CN2591601Y - Photoelectric vibrating string type force-measuring sensor - Google Patents

Photoelectric vibrating string type force-measuring sensor Download PDF

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CN2591601Y
CN2591601Y CN 02292896 CN02292896U CN2591601Y CN 2591601 Y CN2591601 Y CN 2591601Y CN 02292896 CN02292896 CN 02292896 CN 02292896 U CN02292896 U CN 02292896U CN 2591601 Y CN2591601 Y CN 2591601Y
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photoelectric
string
metal string
frequency
metal
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李胜利
凌晨
竺长安
徐敏
郑春阳
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University of Science and Technology of China USTC
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Abstract

The utility model relates to a novel photoelectric vibrating string type force-measuring sensor, which comprises a tension metal string which is fixed on a deformable body. One end of the metal string is connected with ground, the other end is connected with a pulse current source, and both sides of the metal string are provided with magnetic fields. The utility model is characterized in that both the sides of the metal string are respectively provided with a laser and a photoelectric position-sensitive device, the tension of the metal string is changed through the deformable body by the applied force, and the metal string in the magnetic fields generates free vibration through pulse current. A laser irradiates the metal string, the photosensitive surface of the photoelectric position-sensitive device generates the vibrating shadow of the metal string, and the output photoelectric current is converted to the frequency of photoelectric voltage through a signal processing circuit which comprises an I/V converting circuit and a frequency meter. The frequency of the photoelectric voltage is measured, and the loading force information that the tension relative to the frequency of a vibrating string is obtained. The utility model has the advantages that the sensor can avoid the noise which is provided by an electromagnetic induction method, wherein, the electromagnetic induction method is easily disturbed by the strong electromagnetism on site, and the utility model obtains the stable vibrating string frequency signals, enlarges the measuring range, and enhances the load detection capability.

Description

一种光电振弦式测力传感器装置A photoelectric vibrating wire load cell device

技术领域:Technical field:

本实用新型涉及在振弦式传感器中采用半导体激光器和光电位敏器件测量力的装置。The utility model relates to a device for measuring force by using a semiconductor laser and a photoelectric potential sensitive device in a vibrating wire sensor.

背景技术:Background technique:

《施工技术》杂志1997年12期第31页指出,振弦式测力传感器是一种常用的利用振弦的固有频率同振弦受力之间的对应关系进行力的测量的传感器。其结构一般为在弓形的变形体上安装一根作为谐振元件通常称为振弦的张紧的金属丝。在电磁激励下,振弦按其固有频率振动;通过改变振弦的张紧力T,可以得到不同的振动频率f,即张紧力与谐振频率之间呈函数关系。因此,可以通过电磁感应测量振弦的振动频率而得到传感器的受力情况,从而最终达到测力的目的。"Construction Technology" magazine, No. 12, 1997, page 31, pointed out that the vibrating wire force sensor is a commonly used sensor for force measurement using the corresponding relationship between the natural frequency of the vibrating wire and the force of the vibrating wire. Its structure is generally to install a tensioned metal wire as a resonant element, usually called a vibrating wire, on a bow-shaped deformable body. Under electromagnetic excitation, the vibrating wire vibrates according to its natural frequency; by changing the tension T of the vibrating wire, different vibration frequencies f can be obtained, that is, there is a functional relationship between the tension force and the resonance frequency. Therefore, the force of the sensor can be obtained by measuring the vibration frequency of the vibrating wire through electromagnetic induction, so as to finally achieve the purpose of force measurement.

为了使振弦测力传感器获得较高的精确度,必须对振弦的振动频率进行精确的测量。因为振弦的张紧力和振弦的振动频率之间呈函数关系,所以对振弦频率的测量对提高传感器的精度十分重要。现有测量频率的方法主要采用电磁法,通过振弦在磁场中切割磁力线,测量感应电流,来获得振弦的频率。这种方法由于有线圈等感性负载,容易受到外界电磁场的干扰,稳定性较差。至今未见利用光电位敏器件(PSD)原理测量力的装置的报道。In order to obtain high accuracy of the vibrating wire load cell, the vibration frequency of the vibrating wire must be accurately measured. Because there is a functional relationship between the tension force of the vibrating wire and the vibration frequency of the vibrating wire, the measurement of the frequency of the vibrating wire is very important to improve the accuracy of the sensor. The existing frequency measurement method mainly adopts the electromagnetic method, and the frequency of the vibrating wire is obtained by measuring the induced current by cutting the magnetic force line in the magnetic field by the vibrating wire. Due to the presence of inductive loads such as coils, this method is easily disturbed by external electromagnetic fields and has poor stability. So far, there has been no report on a device for measuring force using the principle of a photopotential sensitive device (PSD).

技术内容:Technical content:

本实用新型提供一种精度较高且不受外界环境因素干扰的采用半导体激光器和光电位敏器件的光电振弦测量力的装置。The utility model provides a device for measuring the force of a photoelectric vibrating wire with a semiconductor laser and a photoelectric potential sensitive device, which has high precision and is not disturbed by external environmental factors.

这种光电振弦测量力的装置,包括可以承受力的变形体(1);两端拉紧固定在变形体(1)中部的金属弦(4);金属弦一端接地,一端接在一个脉冲电流源(5)上;固定在金属弦两侧的磁场(3);其特征在于在金属弦一侧设置有作为光源的激光器(2)以及相对固定在激光光路上于金属弦另一侧的用于接收金属弦阴影的光电位敏器件(6);光电位敏器件(6)输出的光电流经包括I/V转换电路和频率计的信号处理电路(7)转换为光电压的频率;光电位敏器件和半导体激光器都封装在荷重传感器盒内。This device for measuring force by photoelectric vibrating wire includes a deformable body (1) that can withstand force; both ends of the metal string (4) are tightened and fixed in the middle of the deformable body (1); one end of the metal string is grounded, and the other end is connected to a pulse On the current source (5); the magnetic field (3) fixed on both sides of the metal string; it is characterized in that a laser (2) as a light source is arranged on one side of the metal string and relatively fixed on the laser optical path on the other side of the metal string A photoelectric potentiometer (6) for receiving metal string shadows; the photoelectric current output by the photoelectric potentiometer (6) is converted to the frequency of photovoltage by a signal processing circuit (7) comprising an I/V conversion circuit and a frequency meter; Both the photoelectric potentiometer and the semiconductor laser are packaged in the load sensor box.

测量时,将金属弦两端拉紧固定在变形体中部,在变形体上外加的力通过变形体使金属弦张力变化;在处于磁场中的金属弦中通过脉冲电流使弦产生自由振荡;将激光照射在金属弦上,调节激光器和光电位敏器件与金属弦距离,使光电位敏器件的光敏面上产生一个明显放大的金属弦的振动阴影,将光电位敏器件输出的光电流转换为光电压,测量光电压的频率,即可得出与振弦频率相关的张力即加载力信息。During the measurement, the two ends of the metal string are tightened and fixed in the middle of the deformable body, and the force applied on the deformable body changes the tension of the metal string through the deformable body; in the metal string in the magnetic field, the pulse current is used to make the string oscillate freely; The laser is irradiated on the metal string, and the distance between the laser and the photoelectric potentiometer and the metal string is adjusted, so that an obviously amplified vibration shadow of the metal string is generated on the photosensitive surface of the photoelectric potentiometer, and the photocurrent output by the photoelectric potentiometer is converted into Photovoltage, by measuring the frequency of the photovoltage, the tension or loading force information related to the frequency of the vibrating wire can be obtained.

本实用新型采用光电振弦测量荷重的方法,是根据光电位敏器件的原理:光电位敏器件是一种侧向效应硅光电器件,通过平面扩散制造工艺,有一个完整的光敏面,在光敏面的两端有两个阳极接触点。当入射光斑照射在光敏面S位置处时,由入射光子产生的光生载流子被电场分开,在外电路形成光电流,流过其中的一个阳极的光电流可用下式表示:The utility model adopts the method of photoelectric vibrating wire to measure the load, which is based on the principle of the photoelectric position sensitive device: the photoelectric position sensitive device is a side-effect silicon photoelectric device, which has a complete photosensitive surface through the planar diffusion manufacturing process. There are two anode contact points on both ends of the face. When the incident light spot is irradiated at the position of the photosensitive surface S, the photogenerated carriers generated by the incident photons are separated by the electric field, and a photocurrent is formed in the external circuit, and the photocurrent flowing through one of the anodes can be expressed by the following formula:

 I1=I0(1-S/L)    (1)另一个I2=I0S/L      (2)I 1 =I 0 (1-S/L) (1) Another I 2 =I 0 S/L (2)

式中,I0为光生电流;L为两阳极间的距离;S为入射光斑距阳极的距离;In the formula, I 0 is the photogenerated current; L is the distance between the two anodes; S is the distance between the incident spot and the anode;

式(1)、(2)表明,光电流是和光斑位置S呈线性关系;光斑位置亦即金属弦投射阴影位置变化即刻会引起光电流变化。Equations (1) and (2) show that the photocurrent has a linear relationship with the spot position S; the change of the spot position, that is, the position of the shadow cast by the metal string will immediately cause the change of the photocurrent.

与现有技术相比较,本实用新型有以下优点和积极效果:Compared with the prior art, the utility model has the following advantages and positive effects:

由于本实用新型中采用的是以往在振弦式传感器中没有使用过的光电位敏器件和半导体激光器等光电器件,不属于感性负载,且都封装在荷重传感器盒内,没有引入其它光源的干扰,故可避免电磁感应法易受测量现场的强电磁干扰带来的噪声,因而采用光电激光测量能获得比已有方法更稳定的振弦频率信号。Since the utility model uses optoelectronic devices such as photoelectric potentiometers and semiconductor lasers that have not been used in vibrating wire sensors in the past, they do not belong to inductive loads, and are all packaged in the load sensor box, without introducing interference from other light sources , so it can avoid the electromagnetic induction method being susceptible to the noise caused by the strong electromagnetic interference at the measurement site, so the photoelectric laser measurement can obtain a more stable vibration frequency signal than the existing method.

当荷重改变随之振弦张紧力也改变振弦的固有频率时,由于光电位敏器件和半导体激光器频率响应都很高,所以采用这种光电法测量,传感器能够及时地反映出这种频率的变化,同时扩大了测量范围。When the load changes and the tension of the vibrating wire changes the natural frequency of the vibrating wire, since the frequency response of the photoelectric potentiometer and the semiconductor laser are very high, the sensor can reflect the frequency in time by using this photoelectric method for measurement. change, while expanding the measurement range.

通过改变半导体激光器和光电位敏器件对金属弦的位置,可以使投射到光电位敏器件光敏面阴影尺寸是弦径的近十倍,因而将振弦振幅也放大近十倍,提高了荷重检测能力。By changing the position of the semiconductor laser and the photoelectric potentiometer to the metal string, the size of the shadow projected on the photosensitive surface of the photoelectric potentiometer can be nearly ten times the diameter of the string, thus amplifying the vibration amplitude by nearly ten times and improving the load detection. ability.

附图说明:Description of drawings:

图1为采用半导体激光器和光电位敏器件的光电振弦测量荷重的装置原理示意图。Figure 1 is a schematic diagram of a device for measuring load using a photoelectric vibrating wire using a semiconductor laser and a photoelectric potentiometer.

图2为PSD信号处理电路原理图。Figure 2 is a schematic diagram of the PSD signal processing circuit.

图3为自动功率控制的激光器驱动电路。Figure 3 shows the laser drive circuit for automatic power control.

具体实施方式:Detailed ways:

实施例1:Example 1:

本实施例的具体实施装置采用直径0.2mm、弦长30mm的京胡弦作为振弦(4)两端拉紧固定在可以承受力的圆形变形体(1)中部,金属弦一端接地,一端接在一个脉冲电流源(5)上,脉冲电流源采用电容放电的方法提供一个占空比可以达到百分之一的尖脉冲电流通过金属振弦;采用两块永磁体固定在金属弦两侧形成磁场(3);把半导体激光器(2)和光电位敏器件(6)布置于金属振弦(4)的两侧,金属振弦(4)和光电位敏器件(6)均布置于激光光路上,这里采用时间响应为1μs以内的光电位敏器件(6);由包括I/V转换电路和频率计的光电流经信号处理电路(7)将光电位敏器件(6)输出的转换为光电压的频率;光电位敏器件和半导体激光器都封装在荷重传感器盒内。The specific implementation device of this embodiment adopts Jinghu strings with a diameter of 0.2mm and a string length of 30mm as the vibrating strings (4). On a pulse current source (5), the pulse current source adopts the method of capacitive discharge to provide a sharp pulse current with a duty cycle of 1% through the metal vibrating wire; two permanent magnets are fixed on both sides of the metal string to form magnetic field (3); the semiconductor laser (2) and the photoelectric potential sensitive device (6) are arranged on both sides of the metal vibrating wire (4), and the metal vibrating wire (4) and the photoelectric potential sensitive device (6) are arranged on the laser beam On the road, the photoelectric position sensitive device (6) with a time response of less than 1 μs is adopted here; the output of the photoelectric position sensitive device (6) is converted into The frequency of the photovoltage; the photoelectric potentiometer and the semiconductor laser are all packaged in the load sensor box.

所述信号处理电路(7)如图2所示。这里I/V转换电路采用一个4558双运放F1,PSD的两个信号输出分别接到F1的两个正向输入,R1,C1并联、R2,C2并联分别作为负反馈一端接在F1的输出端和F1的负向输入。F1的两个输出端接在一个频率计上,来测量所得光电压的频率。将光电位敏器件输出的光电流转换为光电压,并测量光电压的频率,The signal processing circuit (7) is shown in FIG. 2 . Here the I/V conversion circuit uses a 4558 dual operational amplifier F1, the two signal outputs of PSD are connected to the two positive inputs of F1 respectively, R1, C1 are connected in parallel, R2, C2 are connected in parallel as negative feedback, and one end is connected to the output of F1 terminal and the negative input of F1. The two outputs of F1 are connected to a frequency meter to measure the frequency of the resulting photovoltage. Convert the photocurrent output by the photopotential sensor into photovoltage, and measure the frequency of the photovoltage,

本实施例采用的半导体激光器配有一个自动功率控制的半导体激光器驱动电路,如图3所示。该驱动电路中,LD和PD的一端一起接在正5伏电压上;C5用来稳定电源电压,一端接正5伏,一端接地。R4和D1给K1提供稳定的工作电压,R4的一端接正5伏,一端接放大器K1发射极。D1的一端接地,一端接在K1的发射极。R3是用来提供K1的直流偏置,一端接地,一端接K1的基极。K1的基极接在PD的一端,集电极接在K2的基极上。K2用来提供LD的驱动电流。R5是限流保护电阻,一端接LD,一端接K1的基极。C4,C3是用来滤出高频干扰对LD的影响。C4的一端接地,一端接K2的基极。C3的一端接正5伏,一端接K2的集电极。K2的发射极接地。利用半导体激光器自带的PD来反馈LD的光强,通过K1控制LD的驱动电流从而实现光强的稳定。The semiconductor laser used in this embodiment is equipped with an automatic power control semiconductor laser driving circuit, as shown in FIG. 3 . In this drive circuit, one end of LD and PD is connected to positive 5 volts; C5 is used to stabilize the power supply voltage, one end is connected to positive 5 volts, and the other end is grounded. R4 and D1 provide a stable working voltage for K1, one end of R4 is connected to positive 5 volts, and the other end is connected to the emitter of the amplifier K1. One end of D1 is grounded and the other end is connected to the emitter of K1. R3 is used to provide the DC bias of K1, one end is grounded, and the other end is connected to the base of K1. The base of K1 is connected to one end of PD, and the collector is connected to the base of K2. K2 is used to provide the driving current of LD. R5 is a current limiting protection resistor, one end is connected to LD, and the other end is connected to the base of K1. C4 and C3 are used to filter out the influence of high-frequency interference on LD. One end of C4 is grounded and the other end is connected to the base of K2. One end of C3 is connected to positive 5 volts, and the other end is connected to the collector of K2. The emitter of K2 is grounded. Use the PD that comes with the semiconductor laser to feed back the light intensity of the LD, and control the drive current of the LD through K1 to stabilize the light intensity.

测试时,激光垂直照射在振弦上,在光电位敏器件的光敏面上产生一个阴影。在处于永磁体磁场中的振弦中通入脉冲电流,振弦会依据所受张力大小出现不同频率的振动,由于采用占空比很低的脉冲电流,频率很低,为几个赫兹,所以产生的感应力只能使振弦发生自由振动,而不会产生受迫振动,这样测得的频率就是振弦的固有频率。同时该振动会使其阴影在光敏面里上下移动,光电位敏器件的光电流会随着振弦振动的频率变化产生同样频率的变化,光电流经过放大变换成相应的电压信号,通过测量电压信号的频率,就可以得出与振弦的频率相关的荷重大小。During the test, the laser is irradiated vertically on the vibrating wire, and a shadow is produced on the photosensitive surface of the photopotential sensor. When the pulse current is passed into the vibrating wire in the magnetic field of the permanent magnet, the vibrating wire will vibrate at different frequencies according to the magnitude of the tension. Since the pulse current with a very low duty cycle is used, the frequency is very low, several Hz, so The generated induction force can only make the vibrating wire vibrate freely, but will not produce forced vibration, so the measured frequency is the natural frequency of the vibrating wire. At the same time, the vibration will make its shadow move up and down in the photosensitive surface, and the photocurrent of the photoelectric potentiometer will produce the same frequency change as the frequency of the vibrating string. The photocurrent is amplified and transformed into a corresponding voltage signal. By measuring the voltage From the frequency of the signal, the magnitude of the load related to the frequency of the vibrating wire can be obtained.

本实用新型这种测量方法不会受到采用磁感应式传感器易受到的外界磁的干扰,能获得稳定的振弦频率信号,该振弦频率信号和所测量的力是线性关系的,所以可以获得稳定的力的信号。可以使传感器的测量精度大幅提高,而且扩大了测量范围,提高了荷重检测能力。The measurement method of the utility model will not be disturbed by the external magnetism that the magnetic induction sensor is susceptible to, and can obtain a stable vibrating wire frequency signal. The vibrating wire frequency signal and the measured force are in a linear relationship, so stable signal of force. The measurement accuracy of the sensor can be greatly improved, the measurement range is expanded, and the load detection capability is improved.

Claims (1)

1、一种光电振弦测量力的装置,包括可以承受力的变形体(1);两端拉紧固定在变形体(1)中部的金属弦(4);金属弦一端接地,一端接在一个脉冲电流源(5)上;固定在金属弦两侧的磁场(3);其特征在于在金属弦一侧设置有作为光源的激光器(2)以及相对固定在激光光路上于金属弦另一侧的用于接收金属弦阴影的光电位敏器件(6);光电位敏器件(6)输出的光电流经包括I/V转换电路和频率计的信号处理电路(7)转换为光电压的频率;光电位敏器件和半导体激光器都封装在荷重传感器盒内。1. A device for measuring force by a photoelectric vibrating string, comprising a deformable body (1) capable of bearing force; a metal string (4) fixed at the middle of the deformable body (1) at both ends; one end of the metal string is grounded, and the other end is connected to the A pulse current source (5); a magnetic field (3) fixed on both sides of the metal string; it is characterized in that a laser (2) as a light source is arranged on one side of the metal string and is relatively fixed on the laser optical path and the other side of the metal string The photoelectric potentiometer (6) that is used to receive the shadow of the metal string on the side; the photoelectric current that the photoelectric potentiometer (6) outputs is converted into photovoltage by the signal processing circuit (7) that includes I/V conversion circuit and frequency meter Frequency; photoelectric position sensitive devices and semiconductor lasers are packaged in the load cell box.
CN 02292896 2002-12-31 2002-12-31 Photoelectric vibrating string type force-measuring sensor Expired - Fee Related CN2591601Y (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101952695B (en) * 2008-02-13 2013-03-06 索德罗公司 Device for improved response when measuring vibration frequency of a vibrating object
CN106767746A (en) * 2017-01-05 2017-05-31 陈志龙 Type vibration wire gyro

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101952695B (en) * 2008-02-13 2013-03-06 索德罗公司 Device for improved response when measuring vibration frequency of a vibrating object
CN106767746A (en) * 2017-01-05 2017-05-31 陈志龙 Type vibration wire gyro

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