CN2576607Y - Micro gel-propeller - Google Patents
Micro gel-propeller Download PDFInfo
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- CN2576607Y CN2576607Y CN 02253029 CN02253029U CN2576607Y CN 2576607 Y CN2576607 Y CN 2576607Y CN 02253029 CN02253029 CN 02253029 CN 02253029 U CN02253029 U CN 02253029U CN 2576607 Y CN2576607 Y CN 2576607Y
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- propeller
- source electrode
- equal
- impeller
- colloid
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Abstract
The utility model relates to a miniature gel propeller which belongs to the technical field of an electric propeller applied on a tiny satellite and comprises an upper layer silicon wafer, a lower layer silicon wafer and a middle glass pad piece, which form a sandwich structure. The volume, the weight and the working voltage of the miniature gel propeller are greatly decreased by adopting the silicon wafers, miniaturization design of the silicon wafer and a micro machine manufacture method. For example, the working voltage of the miniature gel propeller composed of 192 spray heads is equal to 1300 volts, pushing force generated by the propeller is equal to 400 micro newtons, and the specific impulse of the propeller is equal to 200 seconds. The volume of the propeller is only equal to 10 mm *10 mm *10 mm, the weight of the propeller is equal to 2 grams, and the minimum controllable unit impulse of the propeller is equal to 2 micro newton seconds. Therefore, the utility model can completely reach requirements of tiny satellite pose control for the propeller.
Description
Technical field
The utility model relates to a kind of colloid impeller of micro-miniaturisation, belongs to the electric propulsion device technical field that microsatellite is used.
Background technology
The theory of colloid impeller originates from the forties, once is used for substituting the time that low specific impulse chemical propeller was studied recent two decades by U.S. scientist in the 60 to 70's as a kind of of electric propulsion.Colloid impeller generally all is made up of jet array, each shower nozzle all has a source electrode (emitter) and an extracting pole (intensifying ring), the working medium of strong polarity arrives the tip of source electrode by slow feed system, meanwhile, the high potential that is added between source electrode and extracting pole forms high field intensity at the tip of source electrode, working medium forms charged drop, breaks and is quickened by high field intensity, spray at a high speed by extracting pole, produce thrust.What make referrals in (AIAA67-128) as document " researchon a charged particle bipolar thruster " is exactly one of them representative type example.This colloid impeller is made up of 73 shower nozzles, and the source electrode of all shower nozzles is made by precision machined method on same metal sheet, and its extracting pole also is to be processed by metal sheet, separates by the non-conductive cylinder between the two-layer electrode.Adopt glycerine and sodium iodide weight ratio be 10: 2 compound as working medium, 4400 volts of operating voltages, the thrust of generation is 400 little oxen, specific impulse is 450-700 second, weight is 10 kilograms, the unit impulse of minimum controllable was 5 little ox seconds.
But above-mentioned this colloid impeller can't produce the big thrust of the large satellite attitude control usefulness that is suitable at that time, on the other hand, because the volume of its jet array own, weight are excessive, and, make this colloid impeller also can't use on less than 10 kilograms microsatellite at overall weight because the volume of the additional servomechanism that the operating voltage height causes is excessive.Thereby to the eighties, the research of colloid impeller lies on the table.
The utility model content
The purpose of this utility model is to provide a kind of miniature colloid impeller, by the method that adopts silicon wafer and its miniaturized design and micromechanics to make, reduce the volume and weight of micro-thruster significantly, reduce its operating voltage, further reduce the volume and weight of propelling unit servomechanism, finally make it to reach microsatellite attitude control angle of rake requirement.
The technical scheme that the utility model adopted is as follows: a kind of miniature colloid impeller, it is characterized in that: contain upper and lower two-layer silicon chip and middle insulation spacer, lower floor's silicon chip is the source electrode array, have a plurality of hollow bumps on the described source electrode array, metal level is arranged at the protrusion surface of hollow and the surface coverage of whole lower silicon slice; The upper strata silicon chip is the extracting pole array, has the metal electrode of concavity on the extracting pole array.
Intermediate insulation pad described in the utility model is a glassy layer, and this glassy layer is by bonding and source electrode array and extracting pole array formation working medium passage.
The height of described hollow bumps is the 10-100 micron; Hollow bumps can adopt cylindric, and the inside radius of each hollow column is that 1-50 micron, external diameter are the 2-60 micron.
Concavity metal electrode on the silicon chip of upper strata described in the utility model can adopt one or more, and is corresponding with corresponding projection on the source electrode, forms the passage of an injection.
Concavity metal electrode described in the utility model can adopt annular arrangement, and radius of a circle is the 5-100 micron.
The utility model compared with prior art has the following advantages and the high-lighting progress:
(1) simple in structure, adopt " sandwich " structure, improved reliability.
(2) have little, the lightweight characteristics of volume.As the propelling unit of being made up of 192 shower nozzles, during 1300 volts of operating voltages, the thrust of generation is 400 little oxen, and specific impulse is 200 seconds, and volume only is 10 millimeters * 10 millimeters * 10 millimeters, and weight is 2 grams, and the unit impulse of minimum controllable was 2 little ox seconds.
(3) adopt micro-machined method to make, the surface density of propelling unit array is increased considerably.
(4) source electrode of idiozome propelling unit array, extracting pole size drop to micron dimension, and dimensional effect brings operating voltage can be reduced to 1300V.
(5) shower nozzle that the idiozome propelling unit can be by varying number and between the source electrode of each shower nozzle, extracting pole, apply different voltage and export different thrusts.Extracting pole is controlled separately, can realize the combination of different shower nozzles on the same colloid impeller by the independent control of extracting pole, realizes the conversion of thrust.
(6) the controlled least unit momentum of idiozome propelling unit output reaches little ox level second.
(7) cheap for manufacturing cost, be suitable on conveyor line, producing in enormous quantities.
Description of drawings
Fig. 1 is the overall structure scheme drawing of the utility model embodiment.
Fig. 2 is the following chip architecture scheme drawing of the utility model embodiment.
Fig. 3 is the last chip architecture figure scheme drawing of the utility model embodiment.
The specific embodiment
Further specify principle of the present utility model, structure and the specific embodiment below in conjunction with drawings and Examples:
Miniature colloid impeller provided by the utility model is made of the mini sprinkler array, each shower nozzle all comprises a source electrode and an extracting pole, working medium arrives the top of source electrode with certain flow velocity after by slow flow control system, the voltage that applies between source electrode and extracting pole forms high field intensity on the top of source electrode simultaneously, high field intensity induce the working medium of strong polarity charged, form liquid frustum (CONE-JET), be broken into charged drop at last and quickened formation thrust by high field intensity.The general compound of glycerine and sodium iodide (weight ratio is 10: 2) that adopts is as working medium.
Fig. 1 is the overall structure scheme drawing of miniature colloid impeller of the present utility model, 3 is following of miniature colloid impeller among the figure, is also referred to as the source electrode silicon chip in the utility model, and columnar protrusions 5 of hollow is exactly a source electrode on it, the column source electrode is N one-tenth array distribution on demand, is example with one only herein; 1 be miniature colloid impeller last slice, be also referred to as the extracting pole silicon chip in the utility model, the electrode on the extracting pole is corresponding with source electrode.1 and 3 by coupling together behind the bonding respectively with glass pad 2, forms " sandwich " structure, and form the gap between source electrode and the extracting pole, constitutes the angle of rake base portion of incorporate idiozome.This base portion by go between 6 and the encapsulation usefulness printed circuit board (PCB) 4 be electrically connected, exterior control voltage is applied on the source electrode and extracting pole of miniature colloid impeller by these lead-in wires.
Fig. 2 is the constructional drawing of sheet under the utility model embodiment.In the following sheet 8 is silicon bodies, and the cavity 9 that is formed by etching on it is the passages that pass through of liquid working substance, and 10 is the wall of the source electrode of hollow, and the N of She Dinging source electrode array constitutes a shower nozzle, the 7th, the aluminium lamination that can conduct electricity on demand.
Fig. 3 is the constructional drawing of the utility model embodiment last slice.Wherein, 12 for making the mask layer silicon nitride and the silicon dioxide layer of anti-potassium hydroxide corrosion usefulness, and 13 for corroding the silicon body that cavity is arranged on it, and cavity 14 is the passages that pass through that quicken the back drop, the 11st, the electrode of aluminium matter can be realized the combination of different thrusts by each electrode of independent control.
Having on the said lower floor silicon chip 3 is the array of protrusions of the column of 10-100 micron hollow highly, and array comprises the hollow column that can design number on demand, and the inside radius of each hollow column is that 1-50 micron, external diameter are the 2-60 micron.The columnar protrusions of hollow and the surface of whole lower silicon slice all are coated with aluminium as the metallo-electrode, i.e. the source electrode of miniature colloid impeller, the positive voltage of increasing during work.
One or more circular aluminium electrodes are arranged on the said upper strata silicon chip 1, the center of annulus is a circular cavity, radius of a circle is the 5-100 micron, it is the extracting pole of miniature colloid impeller, corresponding with corresponding projection on the source electrode (can be corresponding one by one, also can be corresponding at interval), the passage of an injection of formation adds zero voltage during work.
Said intermediate glass pad is formed by glass corrosion.Contact with last lower silicon slice around the glass pad has only, the centre is hollow, and the thickness of pad forms the gap between source electrode and extracting pole.
Miniature colloid impeller provided by the utility model can adopt the method for micromachined to process the upper and lower silicon chip respectively, then with glass pad bonding, form silicon chip-glass-silicon chip, constitute the angle of rake base portion of idiozome, couple together with printed circuit board (PCB) again, constitute the idiozome propelling unit.
Claims (6)
1, a kind of miniature colloid impeller, it is characterized in that: contain upper and lower two-layer silicon chip and middle insulation spacer, lower floor's silicon chip is the source electrode array, has a plurality of hollow bumps on the described source electrode array, at the protrusion surface of hollow and the surface coverage of whole lower silicon slice metal level is arranged; The upper strata silicon chip is the extracting pole array, has the metal electrode of concavity on the extracting pole array.
2, according to the described miniature colloid impeller of claim 1, it is characterized in that: described intermediate insulation pad is a glassy layer, and this glassy layer is by bonding and source electrode array and extracting pole array formation working medium passage.
3, according to the described miniature colloid impeller of claim 1, it is characterized in that: the height of described hollow bumps is the 10-100 micron.
4, according to claim 1,2 or 3 described miniature colloid impellers, it is characterized in that: described hollow bumps adopts cylindric, and the inside radius of each hollow column is that 1-50 micron, external diameter are the 2-60 micron.
5, according to the described miniature colloid impeller of claim 1, it is characterized in that: the concavity metal electrode on the silicon chip of described upper strata can adopt one or more, and is corresponding with corresponding projection on the source electrode, forms the passage of an injection.
6, according to claim 1 or 5 described miniature colloid impellers, it is characterized in that: described concavity metal electrode adopts circular, and radius of a circle is the 5-100 micron.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02253029 CN2576607Y (en) | 2002-09-06 | 2002-09-06 | Micro gel-propeller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 02253029 CN2576607Y (en) | 2002-09-06 | 2002-09-06 | Micro gel-propeller |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2576607Y true CN2576607Y (en) | 2003-10-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 02253029 Expired - Fee Related CN2576607Y (en) | 2002-09-06 | 2002-09-06 | Micro gel-propeller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2576607Y (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101539122B (en) * | 2009-04-21 | 2011-01-12 | 北京航空航天大学 | Hole type multi-cavity colloid thrustor |
| CN108313332A (en) * | 2018-01-11 | 2018-07-24 | 北京控制工程研究所 | A kind of MEMS electron sprays thruster propellant automatic drive device |
-
2002
- 2002-09-06 CN CN 02253029 patent/CN2576607Y/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101539122B (en) * | 2009-04-21 | 2011-01-12 | 北京航空航天大学 | Hole type multi-cavity colloid thrustor |
| CN108313332A (en) * | 2018-01-11 | 2018-07-24 | 北京控制工程研究所 | A kind of MEMS electron sprays thruster propellant automatic drive device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |