminal) 73 is connected with terminal (flexible base plate side terminal) 98.Therefore, even if there is restriction because flexible base plate 9 is the reasons such as single substrate to the direction of flexible base plate 9, also flexible base plate 9 can be electrically connected with circuit substrate 7.
[other embodiment]
In the above-described embodiment, the example mounted as magneto sensor to magnetoresistive element is illustrated, but also can be suitable for and be provided with Hall element or be provided with the situation that magnetoresistive element and Hall element are used as magneto sensor simultaneously.
In the above-described embodiment, use plastic magnet as sensor magnet 30, but for sensor magnet 30, sintered magnet or rubber magnet also can be used to replace plastic magnet.Sintered magnet refers to and is baked by magnetic shaping, and elastomeric material and magnetic mixed-forming form by rubber magnet.In addition, in the above-described embodiment, use ferrite as magnetic, but also can use neodymium or samarium etc.
In the above-described embodiment, exemplified with the situation being used for being electrically connected by scolding tin, but also anisotropic conductive film or metal bond etc. can be utilized.
In the above-described embodiment, remove gate vestiges from sensor magnet 30, but also can will produce the opposition side of gate vestiges side as magnetizing surface while keeping gate vestiges.
Claims (15)
1. a rotary encoder, detects the rotation of rotary body relative to fixed body, it is characterized in that, comprising:
Magnetic scale, this magnetic scale has the magnetic track being configured with N pole and S pole in the circumferential; And
Sensor unit, this sensor unit is configured at position relative with described magnetic scale on the rotation center axis direction of described rotary body, and in described sensor unit, magneto sensor is held in keeper,
Described keeper has the circumferential section using the center of described keeper as circle center,
Described magnetic scale has the circumferential section concentric with described magnetic track,
Described sensor unit has the circuit substrate of rigidity, this circuit substrate is under the state making the first substrate being provided with electronic devices and components in first substrate face and second substrate face facing to described keeper, the rear side contrary with the face side at described magnetic scale place is configured in overlappingly in described keeper
Described keeper comprises:
Plate-like portion, this plate-like portion is relative with described circuit substrate;
Substrate supporting stage portion, this substrate supporting stage portion is first substrate face described in the described rear side local support of described plate-like portion, thus guarantees gap between described plate-like portion and described first substrate face; And
Peristome, this peristome is formed at described plate-like portion, for described magneto sensor being configured in inner side.
2. rotary encoder as claimed in claim 1, is characterized in that,
The center of described keeper and being centrally located on the rotation center axis of described rotary body of described magnetic track.
3. rotary encoder as claimed in claim 1, is characterized in that,
Described sensor unit comprises the flexible base plate being provided with described magneto sensor,
Described keeper comprises the limited section limited the radial position of described magneto sensor,
Described flexible base plate bends to the shape that can produce the acting force that described magneto sensor is abutted with described limited section.
4. rotary encoder as claimed in claim 3, is characterized in that,
Described magneto sensor is formed the device substrate stating magnetic resistance pattern to some extent formed by multiple magnetic resistance pattern and interarea shape,
Described keeper is formed the peristome for described magneto sensor being configured in inner side,
In the inner peripheral portion of described peristome, the edge of the center side of described keeper is divided as described limited section.
5. rotary encoder as claimed in claim 4, is characterized in that,
Inner side towards described peristome is formed with the outstanding multiple teats of mode respect to one another in the inner peripheral portion of described peristome,
Described magneto sensor is made to overlap the upper surface of described teat, to position described magneto sensor in a thickness direction.
6. rotary encoder as claimed in claim 5, is characterized in that,
Described magneto sensor is being fixed on described teat because abutting with described limited section by under the state of locating.
7. rotary encoder as claimed in claim 6, is characterized in that,
Described circuit substrate is double-sided substrate,
The protective layer surface being formed with the region of Wiring pattern at least in described second substrate face is also provided with the printed layers of insulativity.
8. rotary encoder as claimed in claim 1, is characterized in that,
Described magneto sensor is the magnetoresistive element respectively on many imaginary lines radially extended from the center of described keeper with magnetic resistance pattern.
9. a rotary encoder, comprises magneto sensor and has the magnetic scale being configured with N pole and S pole in the circumferential, and detecting the rotation of rotary body relative to fixed body, it is characterized in that,
Described magnetic scale has: the circular sensor magnet forming magnetic track; And be fixed on the circular yoke plate of one side side of described sensor magnet,
Described sensor magnet is the plastic magnet be shaped by film-form cast gate,
Described film-form cast gate be located at described sensor magnet become the all-round upper of the part of inner peripheral surface or described sensor magnet become the part of outer peripheral face all-round on.
10. rotary encoder as claimed in claim 9, is characterized in that,
The width dimensions of described yoke plate is larger than the width dimensions of described sensor magnet,
The inner peripheral of described yoke plate is positioned at the inner side of the inner peripheral of described sensor magnet,
The outer peripheral edges of described yoke plate are positioned at the outside of the outer peripheral edges of described sensor magnet.
11. rotary encoders as claimed in claim 10, is characterized in that,
Described sensor magnet is magnetized for benchmark with the round-shaped of described yoke plate.
12. rotary encoders as claimed in claim 9, is characterized in that,
Described sensor magnet is that described film-form cast gate side is polished and there is not the plastic magnet of parting line and gate vestiges.
13. rotary encoders as claimed in claim 10, is characterized in that,
The face of the side that is at least magnetized in two faces of described sensor magnet is ground.
14. rotary encoders as claimed in claim 10, is characterized in that,
Described sensor magnet is the plastic magnet that the face of the lower side of residual bubble density in two face is magnetized.
15. rotary encoders as claimed in claim 10, is characterized in that,
Be formed with demoulding cone in the side of described sensor magnet, in this demoulding cone, make the width in the face be magnetized in two of described sensor magnet faces larger than the width in the face of opposite side.
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-036354 | 2011-02-22 | ||
| JP2011036354A JP5651038B2 (en) | 2011-02-22 | 2011-02-22 | Rotary encoder |
| JP2011036355A JP5651039B2 (en) | 2011-02-22 | 2011-02-22 | Rotary encoder |
| JP2011-036355 | 2011-02-22 |
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| CN102650531A CN102650531A (en) | 2012-08-29 |
| CN102650531B true CN102650531B (en) | 2016-02-17 |
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