CN2606115Y - Crucible vaporizer for organic electroluminascent film coater - Google Patents
Crucible vaporizer for organic electroluminascent film coater Download PDFInfo
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- CN2606115Y CN2606115Y CN 03212003 CN03212003U CN2606115Y CN 2606115 Y CN2606115 Y CN 2606115Y CN 03212003 CN03212003 CN 03212003 CN 03212003 U CN03212003 U CN 03212003U CN 2606115 Y CN2606115 Y CN 2606115Y
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- crucible
- ceramic
- circular ring
- evaporation source
- stove
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Abstract
The utility model relates to a crucible vaporizer for organic electroluminescent film coater. The crucible vaporizer comprises a support, a temperature measuring system of thermocouple, a heating furnace and a crucible. The furnace comprises an upper and a lower number 95 ceramic ring tablet (9), a metal molybdenum furnace wire (8), an inner shielding layer of cylinder silex (7) arranged between the upper and lower ceramic ring tablets and an outer shielding layer of cylinder stainless steel (6). The furnace wire (8) is wrapped around from up to down and embedded on the two ceramic ring tablets (9) through another small ceramic ring (12). The upper and lower number 95 ceramic ring tablets (9) are connected together by three molybdenum screw poles (5). The furnace can be stably placed on a ceramic insulated support (4). The vaporizer has the advantages that; the life span is long, the change and maintenance are not needed in a whole year, the temperature control performance is excellent, the vaporizing speed is stable, the heat preservation performance is good, the vaporizers in the same vacuum room do not pollute each other, and the operation is convenient.
Description
Technical field:
The utility model relates to a kind of evaporation source of coating equipment, is specifically related to a kind of crucible type evaporation source that is applied to the organic electroluminescent coating equipment.
Background technology:
At present, domestic existing organic electroluminescent coating equipment is to continue to use traditional bell-jar coating equipment basically, and this kind coating equipment is employed to be the evaporation mode of hanging silk formula or boat formula metallic crucible.The evaporation source life-span of this evaporation mode is short, voltage is low, power is big, be difficult to control, vaporator rate instability, and is seriously polluted mutually between the multi-source, and changes the Coating Materials inconvenience, and evaporation source also needs frequent replacing, operates pretty troublesome.The vacuum chamber that matches with this evaporation source must be open vacuum chamber in addition, it is the bell-jar vacuum chamber, this vacuum chamber is troublesome poeration not only, and operation each time must make its inside thoroughly be exposed in the atmosphere, and just source and substrate will thoroughly be polluted.And the organic electroluminescent plated film need carry out under high vacuum condition, avoid contacting with water, oxygen, be beneficial to improve work-ing life, therefore this traditional bell-jar coating evaporation mode is not suitable for advanced day by day perfect organic electroluminescent coating equipment system at present basically.
The utility model content:
The purpose of this utility model is a kind of novel evaporation source that is applicable to that the organic electroluminescent coating equipment uses of development, i.e. crucible type evaporation source.
Crucible type evaporation source described in the utility model is made up of bearing, thermocouple temperature measurement system, heating member stove and crucible four parts.Shown in Figure of description 1, the bearing part is made up of stainless steel base (1) and ceramic insulation bearing (4) two portions, and ceramic insulation bearing (4) is connected with stainless steel base (1) by pressure ring (2); Platinum rhodium thermocouple (3) passes ceramic insulation bearing (4) and enters burner hearth, near the bottom of crucible (10), thereby can measure the temperature of crucible bottom exactly; The heating member stove by upper and lower two 95# pottery circular ring plate (9), metal molybdenum stove silk (8), be positioned at up and down tubular silica glass internal shield (7) and the tubular stainless steel external shielding layer (6) between two ceramic circular ring plates (9) and form, stove silk (8) unrolls up and down, is embedded in two ceramic circular ring plates (9) by another little ceramic annulus (12); Two 95# pottery circular ring plates (9) link together with 3 molybdenum lead screw (5) up and down, and body of heater can firmly be placed on the ceramic insulation bearing (4).Crucible (10) can use quartz crucible, BN crucible, molybdenum crucible and ceramic crucible etc., crucible (10) has certain edge, and integral body sinks to burner hearth, and the edge section is placed on the ceramic circular ring plate (9), crucible can take out from burner hearth easily, operation such as be convenient to filler and reload.The two ends of stove silk (8) are connected on the filament terminal stud (11), supply with electric current by external system.Filament terminal stud (11) is done insulation with ceramic circular ring plate (9) and is drawn.
As further improvement of the utility model, stove silk (8) unrolls up and down, is embedded in two ceramic circular ring plates (9) by another little ceramic annulus (12), can make stove silk near top ceramic circular ring plate (9) number of times that unrolls some more, less relatively near the number of times that following ceramic circular ring plate (9) stove silk unrolls, thereby improve the temperature in body of heater exit, purpose is to make the material in the crucible be easier to evaporation, helps the evaporation of various materials on the substrate, as shown in Figure 4.
As can be seen, body of heater and crucible are separate components separately from accompanying drawing 1, and body of heater also is what to separate with thermopair, bearing simultaneously, and the evaporation source each several part is again firmly to be installed together during experiment.The advantage of technical scheme described in the utility model is: ceramic circular ring plate (9), tubular silica glass internal shield (7) and tubular stainless steel external shielding layer (6) are the structure unit of crucible type evaporation source, be again the insulation heat insulating member of body of heater, the heat-insulating property of whole evaporation source is superior.Stainless steel base (1) is fixedlyed connected by pressure ring (2) with ceramic insulation bearing (4), the common bearing part of forming the crucible type evaporation source, ceramic insulation bearing (4) is the strut member of thermopair (3), is the adiabatic strut member of whole stove again, thermopair and body of heater can separate, also can change, to adapt to the needs of different temperature-measuring ranges according to requirement of experiment.
The related crucible type evaporation source of the utility model is the core component of organic electroluminescent coating equipment, and it has important effect to the coating quality control of organic materials.We are for improving the quality of organic light emission plated film, easy to operate and increase work efficiency, develop this kind crucible type evaporation source, can place a plurality of (1-6) evaporation source in the vacuum chamber of an organic film plating machine, each evaporation source is contained in the quartz glass cover, is provided with a plate washer.When needs materials evaporated kind (greater than 5 kinds) more for a long time, can after having steamed certain material, open the vacuum chamber side door, crucible is taken out, carry out the replacing of material.Because vacuum chamber is always under the protection of rare gas element, and opens the replacing that side door carries out material, so extraneous air does not pollute the material of evaporation on the substrate.This evaporation source has overcome the defective of traditional boat formula evaporation source fully, and the life-span reached more than 1000 hours, need not change and safeguard all the year round.Simultaneously temperature control performance is superior, vaporator rate stable, do not pollute mutually between each evaporation source of good heat insulating, same vacuum chamber, easy to operate, can realize one-pan-one-flavour, can under vacuum condition, transmit Coating Materials with mechanical manipulator.When safeguarding, evaporation source conveniently can be taken out in vacuum chamber; and the vacuum chamber that is complementary with it is a non-open type; can be under the protection of rare gas element open the door and operate by side; can carry out simultaneously the operation of mounted substrate and replacing Coating Materials, so just make vacuum system avoid the pollution of atmosphere (mainly being water vapor).This evaporation source is suitable for the requirement of present organic electroluminescent plated film.
Description of drawings:
Fig. 1: crucible type evaporation source diagrammatic cross-section;
Fig. 2: the organic film plating system that has evaporation source;
Fig. 3: the plane enlarged diagram that the ceramic circular ring plate (9) of molybdenum screw is installed;
Fig. 4: the section enlarged diagram of body of heater.
Be illustrated in figure 2 as the organic vacuum coating system schematic that has 1-5 crucible type evaporation source that we use now.System's each several part name is called: the organic materials (19) that adds in cavity (15), rotating mechanism (13), planetary rotation substrate holder (14), substrate (16), side direction hatch door and viewing window (17), inert atmosphere glove box (18), the crucible, the heating of stove silk and temperature controlling system (20), crucible type evaporation source (21), vacuum extractor (22).
The making processes of organic electroluminescence device is as follows: the substrate (16) after at first will cleaning is placed on the planetary rotation substrate holder (14), and every kind of organic materials (19) that needs use is put into a crucible type evaporation source (21) separately.The device architecture that obtains as required afterwards, (the vaporization temperature difference of every kind of organic materials is so the Heating temperature of crucible is also different by the thermal control that adds to each crucible type evaporation source; The various thickness differences that need the material of evaporation are so the time of each crucible temperature control is also different) each layer organic materials on evaporation on the substrate respectively, comprise negative electrode, at last that evaporation is good substrate is sent to inert atmosphere glove box and encapsulates.Be provided with an airtight plate washer above each crucible type evaporation source, can be by the control of external program or system, thus can control the time and the thickness of deposition material easily, also can avoid the mutual pollution between a plurality of evaporation sources simultaneously.
Embodiment:
Be example with double-deck green glow OLED device growth process below, the use of the crucible type evaporation source of organic electroluminescent coating equipment is described.
Material is ITO/NPB (60nm)/Alq (40nm)/Al (100nm), and step is as follows:
1. with in used organic materials (Alq and the NPB) quartz crucible of packing into;
2. Alq and NPB crucible will be housed put into No. 3 and No. 4 stoves of this equipment respectively, have 5 stoves in the equipment, be labeled as the 1-5 stove respectively;
3. the ito glass sheet of handling well is fixed in substrate holder;
4. substrate bracket is fixed on the rotational system in the equipment by draw-in groove;
5. close the small front apron that is positioned at big baffle plate in substrate below and crucible top;
6. the closure systems opening is opened mechanical pump and is taken out rough vacuum;
7. when vacuum tightness reaches 100Pa, drive molecular pump, treat that it is normal, drives vacuumometer;
8. work as vacuum tightness and reach 2 * 10
-4During Pa, open the fender plate No. 4, open film thickness gauge simultaneously;
9. to No. 4 stove heating, slowly be heated to 100, preheating 10 minutes continues slowly to be heated to about 120 ℃, and this moment, growth velocity was approximately 0.2nm/s (recording by film thickness gauge);
10. open big baffle plate, fixed growth speed to thickness is 60nm, closes big baffle plate and small front apron;
11. heat stove No. 3, the process of similar NPB grows to 40nm in the time of about 140 ℃;
12. process of growth finishes, and when treating that furnace temperature is reduced to below 150 ℃, stops molecular pump;
13. stop mechanical pump after 2 minutes, open purging valve after 3 minutes, slowly charge into drying nitrogen;
14. get sheet.
Claims (3)
1, a kind of crucible type evaporation source that is used for the organic electroluminescent coating equipment is made up of bearing, thermopair, heating member stove and crucible four parts, it is characterized in that:
1. bearing is made up of stainless steel base (1) and ceramic insulation bearing (4) two portions, and ceramic insulation bearing (4) links together by pressure ring (2) and stainless steel base (1);
2. thermopair (3) passes ceramic insulation bearing (4) and enters burner hearth, abuts against the bottom of crucible (10);
3. the heating member stove by upper and lower two 95# pottery circular ring plate (9), metal molybdenum stove silk (8), be positioned at up and down tubular silica glass internal shield (7) and the tubular stainless steel external shielding layer (6) between two ceramic circular ring plates (9) and form, stove silk (8) unrolls up and down, is embedded in two ceramic circular ring plates (9) by another little ceramic annulus (12), two 95# pottery circular ring plates (9) link together with 3 molybdenum screws (5) up and down, and body of heater can firmly be placed on the ceramic insulation bearing (4);
4. crucible (10) can use quartz crucible, BN crucible, molybdenum crucible or ceramic crucible, and crucible (10) has certain edge;
5. the two ends of stove silk (8) are connected on the filament terminal stud (11), and filament terminal stud (11) is done insulation with ceramic circular ring plate (9) and drawn.
2, the crucible type evaporation source that is used for the organic electroluminescent coating equipment as claimed in claim 1, it is characterized in that: the stove silk (8) in the heating member stove unrolls up and down, is embedded in two ceramic circular ring plates (9) by another little ceramic annulus (12), some more near the stove silk of top ceramic circular ring plate (9) number of times that unrolls, less relatively near the number of times that following ceramic circular ring plate (9) stove silk unrolls.
3, the crucible type evaporation source that is used for the organic electroluminescent coating equipment as claimed in claim 1 or 2, it is characterized in that: a plurality of crucible type evaporation sources coexist as in the vacuum chamber of an organic film plating machine, each evaporation source is placed in the quartz glass cover, is provided with a plate washer above, realizes one-pan-one-flavour.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03212003 CN2606115Y (en) | 2003-03-17 | 2003-03-17 | Crucible vaporizer for organic electroluminascent film coater |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03212003 CN2606115Y (en) | 2003-03-17 | 2003-03-17 | Crucible vaporizer for organic electroluminascent film coater |
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| Publication Number | Publication Date |
|---|---|
| CN2606115Y true CN2606115Y (en) | 2004-03-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 03212003 Expired - Fee Related CN2606115Y (en) | 2003-03-17 | 2003-03-17 | Crucible vaporizer for organic electroluminascent film coater |
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| Country | Link |
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| CN (1) | CN2606115Y (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105648405A (en) * | 2016-03-29 | 2016-06-08 | 苏州方昇光电装备技术有限公司 | Organic material evaporator |
-
2003
- 2003-03-17 CN CN 03212003 patent/CN2606115Y/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105648405A (en) * | 2016-03-29 | 2016-06-08 | 苏州方昇光电装备技术有限公司 | Organic material evaporator |
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| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |