CN2598215Y - Laser deode solid laser side pumping module - Google Patents

Laser deode solid laser side pumping module Download PDF

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Publication number
CN2598215Y
CN2598215Y CNU032355467U CN03235546U CN2598215Y CN 2598215 Y CN2598215 Y CN 2598215Y CN U032355467 U CNU032355467 U CN U032355467U CN 03235546 U CN03235546 U CN 03235546U CN 2598215 Y CN2598215 Y CN 2598215Y
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CN
China
Prior art keywords
laser diode
laser
light
pump
condenser tube
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNU032355467U
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Chinese (zh)
Inventor
周卓尤
王海林
曹红兵
程昌盛
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Huazhong University of Science and Technology
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Huazhong University of Science and Technology
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Priority to CNU032355467U priority Critical patent/CN2598215Y/en
Application granted granted Critical
Publication of CN2598215Y publication Critical patent/CN2598215Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

The utility model discloses a solid laser profile pump module of laser diode. The foresaid pump module comprises a laser diode, a diode base, a head block, a Nd: YAG bar, a cool light focalizing cavity, a diode lock block and a shield. Reflection light focalizing tubes are fixed on the two head blocks through sealing rings. Outer wall of the reflection light focalizing tube is painted with high reflection silver coating which works as reflection layer. An incidence window is opened on the high reflection silver coating and along axial line of the light focalizing tube. Pump light emitted by the laser diode enters the cool light focalizing cavity through the incidence window, and the pump light is reflected to the Nd: YAG bar and absorbed. The pump light not absorbed by the Nd: YAG bar is reflected by the high reflection silver coating to the Nd: YAG bar again for absorption. Pump modules are averagely arranged on the Nd: YAG bar circumferential direction. Each pump module is made up of a plurality of laser diodes connected in series. The whole pump module is provided with soft sealing cushion so as to prevent entry of dust. The profile pump module of laser diode can be widely used in Nd: YAG solid laser dotting machine and solar silicon wafer scriber.

Description

A kind of laser diode Solid State Laser side pumping module
Technical field
The utility model belongs to the laser device technical field, is specifically related to a kind of laser diode Solid State Laser side pumping module, mainly can be used for laser diode-pumped Solid State Laser mark machine, the side pumping module on the solar silicon wafers scribing machine.
Background technology
The basic technical scheme of existing laser diode-pumped Solid State Laser side pumping module mainly contains three kinds: first kind basic ideas are to place optical collimation lens before laser diode, after the pump light that laser diode is sent carries out optical transform, shine on the Nd:YAG rod after injecting the cooled glass pipe, outside the cooled glass pipe, place a reflector, on unabsorbed pump light reflected back Nd:YAG rod.The basic ideas of second kind of technical scheme are that laser diode is placed outside the pump module, and the pump light that laser diode is sent by optical fiber is transferred in the pump module, inject then in cooled glass pipe and the Nd:YAG rod; The basic ideas of the third technical scheme are the pump light pump-coupling lath Nd:YAG that sends with laser diode, and lath Nd:YAG directly contacts with heat sink, by the conduction cooling.
Obvious first kind of technical scheme not only can improve equipment cost owing to used collimating lens, also can cause the loss of pump light, reduced pumping efficiency; Second kind of scheme is owing to the Optical Fiber Transmission of using, and cost is higher, and loss is bigger, and efficient is lower; The third technical scheme pump mode is simple, and loss is little, but lath Nd:YAG price is higher, is difficult for adjusting.
Summary of the invention
The purpose of this utility model provides a kind of laser diode Solid State Laser side pumping module that can overcome above-mentioned defective, this pump module cost is low, simple in structure and conversion efficiency is high, can make the pump power that sends from laser diode convert the Nd:YAG laser output power to the full extent to.
For realizing above-mentioned utility model purpose, a kind of laser diode Solid State Laser side pumping module, comprise pump unit, cooling condenser tube ferrule and Nd:YAG rod, pump unit is made of the laser diode that is fixed on the base, the cooling condenser tube ferrule is enclosed within outside the Nd:YAG rod, it is characterized in that: described cooling condenser tube ferrule is the quartz glass tube that is coated with high anti-silver layer on the cylindrical wall, have thin narrow incidence window on the axis direction of cooling condenser tube ferrule circumference upper edge, the launch window of laser diode is near the incidence window of cooling condenser tube ferrule, and the pump light that laser diode sends directly enters the cooling condenser tube ferrule by incidence window.
The utility model is directly injected in the cooling condenser tube ferrule by the incidence window on the cooling condenser tube ferrule from the pump light that laser diode sends, shine on the Nd:YAG rod, a part is absorbed by the Nd:YAG rod, the unabsorbed pump light of another part shines to be reflected behind the high anti-silver layer of cooling condenser tube ferrule outer wall and is mapped to once more on the Nd:YAG rod, is absorbed once more.Pump light repeatedly reflection in the cooling condenser tube ferrule like this, the final overwhelming majority is absorbed by the Nd:YAG rod, forms population inversion behind the Nd:YAG rod absorptive pumping light, forms the output of high energy Nd:YAG laser under the help of resonant cavity, this pump module is simple in structure, the conversion efficiency height.
Description of drawings
Accompanying drawing 1 is a laser diode Solid State Laser side pumping module schematic diagram;
Accompanying drawing 2 is a laser diode Solid State Laser side pumping module cross sectional representation.
Sequence number is base 1, end block 2, Nd:YAG rod 3, base plate 4, outer cover 5, laser diode 6, cooling condenser tube ferrule 7, pump unit 81 (82,83), high anti-silver layer 9, protective layer 10 and dust-proof cushion 11 among the figure.
Embodiment
As shown in Figure 1 and Figure 2, three laser diodes 6 are fixed on side by side forms a pump unit 81 on the base 1, be evenly distributed with three pump unit on Nd:YAG rod 3 circumference.Cooling has thin narrow incidence window on the condenser tube ferrule 7, and the number of incidence window is identical with the number of pump unit.Be coated with anti-reflection film on this incidence window to laser diode-pumped light.The launch window of laser diode 6 is near the incidence window of cooling condenser tube ferrule 7, its the two gap is very little, directly inject cooling condenser tube ferrule 7 from the pump light that laser diode 6 sends by incidence window, middle not by any optical element, shine then on the Nd:YAG rod 3, the part pump light is absorbed by Nd:YAG rod 3, after unabsorbed pump light passes and is mapped to the high anti-silver layer 9 of cooling condenser tube ferrule behind the Nd:YAG rod, be reflected back toward the Nd:YAG rod, absorbed by the Nd:YAG rod once more.Like this, pump light is repeatedly absorbed in the cooling condenser tube ferrule, repeatedly reflection, and final most pump lights are absorbed by the Nd:YAG rod.Behind the Nd:YAG rod absorptive pumping light, form population inversion, under the help of resonant cavity, form superlaser output.Outside the anti-silver layer 9 of height, be coated with layer protective layer 10, can prevent that high anti-silver layer is because of being exposed to oxidation in the air.Between end block 2 and outer cover 5, post dust-proof cushion 11, can prevent that extraneous dust from entering in the module, causes the damage of laser diode.
The positive and negative electrode of laser diode tightly forces together by briquetting and laser diode, and base between heat have mylar to make insulation cushion.
Whole pump module is made up of 3 pump unit in the accompanying drawing 1, also can be made up of one or more pump unit.Each pump unit is made up of 3 laser diodes, also can be made up of one or more laser diodes.
Cooling condenser tube ferrule outer wall incidence window number is 3 in the accompanying drawing 2, also can be one or more, and its number is by the quantity decision of pump unit.
Core of the present utility model is to adopt the quartz glass tube that is coated with high anti-silver layer on outer wall as the cooling condenser tube ferrule; and have narrow incidence window thereon; and the gap is very little between the launch window of laser diode and the incidence window; pumping is directly injected the cooling condenser tube ferrule by incidence window without any optical element; therefore the structure of every this kind of employing method all belongs to the scope that the utility model is protected.

Claims (3)

1, a kind of laser diode Solid State Laser side pumping module, comprise pump unit, cooling condenser tube ferrule and Nd:YAG rod, pump unit is made of the laser diode that is fixed on the base, the cooling condenser tube ferrule is enclosed within outside the Nd:YAG rod, it is characterized in that: described cooling condenser tube ferrule (7) is for being coated with the quartz glass tube of high anti-silver layer (9) on the cylindrical wall, have thin narrow incidence window on the axis direction of cooling condenser tube ferrule (7) circumference upper edge, the launch window of laser diode (6) is near the incidence window of cooling condenser tube ferrule (7), and the pump light that laser diode (6) sends directly enters cooling condenser tube ferrule (7) by incidence window.
2, laser diode Solid State Laser side pumping module according to claim 1 is characterized in that: the cooling condenser tube ferrule produces on (7) outer high anti-silver layer (9) and is coated with protective layer (10), prevents the silver layer oxidation.
3, laser diode Solid State Laser side pumping module according to claim 1 and 2 is characterized in that: be coated with the anti-reflection film to laser diode-pumped light on the incidence window of cooling condenser tube ferrule (7).
CNU032355467U 2003-02-21 2003-02-21 Laser deode solid laser side pumping module Expired - Fee Related CN2598215Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CNU032355467U CN2598215Y (en) 2003-02-21 2003-02-21 Laser deode solid laser side pumping module

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CNU032355467U CN2598215Y (en) 2003-02-21 2003-02-21 Laser deode solid laser side pumping module

Publications (1)

Publication Number Publication Date
CN2598215Y true CN2598215Y (en) 2004-01-07

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Family Applications (1)

Application Number Title Priority Date Filing Date
CNU032355467U Expired - Fee Related CN2598215Y (en) 2003-02-21 2003-02-21 Laser deode solid laser side pumping module

Country Status (1)

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CN (1) CN2598215Y (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100459326C (en) * 2004-04-15 2009-02-04 三菱电机株式会社 Rod-type solid laser device
CN102593706A (en) * 2012-01-12 2012-07-18 中国科学院理化技术研究所 Side-pumped round-bar-shaped self-frequency-doubling crystal laser
CN103746274A (en) * 2013-12-27 2014-04-23 中国科学院理化技术研究所 Side pumping laser module
CN103928832A (en) * 2014-04-29 2014-07-16 苏州德龙激光股份有限公司 Semi-conductor diode end face pump module, manufacturing method thereof and laser device with semi-conductor diode end face pump module
CN104485573A (en) * 2014-11-21 2015-04-01 湖北久之洋红外系统股份有限公司 Laser diode array side pumping module
CN104617476A (en) * 2015-01-20 2015-05-13 中国科学院理化技术研究所 Side pumping laser module for preventing laser diode light-emitting cavity surface from being polluted
CN105261923A (en) * 2015-11-06 2016-01-20 华中科技大学 A semiconductor pump discharge gas laser device
CN115021070A (en) * 2022-08-03 2022-09-06 度亘激光技术(苏州)有限公司 Side pump module and semiconductor laser

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100459326C (en) * 2004-04-15 2009-02-04 三菱电机株式会社 Rod-type solid laser device
CN102593706A (en) * 2012-01-12 2012-07-18 中国科学院理化技术研究所 Side-pumped round-bar-shaped self-frequency-doubling crystal laser
CN103746274A (en) * 2013-12-27 2014-04-23 中国科学院理化技术研究所 Side pumping laser module
CN103928832A (en) * 2014-04-29 2014-07-16 苏州德龙激光股份有限公司 Semi-conductor diode end face pump module, manufacturing method thereof and laser device with semi-conductor diode end face pump module
CN104485573A (en) * 2014-11-21 2015-04-01 湖北久之洋红外系统股份有限公司 Laser diode array side pumping module
CN104485573B (en) * 2014-11-21 2017-09-22 湖北久之洋红外系统股份有限公司 A kind of diode laser matrix side pumping module
CN104617476A (en) * 2015-01-20 2015-05-13 中国科学院理化技术研究所 Side pumping laser module for preventing laser diode light-emitting cavity surface from being polluted
CN104617476B (en) * 2015-01-20 2017-07-28 中国科学院理化技术研究所 Side pumping laser module for preventing laser diode light-emitting cavity surface from being polluted
CN105261923A (en) * 2015-11-06 2016-01-20 华中科技大学 A semiconductor pump discharge gas laser device
CN115021070A (en) * 2022-08-03 2022-09-06 度亘激光技术(苏州)有限公司 Side pump module and semiconductor laser

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C19 Lapse of patent right due to non-payment of the annual fee
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